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7632351 |
Atomic layer deposition processes for the formation of ruthenium films, and ruthenium precursors useful in such processes
This invention is directed to processes for the formation of ruthenium-containing films on surfaces in atomic layer deposition (ALD) processes. The ALD process includes depositing a...
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7622149 |
Reactive metal sources and deposition method for thioaluminate phosphors
A physical vapor deposition method for the deposition of thioaluminate phosphor compositions includes providing one or more source materials including an intermetallic barium aluminum compound, a...
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7560016 |
Selectively accelerated plating of metal features
To make a metal feature, a non-plateable layer is applied to a workpiece surface and then patterned to form a first plating region and a first non-plating region. Then, metal is deposited on the...
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7501155 |
Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus
In a method for coating a phosphor or a scintillator layer onto a flexible substrate, within a sealed zone maintained under vacuum conditions, by the step of vapor deposition, said phosphor or...
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7488435 |
Copper(I) complexes and processes for deposition of copper films by atomic layer deposition
The present invention relates to novel 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an Atomic...
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7445810 |
Method of making a tantalum layer and apparatus using a tantalum layer
A method of making tantalum structures, including, creating a tantalum layer disposed on a first layer region of a first layer and on a second layer region of a second layer. The tantalum layer has...
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7442407 |
Tantalum and niobium compounds and their use for chemical vapour deposition (CVD)
Tantalum and niobium compounds having the general formula (I) and their use for the chemical vapour deposition process are described:
wherein
M stands for Nb or Ta, R 1 and R 2 C 1 to C 12 ...
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7427435 |
Coating composition for adhering metallized layers to polymeric films
A metallized film and a process for making the film are disclosed. In general, the metallized film includes a polymeric film layer that is coated with a polyester coating composition. A metal layer...
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7410917 |
Atomic layer deposited Zr-Sn-Ti-O films using TiI4
Various structures having a dielectric film containing Zr—Sn—Ti—O formed by atomic layer deposition using a TiI 4 precursor and a method of fabricating structures having such a dielectric...
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7393555 |
Dicopper(I) oxalate complexes as precursor for metallic copper deposition
The invention relates to dicopper(I) oxalate complexes stabilized by neutral Lewis bases, such as alkenes or alkynes, and to the use of dicopper(I) oxalate complexes as precursors for the...
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7323411 |
Method of selective tungsten deposition on a silicon surface
In one embodiment, a selective tungsten deposition process includes the steps of pre-flowing silane into a deposition chamber, pumping down the chamber, and then selectively depositing tungsten on...
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7273811 |
Method for chemical vapor deposition in high aspect ratio spaces
A method of depositing conformal film into high aspect ratio spaces includes the step of forming a gradient of precursor gas inside the space(s) prior to deposition. The gradient may be formed, for...
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7270844 |
Direct write™ system
Methods and apparatus for the deposition of a source material ( 10 ) are disclosed. An atomizer ( 12 ) renders a supply of source material ( 10 ) into many discrete particles. A force applicator (...
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7226894 |
Superconducting wire, method of manufacture thereof and the articles derived therefrom
Disclosed herein is method for making a wire comprising contacting a first end of a first superconducting wire with a second end of a second superconducting wire, wherein the superconducting wire...
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7186582 |
Process for deposition of semiconductor films
Chemical vapor deposition processes utilize higher order silanes and germanium precursors as chemical precursors. The processes have high deposition rates yet produce more uniform films, both...
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7169947 |
Dicopper(I) oxalate complexes for use as precursor substances in metallic copper deposition
The invention relates to dicopper(I) oxalate complexes stabilised by neutral Lewis base components and to the use thereof as precursors for the deposition of metallic copper. The neutral Lewis...
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7166354 |
Metal coated fiber and electroconductive composition comprising the same and method for production thereof and use thereof
The present invention provides a metal coated fiber with excellent coating strength and corrosion resistance, and a conductive resin composition with excellent conductivity. A feature of a metal...
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7107668 |
Method of manufacturing a longitudinal microsolenoid
A photosensitive material is coated on an insulating material ( 13 ) stacked on a substrate ( 1 ) (FIG. 16 A), and exposed and developed using a mask having a light-shielding film capable of...
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7101795 |
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
A method and system to form a refractory metal layer on a substrate features nucleating a substrate using sequential deposition techniques in which the substrate is serially exposed to first and...
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7081267 |
Nanostructured powders and related nanotechnology
Methods to manufacture nanoscale particles comprising metals, alloys, intermetallics, ceramics are disclosed. The thermal energy is provided by plasma, internal energy, heat of reaction, microwave,...
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7077927 |
Method of applying an edge electrode pattern to a touch screen
A method of applying an edge electrode pattern to a touch screen. The method includes depositing, on a first surface of a decal strip, conductive material in the form of an edge electrode pattern,...
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7022298 |
Exhaust apparatus for process apparatus and method of removing impurity gas
An exhaust apparatus for a process apparatus which processes an object using a process gas includes an exhaust pipe to be connected to an exhaust port of the process apparatus, and a trap mechanism...
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6975453 |
Multilayer electrically conductive anti-reflective coating
The present invention comprises a multilayer inorganic anti-reflective coating with predetermined optical properties, for application on a flexible substrate. The coating comprises a stack...
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6974547 |
Flexible thin film capacitor and method for producing the same
According to a flexible thin film capacitor of the present invention, an adhesive film is formed on a substrate composed of at least one selected from the group consisting of an organic polymer and...
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6905726 |
Component having at least two mutually adjacent insulating layers and corresponding production method
The invention relates to a component having two adjacent insulating layers and to a production process therefore. The component has an activated insulating layer, which can be converted into an...
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6900129 |
CVD of tantalum and tantalum nitride films from tantalum halide precursors
A chemical vapor deposition (CVD) method for depositing high quality conformal tantalum (Ta) and tantalum nitride (TaN x ) films from inorganic tantalum pentahalide (TaX 5 ) precursors is...
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6899966 |
Composite surface on a stainless steel matrix
A composite surface having a thickness from 10 to 5,000 microns comprising a spinel of the formula Mn x Cr 3−x O 4 wherein x is from 0.5 to 2 and oxides of Mn, Si selected from the group...
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6881446 |
Method and device for production of endless plastic hollow profiles
A method for production of endless plastic hollow profiles, in particular tubes, comprises several production stages for the plastic tube and a coating stage for a metal coating. A reduced pressure...
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6878628 |
In situ reduction of copper oxide prior to silicon carbide deposition
The invention relates generally to improved silicon carbide deposition during dual damascene processing. In one aspect of the invention, copper oxide present on a substrate is reduced at least...
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6867149 |
Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale
The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various...
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6855369 |
Transparent laminate, method for producing the same, and plasma display panel
In a transparent laminate, n thin-film units (n=3 or 4) are laminated unit by unit successively on a surface of a substrate, and a high-refractive-index transparent thin film is deposited on a...
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6838202 |
Fuel cell bipolar plate having a conductive foam as a coolant layer
A bipolar plate for use with a fuel cell is provided including an electrically conductive foam as a coolant layer between thin metal foil layers. The thin metal foil layers are provided with...
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6835412 |
Metalized dielectric substrates for EAS tags
A metallized substrate, such as used to make a resonant circuit tag with inductive and capacitive elements in series, has a thin inorganic or polymeric dielectric layer formed on a metal layer. The...
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6822880 |
Multilayer thin film hydrogen getter and internal signal EMI shield for complex three dimensional electronic package components
A thin film hydrogen getter and EMI shielding are provided for protecting GaAs circuitry sealed in an hermetic package. The thin film getter comprises a multilayer metal film that is deposited by...
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6808740 |
Magnetoresistance effect film and method of forming same
A magnetoresistance effect film includes a substrate, a plurality of ferromagnetic particles disposed on the substrate, a nonmagnetic film deposited on the substrate and covering the plurality of...
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6800573 |
Water-vapor-permeable, watertight, and heat-reflecting flat composite, process for its manufacture, and use thereof
A water-vapor-permeable, watertight, heat-reflecting flat composite is made by a process of combining a metal layer and a nonporous, water-vapor-permeable, watertight, hydrophilic flat substrate....
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6798963 |
Method for the metallization of optical fibers
An improved method for providing high-quality optical fiber metallization with the required length at the required location. The method enables metallized optical fibers to be soldered and...
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6791108 |
Protective fullerene (C60) packaging system for microelectromechanical systems applications
The invention involves tunneling tips to their conducting surface, and specifically the deposition of a monolayer of fullerene C 60 onto the conducting plate surface to protect the tunneling tip...
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6787181 |
Chemical vapor deposition method of making layered superlattice materials using trimethylbismuth
A method of forming a Bi-layered superlattice material on a substrate using chemical vapor deposition of a precursor solution of trimethylbismuth and a metal compound dissolved in an organic...
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6780541 |
Carbon electrode coated with porous metal film, its fabrication method and lithium secondary battery using the same
A method for fabricating carbon electrode coated with a porous metal film includes the steps of: positioning a roll of carbon material within a vacuum chamber; winding the carbon material off the...
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6743934 |
Raw material compounds for use in CVD, and chemical vapor deposition of ruthenium compound thin films
This invention provides raw material compounds for use in CVD which contain organic ruthenium compounds as a main ingredient, the organic ruthenium compounds having two β-diketones plus one diene,...
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6739026 |
Method of manufacturing a head chip
A head chip is manufactured by disposing partition walls made of piezoelectric ceramic between a pair of opposing substrates made of a dielectric material so that the partition walls are spaced...
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6733923 |
Metal oxide electrode coated with porous metal film, porous metal oxide film or porous carbon film, its fabrication method, and lithium-ion secondary battery using it
A metal oxide electrode coated with a porous metal film, a metal oxide film or a carbon film, its fabrication method and a lithium-ion secondary battery using it are disclosed. The porous thin film...
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6725528 |
Microsolenoid coil and its manufacturing method
A photosensitive material is coated on an insulating material ( 13 ) stacked on a substrate ( 1 ) (FIG. 16 A), and exposed and developed using a mask having a light-shielding film capable of...
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6709702 |
Cover tape for electronic part conveyance and electronic part conveying member
A cover tape for the electronic-part conveyance comprises at least four laminated layers of: a substrate; at least one layer of a base coating layer and an intermediate layer, provided on the...
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6663761 |
Fine pattern forming method, developing/washing device used for the same, plating method using the same, and manufacturing method of thin film magnetic head using the same
The invention provides a fine pattern forming method in which a pattern interval of a resist pattern is narrowed, and a fine pattern forming material can be certainly formed on a surface of the...
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6651871 |
Substrate coated with a conductive layer and manufacturing method thereof
A substrate is coated with a conductive layer, which comprises a conductive layer of bonded ultrafine metal particles formed on the top surface thereof. The ultrafine metal particles have a...
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6652697 |
Method for manufacturing a copper-clad laminate
A method for manufacturing a copper-clad laminate includes the steps of forming first and second metal films on first and second carriers, forming first and second copper films on the first and...
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6649033 |
Method for producing electrode for lithium secondary battery
The method for producing an electrode for a lithium secondary battery, having an active material in the form of a thin film composed of an interface layer formed on a current collector and an...
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6637643 |
Method of applying a bond coating and a thermal barrier coating on a metal substrate, and related articles
A method for applying at least one bond coating on a surface of a metal-based substrate is described. A foil of the bond coating material is first attached to the substrate surface and then fused...
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