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7601387 |
Piezoelectric film laminate and method of manufacturing the same
A piezoelectric film laminate including a sapphire substrate and a lead zirconate titanate niobate film and a potassium niobate film formed on the sapphire substrate.
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7581295 |
Piezoelectric element and method of manufacturing the same
An array of piezoelectric elements is easily manufactured by making insulating portions at side surfaces smaller. The piezoelectric element includes: a multilayered structure in which piezoelectric...
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7579041 |
Method of manufacturing dielectric layer and method of manufacturing liquid jet head
A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric...
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7575777 |
Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
A method for manufacturing a potassium niobate deposited body includes: forming a buffer layer above a substrate composed of an R-plane sapphire substrate; forming above the buffer layer a...
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7531207 |
MOCVD PGO thin films deposited on indium oxide for feram applications
Methods of forming depositing a ferroelectric thin film, such as PGO, by preparing a substrate with an upper surface of silicon, silicon oxide, or a high-k material, such as hafnium oxide,...
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7527822 |
Ferroelectric thin film formation composition, ferroelectric thin film and method of fabricating ferroelectric thin film
Provided are a ferroelectric thin film formation composition, a ferroelectric thin film and a method of fabricating a ferroelectric thin film, the ferroelectric thin film formation composition...
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7521086 |
Method for obtaining a composite ferro-electric material
The invention relates to a method for obtaining a composite ferro-electric material, consisting of the following stages: particles of a ferro-electric compound are covered with a dielectric layer;...
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7520596 |
Method for producing piezoelectric actuator, method for producing ink-jet head, and piezoelectric actuator
In a method for manufacturing a piezoelectric actuator, the piezoelectric layer is formed by using material particles M having a composition which differs from an optimum composition by a diffusion...
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7510740 |
Method for making piezoelectric element
A method for making a piezoelectric element including a piezoelectric film formed on a substrate by a gas deposition technique includes the steps of ejecting ultra-fine particles of a piezoelectric...
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7472480 |
Method for producing liquid ejecting recording head
Disclosed is a liquid ejecting recording head with improved operational reliability. A first coating resin layer of a liquid ejecting recording head, having a liquid flow duct and a liquid ejecting...
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7454024 |
System and method for design and fabrication of a high frequency transducer
Techniques for fabricating high frequency ultrasound transducers are provided herein. In one embodiment, the fabrication includes depositing a copperclad polyimide film, a layer of epoxy on the...
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7356905 |
Method of fabricating a high frequency ultrasound transducer
Techniques for fabricating high frequency ultrasound transducers are provided herein. In one embodiment, the fabrication includes depositing a copperclad polyimide film, a layer of epoxy on the...
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7343654 |
Method of manufacturing a piezoelectric element and a liquid ink jet head
Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of...
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7328490 |
Method for manufacturing a liquid jetting head
A method for manufacturing a liquid jetting head includes manufacturing a piezoelectric element having consistently high piezoelectric characteristics that obtains a degree of orientation that is...
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7320163 |
Method of manufacturing an actuator device
A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the...
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7310874 |
Method for manufacturing a potassium niobate deposited body
A potassium niobate deposited body includes a substrate, an electrode layer formed above the substrate, and a potassium niobate layer formed above the electrode layer. The potassium niobate layer...
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7296329 |
Method of isolation for acoustic resonator device
A method of isolating piezoelectric thin film acoustic resonator devices to prevent laterally propagating waves generated by the device from leaving the device and/or interfering with adjacent...
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7275292 |
Method for fabricating an acoustical resonator on a substrate
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material....
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7267840 |
Manufacturing method of piezoelectric/electrostrictive film type device
A method is provided for manufacturing a piezoelectric/electrostrictive film device including a ceramic substrate and a piezoelectric/electrostrictive operation portion including a lower electrode,...
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7253703 |
Air-gap type FBAR, method for fabricating the same, and filter and duplexer using the same
An air-gap type thin film bulk acoustic resonator (FBAR) and method for fabricating the same. Also disclosed are a filter and a duplexer employing the air-gap type FBAR. The air-gap type FBAR...
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7240409 |
Process of making a piezoelectric thin film component
A method for manufacturing a piezoelectric thin film component wherein a thin titanium film is deposited on a bottom metal layer such that parts of the thin titanium film remain on crystal grain...
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7229662 |
Heterolayered ferroelectric thin films and methods of forming same
Heterolayered thin films having ferroelectric/piezoelectric layers of alternating crystal structures and methods of their preparation are provided. In the ferroelectric/piezoelectric thin film, a...
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7229502 |
Method of forming a silicon nitride layer
A method of forming a silicon nitride layer is provided. A deposition furnace having an outer tube, a wafer boat, a gas injector and a uniform gas injection apparatus is provided. The wafer boat is...
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7197798 |
Method of fabricating a composite apparatus
A method for fabricating a piezoelectric macro-fiber composite actuator comprises making a piezoelectric fiber sheet by providing a plurality of wafers of piezoelectric material, bonding the wafers...
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7157111 |
MOCVD selective deposition of C-axis oriented PB5GE3O11 thin films on In2O3 oxides
A method of selectively depositing a ferroelectric thin film on an indium-containing substrate in a ferroelectric device includes preparing a silicon substrate; depositing an indium-containing thin...
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7137179 |
Method of forming a piezoelectric layer in forming a piezoelectric element including a lower electrode on one surface of a substrate
A method of forming a piezoelectric layer includes: a drying step for forming at least one ferroelectric precursor film on a lower electrode of a substrate and drying the ferroelectric precursor...
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7128941 |
Method for fabricating film bulk acoustic resonator (FBAR) device
A method for fabricating an FBAR device includes (a) preparing a substrate; (b) forming an insulating layer on the substrate; (c) forming a sacrificial layer on the insulating layer; (d) forming a...
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7120978 |
Process of manufacturing a piezoelectric element
A method of manufacturing a piezoelectric element structure having a supporting substrate and a piezoelectric film supported on the supporting substrate. A first layer, and a second layer having...
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7112263 |
Polarization inversion method for ferroelectric substances
A pattern electrode having a predetermined pattern and a connecting electrode connected to the pattern electrode are formed on one surface of a single-polarized ferroelectric substance crystal. An...
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7102461 |
Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element
In a surface acoustic wave element according to an embodiment of this invention, raised electrodes 20 formed on thin film electrodes 18 are provided with throughholes 31 . Additionally, bumps ...
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7087264 |
Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic flowmeter
It is an object of the present invention to provide an ultrasonic transducer, which is so configured as to reduce the variations in characteristics, thereby to enable the stabilization of the...
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7069630 |
Method of manufacturing a piezoelectric/electrostrictive device
A mathod of manufacturing a piezoelectric/electrostrictive divice includes an additional member that is provided at a border between an inner wall surface of a thin plate section formed by a long...
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7052732 |
Method for producing a piezoelectric element
A method for producing a piezoelectric element by superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMg 1/3 Nb 2/3 O 3 —PbZrO 3 —PbTiO 3 ternary...
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7024737 |
Method for producing an electronic or electrical component with a plastic-passivated surface
A simple method for passivation of a component is presented which is particularly suitable for processing high-viscosity plastics. The component is arranged in a preproduced plastic body and is...
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7008669 |
Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element
A method of manufacturing a ceramic includes forming a film which includes a complex oxide material having an oxygen octahedral structure and a paraelectric material having a catalytic effect for...
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6988300 |
Method of producing a piezoelectric element
A piezoelectric element contains a piezoelectric ceramic body having a layered perovskite structure, and has the C axis selected and oriented in the thickness direction. In the piezoelectric...
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6983521 |
Method of manufacturing a strain element
The invention relates to a method of manufacturing a strain element. In one aspect, the method of the invention comprises forming a coating film of titanium or a titanium compound on a surface of a...
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6957475 |
Method of manufacturing piezoelectric component
A method of manufacturing a piezoelectric component includes forming an unhardened first elastic material partially on at least a pair of end portions of a piezoelectric element, the pair of end...
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6931700 |
Method of manufacturing thin film piezoelectric elements
A method for making thin film piezoelectric elements including forming a flat-plate laminate by laminating a first electrode layer, a piezoelectric thin film, and a second electrode layer, on one...
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6927084 |
Method of manufacturing actuator and ink jet head
A method of manufacturing an actuator comprises the steps of bonding a piezoelectric film formed on a single crystal substrate to a diaphragm structure member and removing the single crystal...
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6895645 |
Methods to make bimorph MEMS devices
A bimorph structure is produced by depositing a first material on a first surface of a first substrate to form a first element structure. A second material is deposited onto a surface of a second...
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6878416 |
Piezoelectric coating
A color shifting composition and method useful as a coating on a surface. The composition comprises a layer of piezoelectric material disposed on the surface and a layer of electrically conductive...
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6857186 |
Method of manufacturing a piezoelectric print-head
A method of manufacturing a piezoelectric ink-jet print-head uses a metallic layer and a thick film layer with a slot hole therein instead of a ceramic vibration plate and an ink layer. The...
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6841192 |
Method for manufacturing piezoelectric element, piezoelectric element, and droplet-ejecting recording head
A liquid material containing metal particles is directly applied onto a piezoelectric layer with an inkjet head to form a pattern portion, and the applied liquid material is transformed into a...
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6838117 |
Film production method and film-element production method
A method for producing a lead ferroelectric film having high relative dielectric constant and low dielectric loss by a hydrothermal process is disclosed. The method includes the step of...
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6836940 |
Process for producing a laminated ink-jet recording head
A process for producing a laminated ink-jet recording head including the steps of forming a titanium layer across a surface of a diaphragm, and forming a layer of a piezoelectric material on the...
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6822535 |
Film bulk acoustic resonator structure and method of making
A film bulk acoustic resonator is formed on a substrate having a major surface. The film bulk acoustic resonator includes an elongated stack. The elongated stack includes a layer of piezoelectric...
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6806795 |
SAW filter using tetrahedral amorphous carbon and method for manufacturing the same
Disclosed is an element using a piezoelectric characteristic, and in particular, an SAW filter and a method for manufacturing the same. The SAW filter according to the invention is resistant to...
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6748635 |
Method of manufacturing piezoelectric thin film component
A method of manufacturing a piezoelectric thin film component utilizing seed crystals, such as crystals of titanium, as a crystal source on a bottom electrode. Crystals of piezoelectric material...
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6725514 |
Method of making thick film pressure and temperature sensors on a stainless steel diaphragm
A method of making a low-cost metal diaphragm sensor that integrates both pressure and temperature sensing in a single sensor assembly utilizes thick-film processing to form a circuit including...
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