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8906281 Imprint method, imprinting equipment, and method for manufacturing semiconductor device  
In an imprint method according to one embodiment, a template on which a template pattern is formed is pushed against resist on a substrate to be transferred while the resist is cured in this state....
8905748 Deformation-based micro surface texturing system  
A compact deformation-based micro-texturing apparatus and method employ flexure bearing houses for rotatably supporting opposite ends of each of a first (e.g. upper) roll and a second (e.g. lower)...
8905744 Transport container  
A transport container for use in a device for producing a three-dimensional object of selective solidification of a build-up material deposited in layers, in which the device has a process chamber...
8894406 Patterning mold and manufacturing method thereof  
Disclosed herein is a patterning mold configured to form a micropattern on a substrate or glass. The disclosed patterning mold includes a transfer body with a patterning part formed at one end of...
8894892 Mold and manufacturing method therefor  
Providing a mold and a manufacturing method therefor wherein protrusions are easy to be pressed into a resin base material and the protrusions are easy to be pulled out from the resin base...
8864489 Thermal nanoimprint lithography mould, process for producing it, and thermal nanoimprint process employing it  
A heating mould for thermal nanoimprint lithography, a process of producing the heating mould, and a process for producing a nanostructured substrate which include the heating mould. The heating...
8858859 Apparatus and method of fabricating flat panel display device  
Disclosed are an apparatus and method for fabricating a flat panel display device to realize easy separation of a substrate from an imprinting mold. The apparatus includes an imprinting mold...
8850980 Tessellated patterns in imprint lithography  
The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint)...
8846159 Mold for fabricating barrier rib and method of fabricating two-layered barrier rib using same  
The disclosed mold includes recessed parts which have a shape corresponding to embossed portions of the barrier rib to be fabricated, and protruding parts which have a shape corresponding to...
8845318 Imprint apparatus, imprint method, and mold for imprint  
An imprint apparatus for imprinting a mold pattern onto a substrate or a member on the substrate includes a light source for irradiating a surface of the mold disposed opposite to the substrate and...
8845320 Imprint lithography apparatus  
An arrangement suitable for use in an imprint lithography apparatus is disclosed. The arrangement includes a support structure arranged to support an imprint template arrangement, a first actuator...
8845314 Lens manufacturing apparatus  
A lens manufacturing apparatus includes a concave-convex shape forming unit that makes a notch in the surface of a workpiece to form a concave-convex shape portion, a resin supply unit that...
8834769 Imprint apparatus for forming a pattern of a resin on a substrate using a mold  
The present invention provides an imprint apparatus including a mold and a stage that holds a substrate, the imprint apparatus executing a curing process of curing a resin while the mold and the...
8834146 System for passive alignment of surfaces  
Passive stamp alignment system. The system includes a stamp supported by a stamp holder resting on three balls affixed to a top platform. A bottom platform supports a substrate to be aligned with...
8834144 Imprinting machine and device manufacturing method  
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when...
8827685 Nano-imprint mold  
A nano-imprint mold includes a mold base; mold body having a first surface and a second surface opposite the first surface; and an elastic body disposed between a surface of the mold base and the...
8827686 Imprinting apparatus and imprint transfer method  
The present invention provides an imprinting apparatus or an imprint transfer method in which uniformity of curing quality by UV light is maintained and a uniform application thickness of a UV...
8821150 Manufacturing method of color filter substrate  
A manufacturing method of a color filter substrate includes forming a black matrix on a substrate, the black matrix including first, second, third and fourth openings, forming first, second and...
8814556 Method and device for manufacturing sheet having fine shape transferred thereon  
A method for manufacturing a sheet having a shape transferred thereon, in which a sheet-like base made of a thermoplastic resin is placed between an imprint mold and an intermediate base and the...
8816211 Articles with photocurable and photocured compositions  
The photocuring efficiency of a photoinitiator is increased by mixing it with an organic phosphite and an aldehyde. This mixture or photoinitiator composition can be used to cure acrylates or other...
8815141 Method for building three-dimensional models with extrusion-based additive manufacturing systems  
A method for building a three-dimensional model with an extrusion-based additive manufacturing system having an extrusion head, the method comprising depositing a consumable material from a...
8807978 Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method  
There is provided a template inspection apparatus which inspects a replica template, manufactured by an imprinting method from a master template having a depression/protrusion pattern, the template...
8795572 Symmetric thermocentric flexure with minimal yaw error motion  
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged...
8794947 Translating forming dies  
A translating die apparatus and method for forming a piece of material into a part having complex contours. The translating die apparatus may comprise upper and lower mounts, fixed upper and lower...
8790105 Apparatus for manufacturing stamp printing blocks  
An apparatus for manufacturing stamp printing blocks by a local exposure and heating of a stamp plate blank made of a porous thermoplastic material; with the apparatus includes at least one...
8778252 Three-dimensional printing system using dual rotation axes  
A 3-D printer system moves a printed tool over a print surface with a mechanism controlling a rotational angle of an arm holding the print tool and a revolutionary angle of axis of rotation of the...
8770965 Device and method for transferring micro structure  
A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light...
8770958 Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction  
A pattern forming method for forming an imprinted pattern on a coating material disposed on a substrate with a pattern provided to a mold. The method includes preparing a mold provided with a first...
8770964 Imprint apparatus and article manufacturing method  
An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which...
8764431 Method and apparatus for transcripting fine patterns  
In a method for transcripting fine patterns and an apparatus for transcripting fine patterns, the ingress of bubbles is prevented and patterns are transcripted with a high throughput by a...
8764427 Apparatus for forming pattern using laser  
An apparatus for forming a pattern using a laser is provided. The apparatus includes a pattern storing unit, a controller, a laser oscillating unit, an X-Y driver, a header unit, and a stage. The...
8765034 Pattern formation method, pattern formation apparatus, and recording medium recorded with alignment program  
According to one embodiment, a pattern formation method includes placing a master on a substrate including a concave-convex pattern, performing alignment between the master and the substrate,...
8758005 Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device  
According to one embodiment, an imprint mask includes a quartz plate. The quartz plate has a plurality of concave sections formed in part of an upper surface on the quartz plate, and impurities are...
8753557 Imprint lithography  
An imprint lithography apparatus is disclosed that has a first array of template holders, a second array of template holders, and a substrate table arranged to support a substrate to be imprinted,...
8747092 Fast nanoimprinting apparatus using deformale mold  
The invention disclosed apparatuses and methods to do nanoimprint lithography using a deformable mold. Generally, the apparatus has a chamber with a transparent section on its top wall, which is...
8741199 Method and device for full wafer nanoimprint lithography  
The present application relates to a full wafer nanoimprint lithography device comprises a wafer stage, a full wafer coated with a liquid resist, a demolding nozzle, a composite mold, an imprint...
8740604 Imprint apparatus and article manufacturing method  
An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a...
8734701 Imprint apparatus and method of manufacturing article  
An imprint apparatus, which performs an imprint process for forming a pattern of a mold on a resin coated on a substrate, includes an imaging unit configured to image the resin on which the pattern...
8734145 Mold for UV assisted nanoimprint lithography and methods for making such a mold  
A mold for nanoimprint lithography assisted by a determined wavelength is disclosed. According to some aspects, a layer made from a first material including, on a first face, a layer made from a...
8727763 Apparatus and methods for selective thermoforming  
Apparatus and methods of forming selected portions of integral sheets of material are disclosed. Unformed portions of the sheets may remain undistorted during the forming process, allowing them to...
8721955 Device and method for etching a pattern  
An apparatus for etching a pattern in an etching zone laid out on a substrate includes a pen that can be freely moved manually relative to the etching zone, the pen being equipped with an etching...
8701733 Shoe customization system having interchangeable platens  
Heat press platens for a shoe customization/decoration system and a method of using the same are disclosed. The platens may be quickly interchanged to allow the same equipment to be used to dye...
8696969 Imprint lithography method and apparatus  
An imprint lithography method is provided. The method includes undertaking first and second imprints, which comprises for each imprint: for an area of a substrate provided with a plurality of drops...
8691123 Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon  
According to one embodiment, a fine processing method includes determining a resist amount required for each first region of a pattern formation surface and a total amount of resist. The method...
8690559 Nano-imprinting resin stamper and nano-imprinting apparatus using the same  
The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a...
8691124 Alignment and imprint lithography  
An imprint lithography alignment apparatus is disclosed that includes at least two detectors which are configured to detect an imprint template alignment mark, wherein the alignment apparatus...
8684717 Apparatus for constructing floor  
Provided is a floor construction apparatus that includes a guide unit that is disposed on surface of a floor to be constructed, and a flattening unit that is guided by the guide unit, to then be...
8685295 Imprint lithography apparatus  
An imprint lithography apparatus is disclosed. The apparatus includes an electromagnetic Lorentz actuator arrangement configured to move an imprint template arrangement, the electromagnetic Lorentz...
8678808 Imprint apparatus and article manufacturing method  
The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a...
8679391 Method and apparatus for making an apertured web  
A method for making apertures in a web comprising providing a precursor web material; providing a pair of counter-rotating, intermeshing rollers, wherein a first roller comprises...