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8807978 Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method  
There is provided a template inspection apparatus which inspects a replica template, manufactured by an imprinting method from a master template having a depression/protrusion pattern, the template...
8795572 Symmetric thermocentric flexure with minimal yaw error motion  
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged...
8794947 Translating forming dies  
A translating die apparatus and method for forming a piece of material into a part having complex contours. The translating die apparatus may comprise upper and lower mounts, fixed upper and lower...
8790105 Apparatus for manufacturing stamp printing blocks  
An apparatus for manufacturing stamp printing blocks by a local exposure and heating of a stamp plate blank made of a porous thermoplastic material; with the apparatus includes at least one...
8778252 Three-dimensional printing system using dual rotation axes  
A 3-D printer system moves a printed tool over a print surface with a mechanism controlling a rotational angle of an arm holding the print tool and a revolutionary angle of axis of rotation of the...
8770965 Device and method for transferring micro structure  
A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light...
8770958 Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction  
A pattern forming method for forming an imprinted pattern on a coating material disposed on a substrate with a pattern provided to a mold. The method includes preparing a mold provided with a first...
8770964 Imprint apparatus and article manufacturing method  
An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which...
8764431 Method and apparatus for transcripting fine patterns  
In a method for transcripting fine patterns and an apparatus for transcripting fine patterns, the ingress of bubbles is prevented and patterns are transcripted with a high throughput by a...
8764427 Apparatus for forming pattern using laser  
An apparatus for forming a pattern using a laser is provided. The apparatus includes a pattern storing unit, a controller, a laser oscillating unit, an X-Y driver, a header unit, and a stage. The...
8765034 Pattern formation method, pattern formation apparatus, and recording medium recorded with alignment program  
According to one embodiment, a pattern formation method includes placing a master on a substrate including a concave-convex pattern, performing alignment between the master and the substrate,...
8758005 Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device  
According to one embodiment, an imprint mask includes a quartz plate. The quartz plate has a plurality of concave sections formed in part of an upper surface on the quartz plate, and impurities are...
8753557 Imprint lithography  
An imprint lithography apparatus is disclosed that has a first array of template holders, a second array of template holders, and a substrate table arranged to support a substrate to be imprinted,...
8747092 Fast nanoimprinting apparatus using deformale mold  
The invention disclosed apparatuses and methods to do nanoimprint lithography using a deformable mold. Generally, the apparatus has a chamber with a transparent section on its top wall, which is...
8741199 Method and device for full wafer nanoimprint lithography  
The present application relates to a full wafer nanoimprint lithography device comprises a wafer stage, a full wafer coated with a liquid resist, a demolding nozzle, a composite mold, an imprint...
8740604 Imprint apparatus and article manufacturing method  
An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a...
8734701 Imprint apparatus and method of manufacturing article  
An imprint apparatus, which performs an imprint process for forming a pattern of a mold on a resin coated on a substrate, includes an imaging unit configured to image the resin on which the pattern...
8734145 Mold for UV assisted nanoimprint lithography and methods for making such a mold  
A mold for nanoimprint lithography assisted by a determined wavelength is disclosed. According to some aspects, a layer made from a first material including, on a first face, a layer made from a...
8727763 Apparatus and methods for selective thermoforming  
Apparatus and methods of forming selected portions of integral sheets of material are disclosed. Unformed portions of the sheets may remain undistorted during the forming process, allowing them to...
8721955 Device and method for etching a pattern  
An apparatus for etching a pattern in an etching zone laid out on a substrate includes a pen that can be freely moved manually relative to the etching zone, the pen being equipped with an etching...
8701733 Shoe customization system having interchangeable platens  
Heat press platens for a shoe customization/decoration system and a method of using the same are disclosed. The platens may be quickly interchanged to allow the same equipment to be used to dye...
8696969 Imprint lithography method and apparatus  
An imprint lithography method is provided. The method includes undertaking first and second imprints, which comprises for each imprint: for an area of a substrate provided with a plurality of drops...
8691123 Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon  
According to one embodiment, a fine processing method includes determining a resist amount required for each first region of a pattern formation surface and a total amount of resist. The method...
8690559 Nano-imprinting resin stamper and nano-imprinting apparatus using the same  
The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a...
8691124 Alignment and imprint lithography  
An imprint lithography alignment apparatus is disclosed that includes at least two detectors which are configured to detect an imprint template alignment mark, wherein the alignment apparatus...
8684717 Apparatus for constructing floor  
Provided is a floor construction apparatus that includes a guide unit that is disposed on surface of a floor to be constructed, and a flattening unit that is guided by the guide unit, to then be...
8685295 Imprint lithography apparatus  
An imprint lithography apparatus is disclosed. The apparatus includes an electromagnetic Lorentz actuator arrangement configured to move an imprint template arrangement, the electromagnetic Lorentz...
8678808 Imprint apparatus and article manufacturing method  
The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a...
8679391 Method and apparatus for making an apertured web  
A method for making apertures in a web comprising providing a precursor web material; providing a pair of counter-rotating, intermeshing rollers, wherein a first roller comprises...
8672661 Imprint apparatus and article manufacturing method  
An imprint apparatus that includes a holding unit, and performs an imprint process, including molding of an imprint material on a substrate held by the holding unit using a mold, curing of the...
8672663 Imprint apparatus and article manufacturing method  
An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit...
8668484 Mold, imprint method, and process for producing a chip  
A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is...
8668487 Micro-pattern transferring stamper  
A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin...
8662878 Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom  
A laminate nanomold includes a layer of perfluoropolyether defining a cavity that has a predetermined shape and a support layer coupled with the layer of perfluoropolyether. The laminate can also...
8662879 Micro/nano imprint mold of the fabricating process  
The invention discloses a mold performing in the micro/nano imprint fabricating process, wherein the mold is utilized to imprint a pattern on a substrate via a material layer. The mold comprises an...
8657597 Templates for use in imprint lithography and related intermediate template structures  
A method of forming a template for use in imprint lithography. The method comprises providing an ultraviolet (“UV”) wavelength radiation transparent layer and forming a pattern in the UV tra...
8651849 Digitally prepared stamp masters and methods of making the same  
Positive and negative stamp masters derived from UV curable ink molds comprising ultraviolet (UV) curable inks and methods for digitally preparing those stamp masters. In particular, the digitally...
8651850 Clip integration of pressure tube mold cores into hardened omega-stringers for the production of stiffened fiber composite skin shells, in particular for aeronautics and astronautics  
The invention concerns a device for stiffening a flat component, a process for the production of a flat component, in particular a fiber composite component, and a fiber composite component. The...
8647106 Template and method of manufacturing a semiconductor device  
A template formed of an optically-transparent material according to an embodiment includes a contact surface which contacts a resist material, a concave portion for resist pattern formed on the...
8636498 Method for manufacturing nano-imprint mold, method for forming resin pattern by nano-imprint technique, and nano-imprint mold  
A nano-imprint mold includes a mold body having a first surface provided with a pattern having projections and recesses, a second surface opposite the first surface and a side surface between the...
8632331 Stamping apparatus for stamping shading film  
A stamping apparatus for stamping a shading film includes a stamping head, at least one locking member and a sleeving ring. The sleeving ring defines an axial sleeving hole and includes a stamping...
8632327 Apparatus to apply a variable surface texture on an airfoil  
A drum is provided having a peripheral surface with texture features thereon. The texture features may be a plurality of grooves for applying riblets to an airfoil surface. Methods of using the...
8628712 Misalignment management  
A method of determining overlay error between a template and a substrate using placement of template features and placement of substrate features in one or more images. Estimated distortion of the...
8616873 Micro-conformal templates for nanoimprint lithography  
A micro-conformal nanoimprint lithography template includes a backing layer and a nanopatterned layer adhered to the backing layer. The elastic modulus of the backing layer exceeds the elastic...
8613878 Medical elongate member, method of manufacturing the same, and apparatus for manufacturing the same  
Disclosed herein is a medical elongate member including a elongate base material, a resin layer formed to coat or to be integral with the surface of at least a part of the base material, and a...
8608468 Wide area stamp for antireflective surface  
Nanoimprint molds for molding a surface of a material are provided. A nanoimprint mold includes a body with a molding surface that is formed by shaped nanopillars. The nanopillars may be formed on...
8609006 Pattern transfer apparatus and pattern forming method  
The pattern transfer apparatus includes: a liquid ejection device having liquid ejection ports through which droplets of liquid are ejected and deposited onto a substrate surface while the liquid...
8603380 Stamper for transferring fine pattern and method for manufacturing thereof  
An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous...
8591785 Digitally prepared stamp masters and methods of making the same  
Positive and negative stamp masters derived from UV curable ink molds comprising ultraviolet (UV) curable inks and methods for digitally preparing those stamp masters. In particular, the digitally...
8591794 Method and device for producing a nanopatterned disc  
A method of producing a nanopattern on an upper side and a lower side of a disc.