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7569122 Method for purifying nitrogen trifluoride  
A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride...
7438883 High-pressure phase silicon nitride having a cubic spinel structure and the manufacturing method  
A method for preparing a high-pressure phase cubic spinel-type silicon nitride includes housing a molding containing low-pressure phase silicon nitride powder and a metal powder in a cylindrical...
7422631 Mould parts of silicon nitride and method for producing such mould parts  
The present invention relates to silicon nitride mould parts, particularly crucibles for use in connection with directional solidification and pulling of silicon single crystals. The mould parts...
7413722 Method and apparatus for manufacturing nitrogen trifluoride  
A method and apparatus for manufacture of NF 3 by gas-liquid phase reaction of fluorine and ammonia in molten ammonium acid fluoride (AAF) in a static reactor in which the reactants are conveyed...
7395823 Method and apparatus for local fluorine and nitrogen trifluoride production  
The present invention relates to a process for production, shipment, and treatment of a NH 4 F(HF) x feedstock for local production of fluorine and NF 3 for semiconductor chamber cleaning without...
7384618 Purification of nitrogen trifluoride  
A process and system for adsorption purification of NF 3 wherein a crude product containing NF 3 and impurities such as CF 4 is brought into contact with a polyacrylonitrile-based carbon...
7128885 NF3 production reactor  
A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of...
7083773 Method for producing nitrogen trifluoride using jet-loop reactors  
Nitrogen trifluoride is produced with a high yield by the method comprising forming a fast stream of micro droplets of a fused ammonium fluoride salt by rapidly ejecting the fused ammonium fluoride...
7074378 Process for the purification of NF3  
This invention describes an improvement in a process for purifying a nitrogen trifluoride (NF 3 ) stream containing unreacted F 2 , HF, and nitrogen oxides from an NF 3 reactor wherein the F 2 ,...
7045107 Process for the production of nitrogen trifluoride  
The present invention is directed to an improved reaction process that allows for the achievement of excellent NF 3 production yields, while minimizing the amount of unreacted fluorine exiting...
7021487 Processing method for high pressure gas container and halogen containing gas filled in said container  
A metal container to be filled with a halogen containing gas, with the inner surface processed with a polishing agent. The gas has a reduced purity decline by the increase of the water content or...
7022160 Method of purifying gaseous nitrogen trifluoride  
The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF 4 as impurity. The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite...
7018598 Process for producing nitrogen trifluoride  
F 2 gas is reacted with NH 3 gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF 3 . Thus, NF 3 is produced with good safety, efficiency and profitability.
6986874 Method and apparatus for the production of nitrogen trifluoride  
The present invention provides a method and apparatus for producing nitrogen trifluoride. The method comprises contacting a fluorine-containing feed stream with liquid ammonium acid fluoride in a...
6984366 Method for nitrogen trifluoride production  
A method for the production of nitrogen trifluoride from a fluorine reactant and an ammonium ion source that is dispersed within a liquid phase reaction mixture containing one or more...
6908601 Method for the production of nitrogen trifluoride  
The invention provides a method and apparatus for producing nitrogen trifluoride. The invention involves passing a working fluid through a heat engine cycle and using the mechanical energy...
6821496 Process for preparing nitrogen trifluoride  
The invention relates to a new process for preparing nitrogen trifluoride which finds extensive application in the technology of semiconductors, high energy lasers, and chemical vapor deposition. ...
6790428 Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride  
A process for reducing or eliminating NH 3 /HF/MFz liquid waste melt in the manufacture of NF 3 is provided which includes the steps of providing an NF 3 reactor for a reaction of F 2 with a...
6458249 Process for purifying perfluorinated products  
Nitrogen trifluoride (NF 3 ) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. Azeotropic and extractive distillation processes using...
6432521 Group III-V compound semiconductor, and semiconductor device using the compound semiconductor  
This invention provides a Group III-V compound semiconductor that is free from the limitation of the shape and the size, is economical, is excellent in photo-electric characteristics...
6399225 Silicon-and-nitrogen-containing luminescent substance, method for forming the same, and light emitting device using the same  
A luminescent substance contains silicon and nitrogen as major components and has an amorphous structure. The silicon content of the luminescent substance is greater than the stoichiometric silicon...
6342194 NF3 treating process  
A process for treating NF 3 useful as a dry etching gas and cleaning gas in processes for producing LSI, TFT, and solar cell and in an electron photographic processes. The treating process...
6190802 Transition metal based ceramic material and electrodes fabricated therefrom  
A transition metal based ceramic material having the general formula Li α M 1 -β T β N x O 67 , wherein M is a transition metal, T is a dopant metal, and wherein x is greater than 0 and less...
6183713 Method for producing nitrogen trifluoride by gas-solid reaction  
The invention relates to a method for producing nitrogen trifluoride by gas-solid reaction. This method includes the steps of (a) providing a packed-bed-type vessel filled with a particulate solid...
6007789 Method of nitriding silicon  
A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by (a)...
5981094 Low compressibility carbon nitrides  
A cubic form of C 3 N 4 with a zero-pressure bulk modulus exceeding that of diamond. The product is prepared by combining carbon and nitrogen at a pressure of 120,000 to 800,000 atmosphere and a...
5637285 Process for nitrogen trifluoride synthesis  
The present invention is directed to a method for the synthesis of nitrogen trifluoride from elemental fluorine gas and a source of ammonia in a gas-liquid phase reaction comprising; 3 F 2 +NH 4...
5591547 Method of manufacturing a negative electrode for lithium secondary battery  
A method of manufacturing a negative electrode for a lithium secondary battery includes the steps of mixing graphite particles as a main constituent that generates intercalation and...
5401473 Method and apparatus for treatment of NF.sub.3 gas  
In accordance with this invention, a waste gas containing toxic NF 3 gas is contacted with a honeycomb structure of a carbonaceous material to thereby convert NF 3 into nontoxic CF 4 and N 2 ...
5340561 Process fo the production of Si.sub.2 N.sub.4 using a silicon, phosphorous and nitrogen containing precursor  
The present invention relates to a process for the production of low-needle silicon nitride of high α-content, wherein an amorphous nitrogen-containing silane compound is mixed with a crystalline...
5302366 Production of silicon product containing both carbon and nitrogen  
A ceramic product comprising both carbon and nitrogen and a method for its production are provided. The product is formed in a reactor having a chamber defined therein which is divided into a...
5284639 Method for the preparation of niobium nitride  
A method is disclosed for preparing and recovering metal nitrides from their ferrometal alloys and nickel metal alloys. Exemplary steps of the process involve niobium nitride prepared from...
5248490 Process for the preparation of silicon nitride having a small crystallite size  
To prepare silicon nitride having a crystallite size of 40 to 60 nm and a specific surface area according to BET of 21 to 40 m 2 /g, amorphous silicon nitride or amorphous silicon nitridoimide is...
5211921 Process of making niobium oxide  
A process for making metal oxides including niobium or tantalum oxides from ferro and nickel alloys containing these metals involving the multiple steps of hydriding the ferro or nickel alloy...
5178847 Process for producing ceramic raw materials  
The invention relates to a process for the production of silicon ceramic whiskers and silicon ceramic powder from silicon fluoride and ammonia or a hydrocarbon, at an elevated temperature....
5174975 Method of preparing metal carbides, nitrides, borides and the like  
A process is provided for the preparation of metals, metal carbides, nitrides, borides, silicides, sulfides and phosphides by low temperature pyrolysis of a selected organometallic precursor. The...
5169613 Method for the preparation of boron nitride using ammonia-monohaloborane  
The invention relates to the synthesis of ammonia-haloboranes, and in particular, H 3 NBH 2 Cl, which materials are useful for the produciton of amorphous boron nitride and crystalline...
5160719 Process for nitriding silicon containing materials  
A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by...
5156830 Process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase material  
A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material includes comminuting a slurry including a mixture of...
5120686 Method of preparing a polysilazane  
A method of preparing an organosilazane including reacting a first halosilane having the formula RR 1 SiX 2 , wherein X is F, Cl, Br, or I, and each R and R 1 , independently, is X, H, or a lower...
5114693 Process for the production of silicon nitride and product made according to the process  
The present invention provides a process for the production of silicon nitride by the reaction of silicon and nitrogen, wherein, in one reaction step, silicon powder is reacted with nitrogen which...
5069887 Method of refining nitrogen trifluoride gas  
The invention provides a selective adsorption method for refining NF 3 gas containing CF 4 as impurity. At a temperature not higher than 10° C. the NF 3 gas is brought into contact with a...
5017525 Production of ceramic materials and of precursor therefor  
A process for the production of a precursor which is a polymeric material comprising at least one metallic or non-metallic element, oxygen and carbon and from which a ceramic material, e.g. a...
4997633 Water-soluble boron containing impurity reduced hexagonally crystalline boron nitride  
A hexagonally crystalline boron nitride containing water-soluble boron containing impurity in such a magnitude that amount of boron to be contained in an extract after boiling at 100° C. of pure...
4990471 Process for producing silicon nitride  
A process for forming silicon nitride containing little or no silicon carbide. The process involves producing a uniform dispersion of finely divided silica particles in a polymer, heating the...
4980322 Sinterable SI.sub.3 N.sub.4 powders containing sintering additives and a process for their preparation  
Sinterable Si 3 N 4 powder containing Si 3 N 4 particles and sintering additives wherein Si 3 N 4 particles have an average particle size of less than 1 μm, contain no particle having a...
4980144 Process for purifying nitrogen trifluoride gas  
This invention relates to a process for obtaining a high purity nitrogen trifluoride gas which is used as a dry etching agent for semiconductors or a cleaning gas for CVD apparatus, etc.,...
4975259 Method of liquefying and condensing nitrogen trifluoride and a method of purifying nitrogen trifluoride  
The present invention has as its technical theme to provide a liquefactive and condensable method that enables the reaction step of forming NF 3 to be operated safely and continuously and...
4948571 Process for purifying nitrogen trifluoride gas  
A process of the present invention can effectively decompose, particularly, dinitrogen difluoride present in a nitrogen trifluoride gas to remove it from the gas. This process for purifying the...
4933158 Method for purifying nitrogen trifluoride gas  
There is here disclosed a method for removing nitrous oxide (N 2 O), carbon dioxide (CO 2 ) and dinitrogen difluoride (N 2 F 2 ) from a nitrogen trifluoride gas. The present invention is directed...
Matches 1 - 50 out of 136 1 2 3 >