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4179530 |
Process for the deposition of pure semiconductor material
In a device and process for the deposition of pure semiconductor materials, specially silicon, by thermal decomposition of gaseous compounds of said semiconductor materials on carrier bodies heated...
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4170667 |
Process for manufacturing pure polycrystalline silicon
A process for the production of high purity polycrystalline silicon from a mixture of silicon tetrachloride and trichlorosilane. Such a mixture can be used for the rapid deposition of...
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4150168 |
Method and apparatus for manufacturing high-purity silicon rods
A method of manufacturing high-purity silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod-shaped high-purity silicon carrier members which have been red-heated by...
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4147814 |
Method of manufacturing high-purity silicon rods having a uniform sectional shape
A method of manufacturing high-purity silicon rods having a uniform sectional shape by thermally decomposing monosilane on a plurality of rod-shaped silicon carrier members which have been...
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4138509 |
Silicon purification process
A process for producing semiconductor grade silicon. Metallurgical grade silicon, silicon dioxide, and silicon tetrafluoride are chemically combined at an elevated temperature to form silicon...
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4132763 |
Process for the production of pure, silicon elemental semiconductor material
An improved process for the production of pure, elemental semiconductor material, especially silicon, of the type wherein the semiconductor material is produced by decomposition from the gaseous...
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4131659 |
Process for producing large-size, self-supporting plates of silicon
Process for producing large-size, self-supporting plates of silicon deposd from the gaseous phase on a substrate body, which comprises heating a graphite substrate to deposition temperature of...
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4070444 |
Low cost, high volume silicon purification process
Truly amorphous silicon having a low level of undesired impurities, and therefore suitable for semiconductor applications, may be prepared by the present process. Impure silicon, for example,...
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4068020 |
Method of depositing elemental amorphous silicon
A smooth surfaced amorphous silicon layer useful in semiconductor technology is produced by pyrolytic deposition of elemental silicon onto a heated mandrel along with simultaneous pyrolytic...
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4062714 |
Process for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so made
A process for making hollow silicon bodies by decomposition from a gaseous ompound containing silicon and depositing said silicon on heated carrier bodies, which comprises assembling in a...
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4054641 |
Method for making vitreous silica
Method and apparatus for making vitreous silica of high purity including producing a melt of liquid silicon in a first chamber, mixing the liquid silicon with carbon dioxide in an upper zone of a...
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4027053 |
Method of producing polycrystalline silicon ribbon
A method of producing a ribbon of polycrystalline silicon, which includes contacting a moving surface carrying a layer of particulate semiconductor silicon, with a gaseous silicon source, is...
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3963838 |
Method of operating a quartz fluidized bed reactor for the production of silicon
In order to prevent breakage of a quartz fluidized bed reactor utilized in the production of silicon, the reactor is cooled as soon as a thin layer of silicon is formed on the reactor walls and...
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3956193 |
Conductivity of silicon nitride
An electrically conducting artefact is produced by heating a silicon nitride artefact to a temperature high enough to decompose part of the silicon nitride to silicon but not high enough to...
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3945864 |
Method of growing thick expitaxial layers of silicon
Epitaxial layers of silicon, having thicknesses of at least about 25 μm, are grown on the (100) or (111) planar surfaces of silicon substrates by the vapor deposition of silicon from the reaction...
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3941900 |
Method for producing highly pure silicon
A method for producing highly pure silicon, or another semiconductor material, includes depositing the element from a corresponding reaction gas at the surface of several rod shaped carrier members...
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3900039 |
Method of producing shaped semiconductor bodies
A method of removing a graphite carrier member supporting a semiconductor body without damaging such body by disintegrating the carrier member at room temperature with the aid of a concentrated...
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3647530 |
PRODUCTION OF SEMICONDUCTOR MATERIAL
When producing semiconductor bodies by a process of depositing semiconductor material from a gaseous mixture on an elongated crystalline semiconductor starting filament held between two laterally...
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3607067 |
METHOD OF PRODUCING FILAMENTARY MONOCRYSTALS
Described is an improvement in the method of producing filamentary monocrystals by precipitation of crystal substance from a vaporous compound in a reaction vessel at elevated temperature, which...
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3607054 |
METHOD FOR EXTENDING THE GROWTH OF VAPOR-LIQUID-SOLID GROWN CRYSTALS
By maintaining the desired temperature gradient in the molten solvent as the crystal grows and by replenishing the solvent lost by segregation into the growing crystal, a continuous filament...
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3527661 |
METHOD OF OBTAINING PUREST SEMICONDUCTOR MATERIAL BY ELIMINATION OF CARBON-IMPURITIES
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3519492 |
PROCESS FOR THE PRODUCTION OF PURE SEMICONDUCTOR MATERIALS
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3502516 |
METHOD FOR PRODUCING PURE SEMICONDUCTOR MATERIAL FOR ELECTRONIC PURPOSES
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3496037 |
SEMICONDUCTOR GROWTH ON DIELECTRIC SUBSTRATES
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3489621 |
METHOD OF PRODUCING HIGHLY PURE CRYSTALLINE,ESPECIALLY MONOCRYSTALLINE MATERIALS
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3447977 |
METHOD OF PRODUCING SEMICONDUCTOR MEMBERS
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3379584 |
Semiconductor wafer with at least one epitaxial layer and methods of making same
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3341360 |
Method of precipitating crystalline layers of highly pure, brittle materials
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3329527 |
Graphite heating elements and method of conditioning the heating surfaces thereof
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3286685 |
Process and apparatus for pyrolytic production of pure semiconductor material, preferably silicon
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3278342 |
Method of growing crystalline members completely within the solution melt
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3240623 |
Method for pyrolytic production of semiconductor material
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3232745 |
Producing rod-shaped semiconductor crystals
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3212922 |
Producing single crystal semiconducting silicon
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3160521 |
Method for producing monocrystalline layers of semiconductor material
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3160522 |
Method for producting monocrystalline semiconductor layers
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3147141 |
Apparatus for the manufacture of high purity elemental silicon by thermal decomposition of silane
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3140922 |
Methods and apparatus for treating reactive materials
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3130013 |
Methods of producing silicon of high purity
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3120451 |
Pyrolytic method for precipitating silicon semiconductor material
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3113841 |
Floating zone melting method for semiconductor rods
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3112997 |
Process for producing pure crystalline silicon by pyrolysis
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3101257 |
Preparation of high purity silicon by decomposition of silicon nitride powder having a graphite target buried therein
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3097069 |
Pyrolytic production of hyperpure silicon
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3095279 |
Apparatus for producing pure silicon
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3091517 |
Method for recovery and recycling hydrogen and silicon halides from silicon deposition reactor exhaust
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3078150 |
Production of semi-conductor materials
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3069244 |
Production of silicon
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3069241 |
Manufacture of high purity silicon
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3068078 |
Apparatus for producing hyperpure silicon for electronic purposes
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