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4837376 |
Process for refining silicon and silicon purified thereby
Highly pure silicon is produced by refining impure silicon to remove deleterious impurities by contacting a melt of the impure silicon with a reacitve gas which comprises a gaseous halogen compound...
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4831964 |
Production of shaped articles of ultra-pure silicon
Shaped articles, e.g., bars, of semiconductor-grade, ultra-pure silicon, are facilely and efficiently produced by thermally decomposing/pyrolyzing a monosilane feedstream on a red-heated silicon...
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4828814 |
Process for purification of solid material
A process is disclosed for producing a solid material which, in some cases, may have a resultant purity of 99.999% or better which comprises contacting the solid material at a temperature...
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4826668 |
Process for the production of ultra high purity polycrystalline silicon
The present invention is directed to an improved process for producing ultra high purity polycrystalline silicon which process provides for increased production capacity and electrical power...
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4820587 |
Polysilicon produced by a fluid bed process
Silicon of high purity is made by decomposing silane in a fluidized bed reactor. To obtain good process economics, two modes of operation are used. In a first mode, the reactor is operated under...
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4784840 |
Polysilicon fluid bed process and product
Silicon of high purity is used in making semiconductor devices. Silicon for this purpose is made by decomposing silane in a fluidized bed reactor. This process entails thermal decomposition of...
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4756896 |
Method of preparing silicon
The invention relates to a method for preparing polycrystalline pure silicon by reducing gaseous silicon tetrafluoride at a raised temperature by means of alkali metal or alkali earth and by...
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4751067 |
Process for making silicon from halosilanes and halosilicons
A reactor apparatus (10) adapted for continuously producing molten, solar grade purity elemental silicon by thermal reaction of a suitable precursor gas, such as silane (SiH 4 ), is disclosed. The...
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4751192 |
Process for the preparation of image-reading photosensor
An improved image-reading photosensor having a desired photoelectric conversion layer prepared in the absence of a plasma by the reaction of a substance capable of contributing to form a deposited...
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4748052 |
Fluid bed reactor and process
Undesirable conversion of a silicon source, such as silane, in the freeboard above a fluidized bed of silicon particles in a fluidized bed reactor, can be reduced by cooling the gas within the...
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4724160 |
Process for the production of semiconductor materials
An improvement in a process for the production of semiconductor materials from the vapor decomposition of a precursor compound of the desired semiconductor material and the deposition of the...
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4710260 |
Deposition of silicon at temperatures above its melting point
Liquid silicon is deposited on a high surface area column of silicon nitride particles, by hydrogen decomposition of trichlorosilane. This is accomplished in an environment heated to a temperature...
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4684513 |
Zone heating for fluidized bed silane pyrolysis
An improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone...
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4683125 |
Method for purifying an industrial raw material gas and a purifier for use in said method and a method of manufacturing said purifier
The invention relates to a purifier for purifying an industrial raw material gas, formed by depositing a hydrogenated or a fluorinated amorphous substance of an element selected from a group...
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4681652 |
Manufacture of polycrystalline silicon
Process of growing polysilicon on a plurality of deposition members grouped in a double ring, i.e., an outer circle surrounding an inner circle of members.
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4676968 |
Melt consolidation of silicon powder
A process is disclosed for the melt consolidation of silicon powder which is based on the use of a critical partial vacuum of 200-300 torr of an inert gas that is applied.
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4676967 |
High purity silane and silicon production
Silicon tetrachloride, hydrogen and metallurgical silicon are reacted at about 400°-600° C. and at pressures in excess of 100 psi, and specifically from about 300 up to about 600 psi to form di-...
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4668493 |
Process for making silicon
A reactor apparatus (10) adapted for continuously producing molten, solar grade purity elemental silicon by thermal reaction of a suitable precursor gas, such as silane (SiH 4 ), is disclosed. The...
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4661335 |
Novel silicon powder having high purity and density and method of making same
A powder of elemental silicon having high purity and a density in excess of about 0.6 g/cm 3 , preferably ranging from 0.8 to 1.2 g/cm 3 , and which is non-amorphous as determined by X-ray...
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4656021 |
Method for the production of silicon
A method for producing silicon which comprises subjecting silane and chlorine to a combustion reaction to generate a flame and thereby precipitating fine crystals of silicon.
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4642227 |
Reactor for producing large particles of materials from gases
A method and apparatus is disclosed for producing large particles of material from gas, or gases, containing the material (e.g., silicon from silane) in a free-space reactor comprised of a tube...
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4642228 |
Fluxing system for reactors for production of silicon
A process is disclosed for the production of elemental silicon that utilizes a non-reactive condensible gas as a means for purging the reactor of ambient air prior to the introduction of an alkali...
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4590024 |
Silicon deposition process
An improved process is disclosed for the deposition in a reactor vessel of silicon on the interior walls of the reactor vessel and for the subsequent separation of the silicon from those walls. The...
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4569855 |
Method of forming deposition film
A process for forming a deposition film, wherein a gaseous atmosphere of a silicon compound selected from (i) a silicon compound having at least one azo group directly bonded to a silicon atom...
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4559219 |
Reducing powder formation in the production of high-purity silicon
A method of manipulating the rate of homogeneous nucleation of silicon as either a particulate solid or liquid settling out of the gaseous phase during the pyrolysis of silane homologs by...
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4537759 |
Production of elemental silicon from impure silane feed
Elemental silicon is produced by a process and apparatus wherein relatively impure silane (SiH 4 ) is purified in the gaseous state, while mixed with an inert carrier gas, to a content of...
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4529576 |
Process and apparatus for obtaining silicon from fluosilicic acid
Process for producing low cost, high purity solar grade Si wherein a reduction reaction, preferably the reduction of SiF 4 , by an alkali metal (liquid Na preferred) is carried out essentialy...
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4525334 |
Process for the production of silicon
A process for the production of silicon comprising reacting a gaseous silicon compound of the formula SiH n X 4 -n, wherein X is halogen and n is 0 to 3, with aluminum in solid state. The...
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4519999 |
Waste treatment in silicon production operations
A battery of special burners, each adapted for the treatment of a particular range of waste material formed during the conversion of metallurgical grade silicon to high purity silane and silicon,...
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4481232 |
Method and apparatus for producing high purity silicon
A method for producing high purity silicon includes forming a copper silie alloy and positioning the alloy within an enclosure. A filament member is also placed within the enclosure opposite the...
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4460556 |
Method for producing high purity Si for solar cells
Highly purified starting materials for the production of silicon suitable for fabrication of solar cells are produced via the carbo-thermal reduction process. A carbon-containing material with...
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4459163 |
Amorphous semiconductor method
Preparation of amorphous semiconductor material that is suitable for use in a wide variety of devices by the pyrolytic decomposition of one or more gaseous phase polysemiconductanes, including...
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4457902 |
High efficiency hydrocarbon reduction of silica
A process to reduce SiO 2 to produce Si, includes the steps: (a) reacting SiO 2 with a saturated hydrocarbon at elevated temperature in a retort, to produce molten Si, and gases including SiO,...
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4454104 |
Process for working up the residual gases obtained in the deposition of silicon and in the conversion of silicon tetrachloride
The chlorosilanes contained in the residual gases obtained in the deposit of silicon and in the conversion of silicon tetrachloride are first condensed out in liquid form. The hydrogen chloride...
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4444811 |
Fluidized bed silicon deposition from silane
A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed. Silicon seed particles are produced in a...
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4444812 |
Combination gas curtains for continuous chemical vapor deposition production of silicon bodies
A process for producing electronic-grade silicon bodies is disclosed wherein continuously-pulled slim rods which can be formed in situ from the reaction of a seed crystal and a molten silicon...
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4424199 |
Fluid jet seed particle generator for silane pyrolysis reactor
Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane.
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4416913 |
Ascending differential silicon harvesting means and method
An improved means and method for extracting polycrystalline silicon from silicon source gases is provided wherein seed particles and source gases are reacted in a rising particle reaction chamber...
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4406765 |
Apparatus and process for production of amorphous semiconductor
A process for producing an amorphous semiconductor membrane. A predetermined gas is introduced into a vacuum chamber which is decomposed by a discharge phenomenon. The discharge phenomenon is...
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4389493 |
Process for the production of silicon-containing and carbon-containing raw material moldings, and the use of such moldings
In the production of silicon or silicon-alloy bodies in which a shaped pre-form, blank or like member containing a silicon carrier and carbon is subjected to an electric furnace, the fine-grain...
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4377564 |
Method of producing silicon
A method of producing silicon comprising producing a plasma in a gas flow laden with at least one silicon compound so that the silicon compound is reduced or decomposed to silicon and transporting...
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4374182 |
Preparation of silicon metal through polymer degradation
What is disclosed is a method of forming silicon from the degradation of polychlorosilanes, a method of coating a substrate with said silicon and a product of said coating method. The method of...
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4341749 |
Heating method for silane pyrolysis reactor
An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that...
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4340574 |
Process for the production of ultrahigh purity silane with recycle from separation columns
Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column...
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4331698 |
Method for making a very pure silicon
A process for producing high purity silicon semiconductor materials and mls by the thermal decomposition of a gaseous compound containing the silicon semiconductor material or metal passing over...
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4321420 |
Process for producing a layer containing silicon and photoelectric conversion device utilizing this process
Process for producing layers of silicon or one of its alloys in pure or doped form and able to absorb optical radiation, the layers being of limited thickness, it comprising a first stage of...
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4318942 |
Process for producing polycrystalline silicon
An economical, low temperature, closed loop, thermal decomposition process is provided for producing a controllable mixture of heterogeneously and homogeneously nucleated ultrahigh purity...
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4311545 |
Method for the deposition of pure semiconductor material
The invention relates to a method and device for making pure semiconductor aterial by thermal decomposition of compounds of the semiconductor material on suitable carrier elements. The quantity and...
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4301323 |
Lead-doped silicon with enhanced semiconductor properties
Silicon having semiconductor properties, adapted for use as an optoelectronic component, in particular solar cells, has its optoelectronic properties improved by adding to the silicon an agent,...
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4292344 |
Fluidized bed heating process and apparatus
Capacitive electrical heating of a fluidized bed enables the individual solid particles within the bed to constitute the hottest portion thereof. This effect is achieved by applying an A. C....
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