Matches 1 - 50 out of 154 1 2 3 4 >


Match Document Document Title
8834824 Method of treating a gas stream  
A method is described for treating a gas stream comprising fluorine (F2) gas. In a preferred embodiment, the method comprises adding water vapor to a gas stream and conveying the gas stream and...
8668868 Methods and apparatus for smart abatement using an improved fuel circuit  
A method for abating effluent from an electronic device manufacturing process is provided, including abating the effluent in a thermal abatement tool to form abated effluent; determining whether...
8303687 Method for absorbing chlorine from gas streams  
Chlorine is absorbed in water from gas streams of nitrogen, oxygen, argon, helium and mixtures thereof, in which process the formation of hypochlorous acid is suppressed through the regulated...
8182775 Dry-scrubbing media compositions and methods of production and use  
Dry-scrubbing media compositions, methods of preparing same, and methods of use are provided. The compositions contain activated alumina and potassium carbonate. Optionally, activated carbon and...
8048203 Method of producing chlorine gas, aqueous sodium hypochlorite solution and liquid chlorine  
It is intended to provide methods of producing a chlorine gas having a small bromine content, an aqueous sodium hypochlorite solution having a small bromic acid content, and liquid chlorine having...
7976808 Method for removing halogen series gas and agent for removing halogen series gas  
To provide an agent for removing a halogen series gas and a method for removing a halogen series gas which is excellent in a removing ability of removing the present halogen series gas in a low...
7883568 Separation of light gases from halogens  
A process is provided for separating one or more light gases from bromine or chlorine using one or more physical separations and contact with a chemical scrubber to recover additional halogen. In...
7846407 Self-concentrating absorbent for acid gas separation  
An process for efficiently deacidizing a gaseous mixture is described. The process utilizes a self-concentrating absorbent that absorbs an acid gas at reduced overall energy costs for the...
7785560 Purification of finely divided, pyrogenically prepared metal oxide particles  
Process for removing halide compounds adhering to finely divided metal oxide particles by means of steam, wherein the metal oxide particles are applied to the upper part of an upright column and...
7776302 Fluorine extraction systems and associated processes  
Fluorine extraction systems and associated processes are described herein. In one embodiment, a fluorine extraction process can include loading a mixture containing a uranium fluoride (UxFy, where...
7686963 Magnesium thiosulfate as ozone quencher and scrubber  
In one aspect, ozone is quenched from a water stream, such as a drinking water or wastewater stream being treated with ozone, by contacting the stream with magnesium thiosulfate. In another...
7494633 Gas abatement  
Apparatus is described for treating an effluent fluid stream from a semiconductor manufacturing process tool. The apparatus comprises a combustion chamber, means for heating the combustion...
7470413 Fluorine removal by ion exchange  
A method for removing fluorine gas from a selected environment comprises contacting the fluorine gas with water to generate a solution of hydrofluoric acid and contacting the solution of...
H002198 Multi-stage pyrolysis systems for treating chlorine contaminated wastes  
A method of decontaminating solids contaminated with chlorinated hydrocarbons includes a first step of heating the contaminated solids at a temperature high enough to volatize chlorine...
7074378 Process for the purification of NF3  
This invention describes an improvement in a process for purifying a nitrogen trifluoride (NF3) stream containing unreacted F2, HF, and nitrogen oxides from an NF3 reactor wherein the F2, and HF...
7022296 Method for treating flue gas  
A multiple-field precipitator, flue-gas treating device, in accordance with the principles of the invention, includes a first section having a dual-function, sensible-cooling heat...
7014824 Method for purifying process waste gases  
The present invention relates to a method for purifying process waste gases by introducing them into a waste gas purification system that includes a reaction chamber and by post-treating the...
6953557 Process and apparatus for treating semiconductor production exhaust gases  
A process and an apparatus for treating exhaust gases, comprising an aeration stirring tank (5) employing an aqueous alkaline liquid, and, as a posterior stage, a gas-liquid contact device (7)...
6896865 Method for recovering hydrogen chloride from chlorine based waste and use of recovered hydrogen chloride  
To provide a process for recovering high quality hydrogen chloride rationally with good economical efficiency, particularly hydrogen chloride with an elevated quality level to be provided as the...
6858194 Method for reducing elementary halogen in a gaseous effluent  
Disclosed are a method for reducing the elementary halogen contained in a gaseous effluent from a combustion furnace by bringing the effluent into contact with hydrazine, and a device or an...
6793740 Method for cleaning pressurized containers containing moisture sensitive chemicals  
The present invention relates to a method for cleaning a pressurized container having at least one chemical contained therein. The pressurized container may be any type of container able to store...
6773925 Detector agent for halogen compounds and method for detecting halogen compounds  
There are provided a detector agent which is effectively discolored at a lower concentration for various halogen compounds and a method for detecting halogen compounds by use of said detector...
6767513 Method of treating exhaust gases containing halogen based compound  
A method of treating exhaust gases containing halogen compound, the improvement in that the exhaust gases containing halogen compounds such as halogen gases and/or hydrogen halide gases...
6709485 Process of removing carbon dioxide from a chlor/alkali plant tail gas stream  
A process for removing chlorine gas from the tail gas stream of a chlor/alkali plant or other chemical processes comprising the steps of: (a) contacting a chlorine-, hydrogen-, and carbon...
6685903 Method of purifying and recycling argon  
This invention is directed to a method for purifying argon from an impure argon stream. If the oxygen concentration in the impure argon is less than about 10 mole percent of oxygen, the invention...
6589494 Process for eliminating halogen-containing compounds contained in a gas or liquid using an adsorbent composition based on at least one metallic element  
The present invention provides a process for eliminating halogen-containing compounds contained in a gas or a liquid, characterized in that the gas or liquid is brought into contact with a...
6511641 Method for abatement of gaseous pollutants  
An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture...
6468490 Abatement of fluorine gas from effluent  
An effluent abatement system 200 that may be used to abate F2 gas content of effluent exhausted from a process chamber 35, such as effluent from a CVD chamber cleaning process includes a catalytic...
6409981 Process for removing chlorine from gas stream  
A process for the scrubbing of chlorine is scrubbed from a chlorine-containing gas using an aqueous feed liquor containing an excess of alkali to give an effluent liquor containing chloride and...
6379638 Method for removing harmful components from a gaseous mixture  
Compounds having the formula A2B3O6┬▒dwherein A is an alkaline-earth metal, an alkaline metal, a lanthanide, or a solid solution thereof, B is a transition metal, an element of group III, or a...
6355223 Closed loop process for producing chlorine from hydrogen chloride  
A method for oxidizing HCl to produce pure chlorine gas by reacting HCl with a mixture of sulfuric and nitric acids. Chlorine gas is evolved. Spent nitric and sulfuric acids are first regenerated...
6352676 Abatement of F2 using small particle fluidized bed  
A process for destroying fluorine in a gas containing such fluorine by contacting the gas with a fluidized bed of metal particles capable of reacting with such fluorine wherein the metal particles...
6238636 Process and systems for purification of boron trichloride  
Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the...
6210650 Process for regenerating hydrochloric acid from pickling plants  
In order to reduce pollutants in the waste gas of regeneration plants for spent hydrochloric acid from pickling plants a process is provided, comprising the thermal decomposition of iron chloride...
6180077 Process for purification of SiO2 granulate  
A process for the purification of SiO2 granulate is provided, where the SiO2 granulate is supplied into a reaction zone, heated therein and exposed to a treatment gas which comprises a...
6103944 Water separation process  
Water present in a hot gaseous product stream from a reactor system A.B (FIG. 1) containing hydrogen fluoride is separated from the stream in order to eliminate a potentially corrosive combination...
6096114 Process for recovering SF6 from a gas  
A process for recovering SF6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF6 and at least one of N2, O2, CO2, and H2 O with a membrane in at least...
6071401 Electrolytic method for purifying gases  
An electrolysis cell with a fixed-bed electrode and its use for the purification of waste gases. The electrolysis cell includes a fixed-bed electrode, a counterelectrode which is separated from it...
6060034 Abatement system for ClF3 containing exhaust gases  
A process for the abatement of a ClFx containing gas such as exhaust gases from a reactor wherein at least one step of the manufacture of integrated circuit is carried out, wherein the ClFx...
6030591 Process for removing and recovering halocarbons from effluent process streams  
A process for recovery of fluorocompound gas from an effluent gas stream containing the fluorocompound gas and other gas components, in which at least one of the other gas components is removed,...
5935540 Cleaning process for harmful gas  
There is disclosed a process for cleaning a harmful gas which comprises bringing a harmful gas containing at least one member selected from the group consisting of nitrogen fluorides, tungsten...
5840174 Process for the purification of gases  
A process for the electrolytic removal of contaminants from gases, wherein a gas and a liquid electrolyte are passed co- or counter-currently through a fixed bed electrode of an electrolysis cell...
5821395 Waste processing  
This invention relates to a process for thermally cracking waste polymer(s) comprising chlorinated polymers in a reactor in the presence of a fluidizing gas and a fluidized bed of solid,...
5756060 Process for cleaning harmful gas  
A process for cleaning a harmful gas which comprises bringing a harmful gas containing a halogen gas and/or a halogen compound gas such as hydrogen fluoride, hydrogen chloride, tungsten...
5756058 Process for purifying sulfur oxides-containing gas  
Impurities such as halides and ammonia are efficiently removed from a gas containing Sox at a high concentration without any substantial addition of fresh water in a process for purifying a sulfur...
5674464 Desulphurization of waste gases  
The present invention relates to a process for the removal of sulphur dioxide from waste gases which process comprises contacting a waste gas containing sulphur dioxide with an aqueous solution...
5597540 Process for cleaning harmful gas  
There is disclosed a process for cleaning a harmful gas which comprises bringing a harmful gaseous halogenide such as chlorine, hydrogen chloride, dichlorosilane, silicon tetrachloride, phosphorus...
5565180 Method of treating gases  
Gas reacting apparatus and method are described for wet mass transfer of solute gases from a gas stream with a liquid or slurry reacting medium capable of chemisorption of solute gases in the gas...
5443798 Separator plate for a chemical oxygen generator candle and assembly and generator made therefrom  
A separator plate for a chemical oxygen generator candle includes an elongate rigid thermal insulating section; and at least a first conduit section on one side of the rigid section having a...
5433938 Chlorine-destruct method  
An improvement is provided in a process for the preferential removal of chlorine from an aqueous solution of chlorine dioxide and chlorine which has been prepared by the process of reducing a...

Matches 1 - 50 out of 154 1 2 3 4 >