Matches 1 - 50 out of 168 1 2 3 4 >


Match Document Document Title
8961105 Vacuum pump  
A vacuum pump includes: a pump main body; a control unit which drives and controls the pump main body; a connector device including a first connector member on the pump main body side and a second...
8858188 Vacuum pump or vacuum apparatus with vacuum pump  
The invention relates to a vacuum pump or vacuum apparatus having a vacuum pump for the evacuation of one or a plurality of volumes, the vacuum pump having a plurality of pressure stages and at...
8851865 Vacuum pump  
A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the...
8814542 Vacuum pump  
A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, includes a rotor shaft (12) that supports at least one rotor device (14). The rotor shaft (12) is mounted on the pressure...
8764413 Pumping arrangement  
A differentially pumped vacuum system includes first, second and third chambers, and a pumping arrangement for evacuating the chambers. The pumping arrangement includes a compound pump having a...
8757987 Vacuum pump for differentially pumping multiple chambers  
A differentially pumped mass spectrometer system comprises a mass spectrometer having first and second pressure chambers through which, during use, ions are conveyed along a path. A pump assembly...
8753095 Pumping system and method of operation  
A pumping system includes a pumping mechanism, a motor for driving the pumping mechanism, a device for supplying power of a variable frequency to the motor, a control device for setting a maximum...
8740587 Apparatus and method for pumping in an ion optical device  
An apparatus and method for differential pumping of a mass spectrometer or other ion-optical device provides a transverse pressure drop introduced across a face of a primary rotor of a...
8740588 Multiple inlet vacuum pumps  
First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first...
8727751 Vacuum pumping arrangement  
A vacuum pumping arrangement comprises a turbomolecular pumping mechanism and a molecular drag pumping mechanism connected in series. A rotor of the molecular drag pumping mechanism is supported...
8716658 Mass spectrometer system  
The invention provides a mass spectrometer system (10) comprising a mass spectrometer (12) comprising a plurality of mass spectrometer stages (16, 18, 20, 44) in fluid communication from a low...
8668436 Turbomolecular pump  
A turbomolecular pump has multiple stages of alternately arranged rotors and stators. Each of the rotors has blades radially extending from a rotating body. Each of the stators has blades radially...
8651838 Vacuum pump with control unit  
A vacuum pump that includes a housing, a control unit including control elements for controlling electronic and electrical components located in the inner chamber of the housing, and a separation...
8628309 Turbomolecular pump device and controlling device thereof  
A turbomolecular pump having a pump main unit having, at least, a rotary vein provided on a rotor, a static vein for working in cooperation with the rotary vein to perform a vacuum exhaust, and a...
8613604 Turbomolecular pump  
The provision of the components requiring cooling on top of the cooling mechanism enables the cooling efficiency to be increased. Furthermore, a case of a control device is attached to the cooling...
8591204 Turbo-molecular pump  
A turbo-molecular pump includes a base 3; a rotor 4 rotatably supported thereon; a stator 400 disposed around the rotor 4; and a tubular casing 2 configured to accommodate the stator 400. The...
8529218 Vacuum pump having nested chambers associated with a mass spectrometer  
A vacuum pump for the evacuation of one or a plurality of volumes is described. The vacuum pump has a plurality of pressure stages and at least two suction inlets. An outer suction inlet for a...
8513826 Wind turbine  
A wind turbine having one or more sets of opposing magnets to create an opposing force between a turbine support and a turbine rotor great enough to form a space between them thereby reducing...
8403652 Molecular pump and flange having shock absorbing member  
A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator...
8398383 Foil shield for a vacuum pump with a high-speed rotor  
A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability μr greater than 1,000.
8366423 Method and arrangement for realizing a vacuum in a vacuum chamber  
The invention relates to a method of realizing a vacuum in a vacuum chamber. The vacuum chamber is connected to a pumping system shared by a plurality of vacuum chambers. The method includes...
8360754 Support for rolling bearing  
A support for a rolling bearing of the kind equipped with an outer rotating ring for a rotary vacuum pump, the support comprising an inner portion that can be associated with the rotating ring, a...
8292603 Rotary vacuum pump, vacuum device, and pump connection structure  
A rotary vacuum pump includes a pump casing on which an intake port flange is formed, a rotor which has a rotating side evacuating device and is driven to rotate at high speed inside the pump...
8235678 Multi-stage vacuum pumping arrangement  
A differentially pumped vacuum system includes first, second and third chambers, and a pumping arrangement for evacuating the chambers. The pumping arrangement includes a compound pump having a...
8221098 Radial turbomolecular pump with electrostatically levitated rotor  
A radial turbomolecular pump comprising an electrostatically levitated rotor with a high compression ratio and pump speed at a chip-scale level. The levitated rotor can be sandwiched between a...
8221052 Turbo-molecular pump  
Disclosed is a turbo-molecular pump, which comprises a rotor including a first cylindrical body formed with a part of a plurality of rotating blades arranged in multistage, a second cylindrical...
8172515 Turbo vacuum pump  
A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a...
8147222 Vacuum divider for differential pumping of a vacuum system  
A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum...
8109744 Turbo vacuum pump  
An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator...
8106354 Mass spectrometer arrangement  
The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at...
8087907 Turbo vacuum pump  
An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator...
8066495 Turbo vacuum pump and semiconductor manufacturing apparatus having the same  
A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump...
8021131 Vacuum pump  
A vacuum pump (50) includes a pumping arrangement, a shaft (10) for driving the pumping arrangement, a motor (60) for rotating the shaft (10) and a bearing arrangement supporting the shaft (10)...
7993113 Damper and vacuum pump  
A damper is configured for a vacuum pump that evacuates a vacuum system via gas transfer by a gas transfer mechanism in the vacuum pump by the rotating action of a rotating body in the vacuum...
7914265 Evacuation of a load lock enclosure  
A system for evacuating an enclosure is provided. The system includes a first vacuum pump having an inlet selectively connectable to an outlet from the enclosure. A second vacuum pump is also...
7900652 Gas supply system for a pumping arrangement  
A system (100) for supplying an inert purge gas to a pumping arrangement (106) includes a plurality of flexible capillary tubes (102) each for conveying the gas from a respective outlet of a...
7896625 Vacuum pumping system and method of operating a vacuum pumping arrangement  
A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising a turbomolecular pumping...
7850434 Pumping arrangement  
A differentially pumped system comprises a plurality of pressure chambers; and a pumping arrangement (100) attached thereto for evacuating the chambers, the pumping arrangement comprising first...
7819635 Vacuum pump with a continuous ignition source  
A multi-stage vacuum pump comprises, between adjacent stages of the pump, a continuous ignition source for igniting a fuel within a pumped fluid. This can ensure that the concentration of the fuel...
7811065 Vacuum pump for differential pumping multiple chambers  
A differentially pumped mass spectrometer system comprises a mass spectrometer having first and second pressure chambers through which, during use, ions are conveyed along a path. A pump assembly...
7753661 Vacuum pump  
A vacuum pump evacuates gas from a chamber by coaction of a rotationally driven rotor and a stator. An electrical equipment section that rotates the rotor is housed within a stator column integral...
7717684 Turbo vacuum pump and semiconductor manufacturing apparatus having the same  
A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump...
7645126 Vacuum pump and semiconductor manufacturing apparatus  
To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping...
7641451 Turbo pump and processing apparatus comprising the same  
A turbo pump for evacuating a process chamber minimizes the amount time necessary to reduce the speed of the rotor in preparation for performing maintenance in the process chamber or the like. The...
7600989 Leak detector comprising an inlet  
A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the...
7501782 Method and apparatus for controlling a magnetic bearing device  
A method and a controller for controlling a magnetic bearing device, in which a rotor is suspended for rotation around a shaft, are disclosed. Sensor signals are transformed to yield tilt...
7438538 Pump and method  
A pump for moving a liquid including a rotor rotatable within a housing and slidable relative to the housing between a first axial rotor position during normal pump operation and a second axial...
7438534 Wide range pressure control using turbo pump  
The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between...
7436093 Turbomolecular vacuum pump  
The turbomolecular vacuum pump with active magnetic bearings comprises an enclosure (110) defining a primary vacuum chamber (116), a rotor (120), an electric motor (107), an axial magnetic bearing...
7413411 Electronically controlled vacuum pump  
A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular...

Matches 1 - 50 out of 168 1 2 3 4 >