Matches 51 - 74 out of 74 < 1 2


Match Document Document Title
6106245 Low cost, high pumping rate electrostatically actuated mesopump  
A mesopump having a plurality of elementary cells. The cells each have a body forming a cavity having an electrode on one curved surface and a second surface facing the electrode. Electrical...
6007309 Micromachined peristaltic pumps  
Micromachined pumps including a channel formed between a first membrane and a substrate or between first and second flexible membranes. A series of electrically conductive strips is applied to a...
5997263 Micromachined filter for a micropump  
The micropump (11) has at least two first plate-forming means (10, 12) together defining a pump chamber (9), and the filter comprises liquid feed means, liquid collection means, second...
5961298 Traveling wave pump employing electroactive actuators  
A traveling wave pump which employs one or more pairs of interfacing plates to transfer fluid (gas or liquid) from one or more inlets to one or more outlets. At least one of the plates in each...
5908603 Ozone generator having micro pump  
An integrated ozone generator is disclosed. It includes: (a) an upper covering layer having a thin film, and a permanent magnet being installed on the thin film, the permanent magnet having a...
5836750 Electrostatically actuated mesopump having a plurality of elementary cells  
A mesopump having a plurality of elementary cells and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved...
5759015 Piezoelectric micropump having actuation electrodes and stopper members  
A micropump including two glass sheets (2, 8) with a machined silicon board (6) sealingly inserted therebetween. An inlet valve (12), a pumping chamber (50) and an outlet valve (28) are arranged...
5759014 Micropump  
A micropump including two glass wafers (2, 8) with a machined silicon wafer (6) sealingly inserted therebetween. An inlet valve (12), a pump chamber (14) and an outlet valve (16) are arranged...
5288214 Micropump  
A micropump comprises a housing for defining a pump chamber, an inlet valve disposed in an inlet flow passage, a outlet valve disposed in a outlet flow passage, and an actuator for changing a...
5271724 Valve equipped with a position detector and a micropump incorporating said valve  
A valve is formed from a silicon wafer (20) and has a position detector to detect by contact the position of the valve and hence reveal any malfunction. The position detector comprises a first...
5224843 Two valve micropump with improved outlet  
Pumping takes place within the micro-pump as a result of the deformation of a plate (12) using a piezo-electric pad (13). The deformation produces a variation in volume within a pumping chamber...
5180288 Microminiaturized electrostatic pump  
An electrostatic pump includes two electrodes, which are spaced apart essentially in the pump flow direction and which are adapted to have applied thereto a potential for injecting an ion current...
5096388 Microfabricated pump  
A micro machined micro pump capable of flow rates on the level of microliters per minute formed by micro machining of a semiconductor material such as silicon with a set of channels or passages...
5085562 Micropump having a constant output  
A micropump comprising a pumping chamber, an inlet channel communicating with the pumping chamber by an inlet valve and an outlet channel communicating with the pumping chamber via an outlet...
5078581 Cascade compressor  
The compressor cascade comprises a plurality of tandem-connected membrane pumps, each of the pumps having a plurality of stroke chambers whose volumes decrease in the direction of the fluid flow...
4938742 Piezoelectric micropump with microvalves  
A silicon micropump which can be manufactured by established integrated circuit techniques, and which is provided with piezoelectric valves, is described. The micropump can be used to pump liquids...
4911616 Micro miniature implantable pump  
A microminiature pump for use in the eye or other location in the human body. The pump is fabricated from crystalline silicon using semiconductor fabrication techniques such as impurity diffusion...
4895500 Micromechanical non-reverse valve  
A silicon micromechanical non-reverse valve. In a main surface of a silicon wafer there is provided a cavity and a cantilever beam. The beam extends over the cavity and is integrally formed with...
4826131 Electrically controllable valve etched from silicon substrates  
An electrically controllable valve etched from two silicon substrates includes an inlet orifice communicating with two outlet orifices through a channel etched into the substrates. A mesa, in...
4816031 Intraocular lens system  
An intraocular lens including a PMMA intraocular lens implant, a second soft and pliable lens disposed thereover such as that of silicon, and electromechanical circuitry for regulating the...
4668374 Gas sensor and method of fabricating same  
A rapid-response gas sensor for measuring the relative presence of a gas in a mixture of gases and its method of manufacture. The sensor is fabricated using microelectronics technology to form...
4520375 Fluid jet ejector  
A fluid jet ejector, such as is used in an inkjet printer head, is provided by a pair of spaced capacitor plates, one of which is a thin diaphragm, preferably of semiconductor material, such as...
4306951 Electrochemical etching process for semiconductors  
A method of electrochemically etching a semiconductor to a predetermined contour includes positioning at least one electrode on one side of the semiconductor and then applying a voltage to the...
4216477 Nozzle head of an ink-jet printing apparatus with built-in fluid diodes  
A nozzle head of an ink-jet printing apparatus according to the present invention comprises an ink reservoir for storing the ink supplied from an ink tank, a pump chamber provided between said ink...

Matches 51 - 74 out of 74 < 1 2