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7322098 |
Method of simultaneous two-disk processing of single-sided magnetic recording disks
Various methods and apparatus for simultaneously processing two single-sided hard memory disks is provided. Disks are positioned in pairs, with one surface of one disk positioned adjacent one...
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7296963 |
Multi-row passive component carrier tape
A carrier tape for a tape and reel machine includes at least one edge having a plurality of sprocket openings therein. The carrier tape also includes a first row of aperture cavities and a second...
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7230702 |
Monitoring of smart pin transition timing
A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling...
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7198447 |
Semiconductor device producing apparatus and producing method of semiconductor device
A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats...
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7179044 |
Method of removing substrates from a storage site and a multiple substrate batch loader
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is...
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7172383 |
Wafer transfer equipment and semiconductor device manufacturing apparatus using wafer transfer equipment
A semiconductor wafer transfer equipment transfers a plurality of semiconductor wafers, held in grooves of carriers in an erected state, to a boat using first and second wafer elevators equipped...
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7134827 |
Reduced footprint tool for automated processing of microelectronic substrates
The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools....
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7083376 |
Automated merge nest for pairs of magnetic storage disks
Various methods and apparatus for handling a plurality of disks and repositioning them into pairs is provided. In one embodiment, a nest is configured to hold a cassette and includes a nest. The...
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6786692 |
Method and apparatus for automatic pick up of hosiery articles from a container
A method and apparatus for automatically picking up hosiery articles ( 20 ) from a container ( 7 ), e.g., socks, knee socks, and the like in which an actuator ( 4 ) comprised of a support ( 5 ), to...
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6748293 |
Methods and apparatus for high speed object handling
Methods and apparatus for high speed workpiece handling are provided. The method for workpiece handling includes removing a workpiece from a first cassette with a first robot, transferring the...
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6723174 |
Automated semiconductor processing system
An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage...
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6705828 |
Vacuum processing apparatus and semiconductor manufacturing line using the same
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
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6669435 |
Precision resistor tube feeder
A system, method, and apparatus, for resistor tube feeding is disclosed. A tube magazine comprising a length of tubing and adapted for receiving precision resistor cores and compressed air is...
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6665583 |
Article holders with sensors detecting a type of article held by the holder
An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor...
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6652215 |
Rotary deblistering apparatus
A rotary deblistering apparatus is described. It comprises a rotatable drum having plurality of circumferential pack holding means each adapted to hold and retain a blister pack. The drum can...
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6634847 |
Method and an apparatus for picking up a module IC in a customer tray of a module IC handler
A method and apparatus for picking up module ICs from customer trays utilizes a rotating table. In the apparatus and method, the customer tray is placed on the rotating table, and the rotating...
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6616401 |
Part-supplying tray feeder and method of picking-up parts in the tray
In a tray feeder, in which a drawing section draws a palette from a container and supplies the palette to a pick-up point where a pick-up head of a parts-mounting-apparatus picks up parts, the head...
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6593045 |
Substrate processing apparatus and method
A cassette station, a processing station having a coating unit and a developing unit, and an inspecting station having a film thickness inspecting apparatus and a defect inspecting apparatus are...
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6568899 |
Wafer processing system including a robot
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a...
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6565308 |
Bulk mail container unloading system, apparatus and method
A Bulk Mail Container (BMC) unloader uses a simple crossed four bar-linkage to move a predetermined point on a BMC unloader in a substantially straight line while the overall BMC unloader rotates...
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6540469 |
Substrate processing apparatus
A substrate processing apparatus includes a process tube for processing a plurality of substrates, two boats for accommodating the substrates, two boat elevators, a substrate transfer unit for...
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6524052 |
Electronic parts-feeding tray feeder and electronic parts-feeding method
A tray feeder sequentially takes pallets, each holding a tray storing electronic parts, out of a magazine and feeds them to a pick-up position where the electronic parts are picked up by a transfer...
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6517304 |
Method for transporting substrates and a semiconductor manufacturing apparatus using the method
A method for transporting a substrate between a carrier, which holds the substrate, and a semiconductor manufacturing unit, which receives the substrate. The method includes steps of applying the...
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6457929 |
Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment
An apparatus for transferring wafers between wafer holders such as wafer cassettes, etching drums and the like includes a tank for containing a liquid transfer medium in which the wafers can be...
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6431811 |
Transfer device for semiconductor wafers
In order to achieve a higher compaction ratio with a wafer transfer apparatus for transferring wafers stacked in an interspaced manner in a first holding device, e.g. a magazine, to a second...
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6394736 |
Bulk mail container unloading system, apparatus and method
A Bulk Mail Container (BMC) unloader uses a simple crossed four bar-linkage to move a predetermined point on a BMC unloader in a substantially straight line while the overall BMC unloader rotates...
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6354794 |
Method for automatically transferring wafers between wafer holders in a liquid environment
An apparatus for transferring wafers between wafer holders such as wafer cassettes, etching drums and the like includes a tank for containing a liquid transfer medium in which the wafers can be...
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6340131 |
Method for operating an automatic cheese winder when changing batches
A method for performing a batch change in an automatic cheese winder, which has many identical winding stations disposed in sections and a transportation system for supplying yarn-wound spinning...
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6334266 |
Supercritical fluid drying system and method of use
A method and apparatus for fabricating and drying wafers, including micro-electro-mechanical system (MEMS) structures, in a second, supercritical processing fluid environment. The apparatus...
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6328523 |
Apparatus for picking up articles using a vision controlled robot
A group of bolts are suppled into a placing surface of a tray, an isolated bolt is searched for by a visual sensor, and its deviation from a standard position at the time of teaching is determined....
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6283695 |
Tray conveying apparatus and method
In a tray conveying apparatus and method for, for instance, semiconductor parts, a main station and substation which have a tray conveying function are driven slidably in a direction perpendicular...
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6257827 |
Apparatus and method for transporting substrates
A method and apparatus for substrate processing at lower cost than existing processing systems are disclosed, which by implementing an arrangement using load locks of smaller dimensions or of a...
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6247891 |
Apparatus for transporting pipette tips
An apparatus for transporting pipette tips is provided which comprises a vacuum manifold and one or more air conduits. The vacuum manifold internally defines a vacuum chamber, and has a wall which...
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6206626 |
Mechanism for transferring integrated circuit packages from a source site to a destination site with minimized moving parts
A mechanism for transferring an integrated circuit package from a source site to a destination site with use of air to push the integrated circuit package to minimize use of moving parts. The...
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6190118 |
Tilt mechanism for wafer cassette
A tilt mechanism for periodically tilting a cassette configured to hold a plurality of wafers or workpieces such that the wafers or workpieces become gravity-loaded against a rear portion of the...
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6152671 |
Component conveying device and method
A component conveying device is provided in which a lead component and a second component behind the lead component can be reliably separated and the lead component can be readily extracted with...
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6149379 |
Wafer transfer method using a serial number detecting device in semiconductor fabricating equipment
A wafer transfer method of semiconductor fabricating equipment is capable of successively arranging a plurality of wafers in a designated order (e.g., an ascending order, a descending order, an...
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6139243 |
Method and system for flipping a tray of parts
A method and system are provided for flipping a tray of parts such as integrated circuit packages including a pair of flippable storage trays. A first storage tray has an upper surface which forms...
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6113346 |
Method for loading and unloading a supply of plates in an automated plate handler
The primary function of the optional handler is to make plates available on demand to the imaging engine. A multitude of plates are stored inside cassettes and these cassettes are loaded into the...
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6106222 |
Method of peeling off chips using peeling plate with integrally formed first and second protrusions
A chip peeling apparatus has a plurality of protrusions which include first protrusions and second protrusions lower than the first protrusions. A vacuum pump communicates through holes with...
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6092981 |
Modular substrate cassette
The present invention generally provides a modular substrate cassette used to store substrates. The modular substrate cassette is designed to use different components that may be collectively...
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6086323 |
Method for supplying wafers to an IC manufacturing process
A method for unloading silicon wafers contained in a cassette from a sealed pod and supplying the wafers to an IC manufacturing process. The method includes receiving a base of the pod onto a...
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6077022 |
Placement machine and a method to control a placement machine
The present invention provides for safe and simple replacement or removal of individual feeders from a placement machine without any loss in performance by using a signal means to emit a signal to...
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6062799 |
Apparatus and method for automatically loading or unloading printed circuit boards for semiconductor modules
An apparatus for automatic loading or unloading printed circuit boards (PCBs) for semiconductor modules is disclosed. The apparatus employs an elastic jig carrier into which the PCBs are loaded....
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6048154 |
High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock
A dual stage load lock is provided for transfer of semiconductor wafers between an environment at atmospheric pressure and a high vacuum environment, such as a wafer processing system. The dual...
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6042324 |
Multi-stage single-drive FOUP door system
Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical...
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6000901 |
Apparatus for indexing magazines holding molded leadframes and a method therefor
An apparatus and method are shown for indexing magazines and molded leadframes within the magazines comprising a lateral drive portion coupled to and located below the magazines for selectively...
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5993132 |
Transferring a stack from a cartridge
A method and apparatus for transferring a stack of flat articles from a cartridge. The method and apparatus are adapted for use in connection with a method and apparatus for automatically stacking...
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5975825 |
Transfer apparatus for wafers
A transfer device for wafers stacked in magazines has a vertically displaceable frame of a platform, with which the cover of the box surrounding the magazine in the closed condition. The magazine...
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5964564 |
Method and apparatus for detecting cross-slotted objects
An apparatus for displacing and detecting cross-slotted objects includes a cradle mounted to a frame, the cradle being sized and shaped to hold a tray of objects in slots. As the cradle rotates on...
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