Matches 1 - 50 out of 212 1 2 3 4 5 >


Match Document Document Title
9033647 Substrate alignment system  
A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the...
9022714 Substrate processing system and substrate transferring method  
A substrate processing system and substrate transferring method capable of transferring a substrate bi-directionally through the use of substrate transferring device provided between two rows of...
9008817 Substrate positioning apparatus, substrate processing apparatus, substrate positioning method, and computer readable medium having a program stored thereon  
Disclosed is a substrate positioning apparatus capable of accurately performing positioning of a center of a circular-shape substrate with respect to a rotating shaft. The substrate positioning...
9003642 Method for making a magnetically coupled thin-wafer handling system  
The present invention describes a method of and an apparatus for including: separating magnets and corresponding target plates; separating a lower support assembly from an upper retainer assembly...
9005542 Storage system for storing laboratory objects at low temperatures  
The storage arrangement has a chamber. Several Dewar flasks are arranged in the chamber and above them a picking device. The picking device has at least one cassette lift, with which storage...
8911197 Method and apparatus for the rapid transport of glass sheets  
The invention relates to a method and to an apparatus for the rapid transport of glass sheets between different manufacturing stations in a spacious manufacturing plant for producing photovoltaic...
8858411 Loading/unloading system serving a sheet cutting centre, feeding tray therefor and relative handling method  
A system for loading/unloading sheets is disclosed, some of which also being of metal, and handling method thereof, serving a laser cutting center. The system includes a pair of rails (1, 2),...
8847122 Method and apparatus for transferring substrate  
A method and an apparatus for transferring a substrate are described. In the method, a substrate is provided on the surface of a first plate at a first position, the first plate is moved from the...
8831330 Parameter determination assisting device and parameter determination assisting program  
This invention provides a parameter determination assisting device and a parameter determination assisting program enabling a more rapid and easy determination of a parameter to be set in a...
8822305 Substrate provided with semiconductor films and manufacturing method thereof  
A plurality of single crystal semiconductor substrates having a rectangular shape are disposed on a tray. Depression portions are provided in the tray so that the single crystal semiconductor...
8731706 Vacuum processing apparatus  
A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers...
8731701 Substrate treatment method and substrate treatment system  
After a cassette is mounted on a cassette mounting part, a control unit instructs a substrate treatment apparatus to start treatment on substrates in the cassette. Thereafter, the control unit...
8707893 Substrate treatment system, substrate treatment method, and non-transitory computer storage medium  
A substrate treatment system includes a plurality of treatment apparatuses, a position adjustment apparatus adjusting a center position of the substrate, a substrate transfer apparatus...
8702370 Substrate transfer method for performing processes including photolithography sequence  
A substrate transfer method for transferring target substrates proceeds in a substrate processing system for performing processes including a photolithography sequence on the target substrates....
8657556 Tactile wafer lifter and methods for operating the same  
A tactile wafer lifting apparatus includes a pedestal and a vertical drive connected to the pedestal. The vertical drive is defined to provide controlled upward and downward movement of the...
8631698 Test slot carriers  
A test rack for a storage device testing system includes a plurality of test slot carriers. Each of the test slot carriers includes a plurality of test slot assemblies. The test slot assemblies...
8599531 Electrostatic end effector apparatus, systems and methods  
Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic...
8560108 Substrate processing apparatus and substrate processing method  
Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a...
8549735 Component-mounting device, component-mounting system, and component-mounting method  
A challenge to be met by the present invention is to provide a component mounting device, a component mounting system, and a component mounting method that make it possible to correctly position a...
8528225 Apparatus and method for continuous lyophilization  
A method and apparatus for the continuous sublimation of a substance includes cascading a material containing a substance capable of sublimation, such as water, between a plurality of trays...
8529314 Method of transporting work and apparatus with work handover mechanism  
When both surfaces of a wafer are sequentially subjected to processing, the wafer is made to be surely supported so that a predetermined processing and transporting can be performed. On one...
8523510 Method for moving and securing a substrate  
An apparatus for transferring and securing a substrate is shown. A pressure source is provided that is adapted to provide positive and negative pressure. A vacuum chuck is provided having a top...
8504194 Substrate processing apparatus and substrate transport method  
A substrate processing apparatus includes: a plurality of substrate processing sections arranged alongside a transport passage; a standby mechanism which retains a substrate in standby, the...
8490268 Method for laser cutting of unfinished metal sheets and laser cutting machine for carrying out the method  
The invention relates to a method for laser-cutting sheet steel (1), wherein a sheet steel (1) is gradually inserted in a defined position into the cutting area (2) of a laser cutter in a...
8489226 Method for automatically and sequentially loading objects and corresponding equipment  
A method is provided for automatically and sequentially loading objects onto a feed system, each having a respective axis of rotation and respective first and second indices of rotation about the...
8459922 Manipulator auto-teach and position correction system  
A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first...
8434993 Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method  
A robot apparatus according to the invention is configured to hand over a workpiece by rotating by a prescribed angle a finger including a holding means for holding the workpiece. The robot...
8339445 Component placing apparatus  
[Problems] To provide a component placing apparatus capable of effectively preventing the occurrence of a suction error by appropriately adjusting a displacement between respective coordinate...
8328498 Component feeding unit and method, and component mounting apparatus and method  
In stacking tray supplying for receiving in a stacked state a plurality of trays that are received in a state in which components to be mounted onto a board are aligned, two tray stages are...
8322963 End effector for a cluster tool  
Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput,...
8317449 Multiple substrate transfer robot  
Embodiments of multiple substrate transfer robots and substrate processing systems have been disclosed herein. In some embodiments, a multiple substrate transfer robot is provided and may include...
8298474 Device and method for loading and unloading a heat treatment furnace  
The invention relates to a device for loading and unloading a heat treatment furnace and to a corresponding method. Heat treatment furnaces are normally loaded and unloaded by means of a so-called...
8282334 Atomic layer deposition apparatus and loading methods  
The invention relates to methods and apparatus in which a plurality of ALD reactors are placed in a pattern in relation to each other, each ALD reactor being configured to receive a batch of...
8280596 Method of estimating the volumetric carrying capacity of a truck body  
A method for estimating the effective volumetric capacity of a truck body is provided. The method includes the step of establishing a side-to-side profile of a generic load model by extending load...
8277165 Transfer mechanism with multiple wafer handling capability  
An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed...
8276960 Device and method for seizing and setting down impact-sensitive sheets  
A device, method and computer readable-storage for mechanically handling impact-sensitive sheets of various formats ready for dispatch is described. The device has the following features: a) a...
8276262 Magnetically coupled thin-wafer handling system  
Aspects of the present disclosure may include an apparatus for enclosing a thin wafer to prevent damage during an on-going manufacture of integrated circuit chip(s) on or in the thin wafer, and...
8216422 Substrate support bushing  
An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a...
8215826 Device and method for moving liquid containers  
A method according to Claim 25, wherein essentially homogeneous material mixtures are achieved or maintained in these liquid containers.
8202034 Vacuum processing apparatus and substrate transfer method  
A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end...
8197171 Apparatus for loading and unloading a tray of a freeze drying plant and method thereof  
Disclosed is an apparatus for loading and unloading a tray of a freeze drying plant with a number of vials. An example apparatus includes a transfer table upstream of the freeze drying plant for...
8177469 Magnetic disk handling apparatus  
An apparatus and method for handling disks as part of a magnetic disk manufacturing process is provided. In one embodiment, during a drying process the disks are engaged at the inner diameter...
8143595 Ion implanter  
An ion implanter includes an implantation chamber into which an ion beam is introduced, a holder for holding substrates on two columns of a first column and a second column in an X-direction, and...
8137050 Pickup device and pickup method  
It is an object of the present invention to provide a device which can pick up a chip from an adhesive film while preventing damage to the chip. In addition, a device which can pick up a chip over...
8087869 Method and apparatus for loading palletized articles for blast freezing  
A method and apparatus for spacing apart layers of cartons containing animal parts (such as chicken parts). In one embodiment is provided a vacuum assist lift device to transfer layers of cartons...
8083463 Mini clean room for preventing wafer pollution and using method thereof  
A mini clean room for preventing wafer pollution includes a robot arm, a clean room body slidably disposed on the robot arm and at least one lock unit which is rotatably connected with the clean...
8079797 Substrate processing system and substrate transfer method  
A substrate processing system includes a control section configured to control a series of transfer operations and preset to control operation of a container transfer apparatus, operation at a...
8078312 Methods for inserting a part into a storage section of a storage container and insertion tool arrangement  
The invention refers to a Method (69) for automatically inserting at least one part (13) into a storage section (15) of a container (11), wherein the storage section (15) comprises a plurality of...
8057156 Transfer unit for test elements  
The invention relates to an analysis apparatus with an analysis device for analyzing body fluids, and a magazine for test elements with a fresh supply container and a transfer unit that comprises...
8047762 Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools  
By providing an overhead buffer system between an automatic transport system and a load port assembly of a process tool, the efficiency of the respective load ports may be significantly enhanced,...

Matches 1 - 50 out of 212 1 2 3 4 5 >