Matches 1 - 20 out of 20


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8960099 Substrate processing apparatus  
A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of...
8660686 Method and device for fixing and transporting impact sensitive sheets in sputter feed systems  
The invention relates to a device and method for fixing glass sheets in a superclean room for feeding a sputter system, comprising the following: a) a roller drive (12), designed to convey a...
8419341 Linear vacuum robot with Z motion and articulated arm  
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use...
7992278 Method of operating a production line  
A method of operating a production line comprises the steps of supporting equipment in the production line on a plurality of crawlers comprising at least one rolling track and a structural support...
7954434 Apparatus for transferring substrates  
An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower...
7591368 Glass substrate carrier with a non-contact brake assembly  
A glass substrate carrier has a base, a tray assembly, a transmission device and a non-contact brake assembly. The base is movable. The tray assembly has a tray slidably mounted on the base and...
7461711 Superconducting crawler system for a production line  
An equipment-carrying crawler (20) includes a rolling track (44) and a structural support (70). The structural support (70) supports equipment (16). Lifting magnets (72) are coupled to the rolling...
7318517 Process system and device for transporting substrates  
A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with...
6582178 Mini-modual manufacturing environmental  
A mini-modular manufacturing environmental chamber for processing and transporting semiconductor devices is disclosed. The cylindrical chamber is provided with a conveyer assembly that transports...
6519273 Magnetic bearing and circulation fan apparatus  
A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while...
6012208 Machine tool system  
The invention relates to a novel machine tool system provided with selectively energizable magnets for selectively moving a support for a work piece clamping plate into a floating condition and...
5980193 Magnetically levitated robot and method of increasing levitation force  
A magnetically levitated transport device provides levitation and propulsion of a vacuum carriage. An air carriage is moved by conventional means through both linear and angular displacements....
5639206 Transferring device  
A transferring device is provided for transferring an article between vacuum chambers. The transferring device comprises a cylindrical float member, and a transferring rod connected to and...
5288199 Transporting device of magnetically floating type  
A transporting device of the magnetically floating type is disposed in a central area of a multi-chamber to transport a semiconductor wafer into and out of peripheral processing rooms. The...
4974439 Controlled transfer of sheet metal can bodies in can body line  
Apparatus which eliminates mechanically-moving parts for clasping or releasing a sheet metal can body for moving a can body from a forming station and, which reduces the number of moving parts as...
4684315 Frictionless supporting apparatus  
A frictionless supporting apparatus comprising a horizontally plane working table having magnet portions on its peripheries. Pairs of stationary magnets define therebetween a vertical space into...
4681506 Table feed apparatus  
A table feed apparatus is disclosed. The table feed apparatus includes a fixed bed, a first movable table and a second movable table. The first movable table and the second movable table are...
3653485 AN AIR BEARING CONVEYOR  
Article handling apparatus including load supporting means in the form of air bearings mounted on decks and actuable to provide a film of air for supporting a load above the surface of the decks....
3599804 MAGNETIC CAN HANDLING APPARATUS WITH SURGE AND HOLD CONTROL  
Apparatus for transferring patterns of cans from a pallet to a conveyor includes a carriage having can lifting electromagnets. The magnets are powered from a silicon controlled rectifier bridge...
3066785 Magnetic article handling apparatus  

Matches 1 - 20 out of 20