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7347120 |
Robot of SCARA type
A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and swivelabl...
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7336009 |
Hobby servo enhancements
An independent and modular apparatus is disclosed for extending the operational capacity of a servo motor. The apparatus includes a frame member having a servo motor and a rotatable shaft mounted t...
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7316537 |
Substrate transport apparatus
A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping...
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7313462 |
Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the ...
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7311515 |
Blow-molding apparatus
A first transfer mechanism of a biaxial stretch blow-forming apparatus has sliders that are transported along a circular transportation passage. The sliders slide along a circular guide rail instal...
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7296962 |
Split assembly robotic arm
A robotic arm assembly ( 101 ) is provided which comprises a hub ( 103 ), a first arm segment ( 105 ) which is attached to the hub, and a second arm segment ( 107 ) which is attached to the first a...
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7292354 |
Apparatus for photoelectric measurement of an original
An apparatus for the photoelectric measurement of an essentially planar measurement original includes a photoelectric scanner and a positioning arrangement for the two dimensional movement of the s...
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7285884 |
Hobby servo attachment mechanisms
An apparatus for extending the operational capacity of a servo motor is disclosed. The apparatus includes a frame member. A first aperture is defined within the frame member and is configured to su...
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7281741 |
End-effectors for handling microelectronic workpieces
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to dete...
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7264436 |
Robot-guidance assembly for providing a precision motion of an object
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having...
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7258237 |
Grader apparatus
A method for weighing and portioning items utilizing a robot device. The robot device includes a grip, e.g., a suction cup, to remove an item from a delivery station to a receiving area for placeme...
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7244091 |
Robot arm mechanism
Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the secon...
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7233842 |
Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it
A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector co...
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7226269 |
Substrate edge grip apparatus
In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded ...
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7206667 |
Robot alignment system and method
The robot alignment system is used for establishing a predetermined alignment position between a movable robot member and an article that is processed by the robot. The system includes a laser tran...
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7192241 |
Substrate conveyer robot
A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first spi...
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7179044 |
Method of removing substrates from a storage site and a multiple substrate batch loader
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is als...
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7175381 |
Robotic arm for use with pharmaceutical unit of use transport and storage system
A robotic arm ( 10 ) for use with a pharmaceutical unit of use transport and storage system ( 200 ) comprises a base plate ( 14 ) with a first cam track segment ( 16 ) and a second cam track segmen...
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7168747 |
Device for gripping and holding an object in a contactless manner
A device is proposed for the contactless grasping and holding of an object from a direction directed at least partially in the direction of the force of gravity, using a holding element situated co...
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7147424 |
Automatic door opener
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier...
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7146718 |
Apparatus for mounting semiconductors
When mounting semiconductor chips, the semiconductor chips are presented on a wafer table where they are picked one after the other by a pick and place system, transported and placed onto a substra...
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7124687 |
Positioning device, especially for offset plates
The invention relates to a device for positioning an element with respect to at least two reference points ( 4 a , 4 c ), in which said device acts upon a working point on the element to be positio...
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7114907 |
Transfer robot
A transfer robot includes a swivel base pivotable about a vertical axis, a hand for holding a plate-like work placed thereon, and a linear transfer mechanism supporting the hand and provided on the...
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7108476 |
Method and device for changing a semiconductor wafer position
A mechanical apparatus and method are disclosed for orienting and positioning semiconductor wafers while avoiding contamination of elements on the faces thereof, by only contacting the peripheries ...
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7086822 |
Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system
An SCARA type robot comprises: an arm unit ( 14 ), whose one end is linked to a base ( 11 ) so as to be pivotable in a horizontal plane, and which is capable of horizontally bending and stretching;...
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7077619 |
Continuous motion robotic manipulator
A continuous motion robotic device including a first robotic arm, a second robotic arm, a third robotic arm, and a drive system. The robotic arms are coaxially arranged, each including an end effec...
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7066707 |
Wafer engine
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts...
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7063499 |
Conveyor system
A conveyor system able to safety convey a workpiece having a thickness of less than 100 μm and easily position the workpiece, provided with a plate-shaped member provided movably and swivelably an...
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7056080 |
Two-arm transfer robot
A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are sym...
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7040852 |
Robot arm mechanism and robot apparatus
Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a fir...
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7039498 |
Robot end effector position error correction using auto-teach methodology
A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the ...
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7018162 |
Articulated carrying device
A carrying device carries a semiconductor wafer above a base disposed in a transfer chamber or the like. The carrying device comprises pick for holding the object, a main arm mechanism adapted to b...
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7001139 |
Robot arm mechanism
Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the secon...
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7001138 |
Split collar for mechanical arm connection
A robot assembly and a method of installing a collar on a robot assembly. The robot assembly comprises a support shaft, an arm extending away from the shaft, a split connecting collar pivotally mou...
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6991420 |
Tool for handling wafers and epitaxial growth station
A tool ( 7 ) for handling a semiconductor material wafer ( 100 ) is designed to be used in an epitaxial growth station; the tool ( 7 ) comprises a disk ( 20 ) having an upper side ( 21 ) and a lowe...
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6988867 |
Transfer apparatus
There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer ap...
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6976822 |
End-effectors and transfer devices for handling microelectronic workpieces
Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention inc...
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6969227 |
Wafer transport apparatus
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein t...
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6968938 |
Convey device for a plate-like workpiece
A conveying device for a plate-like workpiece, comprising a suction-holding device for suction-holding the plate-like workpiece and a moving device for moving the suction-holding device between a f...
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6960057 |
Substrate transport apparatus
A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end effecto...
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6918735 |
Holding device for wafers
The invention relates to a holding device for wafers in an arrangement for wafer inspection, comprising two grippers ( 11, 12 ), each of which, in the closed state of the holding device ( 8 ), encl...
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6918731 |
Fast swap dual substrate transport for load lock
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber withou...
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6913302 |
Robot arm edge gripping device for handling substrates
An edge gripping device grips and ungrips a substrate, such as a semiconductor wafer. A blade extends in a distal direction from a base of the device. At least one distal contact member is provided...
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6910847 |
Precision polar coordinate stage
A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The stag...
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6893204 |
Substrate delivering robot
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comp...
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6884019 |
Conveying arm
A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm i...
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6877946 |
Wafer transport apparatus
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein t...
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6873402 |
Reticle stop block apparatus and method
Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a re...
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6871115 |
Method and apparatus for monitoring the operation of a wafer handling robot
The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storin...
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6863491 |
Catch-pin water support for process chamber
A new and improved wafer support for supporting wafers in a process chamber such as an edge bead removal (EBR) chamber. The wafer support comprises multiple wafer support units each including a gri...
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