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8182198 |
Redundantable robot assembly for workpiece transfer
A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls,...
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8157497 |
Method and loader apparatus for TEM machine work chamber device
A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the...
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8137048 |
Wafer processing system with dual wafer robots capable of asynchronous motion
A robot assembly for transferring substrates includes a central tube assembly oriented along a central axis, perpendicular to a substrate transfer plane, and having an inner surface that forms part...
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8136422 |
Articulated robot
A multi-joint robot for loading/unloading a work into/from a cassette, which includes a hand part holding the work, an arm part rotatably holding the hand part, a link mechanism rotatably holding...
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8132306 |
Device for machining components, in particular of a vehicle body
A device for machining components, in particular of a vehicle body has a transport and positioning unit for the component and several machining stations, which are arranged around said unit and to...
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8109170 |
Umbilical member motion limiting device and robot having the device
An umbilical member motion limiting device is provided on a robot which has a forearm, a wrist portion, an operating tool attached to the end of the wrist portion, and the umbilical member...
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8112177 |
Wafer position teaching method and teaching tool
In the wafer position teaching method for a wafer carrying system, a teaching tool is mounted at a position of the container or the processing equipment where the semiconductor wafer is to be set....
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8105008 |
Pneumatic multi-weight balancing device
A load balancing pneumatic manipulator comprising an inflatable reservoir for establishing via an amplifier a pressure within a lift cylinder that is sufficient to balance the weight of an object...
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8096744 |
Wafer processing system, wafer processing method, and ion implantation system
Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process...
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8099192 |
Method and apparatus for teaching a workpiece transfer robot
A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to...
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8096380 |
Transfer robot
A transfer robot that is safe and produced at low cost is provided. A transfer robot (100) includes a base (7) fixable to a floor surface, a link mechanism provided on the base (7), an arm...
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8079800 |
Articulated robot
An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm...
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8062200 |
Tool-changing device having a directly driven stroke and pivoting actuator
A tool-changing device includes a tool gripper and a stroke and pivoting actuator for operating the tool gripper. The stroke and pivoting actuator can be driven by a first direct drive for...
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8061232 |
Methods and apparatus for a robot wrist assembly
The present invention provides methods, apparatus, and systems for a wrist assembly including a housing having a cap and a bottom, at least one pivot at least partially enclosed in the housing and...
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8060252 |
High throughput method of in transit wafer position correction in system using multiple robots
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate...
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8042711 |
Dosage-dispensing device with a receiving device for an insertion unit
A receiving device in a dosage-dispensing device, which serves to receive any insertion unit that can be inserted in the receiving device, includes a plurality of support arms that are arranged...
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8043042 |
Industrial robot
An industrial robot may include a robot hand structured to mount a transfer object, a multi-joint arm section having at least two arms including a robot hand supporting arm structured to support...
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8025475 |
Wafer transfer apparatus, wafer transfer method and storage medium
One sensor constituted of a light emission element and a light-receiving element is provided in a path through which a wafer is transferred. The sensor is positioned so that the wafer passes...
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8016538 |
System for weighing containers
The station for weighing containers comprises a line for transporting containers to be filled with a predetermined product, a zone for dosing and filling the containers with the product, a first...
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8016541 |
Substrate handling system for aligning and orienting substrates during a transfer operation
A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is...
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8016542 |
Methods and apparatus for extending the reach of a dual scara robot linkage
Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein...
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8011874 |
Transfer apparatus
A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the...
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7979162 |
Wireless controller and a method for wireless control of a device mounted on a robot
A wireless controller for controlling and/or monitoring a device arranged mounted on or relative to an industrial robot. A wireless communicator including a processor arranged with software means...
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7972252 |
Ergonomic tool lifting machine and method
An ergonomic tool lifting machine and method particularly useful for manipulating a machine tool or another heavy object. In one embodiment of the invention, the machine tool is a large milling...
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7967549 |
Robotic system including foldable robotic arm
A system includes an end effector, a robotic wrist for orienting the end effector; and a robotic arm for positioning the end effector. The robotic arm is foldable into a stack. The robotic wrist is...
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7955043 |
Substrate transfer apparatus
Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present...
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7950890 |
Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor
A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being...
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7946800 |
Substrate transport apparatus with multiple independently movable articulated arms
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft...
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7946799 |
Transfer apparatus
A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical...
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7922439 |
Industrial robot
A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost position...
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7918639 |
Automated object mover
An automation apparatus and method includes a first unit rotationally moving objects from one area to another, and a second unit connected to the first unit and holding the objects, moving through...
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7909154 |
Pallet exchanger
A pallet exchanger capable of providing a sufficient operation space on an operator's access side, for example, in front of a machining space, without increasing the size of the exchanger is...
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7905699 |
Transfer robot, transfer method, and control method
A transfer robot includes a hand section on which an object is placed; a horizontal arm mechanism connected to the hand section, the horizontal arm mechanism including at least two rotary joints,...
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7900578 |
Carrying system and processing equipment
A carrying system includes first and second carrying machines each of which includes a holding unit, a base and a linkage having pivotally joined first and second links. The holding unit can be...
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7891935 |
Dual arm robot
A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent...
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7887282 |
Media transportation mechanism and media processing device having the media transportation mechanism
A media transportation mechanism and a media processing device enabling carrying media without transportation errors or picking errors by accurately detecting if media is present. A media...
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7890235 |
Determination of remote control operator position
A system for controlling a work machine and work tool from a remote controller. The remote controller sends a control signal to a receiver assembly and machine controller. The machine controller...
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7874782 |
Wafer transfer apparatus and substrate transfer apparatus
A wafer transfer apparatus is provided. In a minimum transformed state where a robot arm is transformed such that a distance defined from a pivot axis to an arm portion, which is farthest in a...
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7859685 |
Wafer center finding with charge-coupled devices
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior...
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7857044 |
Tool manipulator especially for onshore and offshore drilling platforms
A manipulator apparatus carries tools for connecting drillpipes to the drillstring in a wellbore on a drilling platform. A telescopically extendable horizontal work arm is carried on a...
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7850414 |
Linear transfer mechanism and transfer robot using the same
A linear transfer mechanism includes a guide member, a transfer carriage movable along a horizontal linear transfer path provided on the guide member, and a drive mechanism provided with a drive...
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7845897 |
Method for transporting substrates
Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first...
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7837425 |
Transportation apparatus and drive mechanism
A transfer apparatus (20) for a target substrate (W) includes a rotatable rotary base (24). First and second arm mechanisms (26, 28) are attached to the rotary base and configured to bend and...
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7785060 |
Multi-directional mechanical scanning in an ion implanter
A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a...
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7766596 |
Attachment for a telescopic material handler for manipulating a load with five degrees of freedom
An attachment for a telescopic material handler supplies five degrees of freedom (DOF) for the task of picking, manipulating and aiding in the installation of vertical and horizontal wall cladding...
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7758295 |
Handling device and method for the same
A handling device and method utilizes a clamping arm that is mounted on a guide rod. The axial direction and the rotation direction of the guide rod are intersected each other at right angles....
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7750517 |
Hobby service having enhanced operational performance
An apparatus is disclosed for enhancing the operational performance of a servo. The apparatus comprises an auxiliary shaft that is independent and displaced from the servo and an actuation sensor...
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7736118 |
Transfer apparatus
A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism...
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7720655 |
Extended mainframe designs for semiconductor device manufacturing equipment
In a first aspect, a first mainframe is provided for use during semiconductor device manufacturing. The first mainframe includes (1) a sidewall that defines a central transfer region adapted to...
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7717255 |
End of arm tool, apparatus, and method of engaging an article
A conveying system includes a robotic arm, an end-of-arm-tool, carried by the robotic arm, and a conveyor. In one example, the end of arm tool includes a plurality of engagement mechanisms arranged...
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