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8182198 Redundantable robot assembly for workpiece transfer  
A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls,...
8157497 Method and loader apparatus for TEM machine work chamber device  
A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the...
8137048 Wafer processing system with dual wafer robots capable of asynchronous motion  
A robot assembly for transferring substrates includes a central tube assembly oriented along a central axis, perpendicular to a substrate transfer plane, and having an inner surface that forms part...
8136422 Articulated robot  
A multi-joint robot for loading/unloading a work into/from a cassette, which includes a hand part holding the work, an arm part rotatably holding the hand part, a link mechanism rotatably holding...
8132306 Device for machining components, in particular of a vehicle body  
A device for machining components, in particular of a vehicle body has a transport and positioning unit for the component and several machining stations, which are arranged around said unit and to...
8109170 Umbilical member motion limiting device and robot having the device  
An umbilical member motion limiting device is provided on a robot which has a forearm, a wrist portion, an operating tool attached to the end of the wrist portion, and the umbilical member...
8112177 Wafer position teaching method and teaching tool  
In the wafer position teaching method for a wafer carrying system, a teaching tool is mounted at a position of the container or the processing equipment where the semiconductor wafer is to be set....
8105008 Pneumatic multi-weight balancing device  
A load balancing pneumatic manipulator comprising an inflatable reservoir for establishing via an amplifier a pressure within a lift cylinder that is sufficient to balance the weight of an object...
8096744 Wafer processing system, wafer processing method, and ion implantation system  
Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process...
8099192 Method and apparatus for teaching a workpiece transfer robot  
A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to...
8096380 Transfer robot  
A transfer robot that is safe and produced at low cost is provided. A transfer robot (100) includes a base (7) fixable to a floor surface, a link mechanism provided on the base (7), an arm...
8079800 Articulated robot  
An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm...
8062200 Tool-changing device having a directly driven stroke and pivoting actuator  
A tool-changing device includes a tool gripper and a stroke and pivoting actuator for operating the tool gripper. The stroke and pivoting actuator can be driven by a first direct drive for...
8061232 Methods and apparatus for a robot wrist assembly  
The present invention provides methods, apparatus, and systems for a wrist assembly including a housing having a cap and a bottom, at least one pivot at least partially enclosed in the housing and...
8060252 High throughput method of in transit wafer position correction in system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate...
8042711 Dosage-dispensing device with a receiving device for an insertion unit  
A receiving device in a dosage-dispensing device, which serves to receive any insertion unit that can be inserted in the receiving device, includes a plurality of support arms that are arranged...
8043042 Industrial robot  
An industrial robot may include a robot hand structured to mount a transfer object, a multi-joint arm section having at least two arms including a robot hand supporting arm structured to support...
8025475 Wafer transfer apparatus, wafer transfer method and storage medium  
One sensor constituted of a light emission element and a light-receiving element is provided in a path through which a wafer is transferred. The sensor is positioned so that the wafer passes...
8016538 System for weighing containers  
The station for weighing containers comprises a line for transporting containers to be filled with a predetermined product, a zone for dosing and filling the containers with the product, a first...
8016541 Substrate handling system for aligning and orienting substrates during a transfer operation  
A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is...
8016542 Methods and apparatus for extending the reach of a dual scara robot linkage  
Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein...
8011874 Transfer apparatus  
A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the...
7979162 Wireless controller and a method for wireless control of a device mounted on a robot  
A wireless controller for controlling and/or monitoring a device arranged mounted on or relative to an industrial robot. A wireless communicator including a processor arranged with software means...
7972252 Ergonomic tool lifting machine and method  
An ergonomic tool lifting machine and method particularly useful for manipulating a machine tool or another heavy object. In one embodiment of the invention, the machine tool is a large milling...
7967549 Robotic system including foldable robotic arm  
A system includes an end effector, a robotic wrist for orienting the end effector; and a robotic arm for positioning the end effector. The robotic arm is foldable into a stack. The robotic wrist is...
7955043 Substrate transfer apparatus  
Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present...
7950890 Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor  
A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being...
7946800 Substrate transport apparatus with multiple independently movable articulated arms  
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft...
7946799 Transfer apparatus  
A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical...
7922439 Industrial robot  
A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost position...
7918639 Automated object mover  
An automation apparatus and method includes a first unit rotationally moving objects from one area to another, and a second unit connected to the first unit and holding the objects, moving through...
7909154 Pallet exchanger  
A pallet exchanger capable of providing a sufficient operation space on an operator's access side, for example, in front of a machining space, without increasing the size of the exchanger is...
7905699 Transfer robot, transfer method, and control method  
A transfer robot includes a hand section on which an object is placed; a horizontal arm mechanism connected to the hand section, the horizontal arm mechanism including at least two rotary joints,...
7900578 Carrying system and processing equipment  
A carrying system includes first and second carrying machines each of which includes a holding unit, a base and a linkage having pivotally joined first and second links. The holding unit can be...
7891935 Dual arm robot  
A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent...
7887282 Media transportation mechanism and media processing device having the media transportation mechanism  
A media transportation mechanism and a media processing device enabling carrying media without transportation errors or picking errors by accurately detecting if media is present. A media...
7890235 Determination of remote control operator position  
A system for controlling a work machine and work tool from a remote controller. The remote controller sends a control signal to a receiver assembly and machine controller. The machine controller...
7874782 Wafer transfer apparatus and substrate transfer apparatus  
A wafer transfer apparatus is provided. In a minimum transformed state where a robot arm is transformed such that a distance defined from a pivot axis to an arm portion, which is farthest in a...
7859685 Wafer center finding with charge-coupled devices  
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior...
7857044 Tool manipulator especially for onshore and offshore drilling platforms  
A manipulator apparatus carries tools for connecting drillpipes to the drillstring in a wellbore on a drilling platform. A telescopically extendable horizontal work arm is carried on a...
7850414 Linear transfer mechanism and transfer robot using the same  
A linear transfer mechanism includes a guide member, a transfer carriage movable along a horizontal linear transfer path provided on the guide member, and a drive mechanism provided with a drive...
7845897 Method for transporting substrates  
Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first...
7837425 Transportation apparatus and drive mechanism  
A transfer apparatus (20) for a target substrate (W) includes a rotatable rotary base (24). First and second arm mechanisms (26, 28) are attached to the rotary base and configured to bend and...
7785060 Multi-directional mechanical scanning in an ion implanter  
A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a...
7766596 Attachment for a telescopic material handler for manipulating a load with five degrees of freedom  
An attachment for a telescopic material handler supplies five degrees of freedom (DOF) for the task of picking, manipulating and aiding in the installation of vertical and horizontal wall cladding...
7758295 Handling device and method for the same  
A handling device and method utilizes a clamping arm that is mounted on a guide rod. The axial direction and the rotation direction of the guide rod are intersected each other at right angles....
7750517 Hobby service having enhanced operational performance  
An apparatus is disclosed for enhancing the operational performance of a servo. The apparatus comprises an auxiliary shaft that is independent and displaced from the servo and an actuation sensor...
7736118 Transfer apparatus  
A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism...
7720655 Extended mainframe designs for semiconductor device manufacturing equipment  
In a first aspect, a first mainframe is provided for use during semiconductor device manufacturing. The first mainframe includes (1) a sidewall that defines a central transfer region adapted to...
7717255 End of arm tool, apparatus, and method of engaging an article  
A conveying system includes a robotic arm, an end-of-arm-tool, carried by the robotic arm, and a conveyor. In one example, the end of arm tool includes a plurality of engagement mechanisms arranged...