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7374393 Method of retaining a substrate during a substrate transferring process  
A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device...
7347120 Robot of SCARA type  
A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and...
7336009 Hobby servo enhancements  
An independent and modular apparatus is disclosed for extending the operational capacity of a servo motor. The apparatus includes a frame member having a servo motor and a rotatable shaft mounted...
7313462 Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces  
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the...
7311515 Blow-molding apparatus  
A first transfer mechanism of a biaxial stretch blow-forming apparatus has sliders that are transported along a circular transportation passage. The sliders slide along a circular guide rail...
7296962 Split assembly robotic arm  
A robotic arm assembly ( 101 ) is provided which comprises a hub ( 103 ), a first arm segment ( 105 ) which is attached to the hub, and a second arm segment ( 107 ) which is attached to the first...
7292354 Apparatus for photoelectric measurement of an original  
An apparatus for the photoelectric measurement of an essentially planar measurement original includes a photoelectric scanner and a positioning arrangement for the two dimensional movement of the...
7285884 Hobby servo attachment mechanisms  
An apparatus for extending the operational capacity of a servo motor is disclosed. The apparatus includes a frame member. A first aperture is defined within the frame member and is configured to...
7281741 End-effectors for handling microelectronic workpieces  
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to...
7264436 Robot-guidance assembly for providing a precision motion of an object  
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having...
7233842 Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it  
A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector...
7226269 Substrate edge grip apparatus  
In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded...
7206667 Robot alignment system and method  
The robot alignment system is used for establishing a predetermined alignment position between a movable robot member and an article that is processed by the robot. The system includes a laser...
7192241 Substrate conveyer robot  
A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first...
7175381 Robotic arm for use with pharmaceutical unit of use transport and storage system  
A robotic arm ( 10 ) for use with a pharmaceutical unit of use transport and storage system ( 200 ) comprises a base plate ( 14 ) with a first cam track segment ( 16 ) and a second cam track...
7114907 Transfer robot  
A transfer robot includes a swivel base pivotable about a vertical axis, a hand for holding a plate-like work placed thereon, and a linear transfer mechanism supporting the hand and provided on the...
7108476 Method and device for changing a semiconductor wafer position  
A mechanical apparatus and method are disclosed for orienting and positioning semiconductor wafers while avoiding contamination of elements on the faces thereof, by only contacting the peripheries...
7086822 Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system  
An SCARA type robot comprises: an arm unit ( 14 ), whose one end is linked to a base ( 11 ) so as to be pivotable in a horizontal plane, and which is capable of horizontally bending and stretching;...
7056080 Two-arm transfer robot  
A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are...
7040852 Robot arm mechanism and robot apparatus  
Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a...
7039498 Robot end effector position error correction using auto-teach methodology  
A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the...
7018162 Articulated carrying device  
A carrying device carries a semiconductor wafer above a base disposed in a transfer chamber or the like. The carrying device comprises pick for holding the object, a main arm mechanism adapted to...
7001139 Robot arm mechanism  
Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the...
7001138 Split collar for mechanical arm connection  
A robot assembly and a method of installing a collar on a robot assembly. The robot assembly comprises a support shaft, an arm extending away from the shaft, a split connecting collar pivotally...
6988867 Transfer apparatus  
There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer...
6976822 End-effectors and transfer devices for handling microelectronic workpieces  
Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention...
6969227 Wafer transport apparatus  
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein...
6960057 Substrate transport apparatus  
A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end...
6910847 Precision polar coordinate stage  
A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The...
6893204 Substrate delivering robot  
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot...
6884019 Conveying arm  
A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm...
6863491 Catch-pin water support for process chamber  
A new and improved wafer support for supporting wafers in a process chamber such as an edge bead removal (EBR) chamber. The wafer support comprises multiple wafer support units each including a...
6860711 Semiconductor-manufacturing device having buffer mechanism and method for buffering semiconductor wafers  
A semiconductor-manufacturing device is equipped with a load-lock chamber and a reactor, which are directly connected, wherein a semiconductor wafer is transferred by a transferring arm provided...
6852007 Robotic method of transferring workpieces to and from workstations  
An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be...
6840732 Transport apparatus and vacuum processing system using the same  
This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising...
6826977 Drive system for multiple axis robot arm  
A robot drive assembly for moving a working tool in x, y, z and theta directions comprising three independent, coaxially nested tubes, each tube being driven around a common central axis by drive...
6817640 Four-bar linkage wafer clamping mechanism  
The wafer clamping mechanism comprises a linkage mechanism and a wafer contact point coupled to the linkage mechanism. The linkage mechanism includes a four-bar linkage having: a first link having...
6752584 TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES WITHIN AN ENVIRONMENT OF A PROCESSING MACHINE AND METHODS OF MANUFACTURING AND USING SUCH DEVICES IN THE PROCESSING OF MICROELECTRONIC WORKPIECES  
Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a...
6749391 Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces  
Microelectronic workpiece transfer devices and methods for using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a...
6749390 Integrated tools with transfer devices for handling microelectronic workpieces  
Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a...
6712579 Substrate transfer apparatus and substrate transfer method  
A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer...
6705816 Wafer transport mechanism  
A wafer transfer apparatus provides a rotational and translational motions using only one stationary motor drive. The apparatus includes a drive assembly and a transport arm assembly. The transport...
6705177 Robot arm mechanism  
A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of a plurality of links, and a robot arm driving mechanism for driving the robot arm to...
6699003 Carrying device  
In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor...
6688838 Cleanroom lift having an articulated arm  
A cleanroom lift for maneuvering large objects such as turbomolecular pumps utilized in semiconductor processing applications is provided. In one embodiment, the lift includes a vertically movable...
6685422 Pneumatically actuated flexure gripper for wafer handling robots  
The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present...
6682113 Wafer clamping mechanism  
The wafer clamping apparatus is disclosed including a cam rotatably coupled to a base plate. The cam is configured to couple with a robot arm. The clamping apparatus also includes a rotating clamp...
6669434 Double arm substrate transport unit  
A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, includes a robotic arm formed of a first forearm supported by the tip part of a base arm so as to...
6655901 Three-dimensionally movable transfer robot  
A transfer robot includes a machine base, at least one hand for holding a workpiece, a hand moving mechanism for moving the hand horizontally reciprocally at least in an X direction, a first arm...
6632065 Substrate handling robot with a batch loader and individual vacuum control at batch loader paddles  
A substrate-handling robot comprises an arm drive mechanism with a first arm connected to it. A multiple substrate batch loader is connected to the first arm. The multiple substrate batch loader...
Matches 1 - 50 out of 269 1 2 3 4 5 6 >