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Match Document Document Title
9033644 Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub  
Boom drive apparatus for substrate transport systems and methods are described. The boom drive apparatus is adapted to drive one or more multi-arm robots rotationally mounted to the boom to...
9028197 Robot with plurality of belts and intermediate pulley  
A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the...
9024488 Robot drive with magnetic spindle bearings  
A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section...
8961099 Dual arm vacuum robot with common drive pulley  
A robot for use in semiconductor vacuum chambers is disclosed. The robot may include two independently-driven arms configured for wafer handling. The robot may include three motors or drive...
8958907 Robot arm apparatus  
A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The...
8951002 Dual arm robot  
A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly. Define at least three degrees of freedom to provide independent...
8915693 Robot arm having lower arm link separable into two parts  
A robot arm for transporting semiconductor wafers includes a hand, a lower arm link, and an upper arm link. The hand is connected to the lower arm link via a first joint, and the upper arm link is...
8918203 Substrate processing apparatus  
A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA...
8912697 Vacuum actuator including a stator forming a part of a vacuum partition wall  
A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet...
8888435 Industrial robot with overlapping first hand and second hand during time of linear transport  
An industrial robot is provided with the first hand, the second hand, the arm and the main unit section. The base end portion of the first hand and the base end portion of the second hand are...
8882430 Industrial robot  
An industrial robot may include a first hand and a second hand on which an object is mounted, a first arm which turnably holds the first hand on a first end side, a second arm which turnably holds...
8863685 Device for conveying honeycomb structural body, method for sealing honeycomb structural body, and method for producing honeycomb structural body  
A camera is used to take an image of an end surface of a honeycomb structure gripped by a hand. Based on the image, an initial rotation angle of the honeycomb structure around a vertical axis at a...
8855817 Parts handling device, system and method  
A method for operating a system including at least two robots for handling parts and a robot control unit arranged for control of said at least two robots. Each of the robots is arranged with a...
8807616 Robot hand  
A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to...
8807911 Transfer robot and equipment front end module including transfer robot with vent part  
A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be...
8784033 Robot systems, apparatus and methods for transporting substrates  
Substrate transport systems, apparatus and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent...
8777540 Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers  
An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed...
8777547 Systems, apparatus and methods for transporting substrates  
A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper...
8764085 Clamping device and workpiece conveying robot  
A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly...
8752449 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism  
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms...
8747049 Transferring apparatus  
A transferring apparatus 1 includes a revolving base 13, two hand mechanisms 13 and 14, and two hand drive mechanisms 30 and 40. The hand mechanisms 13 and 14 are provided at a revolving base 13...
8747050 Substrate transport apparatus  
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled...
8720297 Parallel robot of the SCARA type  
A parallel robot of the SCARA type includes a base or a body to which two articulated elements are attached, each including an arm and a forearm that are connected by a joint and are mounted in a...
8720965 Robot hand and robot  
A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least...
8672604 Industrial robot  
An industrial robot includes a hand on which a workpiece is placed, an arm that takes out the hand from a predetermined position of the workpiece and supplies the hand, an up-down moving mechanism...
8668428 Horizontal articulated robot and substrate transfer system provided with the same  
A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a...
8651796 Substrate transport apparatus with multiple independently movable articulated arms  
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft...
8628290 Manipulator having a three-ring bearing between two outer pivot arms and a platform  
A handling device which has a first bearing device forming a pivot point for two inner pivot arms, to each of which one outer pivot arm is pivotally attached. The two outer pivot arms support a...
8606394 Robot and conveying system  
A robot includes an arm member, a rotary actuator that swings the arm member, a hand member provided at an end of the arm member, a joint member that connects the arm member and the hand member to...
8596950 Transfer robot  
A transfer robot includes a hand section, a horizontal arm mechanism, and a lift mechanism. An object is to be placed on the hand section. The horizontal arm mechanism is connected to the hand...
8573919 Substrate transport apparatus  
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a...
8529136 High temperature ball bearing  
A ball bearing having external surfaces coated with ceramic materials is provided. The raceways of the ball bearing may advantageously be formed of metal such as stainless steel. The ceramic...
8528438 Robotic arm for transporting substrate in ultrahigh vacuum  
The invention provides a robotic arm for transporting a substrate in an ultrahigh vacuum including a carrier module and a drive module. The drive module includes a magnetic coupling, a first...
8505991 Conveying device and vacuum apparatus  
The present invention provides a technology for holding an object to be reliably conveyed for the sake of high speed conveyance not only in a low temperature environment but also in a high...
8489237 High throughput method of in transit wafer position correction in a system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot during transfer to an intermediate station. This measurement data is then used...
8459928 Conveyor robot  
A conveyor robot (10) includes a main body (12), a first arm (18), and a second arm (16). The first arm (18) is designed to be reciprocable between a wafer cassette and a position above the main...
8449242 Industrial robot and method of transporting the same  
An industrial robot may include an arm unit equipped with a hand structured to place a workpiece on the hand, a column structured to support the arm unit so as to enable the arm unit to move in a...
8382421 Transport apparatus  
A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of...
8376685 Dual scara arm  
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The...
8371795 Workpiece transfer system  
A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading...
8366375 Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus  
There are provided a rotation introduction mechanism which transmits a rotating motion on the atmosphere side into vacuum, is arranged simply, has a low sliding resistance, and has a long life, a...
8297907 Industrial robot  
An industrial robot for conveying a conveying object may include a hand having a mounting part, an articulated arm part having at least a hand holding arm which is extended and folded when the...
8283813 Robot drive with magnetic spindle bearings  
A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section...
8277165 Transfer mechanism with multiple wafer handling capability  
An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed...
8267636 Substrate transport apparatus  
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled...
8246289 End effector and robot for transferring a substrate having the same  
In a substrate transfer robot, an end effector includes a wrist plate, a first blade movably connected to the wrist plate in a vertical direction to support a first substrate, and a second blade...
8240971 Handling manipulator assembly  
A handling manipulator assembly comprises a vertical extending main support (2) arranged on a rotary plate (3). Arranged on the main support (2) is a vertically travelling vertical carriage (9) to...
8240972 Robot with linearly movable support member attaching to gripper  
In a robot, a support member is supported to an arm to be reciprocable with respect to one of first and second sides of the arm in a predetermined direction. A rotary member of a converter is...
8221050 Robotic assembly providing leveling and joint stress reduction  
A robotic is provided which comprises a hub (203); (b) a first lower arm (209) comprising first (213) and second (215) lower arm segments and having a first set of upper arms (229, 231) attached...
8196492 Versatile robotic module and robots comprising same  
A robotic module comprising a housing having opposed first and second sides, and comprising a base, a first end comprising a first drive feature on one of the first and second sides, and a second...

Matches 1 - 50 out of 353 1 2 3 4 5 6 7 8 >