|
Match
|
Document |
Document Title |
|
|
8136422 |
Articulated robot
A multi-joint robot for loading/unloading a work into/from a cassette, which includes a hand part holding the work, an arm part rotatably holding the hand part, a link mechanism rotatably holding...
|
|
|
8132306 |
Device for machining components, in particular of a vehicle body
A device for machining components, in particular of a vehicle body has a transport and positioning unit for the component and several machining stations, which are arranged around said unit and to...
|
|
|
8112177 |
Wafer position teaching method and teaching tool
In the wafer position teaching method for a wafer carrying system, a teaching tool is mounted at a position of the container or the processing equipment where the semiconductor wafer is to be set....
|
|
|
8099192 |
Method and apparatus for teaching a workpiece transfer robot
A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to...
|
|
|
8079800 |
Articulated robot
An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm...
|
|
|
8043042 |
Industrial robot
An industrial robot may include a robot hand structured to mount a transfer object, a multi-joint arm section having at least two arms including a robot hand supporting arm structured to support...
|
|
|
8025475 |
Wafer transfer apparatus, wafer transfer method and storage medium
One sensor constituted of a light emission element and a light-receiving element is provided in a path through which a wafer is transferred. The sensor is positioned so that the wafer passes...
|
|
|
8016538 |
System for weighing containers
The station for weighing containers comprises a line for transporting containers to be filled with a predetermined product, a zone for dosing and filling the containers with the product, a first...
|
|
|
8016541 |
Substrate handling system for aligning and orienting substrates during a transfer operation
A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is...
|
|
|
8016542 |
Methods and apparatus for extending the reach of a dual scara robot linkage
Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein...
|
|
|
8011874 |
Transfer apparatus
A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the...
|
|
|
7972252 |
Ergonomic tool lifting machine and method
An ergonomic tool lifting machine and method particularly useful for manipulating a machine tool or another heavy object. In one embodiment of the invention, the machine tool is a large milling...
|
|
|
7967549 |
Robotic system including foldable robotic arm
A system includes an end effector, a robotic wrist for orienting the end effector; and a robotic arm for positioning the end effector. The robotic arm is foldable into a stack. The robotic wrist is...
|
|
|
7955043 |
Substrate transfer apparatus
Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present...
|
|
|
7950890 |
Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor
A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being...
|
|
|
7946800 |
Substrate transport apparatus with multiple independently movable articulated arms
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft...
|
|
|
7905699 |
Transfer robot, transfer method, and control method
A transfer robot includes a hand section on which an object is placed; a horizontal arm mechanism connected to the hand section, the horizontal arm mechanism including at least two rotary joints,...
|
|
|
7891935 |
Dual arm robot
A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent...
|
|
|
7874782 |
Wafer transfer apparatus and substrate transfer apparatus
A wafer transfer apparatus is provided. In a minimum transformed state where a robot arm is transformed such that a distance defined from a pivot axis to an arm portion, which is farthest in a...
|
|
|
7859685 |
Wafer center finding with charge-coupled devices
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior...
|
|
|
7845897 |
Method for transporting substrates
Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first...
|
|
|
7837425 |
Transportation apparatus and drive mechanism
A transfer apparatus (20) for a target substrate (W) includes a rotatable rotary base (24). First and second arm mechanisms (26, 28) are attached to the rotary base and configured to bend and...
|
|
|
7785060 |
Multi-directional mechanical scanning in an ion implanter
A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a...
|
|
|
7750517 |
Hobby service having enhanced operational performance
An apparatus is disclosed for enhancing the operational performance of a servo. The apparatus comprises an auxiliary shaft that is independent and displaced from the servo and an actuation sensor...
|
|
|
7712808 |
End effector with centering grip
A flat workpiece transport apparatus having a movable arm and an end effector. The end effector is connected to the arm. The end effector has a movable grip for holding a flat workpiece on the end...
|
|
|
7704036 |
Drive source and transportation robot
The invention includes a base member attached to a casing. The inside of the casing can be a vacuum atmosphere. A partition wall is provided on the base member, the base member separating an air...
|
|
|
7645112 |
Transport apparatus, control method for the same, and vacuum processing system
A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby...
|
|
|
7591625 |
Carrying mechanism, a carrying device and a vacuum processing apparatus
A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second...
|
|
|
7578649 |
Dual arm substrate transport apparatus
A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the...
|
|
|
7572742 |
Equipment and method for processing semiconductor
Semiconductor processing equipment includes a transfer chamber (3) having a plurality of transfer ports (33) arranged at different positions in a lateral direction. A process chamber (4A) for...
|
|
|
7572092 |
Substrate alignment system
A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the...
|
|
|
7566198 |
Industrial robot
An industrial robot may include a main body part and an arm part including a first arm, a second arm and a hand arm. The main body part is provided with a first turnable shaft for performing an...
|
|
|
7531979 |
Direct drive robotic manipulator
A direct drive robotic manipulator is provided which includes a plurality of segments that are rotatably coupled with respect to one another. A plurality of spindles connects the segments for...
|
|
|
7516539 |
Apparatus for transplanting multi-board
An apparatus for transplanting a multi-board is provided. This apparatus includes an orientation device, a calibration device, and an image-adjusting device. The orientation device has a first...
|
|
|
7470098 |
Detecting apparatus and detecting method
An optical sensor for detecting the housing state such as the thickness of a substrate in the present invention is provided at supporting arms. The supporting arms are attached to a supporting...
|
|
|
7422412 |
Horizontal articulated robot
A horizontal articulated robot has a plurality of horizontal arms coupled by joint shafts, and a working shaft disposed at the extreme end of an extreme end arm among the horizontal arms has...
|
|
|
7374393 |
Method of retaining a substrate during a substrate transferring process
A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device...
|
|
|
7347120 |
Robot of SCARA type
A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and...
|
|
|
7336009 |
Hobby servo enhancements
An independent and modular apparatus is disclosed for extending the operational capacity of a servo motor. The apparatus includes a frame member having a servo motor and a rotatable shaft mounted...
|
|
|
7313462 |
Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the...
|
|
|
7311515 |
Blow-molding apparatus
A first transfer mechanism of a biaxial stretch blow-forming apparatus has sliders that are transported along a circular transportation passage. The sliders slide along a circular guide rail...
|
|
|
7296962 |
Split assembly robotic arm
A robotic arm assembly (101) is provided which comprises a hub (103), a first arm segment (105) which is attached to the hub, and a second arm segment (107) which is attached to the first arm...
|
|
|
7292354 |
Apparatus for photoelectric measurement of an original
An apparatus for the photoelectric measurement of an essentially planar measurement original includes a photoelectric scanner and a positioning arrangement for the two dimensional movement of the...
|
|
|
7285884 |
Hobby servo attachment mechanisms
An apparatus for extending the operational capacity of a servo motor is disclosed. The apparatus includes a frame member. A first aperture is defined within the frame member and is configured to...
|
|
|
7281741 |
End-effectors for handling microelectronic workpieces
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to...
|
|
|
7264436 |
Robot-guidance assembly for providing a precision motion of an object
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having...
|
|
|
7233842 |
Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it
A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector...
|
|
|
7226269 |
Substrate edge grip apparatus
In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded...
|
|
|
7206667 |
Robot alignment system and method
The robot alignment system is used for establishing a predetermined alignment position between a movable robot member and an article that is processed by the robot. The system includes a laser...
|
|
|
7192241 |
Substrate conveyer robot
A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first...
|