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7233842 |
Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it
A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector...
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7179044 |
Method of removing substrates from a storage site and a multiple substrate batch loader
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is...
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7066707 |
Wafer engine
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts...
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7039498 |
Robot end effector position error correction using auto-teach methodology
A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the...
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6871115 |
Method and apparatus for monitoring the operation of a wafer handling robot
The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for...
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6736590 |
Lifting device for substrates
The aim of the invention is to make it as easy as possible to change a spindle in a lifting device ( 2 ) for substrates, which device comprises a support ( 10 ). To this end the support is...
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6679675 |
Method and apparatus for processing wafers
An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A...
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6655901 |
Three-dimensionally movable transfer robot
A transfer robot includes a machine base, at least one hand for holding a workpiece, a hand moving mechanism for moving the hand horizontally reciprocally at least in an X direction, a first arm...
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6647605 |
Machine tool and its pallet changing device
The present relates to a machine tool for machining a workpiece by moving a tool and the workpiece relative to each other and to a pallet changer thereof. The machine tool is provided with a...
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6634851 |
Workpiece handling robot
A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The...
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6592315 |
Self-feeding apparatus with hover mode
A robotic self-feeding device uses a multiplicity of dishes, utensils and control methods to handle a wide variety of food, including sandwiches. Its operating sequence has a hover mode in which a...
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6520733 |
Substrate transport and apparatus
A substrate transporting method including inputting process data and determining whether a number of units required for processing a wafer is an odd number or an even number. Depending on the...
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6494666 |
Simplified and enhanced SCARA arm
A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over....
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6493607 |
Method for planning/controlling robot motion
A computerized method/system is provided for planning motion of a robot within a free space confined by obstacles, from an initial position to a goal position. In executing the method/system, a...
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6478531 |
Article transfer apparatus
An article transfer apparatus suitable for an operation requiring a large vertical working distance. The apparatus includes a first link driven by a motor, at least one second link coupled to the...
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6429139 |
Serial wafer handling mechanism
A wafer handling system for a wafer processing apparatus includes a wafer load lock chamber, a wafer processing chamber and a transfer chamber operatively coupled to the wafer load lock chamber and...
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6374982 |
Robotics for transporting containers and objects within an automated analytical instrument and service tool for servicing robotics
A robotic arm has a pair of gripper fingers designed to grip a variety of containers, including capped and uncapped test tubes as well as containers having unique gripping means. The fingers each...
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6354791 |
Water lift mechanism with electrostatic pickup and method for transferring a workpiece
A method and apparatus for transferring a semiconductor wafer in both a theta axis and a z-axis is provided. The apparatus is able to maintain maximum process and wafer throughput while minimizing...
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6353773 |
Remote control system for biped locomotion robot
A remote control system for remotely controlling a biped locomotion robot as manipulated by an operator has an upper body support mechanism for supporting an upper body of the operator while...
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6321138 |
Storage and retrieval system with automated order make up
A basket storage and retrieval apparatus and method has spaced parallel rows of storage racks with multiple horizontal tiers having aisles between the storage racks. Guides are connected to the...
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6318950 |
Unloader for tire vulcanizer
An unloader for a tire vulcanizer includes a linear motion guide rail fixed vertically to a main frame of a tire vulcanizer; a slider movably engaged with the linear motion guide rail; a movable...
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6290448 |
Lifting device (pallet device) with pivotal arm
Lifting device, in particular a pallet device (10), comprising a pivotal arm (19) at the free end of which in the area of a controllable rotary mount (42) is mounted a separate support element for...
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6234738 |
Thin substrate transferring apparatus
In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The...
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6227793 |
Door transport system
A door transport system includes a carriage slidably mounted on an upright column for movement therealong. A swing arm, pivotally mounted to the carriage, carries at its distal end a gripper...
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6213708 |
System for sorting multiple semiconductor wafers
A wafer sorting system is provided. The wafer sorter system is used to simultaneously sort multiple semiconductor wafers of a cassette. The wafer sorter system includes multiple arms which extend...
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6146083 |
Substrate transferring apparatus and substrate processing apparatus using the same
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members...
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6099237 |
Handling device
In order to configure a handling device, provided with an actuator for gripping a work piece, as well as at least two movement axes that are operatively connected to a drive and which allow the...
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6068438 |
Cargo-container crane and system
This is a top lift rotary-crane transfer device and system especially suited for transferring cargo containers between a railway car and one or more conveyors or other vehicles or storage spots. It...
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6058344 |
Automated system and method for control of movement using parameterized scripts
Robotic machines, such as mobile manipulators, are controlled by a relatively high-level script while changes in the environment are accommodated by including parameters in the script. Sensors,...
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6053688 |
Method and apparatus for loading and unloading wafers from a wafer carrier
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided...
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6037733 |
Robot having multiple degrees of freedom
An improvement is set forth in a robotic arm structure which includes at least two links. θ motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R...
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5967739 |
Baggage handling device
A baggage handling device (1) comprising, in combination, a vacuum gripping foot (2) and a non-vacuum, mechanical engagement device (3) such as a simple hook or a power operated claw (4), with an...
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5957651 |
Substrate carrying apparatus
A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an...
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5927937 |
Automated stacking apparatus
A stacker (10) for picking up objects (12) from a first location (14) and stacking the objects at a second location (16) is disclosed. The stacker (10) includes a vertically extending support...
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5906261 |
Device for processing objects
The invention relates to a device for processing objects, said device being provided with a number of stations comprising supporting means for supporting objects in said stations, and with...
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5881603 |
Transfer unit
A transfer unit for moving an object vertically, horizontally or rotationally has a drive mechanism installed on a horizontal bed, with a transfer portion mounted on the drive mechanism. The...
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5771748 |
Highly stable Z axis drive
A vertical positioner comprises a rigid frame. A rigid vertically extending structure extends upwardly from a base to its upper end portion. A generally horizontal flange forms the structure upper...
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5755550 |
Vacuum depalletizer apparatus and method
A vacuum apparatus and method are provided for controlling operation of a vacuum force to be applied through a vacuum cup for use in lifting objects such as cardboard boxes, so as to unload a...
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5733096 |
Multi-stage telescoping structure
A multi-stage telescoping tube structure and a robot including a multi-stage telescoping tube structure. The multi-stage telescoping tube structure includes an outer tube, an intermediate tube, and...
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5711646 |
Substrate transfer apparatus
A substrate transfer apparatus for receiving and delivering a substrate among a plurality of process locations and transferring the substrate among the process locations comprises an apparatus...
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5692293 |
Automatic electronic part-mounting apparatus
There is disclosed an automatic electronic part-mounting apparatus in which acceleration, acting on electronic parts, suction-held respectively by mounting heads, is reduced, thereby enabling...
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5672044 |
Free-traveling manipulator with powered tools
An automatic, controlled manipulator includes a power supply controlling motion of a tool head and providing power to a removeable powered tool supported at the end of the arm. The manipulator may...
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5667353 |
Robot system
A robot system includes a support assembly and a robot arm. The robot arm includes a platform and a carriage movable back and forth along the platform. A shuttle is movable back and forth along the...
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RE35584 |
Industrial robot
A spot welding robot including a base and an arm assembly mounted on the base. The arm assembly includes a lower arm mounted at a lower end on the base for a swingable movement about a...
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5628604 |
Conveying system
A conveying system provides a cassette accommodating workpieces; a container containing the cassette; a transferring device for conveying the cassette while supporting it or conveying the container...
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5617944 |
Shuttle transfer assembly
A shuttle transfer assembly is provided for transferring parts between at least two conveyor lines. The shuttle assembly includes a base and a transfer table which is mounted to the base via a...
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5599159 |
Pellet conveying device
A pellet conveying device used with a bonding machine for, for example, semiconductor devices, including a conveying arm that has a collet for holding pellets. The conveying arm can move vertically...
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5599152 |
Multicomponent attachment apparatus for a moveable working device
A multicomponent attachment apparatus for a movable working device which is detachably attached to the front end of the working device, including a device-sided adapter in order to connect the...
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5570992 |
Free-traveling manipulator with optical feedback control and methods
An automatic, controlled manipulator includes a moveable tool head on an arm and a tool supported at the end of the arm. The manipulator may be moveable in multiple or all directions. A storage for...
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5569014 |
Frog-leg robot having walking-beams
The end effector of a frog-leg robot is raised and lowered by using walking-beams to effect a vertical movement of the fore arms at the elbow joint.
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