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6077027 Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device  
In order to manufacture a semiconductor device of high performance a small-sized transfer arm mechanism, capable of retaining a predetermined transfer stroke, is put to practical use without any...
6077026 Programmable substrate support for a substrate positioning system  
A programmable substrate support including a first substrate support that mates with a second substrate support to enable automatic switching between different types of substrates. The first...
6075334 Automatic calibration system for wafer transfer robot  
A system for automatically calibrating a semiconductor wafer handling robot so that the robot will move wafers into and out of precise locations within enclosures that form process stations or...
6074515 Apparatus for processing substrates  
In a substrate processing apparatus receiving substrates held in a common carrier in a horizontal attitude, the substrates are transferred in the horizontal attitude from the common carrier to an...
6068438 Cargo-container crane and system  
This is a top lift rotary-crane transfer device and system especially suited for transferring cargo containers between a railway car and one or more conveyors or other vehicles or storage spots. It...
6068442 SCARA robot and articulator  
A robot 100 has a pedestal 1, upper and lower arms 5, 12 and a quill 21. A drive train comprises motors in the pedestal 100 coupled to three concentric drive tubes 3, 6, 9. The outer drive tube is...
6059516 Universally tiltable Z axis drive arm  
A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally...
6056504 Adjustable frog-leg robot  
An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position...
6057662 Single motor control for substrate handler in processing system  
A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to...
6058344 Automated system and method for control of movement using parameterized scripts  
Robotic machines, such as mobile manipulators, are controlled by a relatively high-level script while changes in the environment are accommodated by including parameters in the script. Sensors,...
6053980 Substrate processing apparatus  
A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate...
6053688 Method and apparatus for loading and unloading wafers from a wafer carrier  
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided...
6053983 Wafer for carrying semiconductor wafers and method detecting wafers on carrier  
A plurality of projections 21 is disposed on a inner surface of a lid 20 which is detachably attached to a carrier body 10. Each projection 21 has a tapered end part 22 with inclined surfaces 23,...
6048162 Wafer handler for multi-station tool  
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable...
6045315 Robot apparatus and treating apparatus  
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm...
6037733 Robot having multiple degrees of freedom  
An improvement is set forth in a robotic arm structure which includes at least two links. θ motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R ...
6024800 Plasma processing apparatus  
According to the present invention, a plasma processing apparatus for performing surface processing of a substrate by means of plasma discharge is provided comprising: a processing chambers 10R and...
6022185 Substrate transferring device  
A substrate transferring device including a pair of support arms for supporting LCD substrates substantially horizontally, expandable multi-joint link mechanisms for moving the support arms in a...
6007292 Work piece transfer apparatus  
A work piece transfer system particularly suited for transferring semi-conductor wafers from one environment, through a loadlock, to another environment and back again employs a series of pivotally...
5993142 Robot having multiple degrees of freedom in an isolated environment  
An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured...
5993141 Independent linear dual-blade robot and method for transferring wafers  
An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an...
5993140 Apparatus for loading pipes onto processing machines  
An apparatus for loading pipes onto processing machines, in particular pipe-bending machines, is provided which comprises a handler arm (8) consisting of a first segment (9) and a second segment...
5967739 Baggage handling device  
A baggage handling device (1) comprising, in combination, a vacuum gripping foot (2) and a non-vacuum, mechanical engagement device (3) such as a simple hook or a power operated claw (4), with an...
5957651 Substrate carrying apparatus  
A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an...
5954472 Batch loader arm  
The invention resides in an improved transport mechanism which utilizes a linkage having a plurality of end effectors disposed at one end thereof. Movement of a drive linkage in a first rotational...
5940948 Machining center  
In a centre for machining workpieces, of the type comprising a machine frame, a machining table (6) for workpieces held on pallets (7) and a device (9) for pallet changing, it is proposed that the...
5934856 Multi-chamber treatment system  
Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease...
5927937 Automated stacking apparatus  
A stacker (10) for picking up objects (12) from a first location (14) and stacking the objects at a second location (16) is disclosed. The stacker (10) includes a vertically extending support...
5915915 End effector and method for loading and unloading disks at a processing station  
A robotic end effector for loading and unloading a magnetic information storage circular disk on a grinder or polisher carrier surface includes an effector block, an annular vacuum cup, including...
5911557 Process and device for taking an object up and transferring it from a first station to a second  
The invention relates to a process and device for taking up stacked or flat objects and subsequently transferring them from a collecting point forming a first station to a second station at which...
5908281 Coaxial drive loader arm  
An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive...
5906261 Device for processing objects  
The invention relates to a device for processing objects, said device being provided with a number of stations comprising supporting means for supporting objects in said stations, and with...
5899658 Articulated arm transfer device  
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to...
5893700 Transport star for containers  
Transport star for containers with a basic body which can rotate, on whose circumference several gripper arms, in the form of double levers, are attached in bearings, which can be locked by...
5885052 Transferring apparatus and robot arm  
A robot arm and an apparatus for transferring an article. The robot arm includes a movable hand for holding the article. A first arm has a proximal end that rotatably supports a drive pulley and a...
5885051 Workpiece transfer equipment in dicing machine  
A wafer is gripped by a chuck part provided at a front end of a slide arm, and the slide arm is moved in the first direction from a reference position, from which the workpiece is transferred to a...
5881603 Transfer unit  
A transfer unit for moving an object vertically, horizontally or rotationally has a drive mechanism installed on a horizontal bed, with a transfer portion mounted on the drive mechanism. The...
5882171 Transport and transfer apparatus  
A transport and transfer arrangement for a workpiece in a vacuum treatment apparatus has a first transport member with at least one first workpiece holder and a second transport member with at...
5879127 Robot assembly  
A robot assembly, including a central hub, has two arms arranged for independent rotation about the hub. Two carriers, oriented 180° apart from each other, are coupled to an end of each of the ...
5873214 Method and apparatus for load building and stretch wrapping  
A load portion is engaged in an infeed area and transported from the infeed area to a wrapping area with rotational, horizontal, and vertical carriers. Those carriers move the portion of the load...
5865595 Product manipulating unit  
A unit for manipulating products, wherein a conveying device presents at least one operating head for feeding a respective product along a supply path extending about an axis of rotation of the...
5857826 Work transporting robot and semiconductor device manufacturing apparatus  
A work transporting robot includes a first, second and third arms each of which is rotationally moved around a common axis by individual driving source within a plane, the plane being parallel to...
5851296 Vacuum processing apparatus and method  
A vacuum processing apparatus includes a reaction chamber, a non-reaction chamber which is a load-lock chamber or a double load-lock chamber. A double arm is accommodated in the non-reaction...
5839187 Apparatus and method for mounting a chip  
An apparatus and a method for mounting a chip make it possible to accomplish quick chip mounting and also to mount multiple different chips on substrates. Three heads are provided around a center...
5836735 Robot powered pass thru port for automated cartridge library  
A pass thru port, for use in an automated cartridge library, is capable of transferring a cartridge from one module of the automated cartridge library to another module of the automated cartridge...
5827039 Apparatus for handling a stack of sheet-like products  
An apparatus for handling stacks of sheet-like products is provided and includes a rotary table on which gripper devices are mounted for linear shifting. The table has a central axis of rotation...
5819954 Coupon sorting system and method of sorting coupons  
A system for sorting coupons according to information contained within bar codes or similar markings printed thereon. The system includes a storage bin in which the coupons are received and from...
5816770 Transfer robot  
A transfer robot has a base, first and second intermediate arms, and a distal arm. First and second pulleys are fixed to driving and driven shafts of the first intermediate arm, respectively, and a...
5807063 Circuit board loading assembly  
A printed circuit board loading assembly for loading a printed circuit board from a queueing station to an electronic test analyzer having an adjustable extrusion arm and a gripper assembly located...
5807062 Arrangement for handling wafer-shaped objects  
An arrangement for handling wafer-shaped objects is to ensure a high degree of positioning accuracy with increased productivity, freely selectable transport paths, and low mechanical expenditure...