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6155773 Substrate clamping apparatus  
The present invention generally provides a robot that can transfer two workpieces, such as silicon wafers, simultaneously and at increased speeds and accelerations and decelerations. More...
6155768 Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput  
Two multiple link robot arms (10) are mounted to a torso link (11), and each of them includes an offset hand (30) and two motors (50, 52) capable of independent operation that provides movement of...
6146083 Substrate transferring apparatus and substrate processing apparatus using the same  
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members...
6135704 Layer-picking clamp supported on a forklift truck  
A layer-picking clamp mountable on a truck has clamp arms extending downwardly from and movably mounted to an upper frame section. The clamp arms are linearly movable with respect to the upper...
6132165 Single drive, dual plane robot  
The present invention provides a robot and a method of using the robot for transferring objects, namely substrates, through a process system. The robot provides a pair of movable arms mounted to a...
6126380 Robot having a centering and flat finding means  
The present invention is a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. The robot uses the moving elements of the wafer handling robot...
6123502 Substrate holder having vacuum holding and gravity holding  
A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates...
6105454 Single and dual end effector, multiple link robot arm systems having triaxial drive motors  
A robot arm system (8) includes a multiple link robot arm mechanism (10) mounted at a shoulder axis (16) to a torso link (12) that is capable of 360-degree rotation about a torso axis (14). The...
6102164 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers  
A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower...
6098484 High torque, low hysteresis, multiple link robot arm mechanism  
A robot arm mechanism (10) maximizes available torque and control accuracy by arranging first and second high torque motors (50, 52) in a concentric relationship about a shoulder axis (16). The...
6099238 Two-armed transfer robot  
A two-armed transfer robot includes a first arm mechanism and a second arm mechanism. Each arm mechanism has a handling member for carrying a workpiece. The robot further includes a stationary base...
6099237 Handling device  
In order to configure a handling device, provided with an actuator for gripping a work piece, as well as at least two movement axes that are operatively connected to a drive and which allow the...
6089630 Substrate transfer apparatus  
A arm 4 or 104 comprises a heat conduction suppressing portion such as cut-out grooves 8 or a low-temperature melting substance which suppresses conduction of heat. The heat conduction suppressing...
6085125 Prealigner and planarity teaching station  
A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of...
6077027 Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device  
In order to manufacture a semiconductor device of high performance a small-sized transfer arm mechanism, capable of retaining a predetermined transfer stroke, is put to practical use without any...
6077026 Programmable substrate support for a substrate positioning system  
A programmable substrate support including a first substrate support that mates with a second substrate support to enable automatic switching between different types of substrates. The first...
6075334 Automatic calibration system for wafer transfer robot  
A system for automatically calibrating a semiconductor wafer handling robot so that the robot will move wafers into and out of precise locations within enclosures that form process stations or...
6074515 Apparatus for processing substrates  
In a substrate processing apparatus receiving substrates held in a common carrier in a horizontal attitude, the substrates are transferred in the horizontal attitude from the common carrier to an...
6068438 Cargo-container crane and system  
This is a top lift rotary-crane transfer device and system especially suited for transferring cargo containers between a railway car and one or more conveyors or other vehicles or storage spots. It...
6068442 SCARA robot and articulator  
A robot 100 has a pedestal 1, upper and lower arms 5, 12 and a quill 21. A drive train comprises motors in the pedestal 100 coupled to three concentric drive tubes 3, 6, 9. The outer drive tube is...
6059516 Universally tiltable Z axis drive arm  
A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally...
6056504 Adjustable frog-leg robot  
An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position...
6057662 Single motor control for substrate handler in processing system  
A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to...
6058344 Automated system and method for control of movement using parameterized scripts  
Robotic machines, such as mobile manipulators, are controlled by a relatively high-level script while changes in the environment are accommodated by including parameters in the script. Sensors,...
6053980 Substrate processing apparatus  
A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate...
6053688 Method and apparatus for loading and unloading wafers from a wafer carrier  
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided...
6053983 Wafer for carrying semiconductor wafers and method detecting wafers on carrier  
A plurality of projections 21 is disposed on a inner surface of a lid 20 which is detachably attached to a carrier body 10. Each projection 21 has a tapered end part 22 with inclined surfaces 23,...
6048162 Wafer handler for multi-station tool  
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable...
6045315 Robot apparatus and treating apparatus  
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm...
6037733 Robot having multiple degrees of freedom  
An improvement is set forth in a robotic arm structure which includes at least two links. θ motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R ...
6024800 Plasma processing apparatus  
According to the present invention, a plasma processing apparatus for performing surface processing of a substrate by means of plasma discharge is provided comprising: a processing chambers 10R and...
6022185 Substrate transferring device  
A substrate transferring device including a pair of support arms for supporting LCD substrates substantially horizontally, expandable multi-joint link mechanisms for moving the support arms in a...
6007292 Work piece transfer apparatus  
A work piece transfer system particularly suited for transferring semi-conductor wafers from one environment, through a loadlock, to another environment and back again employs a series of pivotally...
5993142 Robot having multiple degrees of freedom in an isolated environment  
An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured...
5993141 Independent linear dual-blade robot and method for transferring wafers  
An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an...
5993140 Apparatus for loading pipes onto processing machines  
An apparatus for loading pipes onto processing machines, in particular pipe-bending machines, is provided which comprises a handler arm (8) consisting of a first segment (9) and a second segment...
5967739 Baggage handling device  
A baggage handling device (1) comprising, in combination, a vacuum gripping foot (2) and a non-vacuum, mechanical engagement device (3) such as a simple hook or a power operated claw (4), with an...
5957651 Substrate carrying apparatus  
A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an...
5954472 Batch loader arm  
The invention resides in an improved transport mechanism which utilizes a linkage having a plurality of end effectors disposed at one end thereof. Movement of a drive linkage in a first rotational...
5940948 Machining center  
In a centre for machining workpieces, of the type comprising a machine frame, a machining table (6) for workpieces held on pallets (7) and a device (9) for pallet changing, it is proposed that the...
5934856 Multi-chamber treatment system  
Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease...
5927937 Automated stacking apparatus  
A stacker (10) for picking up objects (12) from a first location (14) and stacking the objects at a second location (16) is disclosed. The stacker (10) includes a vertically extending support...
5915915 End effector and method for loading and unloading disks at a processing station  
A robotic end effector for loading and unloading a magnetic information storage circular disk on a grinder or polisher carrier surface includes an effector block, an annular vacuum cup, including...
5911557 Process and device for taking an object up and transferring it from a first station to a second  
The invention relates to a process and device for taking up stacked or flat objects and subsequently transferring them from a collecting point forming a first station to a second station at which...
5908281 Coaxial drive loader arm  
An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive...
5906261 Device for processing objects  
The invention relates to a device for processing objects, said device being provided with a number of stations comprising supporting means for supporting objects in said stations, and with...
5899658 Articulated arm transfer device  
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to...
5893700 Transport star for containers  
Transport star for containers with a basic body which can rotate, on whose circumference several gripper arms, in the form of double levers, are attached in bearings, which can be locked by...
5885052 Transferring apparatus and robot arm  
A robot arm and an apparatus for transferring an article. The robot arm includes a movable hand for holding the article. A first arm has a proximal end that rotatably supports a drive pulley and a...
5885051 Workpiece transfer equipment in dicing machine  
A wafer is gripped by a chuck part provided at a front end of a slide arm, and the slide arm is moved in the first direction from a reference position, from which the workpiece is transferred to a...