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6053983 Wafer for carrying semiconductor wafers and method detecting wafers on carrier  
A plurality of projections 21 is disposed on a inner surface of a lid 20 which is detachably attached to a carrier body 10. Each projection 21 has a tapered end part 22 with inclined surfaces 23,...
6048162 Wafer handler for multi-station tool  
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable...
6045315 Robot apparatus and treating apparatus  
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm...
6037733 Robot having multiple degrees of freedom  
An improvement is set forth in a robotic arm structure which includes at least two links. θ motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R ...
6024800 Plasma processing apparatus  
According to the present invention, a plasma processing apparatus for performing surface processing of a substrate by means of plasma discharge is provided comprising: a processing chambers 10R and...
6022185 Substrate transferring device  
A substrate transferring device including a pair of support arms for supporting LCD substrates substantially horizontally, expandable multi-joint link mechanisms for moving the support arms in a...
6007292 Work piece transfer apparatus  
A work piece transfer system particularly suited for transferring semi-conductor wafers from one environment, through a loadlock, to another environment and back again employs a series of pivotally...
5993142 Robot having multiple degrees of freedom in an isolated environment  
An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured...
5993141 Independent linear dual-blade robot and method for transferring wafers  
An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an...
5993140 Apparatus for loading pipes onto processing machines  
An apparatus for loading pipes onto processing machines, in particular pipe-bending machines, is provided which comprises a handler arm (8) consisting of a first segment (9) and a second segment...
5967739 Baggage handling device  
A baggage handling device (1) comprising, in combination, a vacuum gripping foot (2) and a non-vacuum, mechanical engagement device (3) such as a simple hook or a power operated claw (4), with an...
5957651 Substrate carrying apparatus  
A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an...
5954472 Batch loader arm  
The invention resides in an improved transport mechanism which utilizes a linkage having a plurality of end effectors disposed at one end thereof. Movement of a drive linkage in a first rotational...
5940948 Machining center  
In a centre for machining workpieces, of the type comprising a machine frame, a machining table (6) for workpieces held on pallets (7) and a device (9) for pallet changing, it is proposed that the...
5934856 Multi-chamber treatment system  
Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease...
5927937 Automated stacking apparatus  
A stacker (10) for picking up objects (12) from a first location (14) and stacking the objects at a second location (16) is disclosed. The stacker (10) includes a vertically extending support...
5915915 End effector and method for loading and unloading disks at a processing station  
A robotic end effector for loading and unloading a magnetic information storage circular disk on a grinder or polisher carrier surface includes an effector block, an annular vacuum cup, including...
5911557 Process and device for taking an object up and transferring it from a first station to a second  
The invention relates to a process and device for taking up stacked or flat objects and subsequently transferring them from a collecting point forming a first station to a second station at which...
5908281 Coaxial drive loader arm  
An transfer device for moving substrates from one position to another comprises a base and a drive arm pivotally connected to one another about a first pivot axis. A drive is connected to the drive...
5906261 Device for processing objects  
The invention relates to a device for processing objects, said device being provided with a number of stations comprising supporting means for supporting objects in said stations, and with...
5899658 Articulated arm transfer device  
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to...
5893700 Transport star for containers  
Transport star for containers with a basic body which can rotate, on whose circumference several gripper arms, in the form of double levers, are attached in bearings, which can be locked by...
5885052 Transferring apparatus and robot arm  
A robot arm and an apparatus for transferring an article. The robot arm includes a movable hand for holding the article. A first arm has a proximal end that rotatably supports a drive pulley and a...
5885051 Workpiece transfer equipment in dicing machine  
A wafer is gripped by a chuck part provided at a front end of a slide arm, and the slide arm is moved in the first direction from a reference position, from which the workpiece is transferred to a...
5881603 Transfer unit  
A transfer unit for moving an object vertically, horizontally or rotationally has a drive mechanism installed on a horizontal bed, with a transfer portion mounted on the drive mechanism. The...
5882171 Transport and transfer apparatus  
A transport and transfer arrangement for a workpiece in a vacuum treatment apparatus has a first transport member with at least one first workpiece holder and a second transport member with at...
5879127 Robot assembly  
A robot assembly, including a central hub, has two arms arranged for independent rotation about the hub. Two carriers, oriented 180° apart from each other, are coupled to an end of each of the ...
5873214 Method and apparatus for load building and stretch wrapping  
A load portion is engaged in an infeed area and transported from the infeed area to a wrapping area with rotational, horizontal, and vertical carriers. Those carriers move the portion of the load...
5865595 Product manipulating unit  
A unit for manipulating products, wherein a conveying device presents at least one operating head for feeding a respective product along a supply path extending about an axis of rotation of the...
5857826 Work transporting robot and semiconductor device manufacturing apparatus  
A work transporting robot includes a first, second and third arms each of which is rotationally moved around a common axis by individual driving source within a plane, the plane being parallel to...
5851296 Vacuum processing apparatus and method  
A vacuum processing apparatus includes a reaction chamber, a non-reaction chamber which is a load-lock chamber or a double load-lock chamber. A double arm is accommodated in the non-reaction...
5839187 Apparatus and method for mounting a chip  
An apparatus and a method for mounting a chip make it possible to accomplish quick chip mounting and also to mount multiple different chips on substrates. Three heads are provided around a center...
5836735 Robot powered pass thru port for automated cartridge library  
A pass thru port, for use in an automated cartridge library, is capable of transferring a cartridge from one module of the automated cartridge library to another module of the automated cartridge...
5827039 Apparatus for handling a stack of sheet-like products  
An apparatus for handling stacks of sheet-like products is provided and includes a rotary table on which gripper devices are mounted for linear shifting. The table has a central axis of rotation...
5819954 Coupon sorting system and method of sorting coupons  
A system for sorting coupons according to information contained within bar codes or similar markings printed thereon. The system includes a storage bin in which the coupons are received and from...
5816770 Transfer robot  
A transfer robot has a base, first and second intermediate arms, and a distal arm. First and second pulleys are fixed to driving and driven shafts of the first intermediate arm, respectively, and a...
5807063 Circuit board loading assembly  
A printed circuit board loading assembly for loading a printed circuit board from a queueing station to an electronic test analyzer having an adjustable extrusion arm and a gripper assembly located...
5807062 Arrangement for handling wafer-shaped objects  
An arrangement for handling wafer-shaped objects is to ensure a high degree of positioning accuracy with increased productivity, freely selectable transport paths, and low mechanical expenditure...
5803979 Transport apparatus for semiconductor wafers  
Transport apparatus for semiconductor wafers which have been subject to chemical mechanical polishing (CMP). The risk of malfunction of an articulated arm fitted with a vacuum chuck can be reduced...
5788453 Piezoelectric wafer gripping system for robot blades  
A piezoelectric gripping system firmly secures a semiconductor wafer or other workpiece onto a robotic transfer blade so as to allow for acceleration forces that exceed the frictional holding force...
5771748 Highly stable Z axis drive  
A vertical positioner comprises a rigid frame. A rigid vertically extending structure extends upwardly from a base to its upper end portion. A generally horizontal flange forms the structure upper...
5765444 Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities  
A multiple link robot arm system has straight line motion, extended reach, corner reacharound, and continuous bidirectional rotation capabilities for transporting specimens to virtually any...
5765983 Robot handling apparatus  
Robotic apparatus may be provided for handling workpieces such as semiconductor wafers within an integrated vacuum processing system and may be mounted within a vacuum load lock chamber adjacent a...
5755550 Vacuum depalletizer apparatus and method  
A vacuum apparatus and method are provided for controlling operation of a vacuum force to be applied through a vacuum cup for use in lifting objects such as cardboard boxes, so as to unload a...
5752695 Film sample positioning apparatus  
An apparatus for handling and automatically positioning film samples such that individual film samples can be retrieved from a magazine and moved precisely to a position where a subsequent...
5746566 Apparatus for a moving workpiece  
An apparatus for cutting workpieces (36) moving along a path relative to the apparatus, including a guide arm (20), a tool mount (24), and two rotation mechanisms (28), (30), is provided. The guide...
5746565 Robotic wafer handler  
A robotic wafer handler has first and second arms pivotally connected at a swing point to operate in a plane. Each arm is independently drivable through greater than 360° of rotation in the plane. ...
5743704 Wide wrist articulated arm transfer device  
Apparatus for transferring an object between spaced locations comprises first and second articulated arms mounted on a support, each articulated arm having a drive member disposed for rotation...
5741113 Continuously rotatable multiple link robot arm mechanism  
A multiple link robot arm mechanism uses first and second motors capable of synchronized operation to permit movement of the robot arm hand along a curvilinear path as the extension of the hand...
5738481 Universally actuable robot assembly  
An improved universally actuable robot assembly including a pedestal support base and a body which is swivelably mounted and rotatably driven around the base. A main support arm extends...