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6547510 Substrate transport apparatus with coaxial drive shafts and dual independent scara arms  
A substrate transport apparatus having a drive section and a movable arm assembly connected to the drive section. The drive section has a coaxial drive shaft assembly with independently rotatable...
6549825 Alignment apparatus  
An alignment apparatus which obtains an amount of correction for centering a semiconductor wafer from four points of a wafer edge detected by noncontact proprioceptors in a wafer delivery position...
6543988 Apparatus for clamping and transporting a semiconductor wafer  
A wafer is carried on a blade supported on robotic arms. A plurality of guide clamps both move the wafer into a desired position on the blade and clamp the wafer in place during transport by the...
6533530 Wafer transferring robot  
A wafer transferring robot capable of restraining the vibration of wafers during the transfer. The robot comprises a rotating base (2) rotatable on a base (1), two horizontally extensible robot...
6520733 Substrate transport and apparatus  
A substrate transporting method including inputting process data and determining whether a number of units required for processing a wafer is an odd number or an even number. Depending on the...
6513640 Pallet exchange apparatus  
The present invention provides an apparatus provided with a turn driving device rotatable about an axis perpendicular to the plane of a pallet and also movable in the direction of the axis, a...
6514033 Mechanical gripper for wafer handling robots  
The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present...
6499936 Transfer system  
A transfer system used in transferring a semiconductor from one process to another process during manufacture, and comprising first and second upper arms and first and second forearms assembled to...
6494063 Apparatus for pushing hollow glass articles onto a conveyor belt  
The apparatus serves for pushing at least one of two hollow glass articles from a dead plate of a glass forming machine onto a conveyor belt. A pusher serves for this purpose, and includes a base...
6494666 Simplified and enhanced SCARA arm  
A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over....
6491491 Articulated robot  
An articulated robot comprises a movable first transferring portion and a second transferring portion movably supported in relation to the movable first transferring portion by a joint portion. A...
6493607 Method for planning/controlling robot motion  
A computerized method/system is provided for planning motion of a robot within a free space confined by obstacles, from an initial position to a goal position. In executing the method/system, a...
6485250 Substrate transport apparatus with multiple arms on a common axis of rotation  
A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the...
6481956 Method of transferring substrates with two different substrate holding end effectors  
A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual...
6478531 Article transfer apparatus  
An article transfer apparatus suitable for an operation requiring a large vertical working distance. The apparatus includes a first link driven by a motor, at least one second link coupled to the...
6464448 Substrate transport apparatus  
A substrate transport apparatus comprising a drive section and an articulated arm assembly. The articulated arm assembly is pivotably mounted to the drive section. The arm assembly has a first end...
6453543 Transport and transfer device  
Disclosed is a workpiece conveyor and delivery device for a vacuum processing plant. Workpieces are delivered from one device to another, both devices being located opposite each other and moving...
6450757 Conveyor system  
In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a...
6429139 Serial wafer handling mechanism  
A wafer handling system for a wafer processing apparatus includes a wafer load lock chamber, a wafer processing chamber and a transfer chamber operatively coupled to the wafer load lock chamber...
6428266 Direct driven robot  
A robot with a base, a first link connected to the base by a shoulder joint, and a second link connected to the first link by an elbow joint. A shoulder motor drives the shoulder joint, and an...
RE37731 Two-armed transfer robot  
A two-armed transfer robot includes a pair of double-pantograph mechanisms. These mechanisms are substantially symmetrical to each other with a vertical plane. Each double-pantograph mechanism...
6394740 Material handling device  
The present invention comprises a material handling device and method for transferring material from one location to another. More specifically, the present invention relates to a device for...
6382902 Method for controlling handling robot  
A handling robot control method is disclosed for a handling robot disposed in a transfer chamber (1) having a plurality of process chamber stations (2e) arranged around it in communication...
6382900 Apparatus for conveyance of semiconductor chips  
An apparatus for conveyance of a semiconductor chip. The apparatus includes an arm for conveying a semiconductor chip, a pickup on the arm for holding the semiconductor chip. A first transmission...
6374982 Robotics for transporting containers and objects within an automated analytical instrument and service tool for servicing robotics  
A robotic arm has a pair of gripper fingers designed to grip a variety of containers, including capped and uncapped test tubes as well as containers having unique gripping means. The fingers each...
6364599 Robot for handling  
A handling robot comprises a first and a second robotic link mechanism (B1, B2) so configured as to be jointly rotatable. Each mechanism has a transfer table (8a, 8b) at its forward end and is...
6354791 Water lift mechanism with electrostatic pickup and method for transferring a workpiece  
A method and apparatus for transferring a semiconductor wafer in both a theta axis and a z-axis is provided. The apparatus is able to maintain maximum process and wafer throughput while minimizing...
6354167 Scara type robot with counterbalanced arms  
A SCARA type robot with counterbalanced arms and tilting base. This apparatus enables accurate planar movement of a probe. Weak or flexible foundations or footings do not affect positioning...
6353773 Remote control system for biped locomotion robot  
A remote control system for remotely controlling a biped locomotion robot as manipulated by an operator has an upper body support mechanism for supporting an upper body of the operator while...
6349571 Pushout mechanism for I.S. machine  
A pushout mechanism is disclosed for transferring bottles from a deadplate of an I.S. machine section to a conveyor. The pushout mechanism has a finger assembly including inner and outer pockets...
6345213 Control method for an industrial robot  
A method provides an exact measurement of the tool center point (TCP) being carried out, preferably in the whole working area of the robot. In this measurement, the robot moves very slowly so that...
6322119 Robots for microelectronic workpiece handling  
An improved conveyor system for transporting a microelectronic workpiece within a processing tool is set forth. The conveyor system includes a transport unit slidably guided on a conveyor rail for...
6321138 Storage and retrieval system with automated order make up  
A basket storage and retrieval apparatus and method has spaced parallel rows of storage racks with multiple horizontal tiers having aisles between the storage racks. Guides are connected to the...
6318950 Unloader for tire vulcanizer  
An unloader for a tire vulcanizer includes a linear motion guide rail fixed vertically to a main frame of a tire vulcanizer; a slider movably engaged with the linear motion guide rail; a movable...
6305898 Wafer transfer mechanism  
A transfer mechanism is provided for placing a wafer at a prescribed position on an arm without any additional step. The transfer mechanism for transferring a workpiece into and from a storage...
6299404 Substrate transport apparatus with double substrate holders  
A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate...
6290448 Lifting device (pallet device) with pivotal arm  
Lifting device, in particular a pallet device (10), comprising a pivotal arm (19) at the free end of which in the area of a controllable rotary mount (42) is mounted a separate support element for...
6276892 Wafer handling apparatus  
An upper arm 4 and a lower arm 6 of a parallel link system that perform extension and retraction action in the same direction without mutual interference are arranged within a vacuum enclosure 1....
6267549 Dual independent robot blades with minimal offset  
A wafer handling robot system (10) operates in a wafer chamber (40) and comprises two independent robot blades, an upper blade (18) surmounting a lower blade (26). A pair of wafers (28, 32) are...
6264023 Bottle extractor for hollow glass moulding machines  
Bottle extractor for hollow glass moulding machines, of the type that have bottle handling fingers comprising, a head joined to a fixed position spin axis and which includes at least one fluidic...
6260261 Straddle-mount assembly tool and method  
An assembly tool for attaching components such as connector plugs or receptacles to a printed circuit board includes a printed circuit board support plate and a sliding member. The sliding member...
6247889 Multiple-shaft power transmission apparatus and wafer transport arm link  
The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner...
6237216 Apparatus for automatically dismantling a windshield glass and a rear glass from a disused automobile  
A system for recycling the components dismantled from a disused automobile, which includes a main body having a control part, front and rear glass removers connected with the main body for...
6234738 Thin substrate transferring apparatus  
In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The...
6231297 Substrate transport apparatus with angled arms  
A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. In a first embodiment, the movable arm assembly has a general X-shaped...
6227793 Door transport system  
A door transport system includes a carriage slidably mounted on an upright column for movement therealong. A swing arm, pivotally mounted to the carriage, carries at its distal end a gripper...
6224312 Optimal trajectory robot motion  
An apparatus for processing wafers generally comprising a transfer chamber, a loadlock chamber mounted on the transfer chamber, one or more processing chambers mounted on the transfer chamber, a...
6224319 Material handling device with overcenter arms and method for use thereof  
A material handling device comprising first and second upper arm members having respective proximal and distal end portions and first and second forearm members having respective proximal and...
6213708 System for sorting multiple semiconductor wafers  
A wafer sorting system is provided. The wafer sorter system is used to simultaneously sort multiple semiconductor wafers of a cassette. The wafer sorter system includes multiple arms which extend...
6216058 System of trajectory planning for robotic manipulators based on pre-defined time-optimum trajectory shapes  
A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single-...