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6968938 Convey device for a plate-like workpiece  
A conveying device for a plate-like workpiece, comprising a suction-holding device for suction-holding the plate-like workpiece and a moving device for moving the suction-holding device between a...
6960057 Substrate transport apparatus  
A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end...
6918735 Holding device for wafers  
The invention relates to a holding device for wafers in an arrangement for wafer inspection, comprising two grippers (11, 12), each of which, in the closed state of the holding device (8),...
6913302 Robot arm edge gripping device for handling substrates  
An edge gripping device grips and ungrips a substrate, such as a semiconductor wafer. A blade extends in a distal direction from a base of the device. At least one distal contact member is...
6910847 Precision polar coordinate stage  
A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The...
6893204 Substrate delivering robot  
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot...
6884019 Conveying arm  
A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm...
6873402 Reticle stop block apparatus and method  
Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a...
6871115 Method and apparatus for monitoring the operation of a wafer handling robot  
The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for...
6863491 Catch-pin water support for process chamber  
A new and improved wafer support for supporting wafers in a process chamber such as an edge bead removal (EBR) chamber. The wafer support comprises multiple wafer support units each including a...
6860711 Semiconductor-manufacturing device having buffer mechanism and method for buffering semiconductor wafers  
A semiconductor-manufacturing device is equipped with a load-lock chamber and a reactor, which are directly connected, wherein a semiconductor wafer is transferred by a transferring arm provided...
6852007 Robotic method of transferring workpieces to and from workstations  
An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be...
6840732 Transport apparatus and vacuum processing system using the same  
This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising...
6832885 Handling apparatus for structural members  
There is provided an apparatus for handling a structural member. The apparatus includes a beam that extends from a first end to a second end and a shuttle in translational communication with the...
6826977 Drive system for multiple axis robot arm  
A robot drive assembly for moving a working tool in x, y, z and theta directions comprising three independent, coaxially nested tubes, each tube being driven around a common central axis by drive...
6817640 Four-bar linkage wafer clamping mechanism  
The wafer clamping mechanism comprises a linkage mechanism and a wafer contact point coupled to the linkage mechanism. The linkage mechanism includes a four-bar linkage having: a first link having...
6811370 Wafer handling robot having X-Y stage for wafer handling and positioning  
An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum...
6779962 Device for handling flat panels in a vacuum  
A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven...
6773382 Automatic tool-exchanging apparatus  
An automatic tool-exchanging apparatus is provided which extends/contracts an arm with a rational and simple structure and can realize a high-speed operation essentially obtainable by making the...
6761518 Machine tool  
A machine tool for at least triaxial machining of work pieces comprises a column of the type of a casing with side walls. In an interior space, provision is made for a work spindle which projects...
6755092 Conveying device  
A conveying device in which a conveying arm assembly can be quickly set in a conveying position and can be rapidly stabilized in the conveying position includes a conveying arm assembly, a fixed...
6752584 TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES WITHIN AN ENVIRONMENT OF A PROCESSING MACHINE AND METHODS OF MANUFACTURING AND USING SUCH DEVICES IN THE PROCESSING OF MICROELECTRONIC WORKPIECES  
Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a...
6749390 Integrated tools with transfer devices for handling microelectronic workpieces  
Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a...
6748819 Robot  
A robot is disclosed in which load torque imposed on motors is reduced and therefore small-sized motors can be used. In the robot, an arm member, a first link, a second link and a third link...
6749391 Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces  
Microelectronic workpiece transfer devices and methods for using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a...
6746195 Semiconductor transfer and manufacturing apparatus  
A transfer apparatus has a transfer robot for transferring wafers between a process chamber and a pre-pressurizing chamber. The process chamber and pre-pressurizing chamber are arranged in a...
6736589 Method and device for transferring compact discs to a packaging line  
According to the method, single compact discs (1) are removed from a magazine (10) by a pick up group (14) which is carried by a drum (13). The drum (13) rotates continuously on a vertical axis....
6737826 Substrate transport apparatus with multiple independent end effectors  
A substrate processing apparatus comprising a frame, a drive section, an articulated arm, and at least one pair of end effectors. The drive section is connected to the frame. The articulated arm...
6736590 Lifting device for substrates  
The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured...
6725532 Method and apparatus for mounting component  
A plurality of self-propelled system heads (5) are made to independently travel along a closed-loop travel track (6) in a manner that the heads do not interfere with each other by controlling...
6719516 Single wafer load lock with internal wafer transport  
The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load...
6712579 Substrate transfer apparatus and substrate transfer method  
A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer...
6705816 Wafer transport mechanism  
A wafer transfer apparatus provides a rotational and translational motions using only one stationary motor drive. The apparatus includes a drive assembly and a transport arm assembly. The...
6705177 Robot arm mechanism  
A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of a plurality of links, and a robot arm driving mechanism for driving the robot arm to...
6699003 Carrying device  
In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a...
6688838 Cleanroom lift having an articulated arm  
A cleanroom lift for maneuvering large objects such as turbomolecular pumps utilized in semiconductor processing applications is provided. In one embodiment, the lift includes a vertically movable...
6685422 Pneumatically actuated flexure gripper for wafer handling robots  
The present invention generally provides a robot that can transfer workpieces, such as silicon wafers, at increased speeds and accelerations and decelerations. More particularly, the present...
6682113 Wafer clamping mechanism  
The wafer clamping apparatus is disclosed including a cam rotatably coupled to a base plate. The cam is configured to couple with a robot arm. The clamping apparatus also includes a rotating clamp...
6679675 Method and apparatus for processing wafers  
An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot...
6669434 Double arm substrate transport unit  
A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, includes a robotic arm formed of a first forearm supported by the tip part of a base arm so as...
6655901 Three-dimensionally movable transfer robot  
A transfer robot includes a machine base, at least one hand for holding a workpiece, a hand moving mechanism for moving the hand horizontally reciprocally at least in an X direction, a first arm...
6647605 Machine tool and its pallet changing device  
The present relates to a machine tool for machining a workpiece by moving a tool and the workpiece relative to each other and to a pallet changer thereof. The machine tool is provided with a...
6644449 Flat wire cable coil for coupling to a rotating element  
A rotating handler arm is mounted on an upright column, and has electrical components thereon, which require powering. The power is carried to the rotating arm by a multi conductor flat cable that...
6634851 Workpiece handling robot  
A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab....
6632065 Substrate handling robot with a batch loader and individual vacuum control at batch loader paddles  
A substrate-handling robot comprises an arm drive mechanism with a first arm connected to it. A multiple substrate batch loader is connected to the first arm. The multiple substrate batch loader...
6614201 Substrate transfer system  
A substrate transfer system comprises plural end-effectors that are placed so as to touch a periphery of a cone having a vertical angle at a 2θ angle with respect to a central axis at an arbitrary...
6611734 Robot capable of gripping objects  
A robot which incorporates a body, arms with a hand grip, legs, several sensors, light elements, an audio system, and a video system. The sensors allows the robot to interact with objects in the...
6609874 Handler for the transporting of flat substrates for application in the semi-conductor industry  
A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving...
6592315 Self-feeding apparatus with hover mode  
A robotic self-feeding device uses a multiplicity of dishes, utensils and control methods to handle a wide variety of food, including sandwiches. Its operating sequence has a hover mode in which a...
6575691 Transfer arm  
A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm...