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7530287 Industrial robot  
An industrial robot able to reliably prevent fall of an elevating part and able to improve a degree of freedom of design, that is, an industrial robot comprising a base body; an elevating part...
7531979 Direct drive robotic manipulator  
A direct drive robotic manipulator is provided which includes a plurality of segments that are rotatably coupled with respect to one another. A plurality of spindles connects the segments for...
7516539 Apparatus for transplanting multi-board  
An apparatus for transplanting a multi-board is provided. This apparatus includes an orientation device, a calibration device, and an image-adjusting device. The orientation device has a first...
7516833 Multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces within multi-station workpiece processors  
The invention includes multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces...
7478466 Device for applying weatherstrip on a motor vehicle body, and related method  
A device for applying a weatherstrip to a motor vehicle body, and a related method. The body bears an elongated receiving surface with a predetermined profile. The application device includes a...
7474939 Object taking-out apparatus  
An object taking-out apparatus for taking out objects randomly stacked in a container according to a condition of how each object is placed, which includes a robot hand having telescopic means and...
7472472 Electronic part mounting apparatus  
In an electronic part mounting apparatus provided with first, second and third beam members 31, 32 and 33, all supported by a common Y-axis frame at both ends thereof, holding a chip 6 by suction...
7470098 Detecting apparatus and detecting method  
An optical sensor for detecting the housing state such as the thickness of a substrate in the present invention is provided at supporting arms. The supporting arms are attached to a supporting...
7453160 Simplified wafer alignment  
The present invention is directed to aligning wafers within semiconductor fabrication tools. More particularly, one or more aspects of the present invention pertain to quickly and efficiently...
7422412 Horizontal articulated robot  
A horizontal articulated robot has a plurality of horizontal arms coupled by joint shafts, and a working shaft disposed at the extreme end of an extreme end arm among the horizontal arms has...
7383751 Articulated robot  
An articulated robot is provided with first, second and third arms respectively having effective lengths substantially equal to each other and capable of turning respectively about first, second...
7374391 Substrate gripper for a substrate handling robot  
A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device...
7374393 Method of retaining a substrate during a substrate transferring process  
A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device...
7347120 Robot of SCARA type  
A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and...
7336009 Hobby servo enhancements  
An independent and modular apparatus is disclosed for extending the operational capacity of a servo motor. The apparatus includes a frame member having a servo motor and a rotatable shaft mounted...
7316537 Substrate transport apparatus  
A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for...
7311515 Blow-molding apparatus  
A first transfer mechanism of a biaxial stretch blow-forming apparatus has sliders that are transported along a circular transportation passage. The sliders slide along a circular guide rail...
7313462 Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces  
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the...
7296962 Split assembly robotic arm  
A robotic arm assembly (101) is provided which comprises a hub (103), a first arm segment (105) which is attached to the hub, and a second arm segment (107) which is attached to the first arm...
7292354 Apparatus for photoelectric measurement of an original  
An apparatus for the photoelectric measurement of an essentially planar measurement original includes a photoelectric scanner and a positioning arrangement for the two dimensional movement of the...
7285884 Hobby servo attachment mechanisms  
An apparatus for extending the operational capacity of a servo motor is disclosed. The apparatus includes a frame member. A first aperture is defined within the frame member and is configured to...
7281741 End-effectors for handling microelectronic workpieces  
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to...
7264436 Robot-guidance assembly for providing a precision motion of an object  
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot...
7258237 Grader apparatus  
A method for weighing and portioning items utilizing a robot device. The robot device includes a grip, e.g., a suction cup, to remove an item from a delivery station to a receiving area for...
7233842 Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it  
A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector...
7226269 Substrate edge grip apparatus  
In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded...
7206667 Robot alignment system and method  
The robot alignment system is used for establishing a predetermined alignment position between a movable robot member and an article that is processed by the robot. The system includes a laser...
7192241 Substrate conveyer robot  
A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first...
7179044 Method of removing substrates from a storage site and a multiple substrate batch loader  
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is...
7175381 Robotic arm for use with pharmaceutical unit of use transport and storage system  
A robotic arm (10) for use with a pharmaceutical unit of use transport and storage system (200) comprises a base plate (14) with a first cam track segment (16) and a second cam track segment (18)....
7168747 Device for gripping and holding an object in a contactless manner  
A device is proposed for the contactless grasping and holding of an object from a direction directed at least partially in the direction of the force of gravity, using a holding element situated...
7146718 Apparatus for mounting semiconductors  
When mounting semiconductor chips, the semiconductor chips are presented on a wafer table where they are picked one after the other by a pick and place system, transported and placed onto a...
7147424 Automatic door opener  
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer...
7124687 Positioning device, especially for offset plates  
The invention relates to a device for positioning an element with respect to at least two reference points (4a, 4c), in which said device acts upon a working point on the element to be positioned...
7114907 Transfer robot  
A transfer robot includes a swivel base pivotable about a vertical axis, a hand for holding a plate-like work placed thereon, and a linear transfer mechanism supporting the hand and provided on...
7108476 Method and device for changing a semiconductor wafer position  
A mechanical apparatus and method are disclosed for orienting and positioning semiconductor wafers while avoiding contamination of elements on the faces thereof, by only contacting the peripheries...
7086822 Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system  
An SCARA type robot comprises: an arm unit (14), whose one end is linked to a base (11) so as to be pivotable in a horizontal plane, and which is capable of horizontally bending and stretching;...
7077619 Continuous motion robotic manipulator  
A continuous motion robotic device including a first robotic arm, a second robotic arm, a third robotic arm, and a drive system. The robotic arms are coaxially arranged, each including an end...
7066707 Wafer engine  
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which...
7063499 Conveyor system  
A conveyor system able to safety convey a workpiece having a thickness of less than 100 μm and easily position the workpiece, provided with a plate-shaped member provided movably and swivelably...
7056080 Two-arm transfer robot  
A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are...
7040852 Robot arm mechanism and robot apparatus  
Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a...
7039498 Robot end effector position error correction using auto-teach methodology  
A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the...
7018162 Articulated carrying device  
A carrying device carries a semiconductor wafer above a base disposed in a transfer chamber or the like. The carrying device comprises pick for holding the object, a main arm mechanism adapted to...
7001138 Split collar for mechanical arm connection  
A robot assembly and a method of installing a collar on a robot assembly. The robot assembly comprises a support shaft, an arm extending away from the shaft, a split connecting collar pivotally...
7001139 Robot arm mechanism  
Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the...
6991420 Tool for handling wafers and epitaxial growth station  
A tool (7) for handling a semiconductor material wafer (100) is designed to be used in an epitaxial growth station; the tool (7) comprises a disk (20) having an upper side (21) and a lower side...
6988867 Transfer apparatus  
There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer...
6976822 End-effectors and transfer devices for handling microelectronic workpieces  
Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention...
6969227 Wafer transport apparatus  
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein...