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6247889 |
Multiple-shaft power transmission apparatus and wafer transport arm link
The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner...
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6237216 |
Apparatus for automatically dismantling a windshield glass and a rear glass from a disused automobile
A system for recycling the components dismantled from a disused automobile, which includes a main body having a control part, front and rear glass removers connected with the main body for...
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6234738 |
Thin substrate transferring apparatus
In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The...
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6231297 |
Substrate transport apparatus with angled arms
A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. In a first embodiment, the movable arm assembly has a general X-shaped...
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6227793 |
Door transport system
A door transport system includes a carriage slidably mounted on an upright column for movement therealong. A swing arm, pivotally mounted to the carriage, carries at its distal end a gripper...
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6224312 |
Optimal trajectory robot motion
An apparatus for processing wafers generally comprising a transfer chamber, a loadlock chamber mounted on the transfer chamber, one or more processing chambers mounted on the transfer chamber, a...
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6224319 |
Material handling device with overcenter arms and method for use thereof
A material handling device comprising first and second upper arm members having respective proximal and distal end portions and first and second forearm members having respective proximal and...
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6213708 |
System for sorting multiple semiconductor wafers
A wafer sorting system is provided. The wafer sorter system is used to simultaneously sort multiple semiconductor wafers of a cassette. The wafer sorter system includes multiple arms which extend...
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6216058 |
System of trajectory planning for robotic manipulators based on pre-defined time-optimum trajectory shapes
A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single-...
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6195619 |
System for aligning rectangular wafers
A system is provided for determining an eccentricity vector ε which defines the magnitude and direction of an initial placement displaced from a desired location of a centroid O of a right...
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6189404 |
Robot for handling
A handling robot prevents a positioning in a motor unit power transmission system from becoming inaccurate and can eliminate occurrence of vibrations due to a twisting deformation and so forth in...
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6183188 |
Manually operated work pallet changer system
A manually operated pallet changer system for use with automatic machine tools includes a pallet changer and a compatible machine tool mounted pallet receiver. The pallet changer includes a...
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6155768 |
Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
Two multiple link robot arms (10) are mounted to a torso link (11), and each of them includes an offset hand (30) and two motors (50, 52) capable of independent operation that provides movement of...
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6157157 |
Positioning system
A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows...
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6155773 |
Substrate clamping apparatus
The present invention generally provides a robot that can transfer two workpieces, such as silicon wafers, simultaneously and at increased speeds and accelerations and decelerations. More...
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6146083 |
Substrate transferring apparatus and substrate processing apparatus using the same
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members...
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6135704 |
Layer-picking clamp supported on a forklift truck
A layer-picking clamp mountable on a truck has clamp arms extending downwardly from and movably mounted to an upper frame section. The clamp arms are linearly movable with respect to the upper...
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6132165 |
Single drive, dual plane robot
The present invention provides a robot and a method of using the robot for transferring objects, namely substrates, through a process system. The robot provides a pair of movable arms mounted to a...
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6126380 |
Robot having a centering and flat finding means
The present invention is a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. The robot uses the moving elements of the wafer handling robot...
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6123502 |
Substrate holder having vacuum holding and gravity holding
A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates...
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6105454 |
Single and dual end effector, multiple link robot arm systems having triaxial drive motors
A robot arm system (8) includes a multiple link robot arm mechanism (10) mounted at a shoulder axis (16) to a torso link (12) that is capable of 360-degree rotation about a torso axis (14). The...
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6102164 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower...
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6099238 |
Two-armed transfer robot
A two-armed transfer robot includes a first arm mechanism and a second arm mechanism. Each arm mechanism has a handling member for carrying a workpiece. The robot further includes a stationary base...
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6099237 |
Handling device
In order to configure a handling device, provided with an actuator for gripping a work piece, as well as at least two movement axes that are operatively connected to a drive and which allow the...
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6098484 |
High torque, low hysteresis, multiple link robot arm mechanism
A robot arm mechanism (10) maximizes available torque and control accuracy by arranging first and second high torque motors (50, 52) in a concentric relationship about a shoulder axis (16). The...
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6089630 |
Substrate transfer apparatus
A arm 4 or 104 comprises a heat conduction suppressing portion such as cut-out grooves 8 or a low-temperature melting substance which suppresses conduction of heat. The heat conduction suppressing...
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6085125 |
Prealigner and planarity teaching station
A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of...
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6077026 |
Programmable substrate support for a substrate positioning system
A programmable substrate support including a first substrate support that mates with a second substrate support to enable automatic switching between different types of substrates. The first...
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6077027 |
Semiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor device
In order to manufacture a semiconductor device of high performance a small-sized transfer arm mechanism, capable of retaining a predetermined transfer stroke, is put to practical use without any...
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6075334 |
Automatic calibration system for wafer transfer robot
A system for automatically calibrating a semiconductor wafer handling robot so that the robot will move wafers into and out of precise locations within enclosures that form process stations or...
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6074515 |
Apparatus for processing substrates
In a substrate processing apparatus receiving substrates held in a common carrier in a horizontal attitude, the substrates are transferred in the horizontal attitude from the common carrier to an...
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6068438 |
Cargo-container crane and system
This is a top lift rotary-crane transfer device and system especially suited for transferring cargo containers between a railway car and one or more conveyors or other vehicles or storage spots. It...
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6068442 |
SCARA robot and articulator
A robot 100 has a pedestal 1, upper and lower arms 5, 12 and a quill 21. A drive train comprises motors in the pedestal 100 coupled to three concentric drive tubes 3, 6, 9. The outer drive tube is...
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6059516 |
Universally tiltable Z axis drive arm
A tilting elevator is set forth. A rigid frame has a base, a structurally rigid structure extending upwardly from the base, and a flange attached to the structure top. The flange is generally...
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6058344 |
Automated system and method for control of movement using parameterized scripts
Robotic machines, such as mobile manipulators, are controlled by a relatively high-level script while changes in the environment are accommodated by including parameters in the script. Sensors,...
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6056504 |
Adjustable frog-leg robot
An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position...
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6057662 |
Single motor control for substrate handler in processing system
A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to...
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6053980 |
Substrate processing apparatus
A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate...
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6053688 |
Method and apparatus for loading and unloading wafers from a wafer carrier
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided...
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6053983 |
Wafer for carrying semiconductor wafers and method detecting wafers on carrier
A plurality of projections 21 is disposed on a inner surface of a lid 20 which is detachably attached to a carrier body 10. Each projection 21 has a tapered end part 22 with inclined surfaces 23,...
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6048162 |
Wafer handler for multi-station tool
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable...
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6045315 |
Robot apparatus and treating apparatus
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm...
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6037733 |
Robot having multiple degrees of freedom
An improvement is set forth in a robotic arm structure which includes at least two links. θ motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R...
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6024800 |
Plasma processing apparatus
According to the present invention, a plasma processing apparatus for performing surface processing of a substrate by means of plasma discharge is provided comprising: a processing chambers 10R and...
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6022185 |
Substrate transferring device
A substrate transferring device including a pair of support arms for supporting LCD substrates substantially horizontally, expandable multi-joint link mechanisms for moving the support arms in a...
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6007292 |
Work piece transfer apparatus
A work piece transfer system particularly suited for transferring semi-conductor wafers from one environment, through a loadlock, to another environment and back again employs a series of pivotally...
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5993142 |
Robot having multiple degrees of freedom in an isolated environment
An article positioning apparatus which includes a positioning arm structure on a rigid base structure and elevator structure. The base structure includes an upper flange and a lower flange secured...
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5993140 |
Apparatus for loading pipes onto processing machines
An apparatus for loading pipes onto processing machines, in particular pipe-bending machines, is provided which comprises a handler arm (8) consisting of a first segment (9) and a second segment...
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5993141 |
Independent linear dual-blade robot and method for transferring wafers
An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an...
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5967739 |
Baggage handling device
A baggage handling device (1) comprising, in combination, a vacuum gripping foot (2) and a non-vacuum, mechanical engagement device (3) such as a simple hook or a power operated claw (4), with an...
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