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8060252 High throughput method of in transit wafer position correction in system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate...
8043042 Industrial robot  
An industrial robot may include a robot hand structured to mount a transfer object, a multi-joint arm section having at least two arms including a robot hand supporting arm structured to support...
8042711 Dosage-dispensing device with a receiving device for an insertion unit  
A receiving device in a dosage-dispensing device, which serves to receive any insertion unit that can be inserted in the receiving device, includes a plurality of support arms that are arranged...
8025475 Wafer transfer apparatus, wafer transfer method and storage medium  
One sensor constituted of a light emission element and a light-receiving element is provided in a path through which a wafer is transferred. The sensor is positioned so that the wafer passes...
8016541 Substrate handling system for aligning and orienting substrates during a transfer operation  
A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is...
8016542 Methods and apparatus for extending the reach of a dual scara robot linkage  
Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein...
8016538 System for weighing containers  
The station for weighing containers comprises a line for transporting containers to be filled with a predetermined product, a zone for dosing and filling the containers with the product, a first...
8011874 Transfer apparatus  
A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the...
7979162 Wireless controller and a method for wireless control of a device mounted on a robot  
A wireless controller for controlling and/or monitoring a device arranged mounted on or relative to an industrial robot. A wireless communicator including a processor arranged with software means...
7972252 Ergonomic tool lifting machine and method  
An ergonomic tool lifting machine and method particularly useful for manipulating a machine tool or another heavy object. In one embodiment of the invention, the machine tool is a large milling...
7967549 Robotic system including foldable robotic arm  
A system includes an end effector, a robotic wrist for orienting the end effector; and a robotic arm for positioning the end effector. The robotic arm is foldable into a stack. The robotic wrist...
7955043 Substrate transfer apparatus  
Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present...
7950890 Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor  
A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being...
7946799 Transfer apparatus  
A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical...
7946800 Substrate transport apparatus with multiple independently movable articulated arms  
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft...
7922439 Industrial robot  
A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost...
7918639 Automated object mover  
An automation apparatus and method includes a first unit rotationally moving objects from one area to another, and a second unit connected to the first unit and holding the objects, moving through...
7909154 Pallet exchanger  
A pallet exchanger capable of providing a sufficient operation space on an operator's access side, for example, in front of a machining space, without increasing the size of the exchanger is...
7905699 Transfer robot, transfer method, and control method  
A transfer robot includes a hand section on which an object is placed; a horizontal arm mechanism connected to the hand section, the horizontal arm mechanism including at least two rotary joints,...
7900578 Carrying system and processing equipment  
A carrying system includes first and second carrying machines each of which includes a holding unit, a base and a linkage having pivotally joined first and second links. The holding unit can be...
7891935 Dual arm robot  
A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent...
7887282 Media transportation mechanism and media processing device having the media transportation mechanism  
A media transportation mechanism and a media processing device enabling carrying media without transportation errors or picking errors by accurately detecting if media is present. A media...
7890235 Determination of remote control operator position  
A system for controlling a work machine and work tool from a remote controller. The remote controller sends a control signal to a receiver assembly and machine controller. The machine controller...
7874782 Wafer transfer apparatus and substrate transfer apparatus  
A wafer transfer apparatus is provided. In a minimum transformed state where a robot arm is transformed such that a distance defined from a pivot axis to an arm portion, which is farthest in a...
7859685 Wafer center finding with charge-coupled devices  
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior...
7857044 Tool manipulator especially for onshore and offshore drilling platforms  
A manipulator apparatus carries tools for connecting drillpipes to the drillstring in a wellbore on a drilling platform. A telescopically extendable horizontal work arm is carried on a...
7850414 Linear transfer mechanism and transfer robot using the same  
A linear transfer mechanism includes a guide member, a transfer carriage movable along a horizontal linear transfer path provided on the guide member, and a drive mechanism provided with a drive...
7845897 Method for transporting substrates  
Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first...
7837425 Transportation apparatus and drive mechanism  
A transfer apparatus (20) for a target substrate (W) includes a rotatable rotary base (24). First and second arm mechanisms (26, 28) are attached to the rotary base and configured to bend and...
7785060 Multi-directional mechanical scanning in an ion implanter  
A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a...
7766596 Attachment for a telescopic material handler for manipulating a load with five degrees of freedom  
An attachment for a telescopic material handler supplies five degrees of freedom (DOF) for the task of picking, manipulating and aiding in the installation of vertical and horizontal wall cladding...
7758295 Handling device and method for the same  
A handling device and method utilizes a clamping arm that is mounted on a guide rod. The axial direction and the rotation direction of the guide rod are intersected each other at right angles....
7750517 Hobby service having enhanced operational performance  
An apparatus is disclosed for enhancing the operational performance of a servo. The apparatus comprises an auxiliary shaft that is independent and displaced from the servo and an actuation sensor...
7736118 Transfer apparatus  
A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism...
7717255 End of arm tool, apparatus, and method of engaging an article  
A conveying system includes a robotic arm, an end-of-arm-tool, carried by the robotic arm, and a conveyor. In one example, the end of arm tool includes a plurality of engagement mechanisms...
7720655 Extended mainframe designs for semiconductor device manufacturing equipment  
In a first aspect, a first mainframe is provided for use during semiconductor device manufacturing. The first mainframe includes (1) a sidewall that defines a central transfer region adapted to...
7712808 End effector with centering grip  
A flat workpiece transport apparatus having a movable arm and an end effector. The end effector is connected to the arm. The end effector has a movable grip for holding a flat workpiece on the end...
7704036 Drive source and transportation robot  
The invention includes a base member attached to a casing. The inside of the casing can be a vacuum atmosphere. A partition wall is provided on the base member, the base member separating an air...
7690881 Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus  
A substrate transfer apparatus for loading and unloading substrates in a reaction chamber, includes: an arm having a distal end which is laterally movable in a straight line direction; and...
7680551 Method of adjusting origin of industrial robot  
An industrial robot includes a first member, a positioning member arranged to be attached to the first member, a second member arranged to rotate relative to the first member, and a first joint...
7670555 Parallel gripper for handling multiwell plate  
A parallel gripper for handling multiwell plates in an automated analysis system, moves individual multiwell plates between a plate storage array unit (i.e., plate hotel) and an imaging station....
7665950 Transfer apparatus  
A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement...
7645112 Transport apparatus, control method for the same, and vacuum processing system  
A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby...
7635244 Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system  
When a first floor (11) which is formed of a punching plate or the like and through which air passes is provided immediately below an arm (17) at a middle height part of a conveying robot (10) in...
7632057 Handling apparatus for information storage disks and conveying apparatus for the same  
A handling apparatus for information storage disks includes a conveying apparatus and a mounting base. The conveying apparatus includes a body, a conveying arm, a transmission device and a driving...
7591625 Carrying mechanism, a carrying device and a vacuum processing apparatus  
A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second...
7578649 Dual arm substrate transport apparatus  
A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the...
7572092 Substrate alignment system  
A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the...
7572742 Equipment and method for processing semiconductor  
Semiconductor processing equipment includes a transfer chamber (3) having a plurality of transfer ports (33) arranged at different positions in a lateral direction. A process chamber (4A) for...
7566198 Industrial robot  
An industrial robot may include a main body part and an arm part including a first arm, a second arm and a hand arm. The main body part is provided with a first turnable shaft for performing an...