Match Document Document Title
8573919 Substrate transport apparatus  
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a...
8562272 Substrate load and unload mechanisms for high throughput  
In various exemplary embodiments described herein, a system includes a plurality of carrier arms each having concentrically mounted midpoints between opposing ends of the carrier arms with a wafer...
8550765 Apparatus and method for receiving and transferring glass substrate plates  
An apparatus for transferring and accepting glass substrate plates includes a double fork gripper having two superimposed, individual fork grippers that are movable relative to one another...
8529136 High temperature ball bearing  
A ball bearing having external surfaces coated with ceramic materials is provided. The raceways of the ball bearing may advantageously be formed of metal such as stainless steel. The ceramic...
8528438 Robotic arm for transporting substrate in ultrahigh vacuum  
The invention provides a robotic arm for transporting a substrate in an ultrahigh vacuum including a carrier module and a drive module. The drive module includes a magnetic coupling, a first...
8505991 Conveying device and vacuum apparatus  
The present invention provides a technology for holding an object to be reliably conveyed for the sake of high speed conveyance not only in a low temperature environment but also in a high...
8489237 High throughput method of in transit wafer position correction in a system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot during transfer to an intermediate station. This measurement data is then used...
8479607 Work transfer apparatus  
A work transfer apparatus includes a work carrying mechanism, a driving source that drives the work carrying mechanism, a sealed box that accommodates the driving source in a hermetically sealed...
8459140 Adjustable wrist design for robotic arm  
A wrist assembly is provided for securing an end effector to a robotic arm. The wrist assembly comprises a first portion (205, 207) containing a slot for releasably engaging an end effector (231),...
8459928 Conveyor robot  
A conveyor robot (10) includes a main body (12), a first arm (18), and a second arm (16). The first arm (18) is designed to be reciprocable between a wafer cassette and a position above the main...
8449242 Industrial robot and method of transporting the same  
An industrial robot may include an arm unit equipped with a hand structured to place a workpiece on the hand, a column structured to support the arm unit so as to enable the arm unit to move in a...
8444368 Substrate transport apparatus and control method for substrate transport apparatus  
This invention provides a substrate transport apparatus (100) which transports a substrate (W) placed on a hand portion (10) to a processing apparatus or a predetermined storage unit. The...
8442669 Self-feeding device for an individual  
A self-feeding device for a user and method operating is provided. The self-feeding device includes a base assembly having a housing with an upper wall, a lower wall and a sidewall extending...
8434992 Arm mechanism, and vacuum robot provided with the same  
A first decelerator is placed in an arm base such that a lower end of a decelerator shaft is bared in the arm base. A first arm has a hermetic space which becomes equal in pressure to a hermetic...
8419343 Sound film adsorption device  
A sound film adsorption device includes a bracket, which has a platform on which a sound film collect, which forms a chamber for receiving a sound film, is installed. A rotary mechanism includes a...
8382421 Transport apparatus  
A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of...
8376685 Dual scara arm  
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The...
8371795 Workpiece transfer system  
A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading...
8366375 Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus  
There are provided a rotation introduction mechanism which transmits a rotating motion on the atmosphere side into vacuum, is arranged simply, has a low sliding resistance, and has a long life, a...
8352074 Path planning apparatus and method of robot  
A path planning apparatus and method of a robot, in which a path, along which the robot accesses an object to grasp the object, is planned. The path planning method includes judging whether or not...
8316867 Electrostatic chuck cleaning during semiconductor substrate processing  
Methods and apparatus for cleaning electrostatic chucks in processing chambers are provided. The process comprises flowing a backside gas comprising a reactive agent into a zone in a process...
8303239 Percussive shovel for robotic applications  
A percussive digging tool attachment for a small robotic platform employs a percussor module for applying percussive impulses of relatively low impact at relatively high frequency to an attached...
8297907 Industrial robot  
An industrial robot for conveying a conveying object may include a hand having a mounting part, an articulated arm part having at least a hand holding arm which is extended and folded when the...
8283813 Robot drive with magnetic spindle bearings  
A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section...
8277165 Transfer mechanism with multiple wafer handling capability  
An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed...
8272830 Scissor lift transfer robot  
A method and apparatus for a transfer robot that may be used in a vacuum environment is described. The transfer robot includes a lift assembly comprising a first platform and a second platform...
8269447 Magnetic spherical balancing robot drive  
A drive system is presented for controlling rotation of a sphere. The system facilitates holonomic motion of a drive with respect to a sphere such that a holonomic drive or drives may be...
8267636 Substrate transport apparatus  
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled...
8246289 End effector and robot for transferring a substrate having the same  
In a substrate transfer robot, an end effector includes a wrist plate, a first blade movably connected to the wrist plate in a vertical direction to support a first substrate, and a second blade...
8240973 Palletizing robot  
A palletizing robot includes at least one rotatable pallet; a crane comprising a rotary base, a lifting frame fixed on the rotary base, and an extensible mechanical hand slidably engaged to the...
8240971 Handling manipulator assembly  
A handling manipulator assembly comprises a vertical extending main support (2) arranged on a rotary plate (3). Arranged on the main support (2) is a vertically travelling vertical carriage (9) to...
8240972 Robot with linearly movable support member attaching to gripper  
In a robot, a support member is supported to an arm to be reciprocable with respect to one of first and second sides of the arm in a predetermined direction. A rotary member of a converter is...
8220354 Belt-driven robot having extended Z-axis motion  
A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is...
8221050 Robotic assembly providing leveling and joint stress reduction  
A robotic is provided which comprises a hub (203); (b) a first lower arm (209) comprising first (213) and second (215) lower arm segments and having a first set of upper arms (229, 231) attached...
8202034 Vacuum processing apparatus and substrate transfer method  
A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end...
8196492 Versatile robotic module and robots comprising same  
A robotic module comprising a housing having opposed first and second sides, and comprising a base, a first end comprising a first drive feature on one of the first and second sides, and a second...
8182198 Redundantable robot assembly for workpiece transfer  
A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls,...
8157497 Method and loader apparatus for TEM machine work chamber device  
A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the...
8136422 Articulated robot  
A multi-joint robot for loading/unloading a work into/from a cassette, which includes a hand part holding the work, an arm part rotatably holding the hand part, a link mechanism rotatably holding...
8137048 Wafer processing system with dual wafer robots capable of asynchronous motion  
A robot assembly for transferring substrates includes a central tube assembly oriented along a central axis, perpendicular to a substrate transfer plane, and having an inner surface that forms...
8132306 Device for machining components, in particular of a vehicle body  
A device for machining components, in particular of a vehicle body has a transport and positioning unit for the component and several machining stations, which are arranged around said unit and to...
8109170 Umbilical member motion limiting device and robot having the device  
An umbilical member motion limiting device is provided on a robot which has a forearm, a wrist portion, an operating tool attached to the end of the wrist portion, and the umbilical member...
8112177 Wafer position teaching method and teaching tool  
In the wafer position teaching method for a wafer carrying system, a teaching tool is mounted at a position of the container or the processing equipment where the semiconductor wafer is to be set....
8105008 Pneumatic multi-weight balancing device  
A load balancing pneumatic manipulator comprising an inflatable reservoir for establishing via an amplifier a pressure within a lift cylinder that is sufficient to balance the weight of an object...
8099192 Method and apparatus for teaching a workpiece transfer robot  
A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to...
8096380 Transfer robot  
A transfer robot that is safe and produced at low cost is provided. A transfer robot (100) includes a base (7) fixable to a floor surface, a link mechanism provided on the base (7), an arm...
8096744 Wafer processing system, wafer processing method, and ion implantation system  
Two load lock chambers having a load lock pedestal are provided adjacent to a vacuum process chamber through a vacuum intermediate chamber. A passage opening is provided between the vacuum process...
8079800 Articulated robot  
An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm...
8061232 Methods and apparatus for a robot wrist assembly  
The present invention provides methods, apparatus, and systems for a wrist assembly including a housing having a cap and a bottom, at least one pivot at least partially enclosed in the housing and...
8062200 Tool-changing device having a directly driven stroke and pivoting actuator  
A tool-changing device includes a tool gripper and a stroke and pivoting actuator for operating the tool gripper. The stroke and pivoting actuator can be driven by a first direct drive for...