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9004848 Feeding device  
A feeding device includes a housing, a first conveying mechanism mounted on the housing, and a distribution mechanism. The housing forming a receptacle space includes a top surface defining a...
9004838 Apparatus, system, and methods for weighing and positioning wafers  
An apparatus for characterizing a wafer comprising an aligner comprising a chuck for receiving and rotating the wafer, a sensor for detecting the position of the wafer as it is rotated, a first...
8890018 Method and apparatus for improved sorting of diced substrates  
A method for inspecting and sorting a plurality of IC units comprising the steps of: delivering a frame containing said IC units to a unit picking station; conducting a first inspection of said...
8851816 Apparatus, system, and methods for weighing and positioning wafers  
An apparatus for characterizing a wafer comprising an aligner comprising a chuck for receiving and rotating the wafer, a sensor for detecting the position of the wafer as it is rotated, a first...
8807616 Robot hand  
A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to...
8753063 Removable compartments for workpiece stocker  
The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable...
8754381 Method for inspecting UV illuminance in multi-level bake furnace for TFT-LCD manufacturing process and pickup assembly device for performing the method  
The present invention provides a method for inspecting UV illuminance in multi-level UV bake furnace for TFT-LCD manufacturing process and a pickup assembly device for performing the method. The...
8738174 Substrate processing apparatus and method for loading and unloading substrates  
Provided is a substrate processing apparatus for loading substrates such as solar cell substrates on a tray in substrate processing equipment for processing a large number of substrates. The...
8696293 Component transfer device and method  
A component transfer device includes a holding mechanism (20) that positions and holds a component on a carrying surface (S) located at a predetermined height and a pull-out unit (40) that pulls...
8489237 High throughput method of in transit wafer position correction in a system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot during transfer to an intermediate station. This measurement data is then used...
8461857 Distance adjustment system for use in solar wafer inspection machine and inspection machine provided with same  
The present invention relates to a distance adjustment system and a solar wafer inspection machine provided with the system. The inspection machine has a conveyer for carrying a solar wafer, an...
8371795 Workpiece transfer system  
A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading...
8337134 Device and method for stacking and/or conveying a plurality of flat substrates  
A device for stacking a plurality of silicon wafers has an upright machine carrier for holding a plurality of silicon wafers, the silicon wafers being provided in a horizontal position in the...
8303231 Apparatus and method for semiconductor wafer transfer  
An apparatus for semiconductor wafer transfer comprises a first region for placement of a pod, a second region for placement of a cassette, an unloading mechanism, and a transferring mechanism for...
8126587 Apparatus for recognizing and processing information of electronic parts  
An apparatus for recognizing and processing information of electronic parts includes a seating unit on which electronic parts are seated and aligned and a part information processing unit disposed...
8061950 Container packer system and method  
A container packer system includes a transfer base, which receives a container packer adapted for movement longitudinally between retracted and extended positions with respect to the transfer...
8060252 High throughput method of in transit wafer position correction in system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate...
7872797 Device for placing microscope slides in slide trays  
A device for histological research includes at least one container with shelves for slide trays connected to a flexible drive enabling reciprocating vertical motion of the container. The drive...
7744330 Container packer system and method  
A container packer system includes a transfer base, which receives a container packer adapted for movement longitudinally between retracted and extended positions with respect to the transfer...
7717661 Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer  
A compact multiple diameter wafer testing device with a footprint of about 33 by 34 inches features on-chuck wafer calibration and integrated cassette-chuck transfer. It includes a five axes wafer...
7706907 Substrate processing apparatus, substrate processing method, computer program, and storage medium  
A substrate processing apparatus is provided, which can place a substrate in a correct position, even though a positional error occurs between the substrate carried in a processing vessel and a...
7682123 Compact apparatus and method for storing and loading semiconductor wafer carriers  
An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated...
7618225 Six-bar linkage positioning mechanism  
Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of...
7572094 Apparatus and method for reorienting a stack of mail  
Mail reorientation apparatus which transfers horizontally oriented mail stack in an input tray to a vertical orientation in an output tray. The input tray is brought to a rotating station where a...
7547175 Transfer device for substrate and storing device and hand therein, and substrate handled by the device  
A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a...
7377737 Storage lift  
A storage lift has two shelving columns that support storage goods carriers (5). A vertical conveyor is located between the two shelving columns and at least one of the shelving columns has a...
7329079 Semiconductor wafer processing machine  
A semiconductor wafer processing machine comprising a cassette-placing mechanism having a cassette-placing table for placing a cassette storing a semiconductor wafer, a workpiece take-in/take-out...
7296963 Multi-row passive component carrier tape  
A carrier tape for a tape and reel machine includes at least one edge having a plurality of sprocket openings therein. The carrier tape also includes a first row of aperture cavities and a second...
7278813 Automated processing system  
An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in...
7270510 Device and method for transporting wafer-shaped articles  
An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped...
7249691 Product extractor for valve bags  
The invention pertains to a device for removing the contents of a valve bag using suction. The invention further pertains to a method of removing the contents of a valve bag using the device.
7198447 Semiconductor device producing apparatus and producing method of semiconductor device  
A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second...
7179044 Method of removing substrates from a storage site and a multiple substrate batch loader  
A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is...
7172382 Loading assembly for transport containers, and related method of use  
A loading assembly is provided that is configured to load transport containers with bulk material quickly and efficiently. The assembly includes a load bin having a cross section conforming to an...
7131478 Component supply system  
An apparatus for supplying a component carrier in the form of a tape is provided. The component carrier has a number of cavities formed on one surface thereof for containing components. A pair of...
7115891 Wafer mapping device and load port provided with same  
A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of...
7109509 Device for the detection of substrates stacked with a specific spacing  
For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the...
7044703 Automatic guided vehicle, automatic guided vehicle system and wafer carrying method  
Improvement of the workability in an automatic guided vehicle which carries and transfers a semiconductor wafer between stations in a semiconductor manufacturing plant etc. An automatic guided...
7033126 Method and apparatus for loading a batch of wafers into a wafer boat  
A receiver frame loads and unloads a batch of semiconductor wafers onto wafer holders in a wafer boat. The wafer holders extends continuously about the perimeter of an overlying wafer. The...
7011484 End effector with tapered fingertips  
An apparatus for transporting a flat object from one position to another position. The apparatus includes an end effector having a base portion and at least one finger extending from the base...
6984839 Wafer processing apparatus capable of mapping wafers  
A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a...
6942738 Automated semiconductor processing system  
An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage...
6873402 Reticle stop block apparatus and method  
Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a...
6863487 Method and device for transferring storage containers, preferably cassettes for printing plates  
The invention includes a method and a device for transferring storage containers, especially cassettes for printing plates, in order to reliably and accurately receive both manually inserted...
6854948 Stage with two substrate buffer station  
A stage used, e.g., in semiconductor fabrication, includes a two substrate buffer station and a movable chuck. The buffer station, in one embodiment is fixed, i.e., non-movable relative to the...
6846149 Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system  
A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer...
6811370 Wafer handling robot having X-Y stage for wafer handling and positioning  
An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum...
6722834 Robot blade with dual offset wafer supports  
A robot blade and a method of using the robot blade for transferring objects, namely substrates, through a process system, the robot blade comprising an upper platform having a first object...
6692214 Pusher, puller loader, unloader, and working device  
A pusher 13 has a leaf spring 12, a driving section 22, a direction changing section 23, and guides 24. The driving section 22 nips the leaf spring to longitudinally advance and retract it....
6662082 System for operating a robot with easy programming  
A robot wherein the condition for a work and a sequence of movements to be performed may be set in connection with positions. In addition to setting a position at which a work is performed, the...

Matches 1 - 50 out of 251 1 2 3 4 5 6 >