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Match Document Document Title
9033638 OHT accessible high density stocker and method  
A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable...
8931396 Method for the removal of sediment from sparkling wines  
Apparatus for the removal of sediment from sparkling wines, designed to remove the capsule covering the neck of a bottle (18) containing sparkling wine, comprising: a frame (12), a tilting...
8915368 LCD glass substrate storage tray  
A liquid crystal display (LCD) glass substrate storage tray includes a frame. Each surface of the frame is configured with a plate, the frame and the plates enclose to form a closed box, and the...
8905700 Transfer and inspection devices of object to be inspected  
An inspection apparatus includes an inspection chamber in which low-temperature inspection of an inspection object is performed; and a transfer chamber including therein a transfer device. The...
8876173 Substrate storage pod and lid opening/closing system for the same  
The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external...
8870516 Port door positioning apparatus and associated methods  
A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a...
8858150 Door detection system  
A door detection system includes a robot arm unit and a movable unit. The robot arm unit includes at least one bearing platform and at least one level sensing structure disposed on the at least...
8834089 Package assembly handling system for handling clamshell containers containing a particulate aliquot  
A package assembly handling system for handling package assemblies in an automated aliquot and/or dispersal processes is provided. Embodiments of the present invention include, but are not limited...
8821098 Load port  
A load port is disclosed which allows a wafer to be transferred between the inside of a FOUP and the inside of a semiconductor fabrication apparatus even during a purge operation. The load port is...
8764934 Device and method for removing a peelable seal  
A container or array of containers that is are sealed with a peelable seal is transported via a conveyor along a processing path toward a desealing station at which an adhesive surface having a...
8714110 Automated system and method for disassembling, handling and reassembling devices for containing animals in a lab animal room  
The present invention concerns a system for the disassembly, handling and reassembly of animal containment cages for use in a lab animal room, comprising automated means for handling and moving...
8702371 Method of handling clamshell containers containing a particulate aliquot  
A method for handling package assemblies in an automated aliquot and/or dispersal processes is provided. Embodiments of the present invention include, but are not limited to, a method of handling...
8696293 Component transfer device and method  
A component transfer device includes a holding mechanism (20) that positions and holds a component on a carrying surface (S) located at a predetermined height and a pull-out unit (40) that pulls...
8696294 Method and apparatus for orientating a solid growth culture medium plate  
An apparatus for orientating a solid growth culture medium plate from an original orientation to a worked orientation, the plate having a lid and a bottom, the apparatus including an orientation...
8694161 Collaborative automated mobile platform  
A collaborative robotized system comprises: a mobile platform furnished with running device, with an electric motor propulsion assembly, and with a longitudinal mechanical linkage assembly...
8678065 Carrier tape feeder  
A carrier tape feeder is provided. The carrier tape feeder includes a unit for loading a carrier tape, a picking-up unit where chips are picked up, and a driving unit. The pick-up unit includes a...
8657346 Lid opening/closing system for closed container  
The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that...
8651790 Warehouse storage system  
A system and method for the safe storage of items wherein a storage structure is provided having a first section in which storage units are stored in vertically oriented cells with each storage...
8655488 Position control method and robot  
A position control method for controlling a position of a movable portion, includes: performing control of allowing the movable portion to approach a predetermined position by moving the movable...
8628288 Substrate transport apparatus with active edge gripper  
In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an...
8628289 Material handling and storage/warehouse system  
A system and method for optimizing the storage capacity of an automated material handling and storage system wherein rows of vertical columns of storage bins are spaced in opposing relationship...
8591163 FOUP opener and operating method thereof  
To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening...
8585341 Proppant discharge system and a container for use in such a proppant discharge system  
A proppant discharge system has a container with an outlet formed at a bottom thereof and a gate slidably affixed at the outlet so as to be movable between a first position covering the outlet to...
8549824 Capsule treatment apparatus  
A capsule-treatment machine is arranged for separating a packaging of a capsule, in particular made of metal such as aluminum or plastic, from a capsule food or beverage ingredient contained...
8540473 Load port  
A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens...
8528947 Closed container and lid opening/closing system therefor  
In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer...
8485771 Load port apparatus and dust exhaust method for load port apparatus  
In a load port apparatus, a door driving mechanism that supports a door through a communication opening portion leading to a mini-environment is housed in a housing chamber that is in...
8454293 Substrate loading and unloading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
8452449 Position control method and robot  
A position control method for controlling a position of a movable portion, includes: performing control of allowing the movable portion to approach a predetermined position by moving the movable...
8442659 Rotary actuator position sensor  
A rotary actuator position sensor comprises a target with a target surface coupled to a rotatable shaft and a sensor positioned to face the target surface. The target surface is configured to vary...
8418733 Purging apparatus and purging method  
A pod opener is an apparatus for purging the inside of a reticle pod having a pod cover and an openable bottom lid by supplying and discharging a clean gas to and from the inside of the reticle...
8423173 Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus  
A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference...
8414242 Processing apparatus and processing method  
A processing apparatus including: a carry-in area into which a container containing substrates to be processed is carried, the container having a flange part on an upper part thereof and an...
8413693 Lid opening/closing system of an airtight container  
A curtain nozzle is located above an opening portion in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the...
8408859 Wafer transfer device and wafer transfer method  
A wafer transfer device and method capable of preventing a wafer from falling off of a carrier. A first carrier receiver holding a first carrier has a box-like shape having an opening through...
8408860 Method and apparatus for orientating a solid growth culture medium plate  
An apparatus for orientating a solid growth culture medium plate from an original orientation to a worked orientation, the plate having a lid and a bottom, the apparatus including an orientation...
8375998 Lid opening/closing system of an airtight container  
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the...
8353424 Component feeder  
A component feeder capable of enhancing productivity is provided by that the component feeder includes a tape feeding device intermittently feeding a component housing tape constituted of a...
8348583 Container and loader for substrate  
A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an...
8322759 Closed container and lid opening/closing system therefor  
In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and...
8317449 Multiple substrate transfer robot  
Embodiments of multiple substrate transfer robots and substrate processing systems have been disclosed herein. In some embodiments, a multiple substrate transfer robot is provided and may include...
8302637 Method of processing an object in a container and lid opening/closing system used in the method  
A partial pressure of oxidizing gas in an opened state FOUP fixed in a FIMS system is reduced when the FOUP is closed. Purge gas supply nozzles are placed outside of two vertical sides of an...
8267633 FOUP opening/closing device and probe apparatus  
A FOUP opening/closing device includes a housing containing a mounting table for mounting the FOUP thereon, an FOUP loading opening, and a delivery opening. The device further includes a rotator...
8257013 Substrate treatment apparatus  
The present invention provides a substrate treatment apparatus which sets substrate loading intervals to treatment chambers to a fixed value and prevents the occurrence of stagnancy of substrates...
8251636 Lid closing method for closed container and lid opening/closing system for closed container  
Provided is a method of detecting whether or not a lid is fixed to a pod appropriately when performing an operation of closing an opening of the pod by the lid in an FIMS system. Determination is...
8215891 Substrate treating apparatus, and a substrate transporting method therefor  
A substrate treating apparatus includes a treating section, a table for receiving a FOUP (Front Opening Unified Pod) storing the substrates, and an attaching and detaching unit for a lid to/from...
8186927 Contained object transfer system  
A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber...
8182192 Equipment storage for substrate processing apparatus  
A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that...
8167526 Apparatus for automatically unloading agricultural material from a storage bag  
An unloading apparatus capable of automatically unloading agricultural materials from a storage bag is disclosed. The unloading apparatus includes a drive mechanism for advancing the apparatus...
8128333 Substrate processing apparatus and manufacturing method for semiconductor devices  
A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is shut by a lid, a loading and unloading port for...

Matches 1 - 50 out of 383 1 2 3 4 5 6 7 8 >