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8020287 |
Changing method for separation facilitation head in chip mounting apparatus
In a chip mounting apparatus, a structure is employed that a separation facilitation head keeping part is provided for detachably keeping a plurality kinds of separation facilitation heads in a...
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7909557 |
Arrangement for the filling and/or emptying of containers filled and/or for filling with articles and manipulation device for transporting the containers
The invention concerns an arrangement for filling and/or emptying receptacles filled and/or to be filled with articles, essentially including at least one handling device for transporting...
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7790462 |
Reaction vessel support having pivoting plates, an analyzing device comprising a support of this type, and corresponding analysis method
This reaction vessel support is of the type comprising at least one supporting plate (46, 48) designed to take one or more reaction vessels, and mounted rotatably about an axis of rotation (R). In...
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7575408 |
Work conveying method and conveying apparatus employing the conveying method
Plural wok pairs composed of a plurality of works are stored in work storing means. A movable sensor 45 fitted to a conveyance robot 5 detects the position of one of the work pairs in the work...
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7156602 |
Mechanism for exchanging chip-carrier plates for use in a hybrid chip-bonding machine
A mechanism for exchanging chip-carrier plates in a hybrid chip-bonding machine having a plurality of chip-carrier plates, a magazine to store the plurality of chip-carrier plates, and a transport...
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6846146 |
Load storage equipment
Load storage equipment according to the present invention includes rotary racks 21, each of which is supported independently on a story 1 or 2, and which may not extend vertically through the slab...
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6772032 |
Semiconductor device manufacturing line
A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as...
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6726429 |
Local store for a wafer processing station
A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more...
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6663334 |
Random access storage and retrieval system for microplates, microplate transport and microplate conveyor
An apparatus for random access storage and retrieval of a plurality of microplates is provided. The apparatus includes a plurality of microplate racks arranged in a stack. Each of the racks is...
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6619903 |
System and method for reticle protection and transport
A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable...
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6524051 |
Wafer positioning device with storage capability
The present invention provides a wafer positioning device having wafer storage capability. The wafer positioning device has a wafer platform with wafer lift pins, a wafer position sensor, and a...
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6503043 |
Multiple level loading apparatus and method
A loading apparatus for vertically stacking a plurality of articles includes a staging assembly. The staging assembly includes a staging platform configured to receive and support the articles. The...
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6488778 |
Apparatus and method for controlling wafer environment between thermal clean and thermal processing
An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature....
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6473157 |
Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate
An exposure method, which exposes a pattern of a mask carried on a mask stage onto a substrate, includes transferring the mask to the mask stage by a transfer device, and moving the transfer device...
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6419439 |
Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for...
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6236904 |
Substrate conveying system
A conveying system for conveying a substrate is provided with a sensor for measuring information related to flexure of the substrate during conveyance or the vertical position of the substrate....
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6208909 |
Wafer transport device
Of a plurality of wafers (15) circumferential edge portions of which are held by slot grooves (14) of a wafer cassette (13), the positions of a wafer (15) to be transferred and the wafers (15)...
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6158944 |
Automated laser bar transfer apparatus and method
A laser bar loading and unloading apparatus is disclosed. The apparatus includes a mounting surface, a movable coating fixture having a plurality of spacers, and at least a first vacuum source for...
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6149367 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer
An end effector in a transport module includes a body and a web defined by a panel and first and second flanges at opposite panel ends. The first flange is attached to the body. The second flange...
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6111637 |
Apparatus and method for examining wafers
A method and an apparatus for examining wafers includes a wafer cassette having a capacity for holding a plurality of wafers located on each of first and second locaters. The wafer cassettes are...
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6059507 |
Substrate processing apparatus with small batch load lock
A substrate load lock comprising a frame and a substrate support movably mounted to the frame. The frame forms at least three chambers. The substrate support has at least two separate support...
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6036426 |
Wafer handling method and apparatus
Wafer handling apparatus includes a plurality of holding stations arranged in an upstream-to-downstream order and devices to treat the wafers held at the stations. Cyclically operative wafer...
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5947677 |
Cassette transfer mechanism
The cassette transfer mechanism of the present invention comprises a cassette chamber for housing a cassette storing a plurality of substrates, a liftable stand capable of moving up and down in the...
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5855465 |
Semiconductor wafer processing carousel
A semiconductor wafer processing carousel comprises an elevator chamber that accepts cassettes loaded with semiconductor wafers through a removable vacuum lock door, an elevator platform on which...
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5833426 |
Magnetically coupled wafer extraction platform
A wafer extraction platform that is compatible with a high vacuum transfer system includes magnetically coupled upper and lower assemblies. A vacuum to atmosphere seal on the platform is maintained...
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5642978 |
Device for handling disk-shaped objects in a handling plane of a local clean room
A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped...
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5607276 |
Batchloader for substrate carrier on load lock
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a...
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4984953 |
Plate-like article conveying system
A conveying system particularly suitably usable to convey a plate-like article such as a reticle or mask which is usable in transferring a microcircuit forming pattern onto a semiconductor wafer,...
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4878799 |
Automatic machine for unloading film sheet from magazine
A plurality of magazines each of which contains a plurality of film sheets of a type different from those contained in the other magazines are accommodated in movable trays. These movable trays are...
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4871290 |
Automatic handling apparatus for plate-shaped objects
An automatic handling apparatus for plate-shaped objects, including a height-adjustable magazine having compartments lying horizontally, one above the other, and a manipulator which can be moved in...
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4818169 |
Automated wafer inspection system
A high precision automated wafer inspection station provides a base table area on which an X-Y stage is movable in mutually orthogonal directions relative to an inspection axis in alignment with a...
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4815921 |
Article containment apparatus
The invention relates to article containment apparatus which is adapted to store articles such as vials on shelves disposed at different elevations by placing them on the successive shelves. In a...
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4597708 |
Wafer handling apparatus
A wafer handler featuring a carriage movable along a rail path, the carriage supporting an upright rotatable arm with a cantilevered wafer chuck. Elevators for raising and lowering trays containing...
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4427332 |
Integrated circuit wafer transport mechanism
A manually operable mechanism for attachment to the adjustable stage of an inspection microscope for lifting a selected printed circuit wafer from its slot in a conventional disc holder and...
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4141458 |
Wafer transport system
An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory...
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3823836 |
VACUUM APPARATUS FOR HANDLING SHEETS
An apparatus is provided for handling generally flat sheets such as discs or rectangles of fragile silicon. The apparatus includes a supply carrier with a plurality of ledges to hold the sheets and...
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3101852 |
Rack unloader
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