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8177469 |
Magnetic disk handling apparatus
An apparatus and method for handling disks as part of a magnetic disk manufacturing process is provided. In one embodiment, during a drying process the disks are engaged at the inner diameter...
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8157496 |
Substrate processing apparatus and substrate transfer method
A substrate processing apparatus includes a cassette placing table; a first transfer mechanism having a first substrate holding hand capable of advancing/retreating and using this first substrate...
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8146623 |
Purge system for a substrate container
A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means...
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8122851 |
Temperature measurement in a substrate processing apparatus
A substrate processing apparatus is configured to provide in series a plurality of processing blocks, each block including a processing unit and a transport robot transporting a substrate. A...
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8119020 |
Method for manufacturing electronic device
A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient...
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8113141 |
Apparatus for processing a substrate
In a substrate-processing apparatus for performing coating, baking and developing processes on a semiconductor substrate, a first processing block performs a coating process and a developing...
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8113142 |
Apparatus for processing a substrate
In a substrate-processing apparatus for performing coating, baking and developing processes on a semiconductor substrate, a first processing block performs a coating process and a developing...
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8083457 |
Mill relining apparatus
A mill relining apparatus (1) for handling articles such as liners and lifters within a mill (3). The relining apparatus (1) includes a mast (5), with top (23) and bottom (19) engagement members,...
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8057153 |
Substrate transfer device, substrate processing apparatus and substrate transfer method
To correct any positional misalignment of a substrate manifesting along the horizontal direction by utilizing a substrate transfer device alone without engaging a transfer arm in operation. A...
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8057156 |
Transfer unit for test elements
The invention relates to an analysis apparatus with an analysis device for analyzing body fluids, and a magazine for test elements with a fresh supply container and a transfer unit that comprises a...
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8060252 |
High throughput method of in transit wafer position correction in system using multiple robots
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot, e.g. a dual side-by-side end effector robot, during transfer to an intermediate...
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8047755 |
Plate material stocker facility
The present invention provides a plate material stocker facility with a simplified pallet loading and unloading mechanism. The plate material stocker facility includes a plate material stocker 4 in...
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8043039 |
Substrate treatment apparatus
A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is...
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8033288 |
Substrate treatment apparatus
A substrate treatment apparatus includes a container holder which holds a container for containing multiple substrates vertically stacked in horizontal postures, a substrate treatment section which...
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8021094 |
Work handling mechanism and work inspection system
In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works...
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7997847 |
Automated robotic system for handling surgical instruments
Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at...
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7994793 |
Jig for detecting position
A transfer point of a transfer arm is detected accurately and stably by using a position detecting wafer having an electrostatic capacitance sensor. A position detecting wafer S is formed in a...
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7988400 |
Vial conveyance device and arm for the same
A vial conveyance device which includes, in order to hold and release a vial, at least two arms that can be opened and closed, an urging member that urges the arms in an opening direction, a frame...
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7984802 |
Inspection system for rolled products of a milling station
The aim of the invention is to create an inspection system (1) for rolled products (2) of a milling station, which is to reliably prevent the texture of the substrate from being impressed and/or...
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7976260 |
Work handling apparatus
A work handling apparatus includes a pair of traveling guides (20, 20′) provided so as to extend in a front-and-rear direction X at right and left sides, and a pair of direct-acting arms (30, 3...
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7976261 |
Apparatus for moving and securing a substrate
An apparatus for transferring and securing a substrate is shown. A pressure source is provided that is adapted to provide positive and negative pressure. A vacuum chuck is provided having a top...
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7940023 |
Geometric end effector system
A geometric end effector system for use on a robot. The system includes a platform and a frame secured to the platform. At least one base is arranged at a predetermined position on the frame. The...
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7914246 |
Actuatable loadport system
A system adapted to exchange wafer carriers between an overhead transport mechanism and a platform is provided. The system employs a wafer carrier having at least one handle extending therefrom, an...
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7900578 |
Carrying system and processing equipment
A carrying system includes first and second carrying machines each of which includes a holding unit, a base and a linkage having pivotally joined first and second links. The holding unit can be...
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7896563 |
Photo spinner apparatus and wafer carrier loading/unloading method using the same
A photo spinner apparatus, including a spin coater for coating a plurality of wafers with photoresist, a bake device for hardening the photoresist coated by the spin coater, a developer for...
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7874261 |
Stage apparatus and coating treatment device
A stage apparatus includes a stage over which a substrate is to be transferred, and a levitation mechanism which levitates the substrate over the stage. The stage includes a plurality of gas spray...
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7862284 |
Pallet transfer system
A pallet transfer system capable of smoothly transferring a pallet between a machine tool and a pallet conveying device is provided. The pallet transfer system includes an intermediated station to...
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7857571 |
Apparatus for manufacturing flat panel display and method of manufacturing the same
An apparatus for manufacturing capable of reducing footprint and a working time for loading substrates as short as possible, and a method using the same are disclosed. The apparatus includes a...
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7806643 |
Elevator-based tool loading and buffering system
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The...
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7809466 |
Transportation system and transportation method
In the case of transporting an article to a load port which is occupied by another article, at the time of generating a transportation command, estimated arrival time T1 when the article arrives at...
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7798758 |
Reduced capacity carrier, transport, load port, buffer system
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces...
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7801641 |
Work transfer system, route setting method, and route setting program
A route setting method according to the present invention sets, in a work transfer system including a plurality of work transfer units which connect a plurality of loading places to a plurality of...
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7766149 |
Inspection system for rolled products of a milling station
The aim of the invention is to create an inspection system (1) for rolled products (2) of a milling station, which is to reliably prevent the texture of the substrate from being impressed and/or...
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7737567 |
Method and apparatus for wafer marking
A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface....
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7731469 |
Component feeder
According to the type of the plate placed in a plate placing device of a component feeder, appropriate holding operation and expanding operation are performed selectively and automatically...
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7694412 |
Moving a pair of mandrel cradles
A device for assembling a composite structure is disclosed. An illustrative embodiment of the device includes at least one carriage track, a linear rail carriage carried by the at least one...
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7661919 |
Discontinuous conveyor system
The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The...
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7645081 |
Coating and developing apparatus, coating and developing method, and storage medium
Disclosed herein is a coating and developing apparatus 1 whose decreases in substrate-conveying accuracy can be suppressed. A processing block S2 of the coating and developing apparatus 1 includes...
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7637707 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the...
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7628895 |
W-patterned tools for transporting/handling pairs of disks
Various apparatus and methods are provided for handling and transporting pairs of disks. A transfer tool engages a pair of disks in gap merge orientation along the outer perimeter edge of the disks...
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7575406 |
Substrate processing apparatus
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The...
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7560071 |
Instrument docking station for an automated testing system
An automated testing system includes one or more laboratory devices that operate together to perform an assay. The testing system is designed such that a laboratory device may be seamlessly...
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7534081 |
Apparatus and method for transferring samples from a source to a target
A control system for transferring a sample from a source vessel to a target vessel generally includes a vessel unit, a primary transfer unit, an x-drive, a y-drive, a z-drive and a control unit for...
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7532026 |
Testing device
A testing device for performing a white balance test on a display device of an electronic equipment is disclosed. The testing device includes a supporting body, a testing member, a...
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7516833 |
Multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces within multi-station workpiece processors
The invention includes multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces...
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7518699 |
Cassette for containing liquid crystal display device
A cassette for a liquid crystal display (LCD) device, comprises: a body for receiving a substrate on which a plurality of LC panels divided from one another by a dummy region are formed; a...
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7407363 |
Substrate transport apparatus and substrate transport method
A substrate transport apparatus includes a first substrate transport robot, a second substrate transport robot and a substrate transfer mechanism. The first substrate transport robot includes an...
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7396199 |
Substrate processing apparatus and substrate processing method
A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to...
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7390158 |
Handling device for electronic chip components and handling method for electronic chip components
A handling device for electronic chip components includes an indexing table having a plurality of cavities for holding electronic chip components therein and a circulatory feeder for supplying the...
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7364028 |
Glass substrate transporting facility
Glass substrates are transported to a plurality of processing devices to be processed. Certain of the processing devices have associated storage shelf for storing glass substrates and a transfer...
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