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7945348 |
Methods and systems for controlling a semiconductor fabrication process
Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical...
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7930061 |
Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to...
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7792608 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
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7744328 |
Apparatus for aligning a tray and tray holder
An apparatus for aligning a tray and tray holder, including a vertically positioned tray formed with coupling holes and a tray holder having coupling arms to couple with the coupling holes, and to...
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7684895 |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading...
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7600960 |
Method for transfer of particulate solid products between zones of different pressure
The method invented is based on sluice system according to which the product is first conveyed through a portioning device, which produces a sequence of uniform product portions divided by uniform...
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7350674 |
Arrangement for adjusting rotor position in a roting sluice
The arrangement is for the adjustment of wear of the position of the rotor of a sluice feeder within a feed casing. The rotor has the form of a truncated cone and the play between the rotor and the...
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7346431 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
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7052225 |
Apparatus for handling mass produced work pieces
A high speed device and method for transporting work pieces from one container to another is disclosed. This high speed device utilizes a rotary wheel having a number of pick heads located along...
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6966466 |
Rotary airlock valve
A rotary airlock valve has a plurality of material receiving pockets having leading edges that are narrower than the trailing edges thereof, preferably having walls tapering inwardly so as to...
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6830623 |
Method of liquid deposition by selection of liquid viscosity and other precursor properties
A plurality of liquids, the flow of each controlled by a volumetric flowrate controller, are mixed in a mixer to form a final precursor that is misted and then deposited on a substrate. A physical...
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6491188 |
Revolver valve for discharging a pressurized vessel in a fiber stock preparation system
A revolver valve includes a housing with a cylindrical inner chamber, and a pair of end caps respectively attached to each end of the housing. One of the end caps includes an inlet opening and the...
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6257820 |
Atmospheric rotary feed and discharge turret valve and method
A transfer valve assembly (10) for use as a feed valve or a discharge valve includes a series of open-faced pockets (46) biased by leaf springs (48) off of a central hub (44) and an arcuate saddle...
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6206247 |
Rotary valve for particulate materials
A rotary valve consisting generally of a housing having a cylindrical chamber provided with radially disposed inlet and outlet passageways; a shaft journaled in the housing extending through and...
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6062439 |
Rotary valve with improved sealing means
A rotary valve with a rotor shroud and a cylinder wall. The rotary valve is sealed by injecting a fluid to compress a packing seal into sealing engagement with the rotor shroud and the cylinder wall.
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6007675 |
Wafer transfer system and method of using the same
An apparatus and method are described for stripping the photoresist from a wafer while in a substantially parallel manner, another wafer is being transferred between a load lock chamber and a...
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5819992 |
Multi chamber transfer device
A transfer device for passing material between two different fluid environments which uses a multi-passageway rotor member rotatable about a vertical axis and interposed between upper and lower...
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5772081 |
Low leakage rotary valve
A low leakage rotary valve composes of a housing, a rotor, a driving end valve cover and a washing end valve cover. The driving end valve cover and the washing end valve cover are to secure the...
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5707198 |
Method and device for discharging particulate material from a pressurized container
A method of discharging particulate material from a first container to a lower positioned storage area being under a lower pressure than the first container. Particulate material is discharged via...
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5630691 |
Rotary airlock valve
A rotary airlock valve is provided with a ring seal. The airlock includes a tapered tubular housing formed about a longitudinal axis. The housing includes inlet and outlet ports to receive and...
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5544995 |
Rotary valve apparatus
A rotary valve apparatus comprises a rotor housing having an inlet and an outlet, a rotor rotatably fitted in the rotor housing, a plurality of pockets arranged at regular intervals in the...
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5538383 |
Sealed rotary feeder
An object of this invention is to provide a sealed rotary feeder for use in an apparatus which continuously processes chips made of synthetic resin with a coating under high pressure and...
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5409034 |
Electrically actuated valve for a pressurized fluid
An electrically actuated valve for control of a pressurized fluid, particularly a sanitary valve, comprises a rotor (15) arranged in a housing (1) between an inlet passageway (6) and an outlet...
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5405231 |
Conveyor with rotary airlock apparatus
An apparatus for transferring objects from a first region to a second reg, the first and second regions having differing atmospheric environments. The apparatus includes a shell having an entrance...
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5392964 |
Rotary feeder for flowable materials
A rotary feeder wherein a housing defines a cylindrical internal chamber with an inlet for a flowable material and an outlet spaced from the inlet in the circumferential direction of the chamber....
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5353960 |
Gravimetric metering apparatus for pourable materials
An apparatus for continuous gravimetric metering of pourable material includes a housing having arranged therein a rotor. The material is supplied to pockets of the rotor through a charging inlet...
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5213775 |
Device for passing objects between two environments separated from each other under sealed conditions, in particular for sterilization or pasteurization plants
The device comprises an external fixed hollow casing (20) provided with a concave surface (21) of revolution about a central axis A and with two apertures (22') and (22") for passage of the...
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5131797 |
Swipe transfer assembly
The swipe transfer assembly is a mechanical assembly which is used in conjunction with glove boxes and other sealed containments. It is used to pass small samples into or out of glove boxes without...
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5002084 |
Quick clean rotary valve
A rotary valve and associated method of cleaning, including a generally cylindrical housing (104) defining a central axis, and a rotatable shaft (106) mounted in a first end plate (130) of the...
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4958649 |
Apparatus for treating articles with a gaseous and/or liquid medium
The present invention relates to an apparatus for treating a plurality of articles with a gaseous or liquid medium. The apparatus includes a cylindrical chamber in which the articles (14) are...
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4948017 |
Rotary feeder
A rotary feeder includes a housing in which a rotary member is supported between two lateral bearing caps, with one journal fixedly supported in one bearing cap and the other journal loosely...
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4906144 |
Eccentric rotary feeder and pressurized pneumatic conveying system
A rotary feeder having a cylindrical casing having an upper inlet port and a lower outlet port in the vertical direction and a rotor disposed within said cylindrical casing and having a center axis...
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4565305 |
Rotary vane valve
A rotary vane valve having a cylindrical housing with a pair of opposed end bells and an interior axial shaft. Opposed inlet and outlet openings on the side of the cylindrical housing allow...
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4556079 |
Rotary vane valve including means for ensuring uniform distribution of purge gas
A rotary vane valve having a cylindrical housing with a pair of opposed end bells and an interior axial shaft. A pair of spaced shroud structures are fixed to the shaft at the ends of the vanes to...
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4536121 |
Divided rotary valve feeder
A divided rotary valve feeder includes an inlet conduit, an outlet divided into a plurality of passages by webs, and rotor mounted between the inlet conduit and the outlet. The rotor includes vanes...
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4427136 |
Rotary valve
A rotary valve adapted to be used in regulating the flow of a particulate material comprises a casing with inlet and outlet conduits and a rotor mounted for rotation about a horizontal axis in the...
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4284120 |
Method and device for transfer of fiber materials transportable by liquids
There is disclosed a process for the transfer of fiber material from one circuit of circulating liquid to another, where the fiber material is transported by circuits positioned at right angles to...
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4273493 |
Rotary furnace volumetric feeder with sealed chute
A rotary furnace volumetric feeder includes a hopper for receiving work pieces, a feed chute which includes two openings disposed therein, a measuring station and discharge chute. The discharge...
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4268205 |
Method and apparatus for removing material from the ends of a rotary air lock
A rotary vane type air lock for feeding granular abrasive materials into a pressurized chamber having means to prevent the abrasive material from coming between ends of the vanes and the air lock...
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4244705 |
Triple rotary gas lock seal system for transferring coal continuously into, or ash out of, a pressurized process vessel
A multiple rotary gas lock apparatus using a buffer seal gas is disclosed to enable the transfer of solid materials into or out of a pressurized process containing high temperature, flammable or...
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4179043 |
Rotary valve apparatus
A rotary valve apparatus suitable for transporting particulate solid materials from one pressure region to another pressure region, each pressure region may be at different operating temperatures....
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4142868 |
Wear compensating seal means for rotary piston coal feeder
The present invention is directed to a wear compensating seal arrangement for use in a rotary piston feeder utilized for feeding pulverized coal into a gasifier operating at relatively high...
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4033811 |
Method and apparatus for filling of fiber material and liquid to steam phase in treatment vessel
A method and apparatus for filling a treatment vessel, such as a digestor, with fiber material and liquid. A chips-liquid mixture from a pretreatment vessel is fed through a conventional feeding...
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4017270 |
Coal gasification process with improved procedures for continuously feeding lump coal under pressure
A gasification process in which gasification of lump size gas producing material, such as coal, is carried out under high pressure on a fixed-bed principle with a continuous feed of coal particles...
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4009788 |
Apparatus for transferring fuel between spaces which are at differential pressures
Two spaces are provided, one of which is at a higher pressure than the other. A transfer arrangement serves for transferring a finely divided solid material, e.g., a combustible fuel, from one to...
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3931789 |
Vapor deposition apparatus
An apparatus for continuously processing articles includes a pre-heating chamber for confining a vacuum therein provided with four openings by which an entrance chamber, two depositing chamber and...
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3894926 |
In-out transporter for an enclosed chamber
An In-Out Transporter arrangement for an enclosed chamber, subjected either to a vacuum or to a positive pressure, comprising in combination a gasket sleeve on and covering an entrance and/or exit...
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3708890 |
ROTARY AIR LOCK APPARATUS
Rotary air lock apparatus suitable for high temperature operation includes a generally cylindrical housing having opposed inlet and outlet openings, an elongated shaft journaled centrally within...
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3556355 |
PRESSURE SEALED ROTARY FEEDER
A pressured sealed rotary feeder with an inlet and outlet and a rotor mounted within a housing with a material passage therethrough. The rotor has a plurality of radially extending vanes which...
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3556606 |
PARTICULATE MATTER TRANSFER SYSTEM
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