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7622008 |
Gate valve and vacuum container for semiconductor processing system
A gate valve ( 20 ) for a semiconductor processing system includes a housing ( 21 ) forming a plurality of passages ( 22 A to 22 D) arrayed in a first direction. The passages respectively have...
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7622006 |
Processed body carrying device, and processing system with carrying device
A main carrying device forming a part of a processing system, comprising a casing ( 40 ) forming a main carrying chamber ( 44 ) having vacuum atmosphere, the casing ( 40 ) further comprising a...
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7618226 |
Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same
A semiconductor substrate transfer apparatus for transferring semiconductor substrates from a first container to a second container, includes: multiple end effectors; at least one robot arm with...
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7618225 |
Six-bar linkage positioning mechanism
Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the...
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7614840 |
Wafer processing apparatus having dust proof function
The wafer processing apparatus includes a chamber that is pressurized to a pressure that is higher than the pressure of the exterior thereof, an opening portion through which the interior and the...
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7611322 |
Processing thin wafers
There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls...
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7611319 |
Methods and apparatus for identifying small lot size substrate carriers
In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are...
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7611318 |
Overhead transfer flange and support for suspending a substrate carrier
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body...
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7611124 |
Vacuum processing apparatus
A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a...
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7607880 |
Wafer processing apparatus having dust proof function
The wafer processing apparatus includes a chamber that is pressurized to a pressure that is higher than the pressure of the exterior thereof, an opening portion through which the interior and the...
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7607879 |
Substrate processing apparatus with removable component module
A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame....
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7607543 |
Reticle pod with isolation system
The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held...
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7605718 |
Monitoring device for transport pods
A device that fits inside a transport pod communicating with the slots of the transport pod so that the device can be inserted and removed from the transport pod. The transport pods are for silicon...
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7597523 |
Variable lot size load port
A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back...
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7594789 |
Overhead transfer flange and support for suspending a substrate carrier
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body...
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7592261 |
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system
When the state of the vacuum processing chamber is switched to an idle state in which an insulating fluid is circulated while a semiconductor wafer W is not placed in the vacuum processing chamber...
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7591625 |
Carrying mechanism, a carrying device and a vacuum processing apparatus
A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second...
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7591624 |
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles...
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7585144 |
Variable lot size load port
A variable lot size load port assembly is described having a tool interface, a port door, a latch key, an advance plate, and an elevator. The tool interface extends generally in a vertical...
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7585142 |
Substrate handling chamber with movable substrate carrier loading platform
An apparatus for processing substrates may include a substrate handling chamber having a substrate load port on a side wall, and a movable platform movably engaged with the handling chamber between...
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7585141 |
Load lock system for ion beam processing
A load lock system includes a first load lock defining a first chamber, a second load lock defining a second chamber, and a vacuum pumping system to vacuum pump the first and second chambers. The...
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7581916 |
Sample introduction and transfer system and method
A method and system that provides a processing chamber associated with a load lock chamber. A sample receiving stage coupled to a sample positioning apparatus is configured to move between an...
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7578650 |
Quick swap load port
Apparatus and method for reducing the load on an automated material handling system during processing of materials are disclosed. A materials processing tool with one or more load ports is equipped...
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7575406 |
Substrate processing apparatus
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The...
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7559730 |
Cassette device for accepting substrates
A cassette device for accepting substrates includes a frame, a plurality of slots protruding from opposing sides of the frame, and at least two supporting bars connected to at least two of the slots.
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7558645 |
Overhead travelling carriage system
A height sensor 26 and an image recognizing section 28 are installed in a teaching unit 24 ; the height sensor 26 contacts a pin 30 a on a load port 4 to detect the height position of...
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7547175 |
Transfer device for substrate and storing device and hand therein, and substrate handled by the device
A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a...
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7537425 |
Wafer processing apparatus having dust proof function
The wafer processing apparatus includes a chamber that is pressurized to a pressure that is higher than the pressure of the exterior thereof, an opening portion through which the interior and the...
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7534080 |
Vacuum processing and transfer system
An apparatus for processing a work piece in a vacuum environment includes a master process chamber configured to be exhausted to a sub-atmospheric air pressure or to be filled with a desirable gas,...
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7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same
A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with...
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7523769 |
Enclosed container lid opening/closing system and enclosed container lid opening/closing method
In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the...
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7507264 |
Transport apparatus
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a...
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7496423 |
Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of...
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7490714 |
Transport device, in particular for use in a vacuum chamber
A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one...
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7470098 |
Detecting apparatus and detecting method
An optical sensor for detecting the housing state such as the thickness of a substrate in the present invention is provided at supporting arms. The supporting arms are attached to a supporting...
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7467916 |
Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same
A wafer transfer apparatus includes: (A) a mini environment that connects to a wafer storage part and a load lock chamber and is equipped with a transfer robot inside, in order to transfer wafers...
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7458763 |
Mid-entry load lock for semiconductor handling system
In a system having a number of semiconductor processing modules sharing a common vacuum environment, a mid-entry load lock is provided to permit insertion and removal of wafers into the vacuum...
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7452174 |
Load-lock and semiconductor device manufacturing equipment comprising the same
A load-lock and semiconductor device manufacturing equipment have a wafer anti-contamination measure capable of maximizing production yield. The load-lock includes a chamber that can be...
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7446872 |
Positioning apparatus and positioning method using the same
An apparatus for positioning a transport system and a load port is described, including a signal emitting unit disposed on the transport system and a positioning board on the load port. The signal...
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7445415 |
Direct tool loading
The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port preferably...
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7441999 |
Overhead travelling carriage system
An overhead buffer 24 is provided on a side of a running rail 4 for an overhead travelling carriage 8 . The height level of an article on the overhead buffer 24 is slightly lower than that...
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7438514 |
Wafer transfer system
A wafer transfer system, and method of controlling pressure in the system, includes a loadport for receiving a wafer container, a housing operably connected to the loadport, a wafer transfer...
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7438175 |
Linear vacuum deposition system
Embodiments of a vacuum conveyor system are provided herein. In one embodiment a vacuum conveyor system includes a first vacuum sleeve having a plurality of rollers that support and move substrates...
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7428958 |
Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
A substrate conveyor apparatus carries a substrate such as reticle. A substrate conveyance method and an exposure apparatus reliably adhere a substrate to the lower surface of a chuck. A movable...
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7422406 |
Stacked process modules for a semiconductor handling system
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The...
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7419346 |
Integrated system for tool front-end workpiece handling
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts...
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7407358 |
Interback-type substrate processing device
An interback-type device in which a substrate 9 is carried into the device from one side of the device and is inverted in the device to be carried out and returned to the same side, a plurality...
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7399154 |
Vacuum processing system being able to carry process object into and out of vacuum chamber
First and second load-lock mechanisms are installed in a vacuum chamber. An external arm and first and second robot arms are disposed outside of the vacuum chamber. The external arm can hold a...
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7398801 |
Apparatus and method for processing wafers
An apparatus and method for manufacturing semiconductor devices are disclosed. In accordance with the invention, a wafer transfer device for transferring wafers from wafer storage containers to...
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7396199 |
Substrate processing apparatus and substrate processing method
A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to...
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