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7370764 |
Transport module
A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and inte...
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7367769 |
Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool
PS control sections MC 1 , MC 2 configured to independently control the operations in process ships PS 1 , PS 2 are provided respectively, and an LM control section MC 3 configured to control th...
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7360985 |
Wafer processing apparatus including clean box stopping mechanism
The semiconductor wafer processing apparatus includes a clean box having an opening, a lid for closing the opening, a door to be in contact with the lid and to detach the lid from the clean box, a ...
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7360981 |
Datum plate for use in installations of substrate handling systems
A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a s...
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7359767 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station op...
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7359031 |
Lithographic projection assembly, load lock and method for transferring objects
Lithographic projection assembly, including at least one load lock for transferring objects, in particular substrates, between a first environment and a second environment, the second environment p...
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7357842 |
Cluster tool architecture for processing a substrate
A cluster tool for processing a substrate includes a cassette and a processing module including a first processing chamber that is configured to perform a chill process on a substrate, a second pro...
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7353076 |
Vacuum processing method and vacuum processing apparatus
The invention provides a semiconductor processing apparatus having a high throughput capable of appropriately coping with the positional displacement that may occur during transfer of the wafer aft...
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7350544 |
Station for controlling and purging a mini-environment
A SMIF type mini-environment ( 1 ) can be connected onto a purge station ( 2 ). The purge station comprises a leaktight purge compartment ( 2 b ) whose top face includes a closable transfer passage...
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7347656 |
Vacuum processing apparatus and semiconductor manufacturing line using the same
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
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7346431 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station op...
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7331751 |
Vacuum processing method
A vacuum processing method includes an atmospheric transfer step of transferring a wafer in atmospheric air to a vacuum transfer chamber using atmospheric transfer equipment disposed in atmospheric...
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7329079 |
Semiconductor wafer processing machine
A semiconductor wafer processing machine comprising a cassette-placing mechanism having a cassette-placing table for placing a cassette storing a semiconductor wafer, a workpiece take-in/take-out m...
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7328836 |
Smart tag holder and cover housing
A smart-tag housing and method for securing a dedicated data card affixed to a SMIF-pod. A molded housing package for holding a data card for communication with a two-way receiver/transmitter mount...
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7328727 |
Substrate container with fluid-sealing flow passageway
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access st...
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7318697 |
Universal reticle transfer system
A specially adapted SMIF pod ( 20 ) receives and holds one particular type of reticle cassette ( 36 ) or reticle holder ( 132 ) selected from among dozens of different configurations thereof. The S...
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7314345 |
Semiconductor container opening/closing apparatus and semiconductor device manufacturing method
When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the con...
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7314068 |
Apparatus for replacing gas in storage container and method for replacing gas therewith
While gas in a general storage container with no gas inlet and in the storage container with the gas inlet is replaced in a short time, the semiconductor wafer surface is cleaned. In an apparatus f...
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7299831 |
Substrate carrier having door latching and substrate clamping mechanisms
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate car...
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7293950 |
Universal modular wafer transport system
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that...
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7292909 |
Substrate processing apparatus and management method
A variety of maintenance work is performed for each of operation units in a substrate processing apparatus. Doors are provided at given positions on sides of an apparatus space, each of which is pr...
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7282460 |
Transfer chamber for cluster system
A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer chamb...
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7278812 |
Conveyance system
A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one...
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7275905 |
Method and device for controlling position of cassette in semiconductor manufacturing equipment
A cassette position control device controls the position of a cassette in which wafers are stored, when the wafer cassette is loaded on a cassette support. In addition to the cassette support, the ...
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7273339 |
Powder transport method and apparatus
The present invention is directed to a powder paint delivery method and apparatus employing a pressurized reservoir pump that supplies a controlled stream of densely fluidized or dense phase powder...
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7261508 |
Method for aligning a loadport to an overhead hoist transport system
A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a re...
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7258520 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate tr...
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7255524 |
Substrate cassette mapper
A mechanism for mapping the contents of a cassette which is used for delivering substrates to a system for processing semiconductor and similar materials which is independent of load port or loadin...
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7251021 |
Substrate transfer apparatus
A substrate transfer apparatus has pluralities of pairs of substrate support mechanisms. The substrate support mechanism includes a first roller provided on a first rotary shaft and a second roller...
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7246985 |
Work-piece processing system
A transfer system for use with a tool for processing a work-piece at low or vacuum pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for pr...
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7246984 |
Method and apparatus for transferring an article to be processed and processing apparatus
A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold ...
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7244086 |
Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates
A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacu...
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7243003 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station op...
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7234908 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette...
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7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
The present invention provides a seal device comprising a sealing passage which allows communication between a first space and a second space, and evacuation lines individually connected to the fir...
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7232284 |
Device for loading substrates into and unloading them from a clean room
The invention relates to a device for loading substrates into and unloading them from a clean room, comprising a lock device onto which a transport box for receiving the substrates can be placed an...
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7230702 |
Monitoring of smart pin transition timing
A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling eve...
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7226512 |
Load lock system for supercritical fluid cleaning
A substrate is transferred from an environment at about vacuum into a load lock through a first door. The substrate is then sealed within the load lock. The pressure within the load lock is raised ...
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7217076 |
Semiconductor material handling system
The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame t...
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7214027 |
Wafer handler method and system
Systems and methods for handling wafers include retrieving a first wafer from a wafer cassette using a first arm, transferring the first wafer from the first transfer arm to a second arm, deliverin...
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7207763 |
Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system
A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a rea...
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7201551 |
Vacuum processing apparatus and semiconductor manufacturing line using the same
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
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7198448 |
Vacuum process system
A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an atmospheri...
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7198447 |
Semiconductor device producing apparatus and producing method of semiconductor device
A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats...
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7187994 |
Method of interfacing ancillary equipment to FIMS processing stations
This invention includes a method of integrating into a semiconductor specimen fabrication station a process diagnostic module that performs on the semiconductor specimen a processing operation that...
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7168911 |
Semiconductor handling robot with improved paddle-type end effector
A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector ada...
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7168460 |
Apparatus for decanting pulverulent product and method which can be carried out using said apparatus
An apparatus for decanting pulverulent product (Q) into a receptacle ( 50 ) made of deformable material which receptacle is arranged in a container made of rigid material and is temporarily placed ...
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7160417 |
Cassette for a load-lock
A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at...
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7153367 |
Drive mechanism for a vacuum treatment apparatus
The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A stati...
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7153088 |
Method and apparatus for transferring a semiconductor substrate
A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the ...
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