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Document Title |
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6244812 |
Low profile automated pod door removal system
An automated door removal and replacement system utilizes a combination of linear and rotational drive to remove a door of a wafer supporting device and store the door below the device. In one...
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6244811 |
Atmospheric wafer transfer module with nest for wafer transport robot
A load lock wafer transfer face is provided at an acute angle with respect to a footprint dimension line, so the length of the footprint dimension line does not include the entire minimum length of...
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6241427 |
System and method for substantially touchless hydrodynamic transport of objects
A object processing system is disclosed. The object processing system includes processing modules for performing process steps on objects, and hydrodynamic transport chutes coupled between the...
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6238161 |
Cost effective modular-linear wafer processing
An inventive module and fabrication system for processing semiconductor devices reduces the overall cost per unit processed, by eliminating the need for expensive rotational robots. The modules and...
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6238160 |
Method for transporting and electrostatically chucking a semiconductor wafer or the like
An electrically conductive workpiece such as a semiconductor wafer or the like is transported between a staging area and an electrostatic chuck within a processing chamber using an electrostatic...
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6235634 |
Modular substrate processing system
The invention provides an apparatus and method for performing a process on a substrate. At least two types of structures may be used to provide a flow path for a substrate so that the substrate may...
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6235171 |
Vacuum film forming/processing apparatus and method
Disclosed is a vacuum film forming/processing apparatus and method which is hardly influenced by dusts and contamination on a substrate and moreover has a reduced exhaust volume. A substrate...
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6231289 |
Dual plate gas assisted heater module
A dual plate gas assisted heater module having a vertically movable poppet movable between an upper and a lower subchamber has a passive heating feature which preheats a substrate prior to...
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6224312 |
Optimal trajectory robot motion
An apparatus for processing wafers generally comprising a transfer chamber, a loadlock chamber mounted on the transfer chamber, one or more processing chambers mounted on the transfer chamber, a...
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6221163 |
Molecular contamination control system
The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a...
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6220808 |
Ergonomic, variable size, bottom opening system compatible with a vertical interface
A system is described herein including a load port which allows various pod sizes, including 200 mm and 300 mm, add various configurations, including front opening and bottom opening, to operate...
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6217272 |
In-line sputter deposition system
An apparatus for simultaneously transporting and processing substrates is described. The apparatus includes a load lock that stores at least one substrate prior to processing and that stores at...
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6216058 |
System of trajectory planning for robotic manipulators based on pre-defined time-optimum trajectory shapes
A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single-...
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6213704 |
Method and apparatus for substrate transfer and processing
The present invention allows large glass substrates to be rapidly moved from one processing station to another. Such movement occurs such that drives in different chambers are synchronized to move...
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6210533 |
Revolver valve for discharging a pressurized vessel in a fiber stock preparation system
A revolver valve includes a housing with a cylindrical inner chamber, and a pair of end caps respectively attached to each end of the housing. One of the end caps includes an inlet opening and the...
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6206176 |
Substrate transfer shuttle having a magnetic drive
A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle,...
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6201999 |
Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool
A method and apparatus for producing schedules for a wafer in a multichamber semiconductor wafer processing tool comprising the steps of providing a trace defining a series of chambers that are...
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6196154 |
Air lock for introducing substrates to and/or removing them from a treatment chamber
In an air lock for continuous introduction into and/or removal of workpieces from spaces (1,4) separated atmospherically, the individual substrates (3,13) are transported through a transfer channel...
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6193459 |
Integrated wafer pod-load/unload and mass-transfer system
A system includes an interface for receiving a pod having a carrier that receives wafers, and that is initially enclosed within a base and a pod cover. The system also includes a mechanism that...
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6190113 |
Quartz pin lift for single wafer chemical vapor deposition/etch process chamber
A wafer support device is provided. The wafer support device includes a susceptor having a surface configured to support a bottom surface of a wafer. The susceptor has a plurality of guiding...
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6190104 |
Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method
A method and apparatus for conveying a treatment object whereby a drive unit for driving a treatment object conveyor robot is deployed inside a vacuum chamber. The robot comprises a conveyor arm...
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6190103 |
Wafer transfer device and method
A substrate handling apparatus includes a transfer elevator and a process station disposed inside a load lock chamber. The process station includes a top module, a bottom module, and a seal ring...
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6186723 |
Load port
A load port for semiconductor equipment includes a transporting apparatus 18 and/or a moving apparatus 30 for respectively transporting a carrier base 14 and moving a cover 15, using a smaller...
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6186722 |
Chamber apparatus for processing semiconductor devices
An apparatus suitable for producing semiconductors. The apparatus includes a processing chamber, a first preparatory chamber, and a second preparatory chamber. Workpieces are transferred to the...
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6183831 |
Hard disk vapor lube
Disclosed is a system for transporting disks in vacuum to a vacuum station whereat a lubricant film is applied uniformly to the surfaces of the disks by evaporation. Thickness uniformity is...
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6183183 |
Dual arm linear hand-off wafer transfer assembly
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the...
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6178361 |
Automatic modular wafer substrate handling device
The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber...
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6176668 |
In-situ substrate transfer shuttle
The present invention provides an apparatus and method for sequential deposition of regular series of layers on consecutive substrates in a modular assembly-line like system. The apparatus and...
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6176667 |
Multideck wafer processing system
A multideck wafer processing system is described for the treatment of semiconductor wafers. The system includes at least two process chambers stacked one above the other to provide for higher wafer...
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6168364 |
Vacuum clean box, clean transfer method and apparatus therefor
A vacuum clean box 30 includes a box body 31 having a side aperture 32 and a small hole 33 for intake/exhaust, a side lid 34 for closing the side aperture 32 by a pressure difference between inside...
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6164664 |
Kinematic coupling compatible passive interface seal
An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet...
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6162299 |
Multi-position load lock chamber
A machine for manufacturing semiconductor devices has a. processing chamber for processing the semiconductor wafer. A transfer chamber has at least two positions, one position to facilitate the...
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6162010 |
Method for recovering object to be treated after interruption
To a common transfer chamber 102 of a treatment system 100, a treatment chamber 104a of an etching system 104, treatment chambers 106a and 108a of first and second CVD systems 106 and 108, a...
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6161054 |
Cell control method and apparatus
An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication...
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6158946 |
Positioning apparatus for substrates to be processed
An apparatus is provided with a plurality of stages of mounting bases on each of which is disposed upwardly orientated, narrow tapered pins around the periphery of a semiconductor wafer, and a...
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6152669 |
Mechanical interface apparatus
A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the...
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6149367 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer
An end effector in a transport module includes a body and a web defined by a panel and first and second flanges at opposite panel ends. The first flange is attached to the body. The second flange...
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6149365 |
Support frame for substrates
The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing...
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6145444 |
Micro clean sealed tubular transporter apparatus
Apparatus for transporting elements in a clean room environment includes a tubular element having a positive air pressure therein for providing a clean air environment and a cart movable in the...
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6143083 |
Substrate transferring mechanism
A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate...
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6143040 |
Substrate processing apparatus and maintenance method therefor
A substrate processing apparatus comprises a semiconductor wafer processing chamber, a wafer transfer device, a wafer cassette holding unit, a wafer cassette transfer device and a wafer cassette...
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6142722 |
Automated opening and closing of ultra clean storage containers
A substrate handling system is provided with a robot having the dual function of a removing and replacing substrate-containing pod doors and load lock chamber doors, and of transporting the...
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6139695 |
Modular deposition system having batch processing and serial thin film deposition
A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition...
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6138721 |
Tilt and go load port interface alignment system
A tilt and go assembly included as part of a load port interface assembly is disclosed for providing quick and easy attachment and adjustment of the load port interface assembly to a BOLTS...
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6136168 |
Clean transfer method and apparatus therefor
A clean transfer method and an apparatus therefor capable of receiving, storing and transferring a transferred object by means of a vacuum clean box while eliminating arrangement of any vacuum...
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6135698 |
Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications
A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus...
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6135168 |
Standard mechanical interface wafer pod gas filling system
A standard mechanical interface wafer pod gas filling system, comprising: a platform, carrying a wafer pod cover of a wafer pod; a pod hold-down latch mechanism; a port, carrying a wafer pod base,...
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6123494 |
Process for the loading and unloading of an evacuatable treatment chamber and handling device for carrying out the process
A processing station arranged in a vacuum chamber (2) for the coating of workpieces by a device, which loads or empties the workpieces through at least one opening set in the chamber wall (3,3',3")...
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6123120 |
Clean storage equipment for substrates and method of storing substrates
Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers,...
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6120229 |
Substrate carrier as batchloader
A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open...
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