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6729823 |
Processing system for object to be processed
A processing system for an object to be processed has a housing defining a closed space. The housing is provided with an opening through which an airtight carrying box is carried in and carried...
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6726429 |
Local store for a wafer processing station
A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more...
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6722834 |
Robot blade with dual offset wafer supports
A robot blade and a method of using the robot blade for transferring objects, namely substrates, through a process system, the robot blade comprising an upper platform having a first object...
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6722835 |
System and method for processing semiconductor wafers including single-wafer load lock
A wafer processing system employing a single-wafer load lock with integrated cooling unit is disclosed. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By...
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6719517 |
Substrate processing apparatus with independently configurable integral load locks
A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings...
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6719516 |
Single wafer load lock with internal wafer transport
The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load lock...
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6716651 |
Method and apparatus for identifying a wafer cassette
A wafer/loadport assembly that has a built-in, self-identification system and a method for operating the assembly are described. The wafer cassette is equipped with recessed holes provided with...
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6709218 |
Robot blade for semiconductor processing equipment
The present invention generally provides a robot blade which provides a plurality of semi-conductive or conductive contacts disposed at least partially on the surface of the blade to support a...
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6704998 |
Port door removal and wafer handling robotic system
An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient...
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6701972 |
Vacuum load lock, system including vacuum load lock, and associated methods
A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock apparatus,...
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6702540 |
Machine and method for manufacturing compact discs
A compact disc manufacturing machine carrying out a plurality of manufacturing stages including a vacuum stage. A central manipulator has a plurality of radially and outwardly extending manipulator...
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6698992 |
Elastically expandable positioning device
An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input...
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6699173 |
Canopy seal for infant care apparatus
An infant care apparatus having a canopy movable vertically with respect to an infant platform. The canopy has a lower edge mating with upper peripheral edges of a plurality of vertical walls...
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6698991 |
Fabrication system with extensible equipment sets
A fabrication system is provided which includes a storage apparatus coupled perpendicularly to a branch transport aisle, and one or more environmentally controlled fabrication tools coupled...
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6690986 |
Method of detecting the position of a wafer
An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber into which wafers are loaded through a pair of loadlocks which are spaced one above the other. A robot within...
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6688375 |
Vacuum processing system having improved substrate heating and cooling
The invention is directed a vacuum processing system having improved substrate heating and cooling facilities. An evacuable chamber of the system includes a first section in which a temperature of...
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6690993 |
Reticle storage system
A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a...
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6682343 |
Substrate processing apparatus
A substrate processing apparatus includes a substrate holder for holding a substrate with a holding angle of 45 degrees to 90 degrees with respect to a horizontal plane, a conveying system to...
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6680775 |
Substrate treating device and method, and exposure device and method
The mask guiding device of the present invention has a mask guiding device that guides a substrate received from the outside. The mask guiding device is provided with a plurality of receiving...
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6679672 |
Transfer port for movement of materials between clean rooms
A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient...
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6679671 |
Substrate transfer shuttle having a magnetic drive
A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle,...
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6676356 |
Device for attaching target substrate transfer container to semiconductor processing apparatus
A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to...
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6677594 |
Scanning wheel for ion implantation process chamber
A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer 7 on which a wafer is supported. Each wafer support element 3 has a...
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6672864 |
Method and apparatus for processing substrates in a system having high and low pressure areas
A positive pressure gradient is maintained across an open access port of an interface chamber such as a load lock chamber which provides an interface between a low pressure chamber such as a...
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6669121 |
Holder support device
A holder support device in an electron microscope. The device has a detachable cylindrical holder extending along the X-axis. The holder support device permits the position of the inner end of the...
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6663332 |
System for the treatment of wafers
Installation for treatment of wafers in a reactor. To that end a series of wafers is placed in a wafer rack and fed into the reactor. Transport into and out of the reactor, which is sited in an...
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6662465 |
Vacuum processing apparatus
A vacuum processing apparatus which includes a conveyor structure for transferring a substrate from a substrate storage device held on a substrate storage device mount table. The apparatus further...
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6662082 |
System for operating a robot with easy programming
A robot wherein the condition for a work and a sequence of movements to be performed may be set in connection with positions. In addition to setting a position at which a work is performed, the...
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6655891 |
Substrate treatment system, substrate transfer system, and substrate transfer method
A substrate transfer system comprising a cassette table for mounting a cassette which has an opening portion for loading and unloading a substrate and a cover detachably provided to the opening...
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6652212 |
Cylinder, load port using it, and production system
A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room...
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6641350 |
Dual loading port semiconductor processing equipment
A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing...
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6641348 |
Docking station for substrate transport containers
A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty...
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6643564 |
Method of determining retreat permission position of carrier arm and teaching device thereof
A retreat permission position of a carrier arm when the carrier arm is moved back to retreat outside a mounting table after the carrier arm carries a substrate to a position above the mounting...
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6637998 |
Self evacuating micro environment system
A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the...
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6634845 |
Transfer module and cluster system for semiconductor manufacturing process
A number of process chambers connected to a transfer module can be increased after a cluster system provided with the transfer module is initially established. The transfer module transfers an...
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6619901 |
Method and apparatus for air guidance in a processing chamber
An apparatus for air guidance in a processing chamber has a housing with an entrance gate and an exit gate. Inside the housing the processing chamber is embodied for filling and sealing small...
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6612797 |
Cassette buffering within a minienvironment
A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate...
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6609869 |
Transfer chamber with integral loadlock and staging station
A substrate processing system includes a substrate handling chamber and an integrated load lock chamber. The load lock chamber has a gated inlet for the transfer of a substrate into and out of the...
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6602127 |
Plant for producing semiconductor products
A plant for producing semiconductor products that includes at least one clean room having a floor and a plurality of production units that are configured in the clean room. The plurality of the...
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6601824 |
Single shaft, dual cradle vacuum slot valve
A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each...
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6599076 |
Dual cassette load lock
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
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6595370 |
Apparatus and method for reducing contamination in a wafer transfer chamber
A wafer transfer chamber, such as a load-lock chamber used in a cluster processing tool for semiconductor devices that has reduced particle contamination problem is provided. In the wafer transfer...
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6591987 |
Wafer retainer
A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at...
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6592317 |
Pod loader interface end effectors
An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the gripper...
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6592450 |
Access floor using special transfer paper
Disclosed is an access floor made using a special transfer paper which is laid on a floor of the interior of a clean room to prevent generation of dusts or bacteria in a factory of and integrated...
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6592318 |
Docking cart with integrated load port
An integrated wafer transport and transfer device is disclosed, which includes a vehicle with an integrated docking platform for holding a wafer carrier such as a FOUP (front opening unified pod)....
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6588123 |
Apparatus and method for preventing a wafer mapping system of an SMIF system from being polluted by corrosive gases remaining on wafers
An apparatus and a method for preventing a wafer mapping system of an SMIF system from being polluted by a corrosive gas remaining on wafers according to the present invention are disclosed. The...
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6585470 |
System for transporting substrates
A system for transporting substrates into a clean room is provided. The system has an isolation chamber located between the clean room and a staging area. A first movable closure is coupled to the...
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6582178 |
Mini-modual manufacturing environmental
A mini-modular manufacturing environmental chamber for processing and transporting semiconductor devices is disclosed. The cylindrical chamber is provided with a conveyer assembly that transports...
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6582174 |
Substrate processing apparatus and substrate processing method
A substrate processing apparatus includes a rotation accommodating shelf and a transfer machine. The rotation accommodating shelf is capable of accommodating a plurality of accommodating containers...
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