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7059817 Wafer handling apparatus and method  
A high-speed wafer-processing apparatus and method that employs a vacuum chamber having at least two wafer transport robots and a process station. The vacuum chamber interfaces with a number of...
7057711 Lithography tool having a vacuum reticle library coupled to a vacuum chamber  
A lithography tool includes an exposure chamber and a reticle handler that exchanges a reticle being exposed as prescribed by the user of the lithography tool. The reticle handler can include a...
7058468 Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device  
It is an object to provide an AGV that enables preventing a substrate and a manufacturing system from being contaminated due to another substrate with an adhering contaminant generated in a...
7048127 Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism  
The present invention provides a lid unit for closing a container body used to transport thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching...
7039499 Robotic storage buffer system for substrate carrier pods  
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot...
7039501 Method for determining a position of a robot  
Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics,...
7033471 Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers  
A Vacuum transport chamber for disk-shaped substrates, has a base plate structure has an interior surface which borders an interior of the chamber on one side thereof. A covering structure is...
7021881 Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections  
Semiconductor processing equipment that has increased efficiency, throughput, and stability, as well as reduced operating cost, footprint, and faceprint is provided. Other than during deposition,...
7021882 Drive-section-isolated FOUP opener  
A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the...
7018517 Transfer chamber for vacuum processing system  
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body...
7011483 Load port, semiconductor manufacturing apparatus, semiconductor manufacturing method, and method of detecting wafer adapter  
A load port includes an adapter-detecting sensor arranged at an upper portion of an opener. When the opener opens a lid of a FOUP, the adapter-detecting sensor detects whether a wafer adapter is...
7010377 Method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment  
A method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment are provided. The method includes detecting an occurrence of a trigger...
7006888 Semiconductor wafer preheating  
Embodiments of the present invention provide a method, article of manufacture, and apparatus for processing semiconductor wafers. The method includes preheating a semiconductor wafer in two types...
7004708 Apparatus for processing wafers  
Systems and methods are described for wafer processin. A wafer processing apparatus includes: a first wafer transporter; a process station coupled to the first wafer transporter, the process...
7001129 Loadlock apparatus and structure for creating a seal between an elevator drive shaft and the loadlock chamber thereof  
Sealing structure for use in creating a seal between an elevator drive shaft and a loadlock chamber includes a base fastened over a hole in the bottom wall of the loadlock chamber, a fixed member...
6997664 Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment  
The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of...
6997217 Gas conduit for a load lock chamber  
A gas conduit for a load lock chamber. The gas conduit connects to a gas source to introduce gas from the gas source into the load lock chamber of semiconductor equipment. The structure includes a...
6996453 Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module  
A substrate processing apparatus for processing substrates prevents the substrates from contaminating as they are transferred. The apparatus includes a container, like a FOUP, for containing...
6984097 Mounting/demounting device for wafer carrier lid  
An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier...
6981832 Wafer handling system  
A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300-mm wafers. The system is configured initially for...
6979168 Method and apparatus for transferring substrate  
Bays 100, 200, 300 . . . are connected to an inter-bay transfer line 400 via bay stockers 130, 230, 330 . . . , respectively. The bay 100 is, in this embodiment, composed of a single wafer transfer...
6971832 Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6970770 Cluster tool and method for controlling transport  
At a time Tp when a wafer W is transferred into either a load lock chamber LL1 or LL2, periods PSL for the load lock chambers LL1 and LL2 to get ready to permit a transfer of a next wafer W...
6962471 Substrate conveying module and system made up of substrate conveying module and workstation  
The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of...
6956223 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor  
Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of a substrate or wafer holder 180, in at least two generally orthogonal directions (so-called X-Y...
6953315 Apparatus and method for controlling flow of process materials  
An apparatus and method for controlling the flow of a process material from a higher pressure environment to a lower pressure environment is provided. Each of a first and second chamber is divided...
6949144 Low pressure plasma processing apparatus and method  
There are provided a low pressure plasma processing apparatus and method by which a throughput can be improved, film contamination can be effectively prevented, and a film can be readily managed. A...
6945405 Transport module with latching door  
A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two...
6945746 Semiconductor manufacturing equipment and maintenance method  
The equipment comprises a semiconductor-processing device in which a load-lock chamber, a transfer chamber and a reaction chamber are modularized into, a main frame, a stand-alone chamber frame on...
6935828 Wafer load lock and magnetically coupled linear delivery system  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6935466 Lift pin alignment and operation methods and apparatus  
A lifting mechanism includes a plurality of lift pins which may be driven separately and independently upward to engage an alignment surface of the chamber using ambient atmospheric pressure as the...
6930050 Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing  
A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in...
6926029 Wafer container  
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
6926489 Latch sensor for pod transport gripper  
A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and...
6919001 Disk coating system  
There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers...
6917755 Substrate support  
An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus...
6914251 Alignment structure and method for mating a wafer delivery device to a wafer treatment tool  
Apparatus and method for placement of workpieces such as silicon wafers in relation to an integrated circuit fabrication tool. A robotic arm mounted in relation to the tool moves workpieces in and...
6900878 Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same  
Reticle-holding devices (reticle “pods”) are disclosed for holding circular reticles as used microlithography systems that use circular reticles. An exemplary reticle pod includes a base and cov...
6896470 Front-opening unified pod auto-loading structure  
The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified...
6890862 Processes for vacuum treating workpieces, and corresponding process equipment  
A process for the vacuum treatment of workpieces, includes loading the workpieces into a treatment facility, surface treating the workpieces in at least one vacuum station of the facility grouped...
6887026 Semiconductor product container and system for handling a semiconductor product container  
A system for handling a semiconductor product container contains a handler for transporting and positioning the container. A loading/unloading position requires first support members forming part...
6881020 Pod transfer system having retractable mast and rotatable and vertically movable hoist  
A pod transfer system having a retractable mast and a rotatable and vertically movable hoist is disclosed. A first extendable robot is situated under a first overhead transfer (OHT) unit, and a...
6877219 Apparatus for placing components on printed circuit boards  
The apparatus and method of the present invention relates use a dry atmosphere in the component storage portion of the surface mount device placement machine. The dry atmosphere provides the...
6869263 Substrate loading and unloading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
6869262 Vacuum apparatus and transfer apparatus  
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process...
6869457 Clean room for semiconductor device  
A clean room has an equipment installation area where an apparatus for treating an object to be treated such as a semiconductor wafer is installed, a process area 4 where the object is loaded in or...
6866460 Apparatus and method for loading of carriers containing semiconductor wafers and other media  
An apparatus for loading media carriers into a processing chamber, including a pivoting arm mechanism which accepts a carrier in at a lower position, locks it on the arm, and provides a...
6860417 Low shock work transport system for pressure vessels  
A low shock work transport system for moving workpieces into a pressure vessel without significant vibrations or mechanical shocks. The pressure vessel has two opposing ends with a sealable port in...
6858085 Two-compartment chamber for sequential processing  
An apparatus for sequential and isolated processing of a workpiece comprises a two compartment chamber and a mechanism to transfer the workpiece from one compartment to the other compartment. The...
6852644 Atmospheric robot handling equipment  
A semiconductor-manufacturing tool has two load locks, one for semiconductor wafers entering the tool for processing and the other for wafers leaving the tool after being processed. The load locks...