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6996453 Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module  
A substrate processing apparatus for processing substrates prevents the substrates from contaminating as they are transferred. The apparatus includes a container, like a FOUP, for containing...
6984097 Mounting/demounting device for wafer carrier lid  
An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier...
6981832 Wafer handling system  
A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300-mm wafers. The system is configured initially for...
6979168 Method and apparatus for transferring substrate  
Bays 100, 200, 300 . . . are connected to an inter-bay transfer line 400 via bay stockers 130, 230, 330 . . . , respectively. The bay 100 is, in this embodiment, composed of a single wafer transfer...
6971832 Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6970770 Cluster tool and method for controlling transport  
At a time Tp when a wafer W is transferred into either a load lock chamber LL1 or LL2, periods PSL for the load lock chambers LL1 and LL2 to get ready to permit a transfer of a next wafer W...
6962471 Substrate conveying module and system made up of substrate conveying module and workstation  
The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of...
6956223 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor  
Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of a substrate or wafer holder 180, in at least two generally orthogonal directions (so-called X-Y...
6953315 Apparatus and method for controlling flow of process materials  
An apparatus and method for controlling the flow of a process material from a higher pressure environment to a lower pressure environment is provided. Each of a first and second chamber is divided...
6949144 Low pressure plasma processing apparatus and method  
There are provided a low pressure plasma processing apparatus and method by which a throughput can be improved, film contamination can be effectively prevented, and a film can be readily managed. A...
6945405 Transport module with latching door  
A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two...
6945746 Semiconductor manufacturing equipment and maintenance method  
The equipment comprises a semiconductor-processing device in which a load-lock chamber, a transfer chamber and a reaction chamber are modularized into, a main frame, a stand-alone chamber frame on...
6935828 Wafer load lock and magnetically coupled linear delivery system  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6935466 Lift pin alignment and operation methods and apparatus  
A lifting mechanism includes a plurality of lift pins which may be driven separately and independently upward to engage an alignment surface of the chamber using ambient atmospheric pressure as the...
6930050 Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing  
A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in...
6926029 Wafer container  
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
6926489 Latch sensor for pod transport gripper  
A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and...
6919001 Disk coating system  
There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers...
6917755 Substrate support  
An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus...
6914251 Alignment structure and method for mating a wafer delivery device to a wafer treatment tool  
Apparatus and method for placement of workpieces such as silicon wafers in relation to an integrated circuit fabrication tool. A robotic arm mounted in relation to the tool moves workpieces in and...
6900878 Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same  
Reticle-holding devices (reticle “pods”) are disclosed for holding circular reticles as used microlithography systems that use circular reticles. An exemplary reticle pod includes a base and cov...
6896470 Front-opening unified pod auto-loading structure  
The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified...
6890862 Processes for vacuum treating workpieces, and corresponding process equipment  
A process for the vacuum treatment of workpieces, includes loading the workpieces into a treatment facility, surface treating the workpieces in at least one vacuum station of the facility grouped...
6887026 Semiconductor product container and system for handling a semiconductor product container  
A system for handling a semiconductor product container contains a handler for transporting and positioning the container. A loading/unloading position requires first support members forming part...
6881020 Pod transfer system having retractable mast and rotatable and vertically movable hoist  
A pod transfer system having a retractable mast and a rotatable and vertically movable hoist is disclosed. A first extendable robot is situated under a first overhead transfer (OHT) unit, and a...
6877219 Apparatus for placing components on printed circuit boards  
The apparatus and method of the present invention relates use a dry atmosphere in the component storage portion of the surface mount device placement machine. The dry atmosphere provides the...
6869263 Substrate loading and unloading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
6869262 Vacuum apparatus and transfer apparatus  
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process...
6869457 Clean room for semiconductor device  
A clean room has an equipment installation area where an apparatus for treating an object to be treated such as a semiconductor wafer is installed, a process area 4 where the object is loaded in or...
6866460 Apparatus and method for loading of carriers containing semiconductor wafers and other media  
An apparatus for loading media carriers into a processing chamber, including a pivoting arm mechanism which accepts a carrier in at a lower position, locks it on the arm, and provides a...
6860417 Low shock work transport system for pressure vessels  
A low shock work transport system for moving workpieces into a pressure vessel without significant vibrations or mechanical shocks. The pressure vessel has two opposing ends with a sealable port in...
6858085 Two-compartment chamber for sequential processing  
An apparatus for sequential and isolated processing of a workpiece comprises a two compartment chamber and a mechanism to transfer the workpiece from one compartment to the other compartment. The...
6852644 Atmospheric robot handling equipment  
A semiconductor-manufacturing tool has two load locks, one for semiconductor wafers entering the tool for processing and the other for wafers leaving the tool after being processed. The load locks...
6852194 Processing apparatus, transferring apparatus and transferring method  
Processing apparatus is disclosed, that comprises substrate container holding table that can hold substrate container that contains plurality of target substrates, first transferring chamber,...
6848882 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system  
An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine...
6848876 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers  
A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare...
6846149 Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system  
A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer...
6837663 Loading and unloading station for semiconductor processing installations  
In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room...
6835039 Method and apparatus for batch processing of wafers in a furnace  
A method and apparatus for batch processing of semiconductor wafers in a furnace advantageously allow for wafers to be supported for processing at very high temperatures (e.g., about 1350° C.). ...
6830623 Method of liquid deposition by selection of liquid viscosity and other precursor properties  
A plurality of liquids, the flow of each controlled by a volumetric flowrate controller, are mixed in a mixer to form a final precursor that is misted and then deposited on a substrate. A physical...
6830651 Load port capable of coping with different types of cassette containing substrates to be processed  
A load port which can selectively receive plural types of cassette having substrate which are to be processed accommodated therein is disclosed. The load port has the following constituents. That...
6827546 Modular frame for a wafer fabrication system  
A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one...
6824343 Substrate support  
A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate...
6821082 Wafer management system and methods for managing wafers  
A wafer management system has a first stationary wafer storage system (100) with a first buffer (110) for storing a plurality of wafers in slots, a first load-and-unload station (115) for...
6817823 Method, device and system for semiconductor wafer transfer  
The invention relates to a wafer transfer system that achieves high efficiency, as measured by throughput rate. This is accomplished in one instance by the combination of reliable transfer of...
6818108 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece  
A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is...
6817822 Load port, wafer processing apparatus, and method of replacing atmosphere  
Atmosphere inside a wafer carrier is purged through an open face of the wafer carrier, in the state where a carrier door constituting a face of the wafer carrier is opened by a load port door....
6811369 Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method  
In a semiconductor fabrication apparatus, a pod that receives a single substrate using a substrate supporting table and a lid member in a sealing state is loaded from outside of a chamber and the...
6808352 Method for transporting boards, load port apparatus, and board transport system  
A substrate container having substrates stored therein and sealed with a door is placed onto a load port apparatus provided on a substrate processing system, and a door of the load port apparatus...
6802934 Processing apparatus  
Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133. Each of the load lock chambers is capable of accommodating a single wafer W....