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7207763 Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system  
A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a...
7198448 Vacuum process system  
A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an...
7198447 Semiconductor device producing apparatus and producing method of semiconductor device  
A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats...
7187994 Method of interfacing ancillary equipment to FIMS processing stations  
This invention includes a method of integrating into a semiconductor specimen fabrication station a process diagnostic module that performs on the semiconductor specimen a processing operation that...
7168460 Apparatus for decanting pulverulent product and method which can be carried out using said apparatus  
An apparatus for decanting pulverulent product (Q) into a receptacle (50) made of deformable material which receptacle is arranged in a container made of rigid material and is temporarily placed...
7168911 Semiconductor handling robot with improved paddle-type end effector  
A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector...
7160417 Cassette for a load-lock  
A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at...
7153367 Drive mechanism for a vacuum treatment apparatus  
The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A s...
7153088 Method and apparatus for transferring a semiconductor substrate  
A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the...
7147424 Automatic door opener  
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier...
7147795 Method for surface treatment  
A method for surface treatment includes: a first step in which a surface treatment apparatus 1 and a substrate 10 in a state where a front surface 102 of the substrate 10 faces the surface...
7144213 Method for controlling flow of process materials  
An apparatus and method for controlling the flow of a process material from a higher pressure environment to a lower pressure environment is provided. Each of a first and second chamber is divided...
7139638 Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus  
A thermal processing unit is connected to a substrate position detector, which is in turn connected to a bake unit controller. The thermal processing unit includes a temperature control plate and a...
7134825 Device for handling substrates inside and outside a clean room  
A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a...
7134826 Substrate transfer apparatus, substrate processing apparatus and holding table  
A loader includes a receiving section for receiving a FOUP (front opening unified pod), an opener for transporting substrates out of the FOUP, and a transport robot for transporting the FOUP...
7114903 Apparatuses and method for transferring and/or pre-processing microelectronic workpieces  
An apparatus and method for handling and/or pre-processing microelectronic workpieces. In one embodiment, the apparatus includes an input/output station configured to removably receive a plurality...
7102124 Multi-axial positioning mechanism for a FIMS system port door  
A multi-axial positioning system of unitary construction design selectively moves a port door along two transverse paths of travel toward and away from the aperture of a port plate. The positioning...
7077614 Sorting/storage device for wafers and method for handling thereof  
Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or...
7078708 Lithographic apparatus and method of manufacturing a device and method of performing maintenance  
A lithographic apparatus includes an illumination system for providing a beam of radiation. The lithographic apparatus further includes: a support structure for supporting patterning device, the...
7076920 Method of using a combination differential and absolute pressure transducer for controlling a load lock  
A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10−4 torr and a differential pressure sensor for sensing a pressure difference between a...
7074000 Method and apparatus for undocking substrate pod with door status check  
A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod. A...
7073999 Receiving container body for object to be processed  
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a...
7070379 Semiconductor fabrication apparatus having FOUP index in apparatus installation area  
A semiconductor fabrication apparatus, located in an apparatus installation area, includes a front-opening unified pod (FOUP) index, a plate, a first transfer device, a second transfer device, and...
7066703 Chuck transport method and system  
A method and system for transporting a plurality of substrates between a transfer chamber and at least one processing chamber. The system includes a chuck assembly with a plurality of chucks...
7068925 Versatile semi-toroidal processing furnace with automatic and reconfigurable wafer exchange  
The present invention comprises a fully automated, fabrication compliant furnace with the advantages of the horizontal and most of the advantages of the vertical furnace. One embodiment of the...
7059817 Wafer handling apparatus and method  
A high-speed wafer-processing apparatus and method that employs a vacuum chamber having at least two wafer transport robots and a process station. The vacuum chamber interfaces with a number of...
7057711 Lithography tool having a vacuum reticle library coupled to a vacuum chamber  
A lithography tool includes an exposure chamber and a reticle handler that exchanges a reticle being exposed as prescribed by the user of the lithography tool. The reticle handler can include a...
7058468 Automatic material handling system, production system for semiconductor device, and production management method for semiconductor device  
It is an object to provide an AGV that enables preventing a substrate and a manufacturing system from being contaminated due to another substrate with an adhering contaminant generated in a...
7048127 Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism  
The present invention provides a lid unit for closing a container body used to transport thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching...
7039499 Robotic storage buffer system for substrate carrier pods  
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot...
7039501 Method for determining a position of a robot  
Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics,...
7033471 Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers  
A Vacuum transport chamber for disk-shaped substrates, has a base plate structure has an interior surface which borders an interior of the chamber on one side thereof. A covering structure is...
7021881 Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections  
Semiconductor processing equipment that has increased efficiency, throughput, and stability, as well as reduced operating cost, footprint, and faceprint is provided. Other than during deposition,...
7021882 Drive-section-isolated FOUP opener  
A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the...
7018517 Transfer chamber for vacuum processing system  
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body...
7011483 Load port, semiconductor manufacturing apparatus, semiconductor manufacturing method, and method of detecting wafer adapter  
A load port includes an adapter-detecting sensor arranged at an upper portion of an opener. When the opener opens a lid of a FOUP, the adapter-detecting sensor detects whether a wafer adapter is...
7010377 Method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment  
A method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment are provided. The method includes detecting an occurrence of a trigger...
7006888 Semiconductor wafer preheating  
Embodiments of the present invention provide a method, article of manufacture, and apparatus for processing semiconductor wafers. The method includes preheating a semiconductor wafer in two types...
7004708 Apparatus for processing wafers  
Systems and methods are described for wafer processin. A wafer processing apparatus includes: a first wafer transporter; a process station coupled to the first wafer transporter, the process...
7001129 Loadlock apparatus and structure for creating a seal between an elevator drive shaft and the loadlock chamber thereof  
Sealing structure for use in creating a seal between an elevator drive shaft and a loadlock chamber includes a base fastened over a hole in the bottom wall of the loadlock chamber, a fixed member...
6997664 Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment  
The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of...
6997217 Gas conduit for a load lock chamber  
A gas conduit for a load lock chamber. The gas conduit connects to a gas source to introduce gas from the gas source into the load lock chamber of semiconductor equipment. The structure includes a...
6996453 Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module  
A substrate processing apparatus for processing substrates prevents the substrates from contaminating as they are transferred. The apparatus includes a container, like a FOUP, for containing...
6984097 Mounting/demounting device for wafer carrier lid  
An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier...
6981832 Wafer handling system  
A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300-mm wafers. The system is configured initially for...
6979168 Method and apparatus for transferring substrate  
Bays 100, 200, 300 . . . are connected to an inter-bay transfer line 400 via bay stockers 130, 230, 330 . . . , respectively. The bay 100 is, in this embodiment, composed of a single wafer transfer...
6971832 Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6970770 Cluster tool and method for controlling transport  
At a time Tp when a wafer W is transferred into either a load lock chamber LL1 or LL2, periods PSL for the load lock chambers LL1 and LL2 to get ready to permit a transfer of a next wafer W...
6962471 Substrate conveying module and system made up of substrate conveying module and workstation  
The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of...
6956223 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor  
Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of a substrate or wafer holder 180, in at least two generally orthogonal directions (so-called X-Y...