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7490714 Transport device, in particular for use in a vacuum chamber  
A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one...
7470098 Detecting apparatus and detecting method  
An optical sensor for detecting the housing state such as the thickness of a substrate in the present invention is provided at supporting arms. The supporting arms are attached to a supporting...
7467916 Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same  
A wafer transfer apparatus includes: (A) a mini environment that connects to a wafer storage part and a load lock chamber and is equipped with a transfer robot inside, in order to transfer wafers...
7458763 Mid-entry load lock for semiconductor handling system  
In a system having a number of semiconductor processing modules sharing a common vacuum environment, a mid-entry load lock is provided to permit insertion and removal of wafers into the vacuum...
7452174 Load-lock and semiconductor device manufacturing equipment comprising the same  
A load-lock and semiconductor device manufacturing equipment have a wafer anti-contamination measure capable of maximizing production yield. The load-lock includes a chamber that can be...
7445415 Direct tool loading  
The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port...
7446872 Positioning apparatus and positioning method using the same  
An apparatus for positioning a transport system and a load port is described, including a signal emitting unit disposed on the transport system and a positioning board on the load port. The signal...
7441999 Overhead travelling carriage system  
An overhead buffer 24 is provided on a side of a running rail 4 for an overhead travelling carriage 8. The height level of an article on the overhead buffer 24 is slightly lower than that on the...
7438175 Linear vacuum deposition system  
Embodiments of a vacuum conveyor system are provided herein. In one embodiment a vacuum conveyor system includes a first vacuum sleeve having a plurality of rollers that support and move...
7438514 Wafer transfer system  
A wafer transfer system, and method of controlling pressure in the system, includes a loadport for receiving a wafer container, a housing operably connected to the loadport, a wafer transfer...
7428958 Substrate conveyor apparatus, substrate conveyance method and exposure apparatus  
A substrate conveyor apparatus carries a substrate such as reticle. A substrate conveyance method and an exposure apparatus reliably adhere a substrate to the lower surface of a chuck. A movable...
7422406 Stacked process modules for a semiconductor handling system  
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The...
7419346 Integrated system for tool front-end workpiece handling  
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which...
7407358 Interback-type substrate processing device  
An interback-type device in which a substrate 9 is carried into the device from one side of the device and is inverted in the device to be carried out and returned to the same side, a plurality of...
7399154 Vacuum processing system being able to carry process object into and out of vacuum chamber  
First and second load-lock mechanisms are installed in a vacuum chamber. An external arm and first and second robot arms are disposed outside of the vacuum chamber. The external arm can hold a...
7398801 Apparatus and method for processing wafers  
An apparatus and method for manufacturing semiconductor devices are disclosed. In accordance with the invention, a wafer transfer device for transferring wafers from wafer storage containers to...
7396199 Substrate processing apparatus and substrate processing method  
A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to...
7393172 Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device  
In a wafer transfer system wherein a wafer transfer robot linearly reciprocates by a linear motor, dust is prevented from adhering to a wafer. A fixed base 9, on which the secondary side 11 of a...
7387484 Wafer positioning systems and methods thereof  
An wafer positioning system comprises a wafer handling chamber with a vacuum sealable opening catching wafers. At least one processing chamber disposed adjacent to the wafer handling chamber has...
7384228 Insertion device, lithographic apparatus with said insertion device and device manufacturing method  
A robot arm is configured to insert and remove an object from a conditioned environment using a carrier connected to the robot arm. The robot arm is positioned in a conditionable vessel, a wall of...
7384484 Substrate processing method, substrate processing apparatus and substrate processing system  
After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10A, 10B, a substrate W wet with an anti-drying solution is wet-transported to...
7381969 Load lock control  
A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a...
7381673 Composite material, wafer holding member and method for manufacturing the same  
A composite material according to the present invention, is composed of SiC, SiO2, at least one out of Al and Si, with He leak rate of 1.3×10−10 Pa·m3/sec or below, thereby providing a composite...
7377736 Cylinder, load port using it, and production system  
A cylinder which can precisely feed a piston rod 3 into three different positions. The cylinder includes a spring receiving member 14 which is placed coaxially with the piston rod in a piston...
7375041 Transfer chamber for cluster system  
A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer...
7374386 Fast swap dual substrate transport for load lock  
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber...
7370764 Transport module  
A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and...
7367769 Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool  
PS control sections MC1, MC2 configured to independently control the operations in process ships PS1, PS2 are provided respectively, and an LM control section MC3 configured to control the...
7360981 Datum plate for use in installations of substrate handling systems  
A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a...
7360985 Wafer processing apparatus including clean box stopping mechanism  
The semiconductor wafer processing apparatus includes a clean box having an opening, a lid for closing the opening, a door to be in contact with the lid and to detach the lid from the clean box, a...
7359031 Lithographic projection assembly, load lock and method for transferring objects  
Lithographic projection assembly, including at least one load lock for transferring objects, in particular substrates, between a first environment and a second environment, the second environment...
7357842 Cluster tool architecture for processing a substrate  
A cluster tool for processing a substrate includes a cassette and a processing module including a first processing chamber that is configured to perform a chill process on a substrate, a second...
7353076 Vacuum processing method and vacuum processing apparatus  
The invention provides a semiconductor processing apparatus having a high throughput capable of appropriately coping with the positional displacement that may occur during transfer of the wafer...
7350544 Station for controlling and purging a mini-environment  
A SMIF type mini-environment (1) can be connected onto a purge station (2). The purge station comprises a leaktight purge compartment (2b) whose top face includes a closable transfer passage (2c)...
7347656 Vacuum processing apparatus and semiconductor manufacturing line using the same  
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and...
7346431 Substrate carrier handler that unloads substrate carriers directly from a moving conveyer  
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
7331751 Vacuum processing method  
A vacuum processing method includes an atmospheric transfer step of transferring a wafer in atmospheric air to a vacuum transfer chamber using atmospheric transfer equipment disposed in...
7328836 Smart tag holder and cover housing  
A smart-tag housing and method for securing a dedicated data card affixed to a SMIF-pod. A molded housing package for holding a data card for communication with a two-way receiver/transmitter...
7329079 Semiconductor wafer processing machine  
A semiconductor wafer processing machine comprising a cassette-placing mechanism having a cassette-placing table for placing a cassette storing a semiconductor wafer, a workpiece take-in/take-out...
7328727 Substrate container with fluid-sealing flow passageway  
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access...
7318697 Universal reticle transfer system  
A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF...
7314068 Apparatus for replacing gas in storage container and method for replacing gas therewith  
While gas in a general storage container with no gas inlet and in the storage container with the gas inlet is replaced in a short time, the semiconductor wafer surface is cleaned. In an apparatus...
7314345 Semiconductor container opening/closing apparatus and semiconductor device manufacturing method  
When a conventional semiconductor container opening/closing apparatus opens a lid of a semiconductor container, foreign particles enter into the container from outside through a gap between the...
7299831 Substrate carrier having door latching and substrate clamping mechanisms  
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate...
7293950 Universal modular wafer transport system  
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle...
7292909 Substrate processing apparatus and management method  
A variety of maintenance work is performed for each of operation units in a substrate processing apparatus. Doors are provided at given positions on sides of an apparatus space, each of which is...
7278812 Conveyance system  
A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which...
7275905 Method and device for controlling position of cassette in semiconductor manufacturing equipment  
A cassette position control device controls the position of a cassette in which wafers are stored, when the wafer cassette is loaded on a cassette support. In addition to the cassette support, the...
7273339 Powder transport method and apparatus  
The present invention is directed to a powder paint delivery method and apparatus employing a pressurized reservoir pump that supplies a controlled stream of densely fluidized or dense phase...
7261508 Method for aligning a loadport to an overhead hoist transport system  
A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a...