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7720558 Methods and apparatus for mapping carrier contents  
In a first aspect, a first method of mapping contents of a substrate carrier is provided. The first method includes the steps of (1) coupling a sensor to the substrate carrier or a loadport...
7704031 Substrate processing apparatus  
When FOUPs (front opening unified pods) (80a, 80b) are mounted on shelves (111d, 121c), respectively, shelves (121a, 121b, 121c) are moved in the vertical direction by cylinders (127a, 127b,...
7706908 Method for positioning a wafer  
The invention relates to a method for positioning a wafer (3) with a reference mark (6) in a vacuum processing unit with a transport chamber containing a transport device (2, 20, 21) for moving...
7699573 Reticle manipulating device  
A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging...
7699574 Work-piece processing system  
A transfer system for use with a tool for processing a work-piece at low or vacuum pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for...
7699021 Cluster tool substrate throughput optimization  
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased...
7695232 Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same  
A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic...
7695231 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same  
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there...
7695233 Substrate processing apparatus  
The substrate processing apparatus is capable of highly efficiently feeding and carrying out work and improving production efficiency. The substrate processing apparatus comprises: a processing...
7684895 Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event  
In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer...
7677859 Substrate loading and uploading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
7674083 Clean device with clean box-opening/closing device  
In a load port portion of a conventional clean device, it can happen that cleanliness is reduced by dust caused by wear of bellows and a lid is not separated by its weight from a main body. In...
7665951 Multiple slot load lock chamber and method of operation  
Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In...
7665947 Transfer chamber for flat display device manufacturing apparatus  
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may provide a combination of the functions of a transfer and a load-lock chamber. A robot may...
7658586 Advanced low cost high throughput processing platform  
A wafer processing system and method in which a wafer, having a diameter, is movable between a loadlock and a processing chamber. A transfer chamber is arranged for selective pressure...
7651306 Cartesian robot cluster tool architecture  
Embodiments of the invention provide a method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, and a...
7640946 Vacuum treating device with lidded treatment container  
A vacuum treating device, comprising a treatment container having a container body (111) and a lid (112) and allowing an internal pressure to be reduced and a lid support mechanism (130), wherein...
7641434 Dual substrate loadlock process equipment  
One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The...
7637707 Apparatus for storing and moving a cassette  
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the...
7635244 Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system  
When a first floor (11) which is formed of a punching plate or the like and through which air passes is provided immediately below an arm (17) at a middle height part of a conveying robot (10) in...
7628574 Apparatus and method for processing substrates using one or more vacuum transfer chamber units  
An apparatus and method for processing substrates uses one or more vacuum transfer chamber units to transfer some of the substrates between at least one load lock chamber unit and at least one...
7628895 W-patterned tools for transporting/handling pairs of disks  
Various apparatus and methods are provided for handling and transporting pairs of disks. A transfer tool engages a pair of disks in gap merge orientation along the outer perimeter edge of the...
7622006 Processed body carrying device, and processing system with carrying device  
A main carrying device forming a part of a processing system, comprising a casing (40) forming a main carrying chamber (44) having vacuum atmosphere, the casing (40) further comprising a plurality...
7622008 Gate valve and vacuum container for semiconductor processing system  
A gate valve (20) for a semiconductor processing system includes a housing (21) forming a plurality of passages (22A to 22D) arrayed in a first direction. The passages respectively have ports (23A...
7618226 Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same  
A semiconductor substrate transfer apparatus for transferring semiconductor substrates from a first container to a second container, includes: multiple end effectors; at least one robot arm with...
7618225 Six-bar linkage positioning mechanism  
Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of...
7611318 Overhead transfer flange and support for suspending a substrate carrier  
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body...
7611322 Processing thin wafers  
There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls...
7611124 Vacuum processing apparatus  
A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a...
7611319 Methods and apparatus for identifying small lot size substrate carriers  
In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are...
7607879 Substrate processing apparatus with removable component module  
A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame....
7607543 Reticle pod with isolation system  
The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held...
7605718 Monitoring device for transport pods  
A device that fits inside a transport pod communicating with the slots of the transport pod so that the device can be inserted and removed from the transport pod. The transport pods are for...
7597523 Variable lot size load port  
A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back...
7591625 Carrying mechanism, a carrying device and a vacuum processing apparatus  
A carrying device which can prevent an object to be carried from being contaminated with dust and carry the object to a correct position. The present invention is constructed by first and second...
7592261 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system  
When the state of the vacuum processing chamber is switched to an idle state in which an insulating fluid is circulated while a semiconductor wafer W is not placed in the vacuum processing chamber...
7585141 Load lock system for ion beam processing  
A load lock system includes a first load lock defining a first chamber, a second load lock defining a second chamber, and a vacuum pumping system to vacuum pump the first and second chambers. The...
7585142 Substrate handling chamber with movable substrate carrier loading platform  
An apparatus for processing substrates may include a substrate handling chamber having a substrate load port on a side wall, and a movable platform movably engaged with the handling chamber...
7581916 Sample introduction and transfer system and method  
A method and system that provides a processing chamber associated with a load lock chamber. A sample receiving stage coupled to a sample positioning apparatus is configured to move between an...
7578650 Quick swap load port  
Apparatus and method for reducing the load on an automated material handling system during processing of materials are disclosed. A materials processing tool with one or more load ports is...
7575406 Substrate processing apparatus  
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The...
7559730 Cassette device for accepting substrates  
A cassette device for accepting substrates includes a frame, a plurality of slots protruding from opposing sides of the frame, and at least two supporting bars connected to at least two of the slots.
7558645 Overhead travelling carriage system  
A height sensor 26 and an image recognizing section 28 are installed in a teaching unit 24; the height sensor 26 contacts a pin 30a on a load port 4 to detect the height position of the pin 30a...
7547175 Transfer device for substrate and storing device and hand therein, and substrate handled by the device  
A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a...
7537425 Wafer processing apparatus having dust proof function  
The wafer processing apparatus includes a chamber that is pressurized to a pressure that is higher than the pressure of the exterior thereof, an opening portion through which the interior and the...
7534080 Vacuum processing and transfer system  
An apparatus for processing a work piece in a vacuum environment includes a master process chamber configured to be exhausted to a sub-atmospheric air pressure or to be filled with a desirable...
7531816 Vacuum conveying apparatus and charged particle beam equipment with the same  
A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with...
7523769 Enclosed container lid opening/closing system and enclosed container lid opening/closing method  
In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to...
7507264 Transport apparatus  
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a...
7496423 Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots  
The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of...