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7927058 Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port  
The invention is directed to a pod clamping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and a lid, the...
7930061 Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback  
The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to...
7918640 Position correcting apparatus, vacuum processing equipment and position correcting method  
A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and...
7918910 Unit for eliminating particles and apparatus for transferring a substrate having the same  
In an apparatus for transferring a substrate, a partition wall is disposed in a vertical direction in a housing to divide an interior space of the housing into a first space and a second space. A...
7914246 Actuatable loadport system  
A system adapted to exchange wafer carriers between an overhead transport mechanism and a platform is provided. The system employs a wafer carrier having at least one handle extending therefrom,...
7908993 Film forming apparatus, film forming method and method for manufacturing piezoelectric actuator  
A film forming apparatus including a film forming chamber which forms a film, a jetting mechanism which jets aerosol containing material particles onto a substrate in the film forming chamber, a...
7896602 Workpiece stocker with circular configuration  
An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot...
7891932 Straight conveying device for vacuum  
A working rod with a tip end extending into a vacuum process chamber and moving in the axial direction, two static-pressure gas bearings supporting the rod in the non-contact manner, and an...
7891936 High speed substrate aligner apparatus  
A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing....
7887280 Processing apparatus  
There is provided a processing apparatus capable of modifying an existing processing apparatus having a single loading port to one having dual loading ports by providing an additional loading port...
7887276 Load port device  
A mount base is adapted to be fixed to a partition wall which is disposed between a stockyard for temporarily storing a wafer carrier which houses a wafer and a wafer processing device for...
7887278 Overhead travelling carriage system  
An article is conveyed from a load port 26a for a processing device 16 to a load port 26b for a processing device 20. An overhead buffer 28 is provided for each load port 26. An overhead...
7887277 Reticle storage pod (RSP) transport system utilizing FOUP adapter plate  
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles...
7881819 Substrate transfer apparatus, method of transferring substrate, and method of manufacturing electro-optical device  
A substrate transfer apparatus transfers substrates stored in a first substrate storage case, which has support grooves in its inner wall, along the support grooves to substrate storage surfaces...
7878755 Load lock and method for transferring objects  
A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment...
7874781 Substrate processing apparatus  
A substrate processing apparatus includes a plurality of process chambers (20) for applying a process to substrate accommodated therein and a conveyance case (24) that conveys the accommodated...
7874783 Multi-chamber vacuum processing and transfer system  
An apparatus for processing a work piece in a vacuum environment includes a master process chamber that can be exhausted to a sub-atmospheric air pressure or to be filled with a desirable gas, a...
7874782 Wafer transfer apparatus and substrate transfer apparatus  
A wafer transfer apparatus is provided. In a minimum transformed state where a robot arm is transformed such that a distance defined from a pivot axis to an arm portion, which is farthest in a...
7866058 Spin head and substrate treating method using the same  
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving...
7857569 Semiconductor processing system  
A supporting mechanism (12A) is used for transfer-ring a target substrate (W) in cooperation with a transfer arm (32), in a semiconductor processing system. The supporting mechanism includes first...
7857570 Method and apparatus for supplying substrates to a processing tool  
In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a...
7857139 Invertible front opening unified pod  
A front opening unified pod (FOUP) for holding wafers is invertible and compatible with process machines in an inverted orientation. The FOUP can safely transport and store wafers while in a...
7845897 Method for transporting substrates  
Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first...
7845891 Decoupled chamber body  
Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock...
7845892 Movable transfer chamber and substrate-treating apparatus including the same  
A substrate-treating apparatus including: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space for containing a substrate; and a transfer...
7841820 Universal modular wafer transport system  
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle...
7841371 Lid opening/closing system of an airtight container  
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the...
7836845 Substrate carrying and processing apparatus  
The present invention provides a substrate carrying and processing apparatus which is intended to reduce the size of the space for storing substrates in each substrate storing section as much as...
7833351 Batch processing platform for ALD and CVD  
A batch processing platform used for ALD or CVD processing is configured for high throughput and minimal footprint. In one embodiment, the processing platform comprises an atmospheric transfer...
7828504 Combination load lock for handling workpieces  
A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for...
7824497 Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus  
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer...
7815739 Vertical batch processing apparatus  
A semiconductor processing system includes a casing forming a handling area. The handling area includes a main-process area and a pre-process area divided from each other and connected through an...
7806643 Elevator-based tool loading and buffering system  
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates....
7806641 Substrate processing system having improved substrate transport system  
A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber,...
7806642 Receiver for component feed plates and component feeder  
In a receiver for component feed plates for housing, in multi-stage stacks, a plurality of component feed plates with a plurality of components placed thereon, identification mark portions are...
7797855 Heating apparatus, and coating and developing apparatus  
A heating apparatus 2 comprises a housing 20; a flat heating chamber 4 which is provided in the housing 2 and adapted to heat a wafer W used as a substrate, with one side of the heating chamber 4...
7792608 Substrate carrier handler that unloads substrate carriers directly from a moving conveyor  
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station...
7789609 Lid opening/closing system for closed container and substrate processing method using same  
Adjacent to an opening portion 10 in an FIMS system is provided an enclosure that encloses the operation space of a door and has a second opening portion 31 opposed to the opening portion 10. A...
7780391 Substrate processing device  
Processing chambers (3A-3F) for applying a process to a substrate W housed therein are provided at a periphery of a conveying chamber 2. A conveying case (4) houses the substrate (W) in a state...
7776192 Elongate vacuum system for coating one or both sides of a flat substrate  
An elongate vacuum system for coating one or both sides of a flat substrate which can be displaced by the system, comprises at least one magnetron provided with a magnetron surrounding area and is...
7770714 Transfer apparatus  
A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position...
7771150 Gate valve and substrate-treating apparatus including the same  
A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; a transfer unit...
7771151 Interface between conveyor and semiconductor process tool load port  
The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load...
7756599 Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program  
A computer readable storage medium storing a program for performing an operation method of a substrate processing apparatus is provided. The operation method includes the steps of introducing a...
7748942 Dust resistant load port apparatus and mini-environment system  
In a load port apparatus, a slit is formed between an inner circumferential surface of an opening on a wall of the chamber of the apparatus and an outer circumferential surface of a door. In a...
7750818 System and method for introducing a substrate into a process chamber  
A system and method for introducing a substrate into a process chamber is provided. A presence or absence of a substrate on a stage in an apparatus for manufacturing a semiconductor or a flat...
7748944 Method and apparatus for semiconductor processing  
A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a...
7740437 Processing system with increased cassette storage capacity  
A system for processing semiconductor substrates includes a front-end with at least two vertical levels of input/output ports for transferring substrate cassettes into or out of the housing of the...
7737416 Sample transfer unit and sample transferring method  
There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod...
7726353 Lid opening/closing system of an airtight container  
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed, and at the same time, the inert gas is also...