Match Document Document Title
8348583 Container and loader for substrate  
A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an...
8343300 Automated thermal slide debonder  
An improved apparatus for debonding temporary bonded wafers includes a debonder, a cleaning module and a taping module. A vacuum chuck is used in the debonder for holding the debonded thinned...
8317449 Multiple substrate transfer robot  
Embodiments of multiple substrate transfer robots and substrate processing systems have been disclosed herein. In some embodiments, a multiple substrate transfer robot is provided and may include...
8313277 Semiconductor manufacturing process modules  
A variety of process modules are described for use in semiconductor manufacturing processes.
8309465 System and method for producing devices including a semiconductor part and a non-semiconductor part  
A system produces devices that include a semiconductor part and a non-semiconductor part. A front end is configured to receive a semiconductor part and to process the semiconductor part. A back...
8309374 Advanced platform for processing crystalline silicon solar cells  
The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one...
8303764 Apparatus and methods for transporting and processing substrates  
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use...
8303231 Apparatus and method for semiconductor wafer transfer  
An apparatus for semiconductor wafer transfer comprises a first region for placement of a pod, a second region for placement of a cassette, an unloading mechanism, and a transferring mechanism for...
8297591 Slit valve control  
Embodiments disclosed herein generally relate to methods for sealing a processing chamber with a slit valve door. The door initially raises from a position below the opening for the processing...
8292563 Nonproductive wafer buffer module for substrate processing apparatus  
A sorter for handling and sorting semiconductor wafers is provided. The sorter has a housing, a handling and transport device and at least one nonproduction wafer buffer module. The housing has at...
8293066 Apparatus and methods for transporting and processing substrates  
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use...
8288288 Transferring heat in loadlocks  
Methods that increase the overall rate of heat transfer between a substrate and a heat sink or source, e.g., in a loadlock are provided. According to various embodiments, the methods involve...
8282334 Atomic layer deposition apparatus and loading methods  
The invention relates to methods and apparatus in which a plurality of ALD reactors are placed in a pattern in relation to each other, each ALD reactor being configured to receive a batch of...
8276432 Transport pod interface  
A transport pod interface in one example including a sampling probe connected to a gas analyzer and an actuator coupled with an access door on the transport pod in the coupling position, and that...
8277161 Substrate processing apparatus and manufacturing method of a semiconductor device  
A substrate processing apparatus is equipped with a processing furnace for processing wafers, a loading port which is used for carrying a pod containing substrates into and out of a case, a pod...
8272825 Load lock fast pump vent  
A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at...
8275478 Method and apparatus for routing wafer pods to allow parallel processing  
A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer...
8272826 Substrate processing apparatus  
A substrate processing apparatus includes first and second transfer chambers, first and second load lock chambers for exchanging one or more substrates with respective ones of first and the second...
8272827 Reduced capacity carrier, transport, load port, buffer system  
In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least...
8267633 FOUP opening/closing device and probe apparatus  
A FOUP opening/closing device includes a housing containing a mounting table for mounting the FOUP thereon, an FOUP loading opening, and a delivery opening. The device further includes a rotator...
8267632 Semiconductor manufacturing process modules  
A system for processing semiconductor wafers including a plurality of robotic facilities serially joined to each other to form a substantially linear transport chamber through which wafers can be...
8267634 Reduced capacity carrier, transport, load port, buffer system  
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces...
8257498 Substrate transfer module and substrate processing system  
A substrate transfer module that can prevent corrosion of components, adhesion of particles to the substrate, and increases in the manufacturing cost and the size of the substrate transfer module....
8257013 Substrate treatment apparatus  
The present invention provides a substrate treatment apparatus which sets substrate loading intervals to treatment chambers to a fixed value and prevents the occurrence of stagnancy of substrates...
8246284 Stacked load-lock apparatus and method for high throughput solar cell manufacturing  
An apparatus with a plurality of load-lock chambers stacked having independently controlled pressures within their interior regions is provided. According to one or more embodiments, each...
8244399 Transport method and transport apparatus  
Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held...
8231322 Fast swap dual substrate transport for load lock  
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber...
8221045 Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof  
A semiconductor manufacturing apparatus and a wafer loading/unloading method thereof increase productivity. The semiconductor manufacturing apparatus includes a first boat and a second boat having...
8215262 Cluster tool architecture for processing a substrate  
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased...
8210789 Method of assembling substrate transfer device and transfer system unit for the same  
An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a...
8206076 Substrate processing system  
A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette...
8206075 Methods and apparatus for sealing a chamber  
In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the...
8205352 Vapor dryer having hydrophilic end effector  
Embodiments of the present invention generally relate to an apparatus and methods for rinsing and drying substrates. One embodiment provides an end effector comprising a body having a contact tip...
8192131 Architecture for high throughput semiconductor processing applications  
A semiconductor wafer processing system in accordance with an embodiment of the present invention includes a loading station, a load lock, a process module, an intermediate process module, and a...
8192132 Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus  
In a transfer chamber having a housing with a transfer region and a passing band region, a transport device comprising a first arrangement of transport rollers is arranged in the transfer region...
8186927 Contained object transfer system  
A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber...
8181596 Cluster tool architecture for processing a substrate  
An apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, a smaller system...
8177048 Vacuum processing apparatus  
A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power...
8173971 Sample transfer unit and sample transferring method  
There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod...
8171964 Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus  
The invention provides a purge apparatus that purges the gas in the interior of a FOUP with a high purging efficiency and an apparatus for opening/closing the lid of a FOUP for use in the purge...
8172949 Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program  
A computer readable storage medium storing a program for performing an operation method of a substrate processing apparatus is provided. The operation method includes the steps of introducing a...
8167522 Substrate transport apparatus with active edge gripper  
A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide...
8162584 Method and apparatus for semiconductor wafer alignment  
The invention provides, in some aspects, a wafer alignment system comprising an image acquisition device, an illumination source, a rotatable wafer platform, and an image processor that includes...
8153513 Method and system for continuous large-area scanning implantation process  
A method for manufacturing doped substrates using a continuous large area scanning implantation process is disclosed. In one embodiment, the method includes providing a movable track member. The...
8147924 Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus  
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer...
8146530 Cluster tool architecture for processing a substrate  
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased...
8132996 Gate valve and substrate-treating apparatus including the same  
A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space for containing a substrate; a transfer unit...
8128333 Substrate processing apparatus and manufacturing method for semiconductor devices  
A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is shut by a lid, a loading and unloading port for...
8118530 Substrate storage facility and substrate processing facility, and method for operating substrate storage  
Substrate storage facility includes a container that holds a plurality of the substrates with the substrates lined up vertically with space therebetween and that is tubular having a generally...
8119020 Method for manufacturing electronic device  
A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient...