Matches 101 - 150 out of 1065 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >
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6994507 Transport apparatus  
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a...
6984097 Mounting/demounting device for wafer carrier lid  
An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier...
6981832 Wafer handling system  
A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300-mm wafers. The system is configured initially for...
6979168 Method and apparatus for transferring substrate  
Bays 100, 200, 300 . . . are connected to an inter-bay transfer line 400 via bay stockers 130, 230, 330 . . . , respectively. The bay 100 is, in this embodiment, composed of a single wafer...
6976340 Universal access port  
A universal access port includes a specific size opening that is formed through a wall of a conditioning enclosure and located at a specific distance from a floor or mounting surface. The opening...
6971832 Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6970770 Cluster tool and method for controlling transport  
At a time Tp when a wafer W is transferred into either a load lock chamber LL 1 or LL 2 , periods PSL for the load lock chambers LL 1 and LL 2 to get ready to permit a transfer of a next wafer W...
6962472 Vacuum processing apparatus and semiconductor manufacturing line using the same  
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
6962471 Substrate conveying module and system made up of substrate conveying module and workstation  
The invention is based on a substrate conveying module ( 1 ) for conveying substrates into a workstation ( 3 ) for inspection, measurement, or processing of the substrates, in which on because of...
6956223 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor  
Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of a substrate or wafer holder 180 , in at least two generally orthogonal directions (so-called...
6955517 Apparatus for storing and moving a cassette  
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette...
6955516 Single wafer dryer and drying methods  
In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating...
6955197 Substrate carrier having door latching and substrate clamping mechanisms  
In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate...
6953315 Apparatus and method for controlling flow of process materials  
An apparatus and method for controlling the flow of a process material from a higher pressure environment to a lower pressure environment is provided. Each of a first and second chamber is divided...
6949144 Low pressure plasma processing apparatus and method  
There are provided a low pressure plasma processing apparatus and method by which a throughput can be improved, film contamination can be effectively prevented, and a film can be readily managed. A...
6949143 Dual substrate loadlock process equipment  
One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The...
6945746 Semiconductor manufacturing equipment and maintenance method  
The equipment comprises a semiconductor-processing device in which a load-lock chamber, a transfer chamber and a reaction chamber are modularized into, a main frame, a stand-alone chamber frame on...
6945405 Transport module with latching door  
A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two...
6935828 Wafer load lock and magnetically coupled linear delivery system  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end...
6935466 Lift pin alignment and operation methods and apparatus  
A lifting mechanism includes a plurality of lift pins which may be driven separately and independently upward to engage an alignment surface of the chamber using ambient atmospheric pressure as the...
6930050 Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing  
A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in...
6926489 Latch sensor for pod transport gripper  
A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and...
6926029 Wafer container  
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
6919001 Disk coating system  
There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers...
6918731 Fast swap dual substrate transport for load lock  
A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber...
6917755 Substrate support  
An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus...
6914251 Alignment structure and method for mating a wafer delivery device to a wafer treatment tool  
Apparatus and method for placement of workpieces such as silicon wafers in relation to an integrated circuit fabrication tool. A robotic arm mounted in relation to the tool moves workpieces in and...
6913243 Unitary slot valve actuator with dual valves  
A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the unitary actuator for each of...
6901971 Transportable container including an internal environment monitor  
A system is disclosed allowing non-invasive, continuous local and remote sensing of the internal environmental characteristics of transportable containers. The system utilizes a variety of sensors...
6900878 Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same  
Reticle-holding devices (reticle “pods”) are disclosed for holding circular reticles as used microlithography systems that use circular reticles. An exemplary reticle pod includes a base and...
6899507 Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections  
Semiconductor processing equipment that has increased efficiency, throughput, and stability, as well as reduced operating cost, footprint, and faceprint is provided. Other than during deposition,...
6896470 Front-opening unified pod auto-loading structure  
The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified...
6890862 Processes for vacuum treating workpieces, and corresponding process equipment  
A process for the vacuum treatment of workpieces, includes loading the workpieces into a treatment facility, surface treating the workpieces in at least one vacuum station of the facility grouped...
6887026 Semiconductor product container and system for handling a semiconductor product container  
A system for handling a semiconductor product container contains a handler for transporting and positioning the container. A loading/unloading position requires first support members forming part...
6883539 Wafer container  
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for...
6881020 Pod transfer system having retractable mast and rotatable and vertically movable hoist  
A pod transfer system having a retractable mast and a rotatable and vertically movable hoist is disclosed. A first extendable robot is situated under a first overhead transfer (OHT) unit, and a...
6877946 Wafer transport apparatus  
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein...
6877219 Apparatus for placing components on printed circuit boards  
The apparatus and method of the present invention relates use a dry atmosphere in the component storage portion of the surface mount device placement machine. The dry atmosphere provides the...
6869457 Clean room for semiconductor device  
A clean room has an equipment installation area where an apparatus for treating an object to be treated such as a semiconductor wafer is installed, a process area 4 where the object is loaded in...
6869263 Substrate loading and unloading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
6869262 Vacuum apparatus and transfer apparatus  
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process...
6866460 Apparatus and method for loading of carriers containing semiconductor wafers and other media  
An apparatus for loading media carriers into a processing chamber, including a pivoting arm mechanism which accepts a carrier in at a lower position, locks it on the arm, and provides a...
6863485 Conveyance system  
Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber 14 is formed parallel to these wafer processing apparatus, and a guide rail 11 is...
6860417 Low shock work transport system for pressure vessels  
A low shock work transport system for moving workpieces into a pressure vessel without significant vibrations or mechanical shocks. The pressure vessel has two opposing ends with a sealable port in...
6858119 Mobile plating system and method  
An exemplary mobile plating system is provided for performing a plating process using virtually any known or available deposition technology for coating or plating as substrate. The mobile plating...
6858085 Two-compartment chamber for sequential processing  
An apparatus for sequential and isolated processing of a workpiece comprises a two compartment chamber and a mechanism to transfer the workpiece from one compartment to the other compartment. The...
6852644 Atmospheric robot handling equipment  
A semiconductor-manufacturing tool has two load locks, one for semiconductor wafers entering the tool for processing and the other for wafers leaving the tool after being processed. The load locks...
6852194 Processing apparatus, transferring apparatus and transferring method  
Processing apparatus is disclosed, that comprises substrate container holding table that can hold substrate container that contains plurality of target substrates, first transferring chamber,...
6848882 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system  
An apparatus and a method for positioning a cassette pod onto a loadport by an overhead hoist transport system are described. The apparatus includes a vertical front panel of a process machine...
6848876 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers  
A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare...
Matches 101 - 150 out of 1065 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >