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8550031 Cluster tool architecture for processing a substrate  
Embodiments of the invention generally include a robot assembly comprising a robot operable to position a substrate at one or more points within a plane, and a motion assembly having a motor...
8545165 High speed substrate aligner apparatus  
A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing....
8545159 Apparatus having conveyor and method of transferring substrate using the same  
An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the...
8545160 Substrate transfer apparatus and substrate transfer method  
A substrate transfer apparatus that transfers a substrate with respect to a processing apparatus includes a substrate accommodation unit for accommodating a plurality of substrates to be loaded...
8540473 Load port  
A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens...
8534976 Apparatus for providing a rotation carrier magazine, and method of operating thereof  
An apparatus for supporting a plurality of carriers or substrates is described. The apparatus includes a vacuum chamber and a rotatable support for supporting the plurality of carriers or...
8534975 Substrate transport apparatus and method for manufacturing magnetic recording medium  
A substrate transport apparatus comprises chambers connected to each other through a gate valve, a transport mechanism configured to open the gate valve and to transport a carrier between the...
8523138 Vacuum processing apparatus  
A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a...
8522958 Vacuum processing apparatus  
An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2)...
8523507 Semiconductor manufacturing systems  
Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use...
8505212 Method for reconditioning or processing a FCR APG-68 tactical radar unit  
A method for improving the manufacture and reliability of new, remanufactured, repaired or reconditioned Fire Control Radar APG-68 tactical radar systems (FCR) utilized in military aircraft and...
8499784 Lock valve in particular for a strip processing unit  
An air-lock valve (1), especially for a band processing plant, provided for closing a gap-like opening (3), traversed by a flexible band substrate (4), between two different plant sections,...
8500382 Airflow management for particle abatement in semiconductor manufacturing equipment  
An airflow management system and/or method used in particle abatement in semiconductor manufacturing equipment. In particular, the apparatus disclosed is capable of creating and managing a...
8491248 Loadlock designs and methods for using same  
Provided are apparatuses and methods disclosed for wafer processing. Specific embodiments include dual wafer handling systems that transfer wafers from storage cassettes to processing modules and...
8486222 Substrate processing apparatus and method of manufacturing a semiconductor device  
A substrate processing apparatus includes a processing chamber configured to process a substrate, a substrate support member provided within the processing chamber to support the substrate, a...
8489227 Transport method and transport apparatus  
Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held...
8489237 High throughput method of in transit wafer position correction in a system using multiple robots  
Methods correcting wafer position error are provided. The methods involve measuring wafer position error on a robot during transfer to an intermediate station. This measurement data is then used...
8485771 Load port apparatus and dust exhaust method for load port apparatus  
In a load port apparatus, a door driving mechanism that supports a door through a communication opening portion leading to a mini-environment is housed in a housing chamber that is in...
8480346 Apparatus for loading and unloading semiconductor substrate platelets  
The goal of the present invention is to provide an apparatus capable of cooperation with at least one piece of wafer processing equipment. The apparatus is connected to a first equipment via a...
8473095 Substrate processing apparatus, method of displaying error of substrate processing apparatus and transfer control method  
A substrate processing apparatus capable of easily checking a state of a transfer mechanism when an error occurs and readily determining a cause of the error is provided. The substrate processing...
8469650 Method of controlling pressure in a wafer transfer system  
A wafer transfer system, and method of controlling pressure in the system, includes a loadport for receiving a wafer container, a housing operably connected to the loadport, a wafer transfer...
8462008 System and method for introducing a substrate into a process chamber  
A system and method for introducing a substrate into a process chamber is provided. A presence or absence of a substrate on a stage in an apparatus for manufacturing a semiconductor or a flat...
8459625 Device for securing vehicle body to conveyor carrier  
A vehicle body clamping device including a clamping linkage unit adapted for mounting to a conveyor carrier at a location beneath a vehicle body while said vehicle body is carried on a conveyor...
8459922 Manipulator auto-teach and position correction system  
A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first...
8462009 System and method for introducing a substrate into a process chamber  
A system and method for introducing a substrate into a process chamber is provided. A presence or absence of a substrate on a stage in an apparatus for manufacturing a semiconductor or a flat...
8454293 Substrate loading and unloading station with buffer  
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station,...
8454294 Minimum contact area wafer clamping with gas flow for rapid wafer cooling  
Apparatuses and methods for cooling and transferring wafers from low pressure environment to high pressure environment are provided. An apparatus may include a cooling pedestal and a set of...
8443513 Substrate processing apparatus  
Disclosed is a substrate processing apparatus which can achieve an improvement in throughput and suppress the reduction in the operation rate of the entire apparatus even when a problem occurs. In...
8444363 Substrate processing apparatus  
Provided is a substrate processing apparatus configured to attain conflicting purposes of high throughput and footprint reduction. The substrate processing apparatus comprises a carrying chamber,...
8439623 Linear semiconductor processing facilities  
Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities...
8434993 Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method  
A robot apparatus according to the invention is configured to hand over a workpiece by rotating by a prescribed angle a finger including a holding means for holding the workpiece. The robot...
8434989 Batch wafer alignment  
Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing...
8430620 Dedicated hot and cold end effectors for improved throughput  
Methods, systems and apparatuses for high throughput substrate transfer are provided. According to various embodiments, the methods and systems described use robots having dedicated end effectors...
8425172 Reticle manipulation device  
A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a...
8423173 Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus  
A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference...
8419337 Gate valve and substrate processing system using same  
A gate valve includes a valve body to be pressed against a peripheral surface around opening through which a processing target object is loaded and unloaded, pressed members arranged on a surface...
8414242 Processing apparatus and processing method  
A processing apparatus including: a carry-in area into which a container containing substrates to be processed is carried, the container having a flange part on an upper part thereof and an...
8414968 In-line film forming apparatus and manufacturing method of magnetic recording medium  
An in-line film forming apparatus capable of conveying a carrier at a high speed, increasing the exhaust capability within a film forming chamber, and easily realizing a high vacuum degree in a...
8413693 Lid opening/closing system of an airtight container  
A curtain nozzle is located above an opening portion in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the...
8408858 Substrate processing system having improved substrate transport system  
A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber,...
8403619 High speed substrate aligner apparatus  
In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate...
8403613 Bypass thermal adjuster for vacuum semiconductor processing  
A bypass thermal adjuster, which may be placed between two robots, provides a chamber for isolation and thermal control of wafers while permitting other wafers to be passed through the adjuster by...
8398355 Linearly distributed semiconductor workpiece processing tool  
A substrate processing apparatus includes a transport chamber capable of holding an isolated atmosphere therein and communicably connected to a charging station for loading and unloading a...
8393845 Substrate convey processing device, trouble countermeasure method in substrate convey processing device, and trouble countermeasures program in substrate convey processing device  
A plurality of process modules for conducting processes on a wafer; conveying modules for conveying the wafer, a turnout module for transferring the wafer to/from the conveying module, and a CPU...
8393370 Substrate laminating apparatus  
A substrate laminating apparatus which sticks substrates together in vacuum with high accuracy. The apparatus includes a first chamber into which two substrates are carried; a second chamber in...
8375998 Lid opening/closing system of an airtight container  
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the...
8374719 Article processing facility and its control method  
An article processing facility includes an article carrier movable along a track and having an article gripper, and a pair of article racks for temporarily supporting articles. Each of the article...
8371792 Substrate processing apparatus  
A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends...
8366370 Vacuum processing apparatus  
A vacuum processing apparatus includes a transfer container for transferring a wafer in the internal space thereof reduced in pressure, a vacuum vessel coupled to the side wall of the vacuum...
8347915 Load-lock technique  
A method of exhausting a gas in a chamber of a load-lock system having a first valve defining an opening for supplying a gas and a second valve defining an opening for conveyance of an article....