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4682927 Conveyor system  
Apparatus for automatically transferring a cassette of semiconductor wafers from one "clean" room to a second "clean" room across an area that may be less clean. The system includes an elevator in...
4682508 Inlet valve for probe apparatus  
A valve assembly for allowing entry of a sampling device or probe device from an ambient atmosphere to a vacuum chamber comprises an electromagnet means which controls a ball made of magnetic...
4680474 Method and apparatus for improved ion dose accuracy  
The implant chamber pressure during ion implantation is controlled within a specified intermediate pressure range higher than the baseline pressure. Implanted dose errors resulting from...
4676709 Long arm manipulator for standard mechanical interface apparatus  
Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical...
4676884 Wafer processing machine with evacuated wafer transporting and storage system  
An evacuable wafer processing machine includes a load-lock station, a wafer transfer station separated from the load-lock station by means of a gate-valve and a wafer coating station. Wafers...
4674939 Sealed standard interface apparatus  
The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions...
4674936 Short arm manipulator for standard mechanical interface apparatus  
Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical...
4670126 Sputter module for modular wafer processing system  
A machine for sputter deposition of a wafer workpiece also sputters on the wafer supporting mechanism. This causes a need for cleaning or replacement of the support mechanism. A sputter machine is...
4668153 Apparatus for posting materials into and out of enclosures  
An apparatus for posting materials into and out of an enclosure through a port in a wall of the enclosure. A container for the materials has a lid engageable with a door for the port and the...
4668484 Transport containers for semiconductor wafers  
An improved transport container for semiconductor wafers includes chamber structure of sheet material with structure in the chamber for supporting the semiconductor wafers. The chamber includes a...
4664578 Semiconductor substrate transport system  
A semiconductor substrate transport system includes a semiconductor substrate holder for holding semiconductor substrates to be transported, a linear pulse motor for driving and reciprocating the...
4662410 Apparatus for filling electric apparatuses with insulating oil under vacuum  
An apparatus for filling electric apparatus such as transformers with insulating oil consists of first and second decompression tanks each having an opening at one side for taking the transformers...
4649830 Clean tunnel conveying structure  
Articles are transferred in a coverless casing while avoiding contamination. The casing is disposed in a first tunnel zone and attached to, but isolated with separator, from a driving assembly...
4646681 Gaseous phase method accumulated film manufacturing apparatus  
A gaseous phase method accumulated film manufacturing apparatus has one or more reaction furnace installation device on which a plurality of reaction furnaces for forming an accumulated film on a...
4643627 Vacuum transfer device  
A vacuum transfer device includes a central processing chamber and a plurality of additional chambers radially positioned around the central chamber and in vacuum-tight connection therewith. A...
4643629 Automatic loader  
In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed...
4632624 Vacuum load lock apparatus  
A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. Upper and lower bell jars, which...
4619572 Transfer device with a double tight barrier between a container and a confinement enclosure  
A transfer device between a container and a confinement enclosure comprises a chamber having an opening issuing to the outside and an opening issuing into the enclosure. These openings are closed...
4616683 Particle-free dockable interface for integrated circuit processing  
A particle-free dockable interface is disclosed for linking together two spaces each enclosing a clean air environment. The interface is composed of interlocking doors on each space which fit...
4605469 MBE system with in-situ mounting  
A molecular beam epitaxy system wherein the molybdenum substrate holder and the molybdenum ring which assembles to the substrate holder to hold the wafer are kept in vacuum essentially all the...
4604020 Integrated circuit wafer handling system  
A system for transfering discs, such as integrated circuit wafers during manufacture, from a location at atmospheric pressure into a vacuum chamber of an electron microscope or the like with a...
4599092 Process for the gasification of carbonaceous agglomerates in a fixed bed reactor  
A process for the gasification of carbonaceous agglomerates in a reactor at a pressure of the range of 5 to 150 bar. The agglomerates are fed into said reactor from a storage zone located above...
4593644 Continuous in-line deposition system  
A continuous, in-line deposition system is disclosed for coating large substrates. The apparatus includes loadlock chambers for loading and unloading substrates arranged in carriers. The carriers...
4592926 Processing apparatus and method  
A vacuum processing apparatus and method utilize a vacuum chamber formed from a pair of casing sections, one of which is movable in to and out of sealing engagement with the other casing section....
4592306 Apparatus for the deposition of multi-layer coatings  
Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for...
4584045 Apparatus for conveying a semiconductor wafer  
A transfer apparatus for conveying a semiconductor wafer between a first location and a second location comprises transfer arm means including first and second elongated arm members each having...
4573431 Modular V-CVD diffusion furnace  
A novel modular V-CVD diffusion furnace includes a cylindrical quartz diffusion tube having integral end flanges, a first metallic sealing plate having gas ports removably fastened to one flange,...
4569623 Dump assembly  
A dump assembly having a fixed conduit and a rotatable conduit provided with overlapping plates, respectively, at their adjacent ends. The plates are formed with openings, respectively, normally...
4566594 Component verifier  
A verifier for a chip type component placement mechanisms which has an air track conveying the component from a supply source to a placement head. The verifier is positioned in the air track and...
4558984 Wafer lifting and holding apparatus  
An automatic sputtering apparatus for coating semiconductor wafers uses shuttle wafer carriers and elevators to handle wafers within the apparatus. The wafer carrier has a hole in the center. One...
4551206 Apparatus with moving bed pressure letdown stage for recovering retorted oil shale  
A dry sealing leg apparatus is comprised of four chambers through which a moving bed of retorted shale particulates from an oil shale retort is passed serially: a surge chamber, a gas injection...
4548699 Transfer plate rotation system  
The system for rotating the transfer plate of a coating system in a vacuum chamber consists of a transfer plate driver assembly on the outside of the chamber at the axis and a transfer plate...
4546897 Inert atmosphere transfer vessel  
A novel hermetically sealed, protective atmosphere transfer vessel is described which comprises a container defining an interior cavity and opening thereof for receiving a sample to be protected...
4544317 Vacuum-to-vacuum entry system apparatus  
A vacuum-to-vacuum entry system which uses a rotary transport to transfer workpieces between two vacuum environments in a direction parallel to its axis of rotation and through the interface of a...
4542712 Apparatus for molecular beam epitaxy  
An apparatus for molecular beam epitaxy according to the present invention is so constructed that a substrate is introduced into a vacuum vessel with a substrate surface for epitaxial growth...
4540326 Semiconductor wafer transport system  
A system is described for the automated transfer of wafer carriers containing semi-conductor wafers, to various work stations and processing units along a process line. The system includes tunnel...
4538068 Manipulator having thermally conductive rotary joint for transferring heat from a test specimen  
A manipulator for rotatably moving a test specimen in an ultra-high vacuum chamber includes a translational unit movable in three mutually perpendicular directions. A manipulator frame is rigidly...
4534389 Interlocking door latch for dockable interface for integrated circuit processing  
A particle-free dockable interface with an interlocking latch is disclosed for linking together two spaces each enclosing a clean air environment and preventing the opening of the interface...
4534314 Load lock pumping mechanism  
In a vacuum system for processing workpieces, a vacuum chamber has a workpiece-entrance opening. Load lock means for said entrance opening include a door for sealing the outside of said opening, a...
4533289 Sealing and liquid displacement systems for a linear pocket feeder  
An improved sealing and liquid displacement system for a continuous linear pocket feeder for feeding materials from a low pressure to a high pressure region, particularly for feeding coal in a...
4532816 Sample vessel  
A sample vessel for carrying a sample and storing same in a high vacuum. The vessel includes a hollow body which is open at one end. A specimen carrier plate is coupled by a translating mechanism...
4524719 Substrate loading means for a chemical vapor deposition apparatus  
A controlled temperature deposition device comprising an inner reaction chamber having gas distribution means for introducing gas into inner chamber and removing gas therefrom and a vacuum chamber...
4523985 Wafer processing machine  
A sputter coating machine includes a rectilinearly translatable load-lock door closing off one end of an evacuable chamber. Wafers to be coated are loaded and unloaded by an elevator blade onto a...
4516435 Precision manipulator heating and cooling apparatus for use in UHV systems with sample transfer capability  
An improvement of a precision manipulator for use in UHV systems with sample transfer capability in which a spring loaded thermocouple 47 and a heater electrode (51, 52) are both in direct contact...
4503807 Chemical vapor deposition apparatus  
A chemical vapor deposition apparatus has a reactor divided into a reaction space and a purging space by a susceptor for supporting a wafer and a loading chamber communicated through a gate with...
4502827 Transporter for linear pocket feeder  
An endless loop transporter for a linear pocket feeder especially for metering powdered coal from a reservoir at atmospheric pressure to a supply duct to a gas turbine compressor at a...
4500407 Disk or wafer handling and coating system  
A system for handling and individually processing a plurality of thin substrates is described. The system includes a main chamber, entrance and exit load locks, a plurality of processing stations,...
4499776 Vacuum sample introduction unit  
A vacuum sample introduction device includes a roller bearing assembly which rigidly supports a probe rod for accurate reciprocation relative to the device.
4498833 Wafer orientation system  
Apparatus for programmably orienting a semiconductor wafer in an ion implantation system so as to limit channeling or to control the depth of penetration of impinging ions. The apparatus is...
4498416 Installation for treatment of materials for the production of semi-conductors  
Installation for treatment of materials for semi-conductors, starting from slices (30) gathered onto carriers (5) and treated in a series of vacuum chambers. The installation is in modular form,...