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4863577 Desmearing and plated-through-hole method  
An integrated plasma desmearing and plated-through-hole method to first plasma desmear a printed circuit board and then plate through the holes of the plated circuit board by sputtering. The...
4861563 Vacuum load lock  
A compact load lock and processing chamber is disclosed in which a moveable member forms a closure for both a load lock volume and an article processing volume. The moveable member is connected to...
4860669 Energy efficient continuous flow ash lockhoper  
A continuous flow ash lockhopper includes an ash hopper at the outlet of a high temperature, high pressure reactor vessel containing heated high pressure gas, a fluidics control chamber having an...
4857160 High vacuum processing system and method  
A novel method and machine are provided for processing workpieces at one or more work-stations under vacuum conditions. The machine comprises means for receiving at atmospheric pressure an object...
4850749 Airlock having flaps in continuous feed of material carried by a gas stream while obstructing free flow of gas  
An airlock for the continuously feeding through of a material while obstructing the free flow of a gas is provided. The airlock comprises a first continuous belt having a plurality of nonporous...
4851018 Installation for the storage and transfer of objects in a very clean atmosphere  
The installation according to the invention includes a cabinet for storing objects, apparatus for processing these objects, apparatus for transferring these objects between the storage cabinet and...
4851101 Sputter module for modular wafer processing machine  
A sputter coating module for a multifunction processing machine is provided in which the supporting mechanism for the workpiece can be isolated from the sputtering source, the pumps and other...
4828224 Chemical vapor deposition system  
This invention discloses a system for chemically depositing various materials carried by a reactant gas onto substrates for manufacturing semiconductor devices. The system includes special loading...
4826360 Transfer system in a clean room  
A transfer system for transferring a SMIF pod™ in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms™, the arms...
4826698 Vacuum chamber system  
A pressure treatment chamber comprising an enclosure whose interior is maintained at predetermined pressure and temperature conditions, the enclosure defining at least one access port, a rotary...
4824309 Vacuum processing unit and apparatus  
A vacuum processing unit and apparatus comprises a buffer chamber that can be evacuated, a processing chamber that can be communicated with said buffer chamber a first sample carrier installed in...
4820106 Apparatus for passing workpieces into and out of a coating chamber through locks  
In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is...
4818169 Automated wafer inspection system  
A high precision automated wafer inspection station provides a base table area on which an X-Y stage is movable in mutually orthogonal directions relative to an inspection axis in alignment with a...
4815912 Box door actuated retainer  
A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box...
4812101 Method and apparatus for continuous throughput in a vacuum environment  
Disclosed is a method and apparatus for continuous introduction and exit of workpieces into and out of a vacuum. A first seal is provided between the atmosphere and a first pumping station. This...
4802809 Manipulator for standard mechanical interface apparatus  
The present invention provides an apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has...
4801241 Modular article processing machine and method of article handling therein  
Automated article processing, particularly semiconductor wafer processing, is accomplished in a modular article processing machine. The design of the machine allows easy reconfiguration between...
4797054 Apparatus for loading and unloading a vacuum processing chamber  
A main chamber is provided through which a workpiece is loaded or unloaded. A second chamber is provided within the main chamber to cover the workpiece during evacuation and gas introduction...
4795299 Dial deposition and processing apparatus  
A system for moving and processing workpieces includes individual stations isolated from one another and from a main chamber by seals formed by a transport mechanism. Workpieces are moved in a...
4795300 Loading apparatus for a work chamber  
An apparatus for loading workpieces without exposure of a work chamber to the atmosphere comprises a transfer chamber formed in part by an inner plate section which serves as a cover plate with an...
4790921 Planetary substrate carrier method and apparatus  
An inexpensive, vertically oriented multiple substrate carrier is disclosed for high-temperature, high vacuum film deposition systems. In one embodiment, the substrates have central circular...
4790258 Magnetically coupled wafer lift pins  
An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic...
4790750 Automated flexible installation for a rapid thermochemical treatment  
An automated installation for the rapid thermochemical treatment of parts, notably for the mechanical industry, characterized in that it includes: a transfer lock for the parts under a controlled...
4785962 Vacuum chamber slit valve  
A slit valve for sealing an access opening in a vacuum chamber. The slit valve body or door is pivotally mounted adjacent the opening and has a pair of cam blocks mounted at its opposite ends. Cam...
4781511 Semiconductor processing system  
A semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, the first...
4776744 Systems and methods for wafer handling in semiconductor process equipment  
A system and methods for handling semiconductor wafers and dummy wafers in semiconductor process equipment such as an ion implanter. Tray assemblies are provided, each of which is adapted for...
4776745 Substrate handling system  
A substrate handling system supplies new wafers to a vacuum chamber containing a lithography system, and outputs processed semiconductor wafers to an environment with normal atmospheric pressure....
4775281 Apparatus and method for loading and unloading wafers  
Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing...
4764076 Valve incorporating wafer handling arm  
A valve for a wafer processing machine is formed with a wedge-shaped sliding gate. A folded wafer handling arm is stored within the wedge and pumped to keep the arm clean while the valve is closed.
4763602 Thin film deposition apparatus including a vacuum transport mechanism  
An apparatus for depositing thin films on a substrate includes at least one deposition module, a load lock module, a gate valve and a transportation mechanism for moving a substrate between the...
4749465 In-line disk sputtering system  
A step-dwell transport apparatus and method for use in an in-line controlled environment processing system is disclosed. The transport apparatus employs a plurality of shuttles arranged in series...
4746256 Apparatus for handling sensitive material such as semiconductor wafers  
An apparatus for handling or inspecting a sensitive material such as a semiconductor wafer or mask in a self-contained environment, such that the apparatus can be used outside a clean room. The...
4744712 Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes  
The instant invention relates to a loading system for loading semiconductor wafers into a diffusion tube. The combination of a track and a loader trolley designed for the track is disclosed, along...
4739882 Container having disposable liners  
The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior...
4733631 Apparatus for coating substrate devices  
The present apparatus has a movable table with apertures therein. In each aperture there is loaded a carrier device and each carrier holds a substrate to be coated. The carriers are advanced in a...
4734004 Sluice device  
A sluice device for insertion between zones having different environmental conditions, for instance pressure and/or temperature. A drum is rotatably arranged in an opening in a housing and has...
4732527 Procedure for transferring objects without breaking confinement  
A procedure for transferring an object along an axis, from a contaminated and radioactive zone to a clean zone without breaking the confinement when the zones are separated by a slab is disclosed....
4724874 Sealable transportable container having a particle filtering system  
A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an...
4722654 Article transfer system  
A load lock chamber is secured to a Rutherford Backscattering Spectrometer in communication with the spectrometer chamber. A valve separates the two chambers. A specimen manipulator transfers a...
4715764 Gate valve for wafer processing system  
A modular wafer processing system requires a gate valve of minimum thickness. A gate valve is provided in which the gate is an assymetric wedge on an assymetrically mounted drive shaft.
4707334 Isolation method and apparatus for sterilizing chambers of filling machines  
A chamber, in which an atmosphere comprising a toxic vapor is established, is pneumatically isolated from the ambient environment. The isolation technique permits objects to be sterilized to be...
4705950 Specimen-exchanging apparatus  
A feed screw is provided in a specimen-exchanging chamber connecting with a specimen chamber valve and a removable element is removed in the axial direction of the feed screw by rotation of the...
4705951 Wafer processing system  
A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a...
4701251 Apparatus for sputter coating discs  
Apparatus for sputter coating a disc comprises an evacuable chamber with a disc entry and exit opening. A disc to be coated is supported at the center of the disc by support means and drive means...
4699554 Vacuum processing apparatus  
This invention is directed to a vacuum processing apparatus which is constructed so that a sample may be carried between a main vacuum chamber and a portion of the atmosphere outside the main...
4699555 Module positioning apparatus  
A housing has a flange for engagement with an evacuable vessel having a work table for supporting devices to be processed with an ion beam inside the vessel. The housing has rails extending into...
4695214 Apparatus and method for feeding solid materials to a high pressure vessel  
An apparatus and method utilize liquid pressurized lock hoppers to feed solids to a high pressure vessel. Solids are introduced to a first lock hopper, and gases are passed to the first lock...
4687542 Vacuum processing system  
A system for performing one semiconductor manufacturing operation or sequence of operations with reduced particulate contamination. A vacuum-tight wafer carrier, which contains numerous wafers in...
4687408 Lock for the transport of bulk material  
In a lock for the transport of bulk material between chambers being under different pressure a lock chamber (4) is guided tightly and driven by a reciprocal movement in a preferably horizontal...
4685852 Process apparatus and method and elevator mechanism for use in connection therewith  
Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are...