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5096364 Wafer arm handler mechanism  
A wafer handler arm conveys a wafer from a horizontal orientation to a vertical orientation for wafer processing. The arm includes a wafer holding member which is rigidly attached to a first...
5092729 Apparatus for transporting a wafer and a carrier used for the same  
A wafer transporting apparatus comprising at least one carrier for supporting a substantially circular thin wafer having a flat plane, the carrier including a supporting base for supporting the...
5092728 Substrate loading apparatus for a CVD process  
Each substrate is loaded into a receiving chamber upon a positionable platform, which platform is in sealed relationship with the receiving chamber to permit purging of the receiving chamber prior...
5090356 Chemically active isolation passageway for deposition chambers  
An improved gas gate (34) is adapted to operatively interconnect to adjacent chambers in which process gases are introduced for depositing a first layer (16) upon a substrate (11) in a first...
5083364 System for manufacturing semiconductor substrates  
A system for manufacturing substrates, in particular wafers, glass masks, and channels, having individual process stations for treating and/or processing the various substrates in a clean...
5076205 Modular vapor processor system  
A system for multichamber processing of semiconductor wafers providing flexibility in the nature of processing available in a multi processing facility. To accommodate changing processing demands...
5072656 Method and apparatus for controlling the transfer of tubular members into a shelter  
A portable drilling apparatus 10 designed to be used in environmentally severe locations, such as the Arctic, includes provisions for heating various portions thereof, including a pipe shelter 14....
5069269 Lifting and turning unit for a melting and/or casting plant  
A lifting and turning unit for a melting or casting plant. The lifting and turning unit for a deposit stand, preferably a table, for ingot molds of a vacuum melting and casting plant is provided....
5067218 Vacuum wafer transport and processing system and method using a plurality of wafer transport arms  
A vacuum wafer transport and processing system and method includes a central vacuum chamber having wafer holding means disposed therein. A plurality of wafer transport arms are disposed between...
5062758 Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber for doing work thereon in the chamber  
An automated workpiece handling system rapidly moves a workpiece into a controlled atmosphere chamber, like a vacuum chamber, to a work station, like an electron beam, and withdraws the piece...
5058526 Vertical load-lock reduced-pressure type chemical vapor deposition apparatus  
A CVD apparatus having a single loading-unloading chamber that serves as a loading chamber in the left and center parts and as an unloading chamber in the right and center parts. Alternately,...
5056875 Container for use within a clean environment  
A container is provided for use in a clean environment, thereby allowing functional access to items such as chemicals stored within the container while minimizing contamination to the clean...
5051054 Elevating table and transporting method  
An elevating table has a housing with a workpiece support movably guided in an upward and downward direction by which a disk-shaped workpiece is transportable into a processing chamber of a vacuum...
5044871 Integrated circuit processing system  
A vacuum-tight wafer carrier, and a load lock suitable for use with this wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is...
5037262 Holding device for a disk and application therefor  
A holding device for semiconductor disks or wafers orients and secures the disk during transport to a working position. Shortly before the disk reaches a working position the device releases the...
5033927 Device for carrying out sequential thermal treatments under a vacuum  
A device for treating parts in a controlled atmosphere comprises an airtight chamber (2), treatment cells (31) mounted on the airtight chamber and able to communicate with the airtight chamber for...
5026239 Mask cassette and mask cassette loading device  
A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contained in synchrotron radiation, to print a pattern...
5020475 Substrate handling and transporting apparatus  
A substrate loading subsystem receives substrates from an external source and delivers them to an input port. A substrate pickup transports the substrates serially from the input port to a...
5019233 Sputtering system  
A system (10) for the vacuum processing of substrates such as semiconductor wafers which includes a central handling chamber (14), a number of separately pumped and randomly accessed process...
5016561 Continuous vacuum processing apparatus  
A continuous vacuum processing apparatus including a slit-type sealing portion and a guide roller for guiding an object to be processed. The guide roller is provided at each of the two sides of...
5017073 Transport system for conveying workpiece between first and second media  
A lock chamber for conveying a workpiece from one medium (U0) into another medium (U7) which comprises a lever (11) acting as a transport system and pivotably mounted in the chamber on one side....
5017131 Atmosphere furnace  
An atmosphere furnace including a plurality of divided furnace units, work transfer devices connecting the adjacent divided furnace units and those for the divided furnace units at both ends of...
5013384 Vacuum system  
An inlet opening in an evacuatable vacuum system is substantially enlarged and closed off by a porous plate so that the ingress of dust is avoided and a very uniform inflow of gas is realized. A...
5011366 Ultraclean robotic material transfer method  
An automatic wafer handling system utilizing a vacuum pneumatic controlled cable driving mechanism. In principle, the necessary movements are provided by air cylinder actuation of pulley supported...
4995430 Sealable transportable container having improved latch mechanism  
A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the...
4990047 Vacuum apparatus  
A vacuum apparatus for treating disk-shaped workpieces includes a central distribution chamber into which the workpieces are brought from a lock through a communication opening which can be closed...
4981408 Dual track handling and processing system  
A dual track substrate handling and processing system includes an entrance load lock station, an exit load lock station and a plurality of substrate processing stations, all positioned above a...
4969790 Apparatus on the carousel principle for the coating of substrates  
Apparatus for the coating of substrates in a vacuum chamber is disclosed wherein a rotatable substrate holder bears a plurality of substrate receivers adapted to transport a like number of...
4962726 Chemical vapor deposition reaction apparatus having isolated reaction and buffer chambers  
In a CVD reaction apparatus having a heated reaction chamber (102) and a buffer chamber (103) connected continuously under the reaction chamber and a wafer boat elevator (114) which is to be...
4963065 Centrifugal pump for pulverized material  
A centrifugal pump for feeding pulverized material such as coal particles from a low pressure zone into a high pressure zone, said pump having nozzles mounted on a rotor. The pulverized material...
4953497 Apparatus for coating continuous webs  
An apparatus for vacuum coating continuous web materials has a housing with a removable cover disposed on at least one side for the hermetic closure of the housing, and a winding means having...
4951601 Multi-chamber integrated process system  
An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator,...
4948979 Vacuum device for handling workpieces  
A vacuum device comprises a vacuum working chamber for performing a predetermined process to a material such as substrate and a vacuum prechamber for changing the material. Both the vacuum...
4944246 Molecular beam epitaxy apparatus  
A molecular beam epitaxy apparatus comprises a growth chamber provided therein with a holder support frame and connected via a first gate valve to a preparation chamber which in turn is connected...
4944645 Method and apparatus for loading objects into evacuated treating chamber  
In a method and apparatus for depicting a circuit pattern on an article such as a semiconductor wafer, glass mask or a reticle supported by a stage in an evacuated casing with an electron beam,...
4929139 Passive electrostatic vacuum particle collector  
Disclosed are passive electrostatic particle collectors (10 & 12) for use in vacuum chambers (24 & 32) especially for a particle beam machine system (30 & 36) to collect particulates, such as dust...
4923584 Sealing apparatus for a vacuum processing system  
A sealing arrangement for a vacuum processing system for semiconductor wafers which is effective to apply a sealing force to a valve element (66) between chambers of the processing system. The...
4917556 Modular wafer transport and processing system  
A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment...
4915564 Method and apparatus for handling and processing wafer-like materials  
An apparatus and method for moving a plurality of wafer-like articles such as semiconductor substrates back and forth between a carrier and a processing chamber maintained in an interior...
4909695 Method and apparatus for handling and processing wafer-like materials  
The apparatus is provided with a main chamber divided into two chamber halves by a rotatable index plate. The plate rotates through a load lock station, through which wafer-like articles are...
4909185 Cantilever and cold zone assembly for loading and unloading an oven  
Apparatus for heating product with the product during heating subjected to a controlled, nonatmospheric gas environment. The apparatus includes a double-walled cold zone assembly adapted to be...
4904143 Apparatus for the continuous feeding of material to be melted  
In an apparatus for the continuous feeding of material to a melting crucible in the pulling of monocrystals in a vacuum tank, a first container (3) is provided which is provided with an internal...
4902934 Plasma apparatus  
A plasma apparatus which is; provided with a pair of plasma generation chambers at both sides of a specimen chamber provided therein with two specimen mounts for fixing specimens to be subjected...
4897963 Connector device for two reactor containments  
In order to place in sealed communication two reactor containments provided with openings capable of having a displacement between their axes, an assembly (12) is placed between the flanges (B1,...
4895486 Wafer monitoring device  
A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an...
4892451 Apparatus for the quasi-continuous treatment of substrates  
In an apparatus for the treatment of substrates supplied in cassettes, with a series of lock chambers and treatment chambers, with a transport system for transporting at least one substrate holder...
4886412 Method and system for loading wafers  
A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer...
4883020 Apparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductor  
A transfer chamber is provided between MOCVD reaction chamber and load lock chamber, connected to each chamber through an opening for each, for preventing the reaction chamber from the invasion of...
4875825 Method for automated cassette handling  
An automated cassette handler is disclosed for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system...
4867629 Dusttight storage cabinet apparatus for use in clean rooms  
There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing...