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8827617 Substrate processing apparatus  
A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends...
8827695 Wafer's ambiance control  
A semiconductor manufacturing system, an interface system, a carrier, and a method for providing an ambient controlled environment is disclosed. The semiconductor manufacturing system comprises a...
8821098 Load port  
A load port is disclosed which allows a wafer to be transferred between the inside of a FOUP and the inside of a semiconductor fabrication apparatus even during a purge operation. The load port is...
8815616 Slit valve unit and film forming apparatus having the same  
There is provided a slit valve unit including: a body disposed on an outer side of a process chamber and having an entrance connected to an opening of the process chamber; a slit valve provided in...
8814488 Substrate processing apparatus and semiconductor device manufacturing method  
A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is sealed by a lid, a load port for placing the...
8814489 Substrate processing system and substrate processing method  
A substrate processing system includes a processing chamber that performs a preset process on a plurality of substrates in a batch-type manner; a substrate mounting table, installed within the...
8807905 Linear semiconductor processing facilities  
Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities...
8807914 Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber  
The present invention provides a seal device comprising a sealing passage which allows communication between a first space and a second space, and evacuation lines individually connected to the...
8807616 Robot hand  
A robot hand includes a mounting surface to which a work unit is mounted with some freedom of horizontal movement. A pair of anti-fall hooks is formed at a tip portion of the mounting surface to...
8794896 Vacuum processing apparatus and zonal airflow generating unit  
A vacuum processing apparatus includes a vacuum processing chamber; a load lock chamber connected to the vacuum processing chamber via a gate valve or via a gate valve and a depressurized space...
8777540 Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers  
An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed...
8777547 Systems, apparatus and methods for transporting substrates  
A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper...
8764370 Scalable stockers with automatic handling buffer  
Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a...
8752580 Vacuum chamber for processing substrate and apparatus including the same  
A vacuum chamber for processing a substrate includes: a chamber body; and a chamber lid combined with the chamber body, wherein the chamber lid comprises: a frame having a plurality of openings;...
8747046 Vacuum processing apparatus  
The vacuum processing apparatus is comprised of two vacuum transfer vessels in which a wafer is transferred through; two vacuum process vessels connected to these vacuum transfer vessels...
8747050 Substrate transport apparatus  
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled...
8740535 Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage medium  
In a vacuum transfer chamber, a position detecting mechanism for detecting the positions of semiconductor wafers is arranged. The semiconductor wafers disposed at predetermined positions in a load...
8740536 Method and device for introducing and removing substrates  
The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport element (4). A collection container (3) is...
8740537 Transport device having a deflectable sealing frame  
A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports...
8741096 Apparatus for semiconductor processing  
An apparatus for semiconductor processing capable of performing semiconductor processing such as etching, depositing, etc. on a surface of a substrate such as a wafer. The apparatus for...
8738174 Substrate processing apparatus and method for loading and unloading substrates  
Provided is a substrate processing apparatus for loading substrates such as solar cell substrates on a tray in substrate processing equipment for processing a large number of substrates. The...
8727125 Substrate container with fluid-sealing flow passageway  
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access...
8731701 Substrate treatment method and substrate treatment system  
After a cassette is mounted on a cassette mounting part, a control unit instructs a substrate treatment apparatus to start treatment on substrates in the cassette. Thereafter, the control unit...
8702365 Substrate processing apparatus and method for transferring substrate for the apparatus  
A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load...
8684650 Methods for introduction of a reactive material into a vacuum chamber  
A vacuum chamber assembly includes a vacuum chamber containing a reactive material, an inlet fill tube fixedly attached to the vacuum chamber, and an outlet fill tube fixedly attached to the...
8672603 Auto-sequencing inline processing apparatus  
An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates...
8668422 Low cost high throughput processing platform  
As part of a system for processing workpieces, a workpiece support arrangement, separate from a process chamber arrangement supports at least two workpieces at least generally in a stacked...
8662811 Substrate processing apparatus  
Manufacturing cost or energy consumption of a substrate processing apparatus can be reduced. The substrate processing apparatus includes a substrate loading/unloading unit (a substrate transit...
8662812 Load lock fast pump vent  
A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured...
8656858 Device and method for chemically and electrolytically treating work pieces using a conveyor system to transport work pieces between treatment tanks  
A device and a method for chemically or electrolytically treating work pieces (1) are proposed in an effort to avoid irregular contours of finest conductive structures, pads and lands as well as...
8651789 Substrate processing apparatus  
A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably...
8651790 Warehouse storage system  
A system and method for the safe storage of items wherein a storage structure is provided having a first section in which storage units are stored in vertically oriented cells with each storage...
8641351 Robot and instruction method thereof  
A robot control unit that turns off a holding unit for a plate member, while the plate member is placed on an end effector, and lower the end effector, by a predetermined distance, from an initial...
8636458 Integrated post-exposure bake track  
Systems and methods for processing wafers, a combined post expose bake and chill unit, and an interface are disclosed. An exemplary system includes a lithography tool, local track, transfer...
8628288 Substrate transport apparatus with active edge gripper  
In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an...
8628289 Material handling and storage/warehouse system  
A system and method for optimizing the storage capacity of an automated material handling and storage system wherein rows of vertical columns of storage bins are spaced in opposing relationship...
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus  
A processed object processing apparatus which enables a plurality of processes to be carried out efficiently. A plurality of treatment systems are communicably connected together in a line and in...
8616820 Double dual slot load lock chamber  
Provided herein is a double dual slot load lock chamber. The double dual slot load lock chamber includes two isolated load lock regions that are vertically stacked and share a common wall, wherein...
8616821 Integrated apparatus to assure wafer quality and manufacturability  
The present disclosure provides a system and method for processing a semiconductor substrate wherein a substrate is received at a load lock interface. The substrate is transferred from the load...
8608422 Particle sticking prevention apparatus and plasma processing apparatus  
In order to prevent particles within a unit from sticking to a substrate in a substrate processing process, an ion generator charges the particles. At the same time, a direct current voltage of...
8606400 Robot system  
A robot system according to embodiments includes a conveying device, a plurality of robots, an image capturing device, a workpiece detecting device, and a control device. The control device...
8602707 Methods and apparatus for a chemical vapor deposition reactor  
Embodiments of the invention generally relate to a levitating substrate carrier or support. In one embodiment, a substrate carrier for supporting and carrying at least one substrate or wafer is...
8602706 Substrate processing apparatus  
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The...
8591163 FOUP opener and operating method thereof  
To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening...
8588950 Substrate processing apparatus  
Only a wafer for QC check may be transferred and a production wafer may prevent from being transferred into an assigned process chamber whose QC check is not completed after a maintenance task,...
8574366 Vacuum processing apparatus  
A vacuum processing apparatus includes: a plurality of carriers to be mounted with a base member; a circulation path which is kept in a controlled atmosphere and through which the carriers...
8569718 Charged particle beam system  
In the embodiment a charged particle beam system includes a main chamber, an exchange chamber, an x-y positioning stage housed in the main chamber, a substrate-supporting structure supported by or...
8562271 Compact substrate transport system  
A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an...
8562272 Substrate load and unload mechanisms for high throughput  
In various exemplary embodiments described herein, a system includes a plurality of carrier arms each having concentrically mounted midpoints between opposing ends of the carrier arms with a wafer...
8562273 Load port apparatus  
Provided is a load port apparatus having a structure capable of resisting against a moment generated at a time of driving of a door increased in weight owing to upsizing. A pair of rectangular...