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5503675 Apparatus for applying a mask to and/or removing it from a substrate  
First and second transport chambers are joined to one another through a common opening (5), and house respective substrate carriers (6, 7) mounted for rotation about parallel axes. In at least one...
5501564 System for the storage and transportation of flat objects such as extra-flat boxes and its portable rack  
According to the present invention, a system for storing and distributing flat objects to different working stations is provided. The system comprises storage modules (2), transportation or...
5486080 High speed movement of workpieces in vacuum processing  
A high speed wafer processing apparatus employs two wafer transport robots to move wafers from two load locks past a processing station with gentle vacuum cycling and without pumpdown delays. Both...
5484004 Transfer closure valve for filling and emptying containers  
There is disclosed a transfer closure valve for safely filling and emptying containers of any type with a liquid, pasty or powdery medium. The medium flows from a barrel into another container...
5482161 Mechanical interface wafer container  
A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like,...
5478195 Process and apparatus for transferring an object and for processing semiconductor wafers  
Apparatus for processing semiconductor wafers includes a load lock chamber with a first gate valve and a second gate valve so as to load and unload cassettes through the first gate valve, and to...
5474410 Multi-chamber system provided with carrier units  
A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette...
5468111 Disc loading and unloading assembly  
An assembly for transferring discs between disc manufacturing machinery or processes comprises a series of storage cassettes having discs stored therein. Each stored disc is retrieved from the...
5468112 Wafer container and wafer aligning apparatus  
A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn...
5462397 Processing apparatus  
The processing apparatus of the present invention comprises a processing chamber for providing a predetermined processing to a processing object, a transfer chamber having transfer arm for...
5451131 Dockable interface airlock between process enclosure and interprocess transfer container  
Disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock...
5451130 Method and apparatus for the step-by-step and automatic loading and unloading of a coating apparatus  
A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6)....
5445491 Method for multichamber sheet-after-sheet type treatment  
In a multichamber type sheet-after-sheet type of treating apparatus, there are provided an inlet/outlet port capable of independently control pressure and atmosphere in the port, a platform...
5439522 Device for locking a flat, preferably discoid substrate onto the substrate plate of a vacuum coating apparatus  
In a device for locking a flat, discoid substrate 9 provided with a central opening 38 onto a substrate plate 22 provided with a centering post 35 projecting above the substrate bearing surface 42...
5435683 Load-lock unit and wafer transfer system  
A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being...
5435682 Chemical vapor desposition system  
This invention discloses a system for chemically depositing various materials carried by a reactant gas onto substrates for manufacturing semiconductor devices. The system includes special loading...
5433574 Gas purge unit for a portable container  
A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet...
5425611 Substrate handling and processing system  
This invention relates to a system for handling and processing thin substrates, such as substrates for magnetic disks. The system includes a main chamber, entrance and output load locks, a buffer...
5421979 Load-lock drum-type coating apparatus  
Vacuum coating apparatus (30) includes a coating chamber (32), and a load-lock chamber (34) connected to the coating chamber via a high vacuum valve (44). The coating chamber includes...
5417537 Wafer transport device  
An apparatus for transporting material, such as semiconductor wafers, between process modules coupled to a chamber. The transport apparatus includes a chamber; guide rails affixed to an outer...
5407314 Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber  
Apparatus for loading and unloading disk-shaped substrates into and out of a vacuum coating chamber and for transporting the substrates within this chamber, having a first station for loading and...
5405230 Load-lock unit and wafer transfer system  
A load-lock unit is disposed between first and second atmospheres, stores a wafer transferred from the first atmosphere, is blocked off from the first atmosphere, is thereafter set in the same...
5404894 Conveyor apparatus  
A thermal processing station is provided with a first conveyor that conveys a wafer from a first conveyor access portion and a second conveyor that conveys another wafer from a second conveyor...
5405231 Conveyor with rotary airlock apparatus  
An apparatus for transferring objects from a first region to a second reg, the first and second regions having differing atmospheric environments. The apparatus includes a shell having an entrance...
5395198 Vacuum loading chuck and fixture for flexible printed circuit panels  
Disclosed is a system for handling large area, in-process, circuit panel layers. The circuit panel layers are thin and flimsy, and require rigid support for certain processing steps. The system...
5391035 Micro-enviroment load lock  
A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at...
5388944 Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus  
A wafer loading and unloading chamber is provided at the bottom of a reaction tube of a heat treatment section, a robot chamber and cassette chamber are coupled via gate valves to the wafer...
5388945 Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers  
A fully automated and computerized conveyor based manufacturing line architecture (15) is provided for the storage, handling and transportation of articles by processing equipment (500). The...
5387067 Direct load/unload semiconductor wafer cassette apparatus and transfer system  
A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first...
5382127 Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment  
A pressurized interface apparatus (200) is provided for transferring a workpiece from within a pressurized sealable transportable container (100) into a specified environment and vice versa. The...
5382126 Multichamber coating apparatus  
A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of...
5377476 Arrangement for storing, transporting and loading substrates  
Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which...
5378283 Treating device  
A treating device of the closed system structure in which semiconductor wafers are conveyed from a load lock chamber to a process tube comprises a gas feed pipe for feeding inert gas into a load...
5378107 Controlled environment enclosure and mechanical interface  
Disclosed is a method for enabling the contents of a first chamber to be moved into a second chamber without exposing either chamber to elements making particulate-producing sliding contact. In...
5377816 Spiral magnetic linear translating mechanism  
A spiral magnetic linear translating mechanism for use with a wafer processing system which includes a plurality of evacuatable housings connected in a series to form a processing line comprises...
5376212 Reduced-pressure processing apparatus  
A reduced-pressure processing apparatus which comprises a wafer table, two processing chambers, and three load-locking chambers. The wafer table temporarily supports a workpiece. In the first...
5374147 Transfer device for transferring a substrate  
A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is...
5374148 Procedure and apparatus for feeding a material into a pressurized space  
The invention relates to a procedure and an apparatus for feeding solid material into a pressurized space. According to the invention, the apparatus comprises a feed chamber (12) communicating...
5372647 Apparatus for forming thin film  
An apparatus for forming a thin film without spoiling contact resistances and breakdown voltage characteristics. The apparatus is so designed that at least one of first, second and third...
5363872 Low particulate slit valve system and method for controlling same  
Low particulate slit valve system and method for controlling the closure pressure applied to a slit valve. An apparatus in accordance with the present invention includes a barrier having a slit...
5364219 Apparatus for clean transfer of objects  
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the...
5364225 Method of printed circuit panel manufacture  
Disclosed is a method of manufacturing a printed circuit panel. The method is carried out without a cleanroom, but in a clean room environment. The first step is to place a thin, non-rigid panel...
5354380 Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus  
A plunger (14) is displaceably mounted in a vacuum chamber (42) and movable on a first linear path into the plane of substrate (20), for the mounting and for the transport of the mask (15)...
5344542 Multiple-processing and contamination-free plasma etching system  
The present invention includes plural plasma etching vessels and a wafer queuing station arrayed with a wafer transfer arm in a controlled environment. Wafers are movable within the controlled...
5336029 Loading apparatus having a suction-hold mechanism  
A suction head having plural suction pads on both surfaces thereof is used to transfer a substrate of a compack disk and the like from one position to another for loading. The suction head is...
5336325 Enhanced vertical thermal reactor system  
An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool down chamber, each sealed from...
5333986 Transfer apparatus  
A transfer apparatus for transferring a semiconductor wafer has a base provided with a rotary driving source, and four arms having the same length. A first inner arm has an end fixed to the rotary...
5332013 Unmanned conveying device in clean room  
An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own...
5326211 Airlock system  
An air lock system for the transfer of large containers into a containment comprises a set of horizontally and vertically slidable doors adapted to define a variable opening for the passage of...
5310410 Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus  
A method wherein wafers are transferred between a loading chamber and a central vacuum chamber. A plurality of first vacuum processing chambers are disposed in a satellite relationship around the...