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6186723 Load port  
A load port for semiconductor equipment includes a transporting apparatus 18 and/or a moving apparatus 30 for respectively transporting a carrier base 14 and moving a cover 15, using a smaller...
6183831 Hard disk vapor lube  
Disclosed is a system for transporting disks in vacuum to a vacuum station whereat a lubricant film is applied uniformly to the surfaces of the disks by evaporation. Thickness uniformity is...
6176667 Multideck wafer processing system  
A multideck wafer processing system is described for the treatment of semiconductor wafers. The system includes at least two process chambers stacked one above the other to provide for higher...
6176668 In-situ substrate transfer shuttle  
The present invention provides an apparatus and method for sequential deposition of regular series of layers on consecutive substrates in a modular assembly-line like system. The apparatus and...
6178361 Automatic modular wafer substrate handling device  
The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber...
6168364 Vacuum clean box, clean transfer method and apparatus therefor  
A vacuum clean box 30 includes a box body 31 having a side aperture 32 and a small hole 33 for intake/exhaust, a side lid 34 for closing the side aperture 32 by a pressure difference between...
6164664 Kinematic coupling compatible passive interface seal  
An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of...
6162010 Method for recovering object to be treated after interruption  
To a common transfer chamber 102 of a treatment system 100, a treatment chamber 104a of an etching system 104, treatment chambers 106a and 108a of first and second CVD systems 106 and 108, a...
6162299 Multi-position load lock chamber  
A machine for manufacturing semiconductor devices has a. processing chamber for processing the semiconductor wafer. A transfer chamber has at least two positions, one position to facilitate the...
6161054 Cell control method and apparatus  
An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication...
6152669 Mechanical interface apparatus  
A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the...
6149367 End effector assembly for inclusion in a system for producing uniform deposits on a wafer  
An end effector in a transport module includes a body and a web defined by a panel and first and second flanges at opposite panel ends. The first flange is attached to the body. The second flange...
6145444 Micro clean sealed tubular transporter apparatus  
Apparatus for transporting elements in a clean room environment includes a tubular element having a positive air pressure therein for providing a clean air environment and a cart movable in the...
6143083 Substrate transferring mechanism  
A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate...
6142722 Automated opening and closing of ultra clean storage containers  
A substrate handling system is provided with a robot having the dual function of a removing and replacing substrate-containing pod doors and load lock chamber doors, and of transporting the...
6138721 Tilt and go load port interface alignment system  
A tilt and go assembly included as part of a load port interface assembly is disclosed for providing quick and easy attachment and adjustment of the load port interface assembly to a BOLTS...
6135698 Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications  
A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus...
6136168 Clean transfer method and apparatus therefor  
A clean transfer method and an apparatus therefor capable of receiving, storing and transferring a transferred object by means of a vacuum clean box while eliminating arrangement of any vacuum...
6135168 Standard mechanical interface wafer pod gas filling system  
A standard mechanical interface wafer pod gas filling system, comprising: a platform, carrying a wafer pod cover of a wafer pod; a pod hold-down latch mechanism; a port, carrying a wafer pod base,...
6123120 Clean storage equipment for substrates and method of storing substrates  
Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers,...
6123494 Process for the loading and unloading of an evacuatable treatment chamber and handling device for carrying out the process  
A processing station arranged in a vacuum chamber (2) for the coating of workpieces by a device, which loads or empties the workpieces through at least one opening set in the chamber wall...
6120229 Substrate carrier as batchloader  
A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an...
6113694 Substrate treatment apparatus  
Apparatus for coating a surface of a semiconductor wafer includes at least one treatment module, a handling device that may access each of the treatment modules, and a host controller connected to...
6095741 Dual sided slot valve and method for implementing the same  
A dual sided slot valve is in a vacuum body between adjacent process and transport modules. Separate valves are provided for each of two valve body slots, one body slot being separately closed or...
6092980 Substrate treatment equipment and method with testing feature  
An exclusive carrier (EQMC) housing therein equipment testing wafers (EQMW) is housed in a carrier housing rack (32) of a treatment equipment. An equipment testing parameter setting section (62)...
6082949 Load port opener  
A load port opener for separating a pod top from a pod door so that a wafer-carrying cassette may be accessed and/or transferred from the pod into a semiconductor processing station, to which the...
6082951 Wafer cassette load station  
A pod loading station and method of operation are provided for enabling the transfer and introduction of wafers into a processing system from a wafer pod. The pod loading station generally...
6083566 Substrate handling and processing system and method  
The present invention relates in a system and method for handling and processing substrates for magnetic and optical media and other types of substrates, such as wafers and lenses, requiring...
6082950 Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding  
A front end staging method and apparatus is provided to introduce and remove a set of wafers from a vacuum processing system. The system generally comprises a support platform, one or more wafer...
6079927 Automated wafer buffer for use with wafer processing equipment  
An automated wafer buffer is provided for use with a wafer processing system. The wafer buffer includes an I/O port for loading and unloading wafer containers, each holding a batch of wafers, a...
6071350 Semiconductor device manufacturing apparatus employing vacuum system  
An apparatus for manufacturing a semiconductor device employs a vacuum system, in which a heating source is installed in a predetermined portion of a venting-gas inlet. A venting-speed controlling...
6071055 Front end vacuum processing environment  
The present invention provides a wafer process system that incorporates a multiple wafer processing system, such as a tandem wafer processing system, and a front end staging apparatus. The front...
6068089 Releasable semiconductor wafer lifter basket  
A wafer lifter basket assembly includes a wafer lifter basket and a base, the base including a bracket and a bracket holder. The wafer lifter basket is mounted to the bracket, and the bracket...
6066210 Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section  
A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate...
6059507 Substrate processing apparatus with small batch load lock  
A substrate load lock comprising a frame and a substrate support movably mounted to the frame. The frame forms at least three chambers. The substrate support has at least two separate support...
6058740 Glass substrate deposition system having lateral alignment mechanism  
A deposition system (20) for depositing a material layer on a glass sheet substrate includes a lateral alignment mechanism (28) for laterally aligning glass sheet substrates with an ingress seal...
6056026 Passively activated valve for carrier purging  
A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central...
6053980 Substrate processing apparatus  
A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate...
6053688 Method and apparatus for loading and unloading wafers from a wafer carrier  
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is...
6053686 Device and method for load locking for semiconductor processing  
There is provided a load-lock device which allows high productivity and occupies a small space. There is provided a load-lock device which stands by with objects to be processed loaded thereon in...
6048162 Wafer handler for multi-station tool  
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable...
6045315 Robot apparatus and treating apparatus  
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm...
6044874 Sealed container and sealed container ambient gas substitution apparatus and method  
First and second wall portions respectively spread along first and second opposing inner surfaces of a housing portion, and a plurality of vent pores that are distributed along the first and...
6045620 Two-piece slit valve insert for vacuum processing system  
A vacuum processing system has a transfer chamber with a slit valve at which is attached a process chamber and with a slit valve insert disposed in the slit valve for matching up with the process...
6045299 Unidirectional gate between interconnecting fluid transport regions  
A unidirectional gate disposed between interconnecting fluid transport regions in a manufacturing process. The gate allows workpieces to pass from a first transport region to a second transport...
6042623 Two-wafer loadlock wafer processing apparatus and loading and unloading method therefor  
Wafers from plural non-vacuum multiple wafer carriers are loaded and unloaded in an atmospheric front end of a wafer processing machine and transferred to and from a high vacuum chamber of a...
6042324 Multi-stage single-drive FOUP door system  
Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical...
6040585 Method for detecting wafer orientation during transport  
The orientation of a wafer carried on a blade of a semiconductor wafer transfer system is sensed in order to prevent wafer damage during transfer of the wafer from chamber-to-chamber within a...
6024800 Plasma processing apparatus  
According to the present invention, a plasma processing apparatus for performing surface processing of a substrate by means of plasma discharge is provided comprising: a processing chambers 10R...
6014817 Semiconductor wafer processing system  
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which...