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4851101 |
Sputter module for modular wafer processing machine
A sputter coating module for a multifunction processing machine is provided in which the supporting mechanism for the workpiece can be isolated from the sputtering source, the pumps and other...
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4851018 |
Installation for the storage and transfer of objects in a very clean atmosphere
The installation according to the invention includes a cabinet for storing objects, apparatus for processing these objects, apparatus for transferring these objects between the storage cabinet and...
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4828224 |
Chemical vapor deposition system
This invention discloses a system for chemically depositing various materials carried by a reactant gas onto substrates for manufacturing semiconductor devices. The system includes special loading...
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4826698 |
Vacuum chamber system
A pressure treatment chamber comprising an enclosure whose interior is maintained at predetermined pressure and temperature conditions, the enclosure defining at least one access port, a rotary...
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4826360 |
Transfer system in a clean room
A transfer system for transferring a SMIF pod™ in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms™, the arms...
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4824309 |
Vacuum processing unit and apparatus
A vacuum processing unit and apparatus comprises a buffer chamber that can be evacuated, a processing chamber that can be communicated with said buffer chamber a first sample carrier installed in...
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4820106 |
Apparatus for passing workpieces into and out of a coating chamber through locks
In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is...
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4818169 |
Automated wafer inspection system
A high precision automated wafer inspection station provides a base table area on which an X-Y stage is movable in mutually orthogonal directions relative to an inspection axis in alignment with a...
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4815912 |
Box door actuated retainer
A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box...
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4812101 |
Method and apparatus for continuous throughput in a vacuum environment
Disclosed is a method and apparatus for continuous introduction and exit of workpieces into and out of a vacuum. A first seal is provided between the atmosphere and a first pumping station. This...
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4802809 |
Manipulator for standard mechanical interface apparatus
The present invention provides an apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a...
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4801241 |
Modular article processing machine and method of article handling therein
Automated article processing, particularly semiconductor wafer processing, is accomplished in a modular article processing machine. The design of the machine allows easy reconfiguration between...
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4797054 |
Apparatus for loading and unloading a vacuum processing chamber
A main chamber is provided through which a workpiece is loaded or unloaded. A second chamber is provided within the main chamber to cover the workpiece during evacuation and gas introduction...
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4795299 |
Dial deposition and processing apparatus
A system for moving and processing workpieces includes individual stations isolated from one another and from a main chamber by seals formed by a transport mechanism. Workpieces are moved in a...
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4795300 |
Loading apparatus for a work chamber
An apparatus for loading workpieces without exposure of a work chamber to the atmosphere comprises a transfer chamber formed in part by an inner plate section which serves as a cover plate with an...
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4790750 |
Automated flexible installation for a rapid thermochemical treatment
An automated installation for the rapid thermochemical treatment of parts, notably for the mechanical industry, characterized in that it includes: a transfer lock for the parts under a controlled...
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4790921 |
Planetary substrate carrier method and apparatus
An inexpensive, vertically oriented multiple substrate carrier is disclosed for high-temperature, high vacuum film deposition systems. In one embodiment, the substrates have central circular...
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4790258 |
Magnetically coupled wafer lift pins
An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic...
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4785962 |
Vacuum chamber slit valve
A slit valve for sealing an access opening in a vacuum chamber. The slit valve body or door is pivotally mounted adjacent the opening and has a pair of cam blocks mounted at its opposite ends. Cam...
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4781511 |
Semiconductor processing system
A semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, the first...
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4776744 |
Systems and methods for wafer handling in semiconductor process equipment
A system and methods for handling semiconductor wafers and dummy wafers in semiconductor process equipment such as an ion implanter. Tray assemblies are provided, each of which is adapted for...
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4776745 |
Substrate handling system
A substrate handling system supplies new wafers to a vacuum chamber containing a lithography system, and outputs processed semiconductor wafers to an environment with normal atmospheric pressure....
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4775281 |
Apparatus and method for loading and unloading wafers
Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing...
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4763602 |
Thin film deposition apparatus including a vacuum transport mechanism
An apparatus for depositing thin films on a substrate includes at least one deposition module, a load lock module, a gate valve and a transportation mechanism for moving a substrate between the...
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4764076 |
Valve incorporating wafer handling arm
A valve for a wafer processing machine is formed with a wedge-shaped sliding gate. A folded wafer handling arm is stored within the wedge and pumped to keep the arm clean while the valve is closed.
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4749465 |
In-line disk sputtering system
A step-dwell transport apparatus and method for use in an in-line controlled environment processing system is disclosed. The transport apparatus employs a plurality of shuttles arranged in series...
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4746256 |
Apparatus for handling sensitive material such as semiconductor wafers
An apparatus for handling or inspecting a sensitive material such as a semiconductor wafer or mask in a self-contained environment, such that the apparatus can be used outside a clean room. The...
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4744712 |
Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes
The instant invention relates to a loading system for loading semiconductor wafers into a diffusion tube. The combination of a track and a loader trolley designed for the track is disclosed, along...
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4739882 |
Container having disposable liners
The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior...
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4733631 |
Apparatus for coating substrate devices
The present apparatus has a movable table with apertures therein. In each aperture there is loaded a carrier device and each carrier holds a substrate to be coated. The carriers are advanced in a...
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4734004 |
Sluice device
A sluice device for insertion between zones having different environmental conditions, for instance pressure and/or temperature. A drum is rotatably arranged in an opening in a housing and has...
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4732527 |
Procedure for transferring objects without breaking confinement
A procedure for transferring an object along an axis, from a contaminated and radioactive zone to a clean zone without breaking the confinement when the zones are separated by a slab is disclosed....
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4724874 |
Sealable transportable container having a particle filtering system
A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an...
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4722654 |
Article transfer system
A load lock chamber is secured to a Rutherford Backscattering Spectrometer in communication with the spectrometer chamber. A valve separates the two chambers. A specimen manipulator transfers a...
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4715764 |
Gate valve for wafer processing system
A modular wafer processing system requires a gate valve of minimum thickness. A gate valve is provided in which the gate is an assymetric wedge on an assymetrically mounted drive shaft.
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4707334 |
Isolation method and apparatus for sterilizing chambers of filling machines
A chamber, in which an atmosphere comprising a toxic vapor is established, is pneumatically isolated from the ambient environment. The isolation technique permits objects to be sterilized to be...
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4705950 |
Specimen-exchanging apparatus
A feed screw is provided in a specimen-exchanging chamber connecting with a specimen chamber valve and a removable element is removed in the axial direction of the feed screw by rotation of the...
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4705951 |
Wafer processing system
A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a...
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4701251 |
Apparatus for sputter coating discs
Apparatus for sputter coating a disc comprises an evacuable chamber with a disc entry and exit opening. A disc to be coated is supported at the center of the disc by support means and drive means...
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4699554 |
Vacuum processing apparatus
This invention is directed to a vacuum processing apparatus which is constructed so that a sample may be carried between a main vacuum chamber and a portion of the atmosphere outside the main...
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4699555 |
Module positioning apparatus
A housing has a flange for engagement with an evacuable vessel having a work table for supporting devices to be processed with an ion beam inside the vessel. The housing has rails extending into...
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4695214 |
Apparatus and method for feeding solid materials to a high pressure vessel
An apparatus and method utilize liquid pressurized lock hoppers to feed solids to a high pressure vessel. Solids are introduced to a first lock hopper, and gases are passed to the first lock hopper...
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4687408 |
Lock for the transport of bulk material
In a lock for the transport of bulk material between chambers being under different pressure a lock chamber (4) is guided tightly and driven by a reciprocal movement in a preferably horizontal...
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4687542 |
Vacuum processing system
A system for performing one semiconductor manufacturing operation or sequence of operations with reduced particulate contamination. A vacuum-tight wafer carrier, which contains numerous wafers in...
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4685852 |
Process apparatus and method and elevator mechanism for use in connection therewith
Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are...
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4682927 |
Conveyor system
Apparatus for automatically transferring a cassette of semiconductor wafers from one "clean" room to a second "clean" room across an area that may be less clean. The system includes an elevator in...
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4682508 |
Inlet valve for probe apparatus
A valve assembly for allowing entry of a sampling device or probe device from an ambient atmosphere to a vacuum chamber comprises an electromagnet means which controls a ball made of magnetic...
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4680474 |
Method and apparatus for improved ion dose accuracy
The implant chamber pressure during ion implantation is controlled within a specified intermediate pressure range higher than the baseline pressure. Implanted dose errors resulting from...
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4676709 |
Long arm manipulator for standard mechanical interface apparatus
Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical...
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4676884 |
Wafer processing machine with evacuated wafer transporting and storage system
An evacuable wafer processing machine includes a load-lock station, a wafer transfer station separated from the load-lock station by means of a gate-valve and a wafer coating station. Wafers...
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