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5076205 |
Modular vapor processor system
A system for multichamber processing of semiconductor wafers providing flexibility in the nature of processing available in a multi processing facility. To accommodate changing processing demands...
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5072656 |
Method and apparatus for controlling the transfer of tubular members into a shelter
A portable drilling apparatus 10 designed to be used in environmentally severe locations, such as the Arctic, includes provisions for heating various portions thereof, including a pipe shelter 14....
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5069269 |
Lifting and turning unit for a melting and/or casting plant
A lifting and turning unit for a melting or casting plant. The lifting and turning unit for a deposit stand, preferably a table, for ingot molds of a vacuum melting and casting plant is provided....
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5067218 |
Vacuum wafer transport and processing system and method using a plurality of wafer transport arms
A vacuum wafer transport and processing system and method includes a central vacuum chamber having wafer holding means disposed therein. A plurality of wafer transport arms are disposed between the...
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5062758 |
Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber for doing work thereon in the chamber
An automated workpiece handling system rapidly moves a workpiece into a controlled atmosphere chamber, like a vacuum chamber, to a work station, like an electron beam, and withdraws the piece after...
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5058526 |
Vertical load-lock reduced-pressure type chemical vapor deposition apparatus
A CVD apparatus having a single loading-unloading chamber that serves as a loading chamber in the left and center parts and as an unloading chamber in the right and center parts. Alternately,...
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5056875 |
Container for use within a clean environment
A container is provided for use in a clean environment, thereby allowing functional access to items such as chemicals stored within the container while minimizing contamination to the clean...
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5051054 |
Elevating table and transporting method
An elevating table has a housing with a workpiece support movably guided in an upward and downward direction by which a disk-shaped workpiece is transportable into a processing chamber of a vacuum...
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5044871 |
Integrated circuit processing system
A vacuum-tight wafer carrier, and a load lock suitable for use with this wafer carrier. The wafers are supported at each side by a slightly sloping shelf, so that minimal contact (line contact) is...
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5037262 |
Holding device for a disk and application therefor
A holding device for semiconductor disks or wafers orients and secures the disk during transport to a working position. Shortly before the disk reaches a working position the device releases the...
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5033927 |
Device for carrying out sequential thermal treatments under a vacuum
A device for treating parts in a controlled atmosphere comprises an airtight chamber (2), treatment cells (31) mounted on the airtight chamber and able to communicate with the airtight chamber for...
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5026239 |
Mask cassette and mask cassette loading device
A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contained in synchrotron radiation, to print a pattern of...
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5020475 |
Substrate handling and transporting apparatus
A substrate loading subsystem receives substrates from an external source and delivers them to an input port. A substrate pickup transports the substrates serially from the input port to a delivery...
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5019233 |
Sputtering system
A system (10) for the vacuum processing of substrates such as semiconductor wafers which includes a central handling chamber (14), a number of separately pumped and randomly accessed process...
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5017073 |
Transport system for conveying workpiece between first and second media
A lock chamber for conveying a workpiece from one medium (U 0 ) into another medium (U 7 ) which comprises a lever (11) acting as a transport system and pivotably mounted in the chamber on one...
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5017131 |
Atmosphere furnace
An atmosphere furnace including a plurality of divided furnace units, work transfer devices connecting the adjacent divided furnace units and those for the divided furnace units at both ends of the...
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5016561 |
Continuous vacuum processing apparatus
A continuous vacuum processing apparatus including a slit-type sealing portion and a guide roller for guiding an object to be processed. The guide roller is provided at each of the two sides of the...
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5013384 |
Vacuum system
An inlet opening in an evacuatable vacuum system is substantially enlarged and closed off by a porous plate so that the ingress of dust is avoided and a very uniform inflow of gas is realized. A...
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5011366 |
Ultraclean robotic material transfer method
An automatic wafer handling system utilizing a vacuum pneumatic controlled cable driving mechanism. In principle, the necessary movements are provided by air cylinder actuation of pulley supported...
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4995430 |
Sealable transportable container having improved latch mechanism
A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the...
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4990047 |
Vacuum apparatus
A vacuum apparatus for treating disk-shaped workpieces includes a central distribution chamber into which the workpieces are brought from a lock through a communication opening which can be closed...
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4981408 |
Dual track handling and processing system
A dual track substrate handling and processing system includes an entrance load lock station, an exit load lock station and a plurality of substrate processing stations, all positioned above a...
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4969790 |
Apparatus on the carousel principle for the coating of substrates
Apparatus for the coating of substrates in a vacuum chamber is disclosed wherein a rotatable substrate holder bears a plurality of substrate receivers adapted to transport a like number of...
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4963065 |
Centrifugal pump for pulverized material
A centrifugal pump for feeding pulverized material such as coal particles from a low pressure zone into a high pressure zone, said pump having nozzles mounted on a rotor. The pulverized material is...
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4962726 |
Chemical vapor deposition reaction apparatus having isolated reaction and buffer chambers
In a CVD reaction apparatus having a heated reaction chamber (102) and a buffer chamber (103) connected continuously under the reaction chamber and a wafer boat elevator (114) which is to be raised...
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4953497 |
Apparatus for coating continuous webs
An apparatus for vacuum coating continuous web materials has a housing with a removable cover disposed on at least one side for the hermetic closure of the housing, and a winding means having...
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4951601 |
Multi-chamber integrated process system
An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator,...
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4948979 |
Vacuum device for handling workpieces
A vacuum device comprises a vacuum working chamber for performing a predetermined process to a material such as substrate and a vacuum prechamber for changing the material. Both the vacuum chambers...
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4944246 |
Molecular beam epitaxy apparatus
A molecular beam epitaxy apparatus comprises a growth chamber provided therein with a holder support frame and connected via a first gate valve to a preparation chamber which in turn is connected...
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4944645 |
Method and apparatus for loading objects into evacuated treating chamber
In a method and apparatus for depicting a circuit pattern on an article such as a semiconductor wafer, glass mask or a reticle supported by a stage in an evacuated casing with an electron beam, the...
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4929139 |
Passive electrostatic vacuum particle collector
Disclosed are passive electrostatic particle collectors (10 & 12) for use in vacuum chambers (24 & 32) especially for a particle beam machine system (30 & 36) to collect particulates, such as dust...
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4923584 |
Sealing apparatus for a vacuum processing system
A sealing arrangement for a vacuum processing system for semiconductor wafers which is effective to apply a sealing force to a valve element (66) between chambers of the processing system. The...
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4917556 |
Modular wafer transport and processing system
A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment...
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4915564 |
Method and apparatus for handling and processing wafer-like materials
An apparatus and method for moving a plurality of wafer-like articles such as semiconductor substrates back and forth between a carrier and a processing chamber maintained in an interior atmosphere...
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4909695 |
Method and apparatus for handling and processing wafer-like materials
The apparatus is provided with a main chamber divided into two chamber halves by a rotatable index plate. The plate rotates through a load lock station, through which wafer-like articles are...
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4909185 |
Cantilever and cold zone assembly for loading and unloading an oven
Apparatus for heating product with the product during heating subjected to a controlled, nonatmospheric gas environment. The apparatus includes a double-walled cold zone assembly adapted to be...
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4904143 |
Apparatus for the continuous feeding of material to be melted
In an apparatus for the continuous feeding of material to a melting crucible in the pulling of monocrystals in a vacuum tank, a first container (3) is provided which is provided with an internal...
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4902934 |
Plasma apparatus
A plasma apparatus which is; provided with a pair of plasma generation chambers at both sides of a specimen chamber provided therein with two specimen mounts for fixing specimens to be subjected to...
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4897963 |
Connector device for two reactor containments
In order to place in sealed communication two reactor containments provided with openings capable of having a displacement between their axes, an assembly (12) is placed between the flanges (B 1 ,...
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4895486 |
Wafer monitoring device
A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an...
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4892451 |
Apparatus for the quasi-continuous treatment of substrates
In an apparatus for the treatment of substrates supplied in cassettes, with a series of lock chambers and treatment chambers, with a transport system for transporting at least one substrate holder...
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4886412 |
Method and system for loading wafers
A wafer transport system includes a mobile frame, a wafer cassette conveyor, a wafer support table, and a wafer transfer assembly. The wafer cassette conveyor carries a plurality of wafer cassettes...
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4883020 |
Apparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductor
A transfer chamber is provided between MOCVD reaction chamber and load lock chamber, connected to each chamber through an opening for each, for preventing the reaction chamber from the invasion of...
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4875825 |
Method for automated cassette handling
An automated cassette handler is disclosed for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system...
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4867629 |
Dusttight storage cabinet apparatus for use in clean rooms
There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having...
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4863577 |
Desmearing and plated-through-hole method
An integrated plasma desmearing and plated-through-hole method to first plasma desmear a printed circuit board and then plate through the holes of the plated circuit board by sputtering. The method...
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4860669 |
Energy efficient continuous flow ash lockhoper
A continuous flow ash lockhopper includes an ash hopper at the outlet of a high temperature, high pressure reactor vessel containing heated high pressure gas, a fluidics control chamber having an...
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4861563 |
Vacuum load lock
A compact load lock and processing chamber is disclosed in which a moveable member forms a closure for both a load lock volume and an article processing volume. The moveable member is connected to...
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4857160 |
High vacuum processing system and method
A novel method and machine are provided for processing workpieces at one or more work-stations under vacuum conditions. The machine comprises means for receiving at atmospheric pressure an object...
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4850749 |
Airlock having flaps in continuous feed of material carried by a gas stream while obstructing free flow of gas
An airlock for the continuously feeding through of a material while obstructing the free flow of a gas is provided. The airlock comprises a first continuous belt having a plurality of nonporous...
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