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6517304 Method for transporting substrates and a semiconductor manufacturing apparatus using the method  
A method for transporting a substrate between a carrier, which holds the substrate, and a semiconductor manufacturing unit, which receives the substrate. The method includes steps of applying the...
6515736 Reticle capturing and handling system  
A reticle capturing system includes a reticle that defines a first recess extending into the reticle from a first edge of the reticle and a second recess extending into the reticle from a second...
6494670 Three chamber load lock apparatus  
A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing...
6491188 Revolver valve for discharging a pressurized vessel in a fiber stock preparation system  
A revolver valve includes a housing with a cylindrical inner chamber, and a pair of end caps respectively attached to each end of the housing. One of the end caps includes an inlet opening and the...
6491802 Magnetic film forming system  
A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction is disclosed. The magnetic film forming system includes a vacuum container, a...
6487794 Substrate changing-over mechanism in vacuum tank  
A substrate changing-over mechanism in a vacuum processing apparatus which includes a substrate supporting means arranged within a vacuum tank which has at least two openings at a side wall of the...
6488778 Apparatus and method for controlling wafer environment between thermal clean and thermal processing  
An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated...
6485248 Multiple wafer lift apparatus and associated method  
An apparatus and associated method for transporting a first substrate and a second substrate relative to a cell. The cell contains a pedestal that is configured to interact with a single...
6481945 Method and device for transferring wafers  
Enhanced inserts are formed having a cylindrical grip and a protrusion extending from the grip. An ultra hard material layer is bonded on top of the protrusion. The inserts are mounted on a rock...
6473996 Load port system for substrate processing system, and method of processing substrate  
In a load port mechanism of a substrate treatment unit, protuberances are provided on a sealing surface formed along a door with which a wafer carrier is to dock, or on a sealing surface formed...
6473989 Conveying system for a vacuum processing apparatus  
A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure that includes a robot, a cassette table for holding the cassette, an...
6470927 Foup opener  
A FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and...
6468021 Integrated intra-bay transfer, storage, and delivery system  
An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly...
6467626 Wafer storing method and storing container therefor and wafer transferring method for transferring wafer to the storing container  
Adhesion of particles on the surface of a wafer is prevented even if particles are generated during transport, by transferring the wafers after mirror-polishing, cleaning, and drying into a...
6467186 Transferring device for a vacuum processing apparatus and operating method therefor  
A transferring device for a semiconductor wafer which transfers a wafer storing structure to a table and/or other positions within the vicinity of a vacuum processing apparatus and removes wafers...
6463678 Substrate changing-over mechanism in a vaccum tank  
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
6461437 Apparatus used for fabricating liquid crystal device and method of fabricating the same  
An apparatus for manufacturing a liquid crystal display device that can prevent chemical contamination attributed to contacting an external atmosphere, and a method of manufacturing the liquid...
6456364 Semiconductor manufacturing apparatus, and device manufacturing method  
A semiconductor manufacturing apparatus having a guard system, an interlocking system operable in response to loss of function in a portion of the guard system, to stop a corresponding operation...
6454512 Person-guided vehicle  
A person-guided vehicle (PGV) is provided for transporting and manipulating at least one carrier containing items such as semiconductor wafers to be loaded or unloaded at a load port. The PGV...
6449522 Managing a semiconductor fabrication facility using wafer lot and cassette attributes  
Systems and methods for managing automated material handling systems, such as semiconductor fabrication facilities, using material item (e.g., wafer lot) attributes and cassette attributes are...
6447233 Automated door assembly for use in semiconductor wafer manufacturing  
An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base...
6435809 Dual arm linear hand-off wafer transfer assembly  
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of...
6435798 Semiconductor processing apparatus with substrate-supporting mechanism  
A semiconductor processing apparatus for processing a semiconductor substrate includes: (i) a vacuum-exhausted chamber; (ii) a susceptor which is provided within the chamber and which holds the...
6435799 Wafer transfer arm stop  
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of...
6431806 Adapter device for carrier pods containing at least one flat object in an ultraclean atmosphere  
An adapter device is placed on a movable plate of a base of an interface device to position a carrier pod at a preset height enabling a standard interfacing system with equipment machines to be...
6431807 Wafer processing architecture including single-wafer load lock with cooling unit  
A wafer processing system includes a single-wafer load lock with integrated cooling unit. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By integrating a...
6428262 Compact load lock system for ion beam processing of foups  
The system processes one or more wafers from a FOUP to an ion processing chamber. A group of wafers from the FOUP is removed by a first end effector and loaded into a load lock through a lower...
6422798 Process and arrangement for continuous treatment of objects  
The invention relates to a process for continuous treatment of objects in a processing unit, where the objects are moved along a conveyor track passing through the processing unit by a first...
6422823 Mini-environment control system and method  
A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure...
6419438 FIMS interface without alignment pins  
A front opening interface mechanical standard, or “FIMS”, system is disclosed for ensuring proper registration of a pod door against a port door on a load port assembly without the use of guide...
6417014 Method and apparatus for reducing wafer to wafer deposition variation  
A processing line includes a processing tool and an automatic process controller. The processing tool is adapted to deposit a layer of material on a semiconductor wafer based on an operating...
6409448 Ergonomic load port  
A load port module is mounted adjacent a process tool for loading semiconductor wafers to the process tool and unloading them from the process tool. The module includes a mounting frame having a...
6410455 Wafer processing system  
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a...
6398475 Container  
A container for receiving and transporting dust free articles which is opened and closed by inserting a positioning pin and a key in an opener mechanism into a positioning hole and a key hole...
6395094 Process system with transfer unit for object to be processed  
A process system comprises cassette housing chambers 33A and 33B, each of which houses therein a cassette C having housed an object W to be processed, and process chambers 26A through 26D for...
6394733 Substrate body transfer apparatus  
A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination...
6390754 Wafer processing apparatus, method of operating the same and wafer detecting system  
A closed-type cassette is mounted on a cassette stand disposed in a working region at a position corresponding to an opening formed in a wall separating the working region from a loading region....
6382902 Method for controlling handling robot  
A handling robot control method is disclosed for a handling robot disposed in a transfer chamber (1) having a plurality of process chamber stations (2e) arranged around it in communication...
6382895 Substrate processing apparatus  
Four load lock chambers 2, 2′, 2″, 2′″ and eight process chambers 101, 102, 103, 104, 105, 106, 107 and 108 are hermetically connected around the outside of a central separation chamber 3 via gate...
6382896 Front-opening unified pod closing/opening control structure  
A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets...
6385503 Reactor for the processing of wafers, with a protection device  
The invention relates to a reactor (1) for processing wafers (7) comprising at least one process chamber (5), at least one transport chamber (2) with a transport robot (3) for the wafers (7), and...
6371712 Support frame for substrates  
The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing...
6371711 Valveless continuous atmospherically isolated container feeding assembly  
An apparatus for feeding containers of feed material into a process chamber is disclosed. The apparatus is designed to maintain the atmosphere within the process chamber as separate from the...
6368411 Molecular contamination control system  
The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including...
6364592 Small footprint carrier front end loader  
An apparatus for moving substrates between a loading section and a working chamber includes at least two loading locations at which the substrates may be supplied or received in stacked form...
6366830 Self-teaching robot arm position method to compensate for support structure component alignment offset  
A self-teaching robot arm positioning method that compensates for support structure component alignment offset entails the use of a component emulating fixture preferably having mounting features...
6364593 Material transport system  
A system for loading and unloading semiconductor wafers includes a frame having a charging opening, a platform mounted on the frame and movable between a deployed position and a retracted...
6358377 Apparatus for sputter-coating glass and corresponding method  
A sputter coating apparatus includes at least a first sputter coating line and a second sputter coating line. The first and second sputter coating lines may be operated in parallel with one...
6354445 Rack holding device  
A rack-holding device with an attachment surface (1), which device has as least two side guides (2) and at least one stop (3), the stop (3) being arranged in each case in front of the at least two...
6354781 Semiconductor manufacturing system  
An improved manufacturing system for processing semiconductor wafers which includes a (1) plurality of processing stations, (2) a sealed transport tunnel located directly over the processing...