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5303671 |
System for continuously washing and film-forming a semiconductor wafer
A system for cleaning and film-forming a semiconductor wafer continuously comprises a washing section for removing native oxide from the surface of the wafer while applying hydrofluoric acid to the...
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5295522 |
Gas purge system for isolation enclosure for contamination sensitive items
A reusable isolation enclosure has a closure member adapted for purging gases from the enclosure. The closure member includes filters and vapor and moisture drains. Replacement of ambient...
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5295777 |
Wafer transport module with rotatable and horizontally extendable wafer holder
A wafer transport module interconnects a horizontal wafer handler with a vertical wafer processor and includes an evacuatable housing with a first port in communication with the horizontal wafer...
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5292393 |
Multichamber integrated process system
An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator,...
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5291925 |
Equipment for forming temporary connections for the transfer of objects between discontinuous confined volumes
An isolating chamber (1) with an annular connector (5) defines an access opening with one dimension greater than that perpendicular thereto and with an internal wall (5A) of constant section to...
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5291923 |
Door opening system and method
A reusable isolation structure features an easily cleanable shell. The opening of the shell includes a groove formed around the periphery thereof and is preferably not more than slightly smaller...
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5288379 |
Multi-chamber integrated process system
A vacuum processing apparatus capable of quickly replacing a substrate without opening the two gate valves simultaneously by using two waiting stages and a single transferring robot. The...
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5286296 |
Multi-chamber wafer process equipment having plural, physically communicating transfer means
In a multi-chamber process equipment in which a plurality of process chambers for processing a single wafer are connected with a wafer transfer chamber in parallel through respective gate valves,...
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5284411 |
Conveyor for conveying workpieces in a vacuum chamber
A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and...
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5281320 |
Wafer coating system
Semiconductor wafers having patterns of steps and grooves defining microcircuit elements thereon are coated with metallic film by supporting the wafers individually adjacent a respective...
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5280983 |
Semiconductor processing system with robotic autoloader and load lock
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and...
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5277579 |
Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system
A wafers transferring method in the heat treatment apparatus of the vertical type comprising providing a boat loading/unloading chamber under a process tube, providing an elevator in the boat...
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5275709 |
Apparatus for coating substrates, preferably flat, more or less plate-like substrates
Apparatus for coating substrates by a vacuum coating process. The apparatus includes a plurality of closed processing chambers, each provided with an entrance/exit closable opening. The individual...
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5273423 |
Heat treatment apparatus
A heat treatment apparatus includes a process tube for heat treatment of an object to be heat treated, and a load lock chamber linked to the process tube and for housing the object to be heat...
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5271702 |
Robotic substrate manipulator
A robotic substrate manipulator constructed for substrate handling during thin film deposition in the vacuum of outer space. The robotic substrate manipulator includes a cassette holding a...
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5261935 |
Clean air apparatus
A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace...
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5261776 |
Vacuum operated wafer transfer apparatus
The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer...
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5259942 |
Device for transferring a workpiece into and out from a vacuum chamber
A device for transferring a workpiece into and out from a vacuum chamber including a first device for receiving and holding the workpiece in a disk-shaped conveyor within the chamber and a second...
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5234303 |
In-vacuum conveyance robot
In a robot for conveying a workpiece or the like 21 in vacuum chambers (16, 24); a conveyance robot for use in a high vacuum, in which magnetic floatation and magnetic drive are applied to a...
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RE34311 |
Semiconductor slice cassette transport unit
A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in...
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5226781 |
Process and installation for transferring products from a contaminated enclosure into a second enclosure without contaminating the latter
For transferring products from a contaminated enclosure (12) into a second enclosure (16) without contaminating the latter, it is proposed to engage on the contaminated enclosure a transportation...
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5223001 |
Vacuum processing apparatus
The present invention is a vacuum processing apparatus provided with a vacuum processing chamber which implements a required processing to an object of processing, and a pre-vacuum chamber...
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5217053 |
Vented vacuum semiconductor wafer cassette
A vacuum storage cassette for semiconductor wafers has one or more valves to allow the cassette to be evacuated, backfilled, and opened to the surround atmosphere and resealed without the need for...
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5202716 |
Resist process system
A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage,...
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5192188 |
Lock for the loading and/or discharging of bulk materials
A lock for the loading and/or discharging of, in particular, not easily flowing, adhering bulk materials into or out of a pressurized or vacuum chamber through a discharge opening of a discharge...
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5183547 |
Sputtering apparatus and system for sputtering employing same
The present invention provides a sputtering apparatus employed for producing an optical disc, for example, wherein a material to be processed by sputtering, such as a disc base plate, is placed in...
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5181819 |
Apparatus for processing semiconductors
A semiconductor processing apparatus comprises a main body having an air passage, a plurality of filter units connected in series with the air passage in the main body, each filter unit having an...
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5176493 |
High speed wafer handling method
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing...
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5174067 |
Automatic wafer lapping apparatus
An automatic wafer lapping apparatus in which a pair of turntable stages are provided which each have a vertical central shaft and a pin on which the wafer carriers are spitted and piled up;...
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5171541 |
Fluidized bed discharge process
Process for discharging solid particulate products present in a fluidized bed reactor in which the polymerization or copolymerization of alpha-olefins is carried out, in a system consisting of a...
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5156521 |
Method for loading a substrate into a GVD apparatus
A method for loading a substrate into a receiving chamber upon a positionable platform, which platform is in sealed relationship with the receiving chamber, permits purging of the receiving chamber...
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5147168 |
Loading and unloading airlock apparatus for a vacuum treatment chamber
A loading and unloading airlock apparatus for a vacuum treatment chamber which includes an airlock chamber, a transport mechanism inside the chamber to transport a substrate holder arranged to have...
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5145303 |
Method and apparatus for reducing particulate contamination in processing chambers
A load lock removes particulate contamination during microelectronic manufacturing. The load lock may have a single door or two doors, or a single door and a funnel valve. A passageway is defined...
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5143254 |
Device for the metering of granular or powdered products and method of mixing raw rubbers using this device
The material to be metered drops onto a plate 21 which is driven in rotation. This plate 21 is provided on its edge with a cylindrical wall 22 pierced by recesses 24. The plate 21 turns in a...
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5139459 |
Clean transfer method and system therefor
A clean transfer method capable of safely transferring a semiconductor or the like to various apparatus for treating the semiconductor while keeping the environment clean. In the method, the...
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5135635 |
Sputtering apparatus
The sputtering apparatus for the present invention is used for manufacturing optical discs. On loading and unloading of disc substrates to and from a vacuum chamber, a disc entrance and exit...
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5135608 |
Method of producing semiconductor devices
A process and apparatus for producing semiconductor integrated circuit devices wherein the dry processing and the wet processing are continuously effected for the wafers to be processed, and the...
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5133285 |
Apparatus for transporting substrates
Apparatus for transporting substrates 22, 23 in vacuum deposition systems with several stations, comprising plate-like substrate holders 16 which are moved across the stations in a vertical...
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5133400 |
Apparatus for rotating and moving an ingot mold table in a vacuum melting and casting unit
A mold table is linearly moved into a pouring position or a resting position in a vacuum casting unit and rotates around its vertical axis so that the ingot molds disposed on the mold table can be...
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5125781 |
Air lock for transfer of product into and out of vacuum or pressurized chamber
An air lock transfer device allows the transfer of substances between environments at different pressures, without disrupting the integrity of the pressure differential therebetween and which...
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5121705 |
Loading lock for chemical vapor deposition apparatus
A loading lock for a chemical vapor deposition apparatus comprises three chambers: an outer chamber for introduction and removal of substrates, a reaction chamber for forming thin films on the...
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5112469 |
Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber
An apparatus for the inward and outward transfer of a workpiece, particularly of a disk-shaped substrate in a vacuum chamber having a coating system comprising a cathode station. A conveyor means...
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5112185 |
Method for replacing a deposit shield in an evacuated film forming chamber
A film forming apparatus for forming a film on a substrate set inside a film forming chamber capable of being evacuated comprises; a film forming chamber in which a film is formed on a substrate; a...
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5112277 |
Blowing door for ultra-clean confinement container
The blowing door permits the passage of an object (6) from the interior of a first container (5) to a second container (4) without the respective atmospheres of the interior of these two containers...
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5110248 |
Vertical heat-treatment apparatus having a wafer transfer mechanism
A vertical heat-treatment apparatus is provided with a mechanism for automatically transferring semiconductor wafers from carriers to a boat for a vertical type furnace. The automatic transferring...
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5110249 |
Transport system for inline vacuum processing
An inline processing system for processing a batch of pallets, including a first magazine for supporting a predetermined number of unprocessed pallets. A load chamber for receiving and supporting...
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5102279 |
Continuous vacuum processing apparatus
A continuous vacuum processing apparatus has at least one preliminary vacuum chamber respectively disposed in front of and rear of a vacuum processing chamber. The preliminary vacuum chamber is...
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5100287 |
Method of transferring wafers using vacuum
The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer...
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5098245 |
High speed wafer handler
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing...
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5096364 |
Wafer arm handler mechanism
A wafer handler arm conveys a wafer from a horizontal orientation to a vertical orientation for wafer processing. The arm includes a wafer holding member which is rigidly attached to a first shaft....
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