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5501564 |
System for the storage and transportation of flat objects such as extra-flat boxes and its portable rack
According to the present invention, a system for storing and distributing flat objects to different working stations is provided. The system comprises storage modules (2), transportation or...
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5486080 |
High speed movement of workpieces in vacuum processing
A high speed wafer processing apparatus employs two wafer transport robots to move wafers from two load locks past a processing station with gentle vacuum cycling and without pumpdown delays. Both...
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5484004 |
Transfer closure valve for filling and emptying containers
There is disclosed a transfer closure valve for safely filling and emptying containers of any type with a liquid, pasty or powdery medium. The medium flows from a barrel into another container...
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5482161 |
Mechanical interface wafer container
A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between...
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5478195 |
Process and apparatus for transferring an object and for processing semiconductor wafers
Apparatus for processing semiconductor wafers includes a load lock chamber with a first gate valve and a second gate valve so as to load and unload cassettes through the first gate valve, and to...
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5474410 |
Multi-chamber system provided with carrier units
A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette...
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5468112 |
Wafer container and wafer aligning apparatus
A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from...
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5468111 |
Disc loading and unloading assembly
An assembly for transferring discs between disc manufacturing machinery or processes comprises a series of storage cassettes having discs stored therein. Each stored disc is retrieved from the...
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5462397 |
Processing apparatus
The processing apparatus of the present invention comprises a processing chamber for providing a predetermined processing to a processing object, a transfer chamber having transfer arm for...
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5451131 |
Dockable interface airlock between process enclosure and interprocess transfer container
Disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock...
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5451130 |
Method and apparatus for the step-by-step and automatic loading and unloading of a coating apparatus
A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6)....
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5445491 |
Method for multichamber sheet-after-sheet type treatment
In a multichamber type sheet-after-sheet type of treating apparatus, there are provided an inlet/outlet port capable of independently control pressure and atmosphere in the port, a platform...
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5439522 |
Device for locking a flat, preferably discoid substrate onto the substrate plate of a vacuum coating apparatus
In a device for locking a flat, discoid substrate 9 provided with a central opening 38 onto a substrate plate 22 provided with a centering post 35 projecting above the substrate bearing surface 42...
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5435683 |
Load-lock unit and wafer transfer system
A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being...
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5435682 |
Chemical vapor desposition system
This invention discloses a system for chemically depositing various materials carried by a reactant gas onto substrates for manufacturing semiconductor devices. The system includes special loading...
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5433574 |
Gas purge unit for a portable container
A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet...
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5425611 |
Substrate handling and processing system
This invention relates to a system for handling and processing thin substrates, such as substrates for magnetic disks. The system includes a main chamber, entrance and output load locks, a buffer...
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5421979 |
Load-lock drum-type coating apparatus
Vacuum coating apparatus (30) includes a coating chamber (32), and a load-lock chamber (34) connected to the coating chamber via a high vacuum valve (44). The coating chamber includes...
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5417537 |
Wafer transport device
An apparatus for transporting material, such as semiconductor wafers, between process modules coupled to a chamber. The transport apparatus includes a chamber; guide rails affixed to an outer...
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5407314 |
Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber
Apparatus for loading and unloading disk-shaped substrates into and out of a vacuum coating chamber and for transporting the substrates within this chamber, having a first station for loading and...
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5405231 |
Conveyor with rotary airlock apparatus
An apparatus for transferring objects from a first region to a second reg, the first and second regions having differing atmospheric environments. The apparatus includes a shell having an entrance...
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5405230 |
Load-lock unit and wafer transfer system
A load-lock unit is disposed between first and second atmospheres, stores a wafer transferred from the first atmosphere, is blocked off from the first atmosphere, is thereafter set in the same...
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5404894 |
Conveyor apparatus
A thermal processing station is provided with a first conveyor that conveys a wafer from a first conveyor access portion and a second conveyor that conveys another wafer from a second conveyor...
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5395198 |
Vacuum loading chuck and fixture for flexible printed circuit panels
Disclosed is a system for handling large area, in-process, circuit panel layers. The circuit panel layers are thin and flimsy, and require rigid support for certain processing steps. The system...
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5391035 |
Micro-enviroment load lock
A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at...
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5388945 |
Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers
A fully automated and computerized conveyor based manufacturing line architecture (15) is provided for the storage, handling and transportation of articles by processing equipment (500). The...
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5388944 |
Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus
A wafer loading and unloading chamber is provided at the bottom of a reaction tube of a heat treatment section, a robot chamber and cassette chamber are coupled via gate valves to the wafer loading...
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5387067 |
Direct load/unload semiconductor wafer cassette apparatus and transfer system
A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first...
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5382127 |
Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment
A pressurized interface apparatus (200) is provided for transferring a workpiece from within a pressurized sealable transportable container (100) into a specified environment and vice versa. The...
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5382126 |
Multichamber coating apparatus
A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of...
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5377476 |
Arrangement for storing, transporting and loading substrates
Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which are...
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5377816 |
Spiral magnetic linear translating mechanism
A spiral magnetic linear translating mechanism for use with a wafer processing system which includes a plurality of evacuatable housings connected in a series to form a processing line comprises at...
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5378107 |
Controlled environment enclosure and mechanical interface
Disclosed is a method for enabling the contents of a first chamber to be moved into a second chamber without exposing either chamber to elements making particulate-producing sliding contact. In one...
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5378283 |
Treating device
A treating device of the closed system structure in which semiconductor wafers are conveyed from a load lock chamber to a process tube comprises a gas feed pipe for feeding inert gas into a load...
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5376212 |
Reduced-pressure processing apparatus
A reduced-pressure processing apparatus which comprises a wafer table, two processing chambers, and three load-locking chambers. The wafer table temporarily supports a workpiece. In the first...
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5374148 |
Procedure and apparatus for feeding a material into a pressurized space
The invention relates to a procedure and an apparatus for feeding solid material into a pressurized space. According to the invention, the apparatus comprises a feed chamber (12) communicating with...
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5374147 |
Transfer device for transferring a substrate
A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is...
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5372647 |
Apparatus for forming thin film
An apparatus for forming a thin film without spoiling contact resistances and breakdown voltage characteristics. The apparatus is so designed that at least one of first, second and third...
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5363872 |
Low particulate slit valve system and method for controlling same
Low particulate slit valve system and method for controlling the closure pressure applied to a slit valve. An apparatus in accordance with the present invention includes a barrier having a slit...
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5364219 |
Apparatus for clean transfer of objects
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first...
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5364225 |
Method of printed circuit panel manufacture
Disclosed is a method of manufacturing a printed circuit panel. The method is carried out without a cleanroom, but in a clean room environment. The first step is to place a thin, non-rigid panel in...
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5354380 |
Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus
A plunger (14) is displaceably mounted in a vacuum chamber (42) and movable on a first linear path into the plane of substrate (20), for the mounting and for the transport of the mask (15) provided...
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5344542 |
Multiple-processing and contamination-free plasma etching system
The present invention includes plural plasma etching vessels and a wafer queuing station arrayed with a wafer transfer arm in a controlled environment. Wafers are movable within the controlled...
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5336325 |
Enhanced vertical thermal reactor system
An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool down chamber, each sealed from...
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5336029 |
Loading apparatus having a suction-hold mechanism
A suction head having plural suction pads on both surfaces thereof is used to transfer a substrate of a compack disk and the like from one position to another for loading. The suction head is...
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5333986 |
Transfer apparatus
A transfer apparatus for transferring a semiconductor wafer has a base provided with a rotary driving source, and four arms having the same length. A first inner arm has an end fixed to the rotary...
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5332013 |
Unmanned conveying device in clean room
An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own...
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5326211 |
Airlock system
An air lock system for the transfer of large containers into a containment comprises a set of horizontally and vertically slidable doors adapted to define a variable opening for the passage of...
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5310410 |
Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus
A method wherein wafers are transferred between a loading chamber and a central vacuum chamber. A plurality of first vacuum processing chambers are disposed in a satellite relationship around the...
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5308989 |
Fluid flow control method and apparatus for an ion implanter
A fluid flow control for use with a process chamber. In the disclosed embodiment, the process chamber is for ion implantation of a workpiece such as a silicon wafer and the fluid flow control is to...
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