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5784799 |
Vacuum processing apparatus for substate wafers
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
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5779799 |
Substrate coating apparatus
An apparatus is provided for coating a surface of a plate-like material, or substrate, specifically a semiconductor wafer, with a coating material. The apparatus includes a plurality of...
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5769588 |
Dual cassette load lock
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
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5765983 |
Robot handling apparatus
Robotic apparatus may be provided for handling workpieces such as semiconductor wafers within an integrated vacuum processing system and may be mounted within a vacuum load lock chamber adjacent a...
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5762745 |
Substrate processing apparatus
A substrate processing apparatus includes a plurality of easily removable processing units including at least a heating unit for heating a substrate and a cooling unit for cooling the substrate,...
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5759268 |
System for providing a controlled deposition on wafers
A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the...
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5759006 |
Semiconductor wafer loading and unloading apparatus, and semiconductor wafer transport containers for use therewith
A transport container for transporting a plurality of semiconductor wafers as stacked therein. The container includes a box-shaped container body having four peripheral walls, and an upper lid for...
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5755332 |
Enclosed sealable purgible semiconductor wafer holder
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing...
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5752796 |
Vacuum integrated SMIF system
A system uses a portable carrier for transporting multiple semiconductor wafers in a substantially particle free environment. A cassette freely received within the carrier for supporting the wafers...
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5746562 |
Processing system and device manufacturing method using the same
A processing system is disclosed which includes first and second chambers, each for accommodating a processing apparatus therein, each chamber being able to be kept gas tight, a coupling member for...
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5746434 |
Chamber interfacing O-rings and method for implementing same
Disclosed is a method for implementing a vacuum seal between an interface of a transport chamber interface port of a transport chamber and another chamber. The transport chamber being configured to...
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5743965 |
Disk coating system
To improve the reliability, operating speed, size of equipment and economy, a disk coating system for forming a coating on a disk such as a compact disk is arranged to transfer disks to and from a...
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5740845 |
Sealable, transportable container having a breather assembly
A transportable, sealable container, for example a SMIF pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. The two sealing...
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5740059 |
Method of transporting substrates and apparatus for transporting substrates
Transferring apparatus includes a main body defining a take-up position at which a rectangular glass substrate is located and a transfer position spaced apart from the take-up position. A...
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5730573 |
Clean transfer method and apparatus therefor
A clean transfer method and an apparatus therefor capable of facilitating storage and transfer of transferred objects by a vacuum clean box and realizing transfer of the objects to various...
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5713711 |
Multiple interface door for wafer storage and handling container
The present invention is an improved container and interface for transporting or otherwise handling contamination-sensitive materials, such as semi-conductor wafers during processing. The container...
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5711427 |
Wafer carrier with door
A wafer container has an open front defined by a door frame and a door sized for the door frame. The door receiving frame has slots on opposite sides and the door utilizes latching portions that...
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5706930 |
Method of and apparatus for transferring circular object
When a carrier arm is retracted, a semiconductor wafer carried thereon passes between three light-emitting elements and three light-detecting elements associated therewith. At this time, a...
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5700127 |
Substrate processing method and substrate processing apparatus
According to the present invention, a substrate processing method has (a) the step of predetermining initial conditions for cassettes and substrates before processing is started, (b) the step of...
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5697759 |
Method of orienting a specimen carrier holder in an automated specimen processing system
A method of loading a specimen carrier in an automated specimen processing system facilitates loading into or removing from a tiltable specimen carrier holder a fully loaded specimen carrier by a...
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5697750 |
Controlled environment enclosure and mechanical interface
A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a...
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5697749 |
Wafer processing apparatus
The present invention refers to a wafer transfer robot for a wafer boat of a wafer processing apparatus wherein a turntable within a chamber of a turntable apparatus is provided with a prescribed...
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5697748 |
Wafer tray and ceramic blade for semiconductor processing apparatus
A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more...
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5695564 |
Semiconductor processing system
A multi-chamber type process system for processing semiconductor wafers is constituted such that a plurality of units selected from process units, transfer units, interconnection units and in/out...
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5685684 |
Vacuum processing system
A vacuum treating apparatus having a vacuum treating chamber for treating a to-be-treated substrate in vacuum, includes a plurality of substrate cassettes which are installed in the open air and...
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5674368 |
Film forming apparatus
A film forming apparatus includes a film forming chamber in which a film is formed on a substrate at a film forming position, a plurality of load lock chambers provided on the film forming chamber...
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5668452 |
Magnetic sensing robotics for automated semiconductor wafer processing systems
A collision avoidance technique is provided in an automated semiconductor wafer processing system, wherein a magnet or magnetic strip is incorporated into each boat or carrier used to hold and...
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5664925 |
Batchloader for load lock
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier, for example, used for supporting and transporting a plurality of the wafers in spaced, stacked,...
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5662785 |
Method for masking a workpiece and a vacuum treatment facility
A vacuum treatment facility and method are provided for the surface treatment of workpieces, particularly for the covering of the central and/or peripheral area of circular-disk-shaped workpieces,...
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5660517 |
Semiconductor processing system with wafer container docking and loading station
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which...
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5658123 |
Container-less transfer of semiconductor wafers through a barrier between fabrication areas
A method and apparatus is presented for transferring semiconductor wafers through a barrier between two separate fabrication areas without the transfer of a container (i.e., wafer boat) with the...
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5658114 |
Modular vacuum system for the treatment of disk-shaped workpieces
Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single...
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5655277 |
Vacuum apparatus for the surface treatment of workpieces
Vacuum processing plant with a small footprint for the surface treatment of large-area substrates in a virtually upright position, has a vacuum chamber containing a substrate carrier rotatable...
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5653565 |
SMIF port interface adaptor
An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The...
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5645390 |
System and Method for conveying cargo containers through environmentally controlled enclosures
System (10) for automatically conveying photosensitive cargo containers (15) through a storage compartment (14) of a vehicle, preferably a trailer (12) and selective environmentally controlled...
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5641354 |
Puller cell
A crystal puller cell (18) provides a low particulate environment for an individual crystal puller (28). The airflow within each cell is adjustable so that a particulate level appropriate to the...
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5636963 |
Method of handling wafers in a vacuum processing apparatus
A vacuum processing apparatus includes a reaction chamber, a non-reaction chamber which is a load-lock chamber or a double load-lock chamber. A double arm is accommodated in the non-reaction...
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5630690 |
Enclosure for load lock interface
A load lock interface for a semiconductor wafer process chamber includes a platform adapted to receive and engage with a carrier containing a cassette of semiconductor wafers; and a removable...
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5628828 |
Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface
Process equipment and method for processing a semiconductor device comprising a buffer chamber, at least one process chamber connected to the buffer chamber through an opening portion, a...
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5628683 |
System for transferring substrates into clean rooms
A system for transferring substrates in a clean room (100) has a box (1) for receiving a cassette (101) that contains the substrates (102), and a bottom (2) that hermetically closes the box (1) and...
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5613821 |
Cluster tool batchloader of substrate carrier
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a...
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5611858 |
Apparatus for transporting discoidal substrates in a vacuum coating apparatus
In an apparatus for the transport of discoidal substrates (3, 3', . . . ) through a treatment station or from a first to a second processing station (4 and 5, respectively) of a vacuum coating...
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5611655 |
Vacuum process apparatus and vacuum processing method
A vacuum process apparatus includes a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed, at least one...
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5611452 |
Sealable transportable container having improved liner
A transportable, sealable container, for example a Standard Mechanical Interface (or SMIF) pod, including a box and box door. The box has a first sealing surface and the box door has a second...
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5609689 |
Vacuum process apparaus
A cooling table for cooling a processed object of process in a vacuum reserve chamber is provided with support members, which support the object with predetermined gaps between the object and the...
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5609459 |
Door drive mechanisms for substrate carrier and load lock
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a...
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5607353 |
Airlock system
In an airlock system, through which drums containing radioactive material are transferred into a containment area, a passage has an intermediate region, of reduced cross section relative to the...
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5590994 |
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
At least one chamber is provided for transport of workpieces such as storage disks, at least at times, into the vacuum atmosphere, during their manufacturing and comprises at least two exterior...
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5588789 |
Load arm for load lock
Load transferring apparatus comprises a base member, a planar platform for supporting a load and a drive arm pivotally mounted on the base member for moving the platform in plane between a...
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5586585 |
Direct loadlock interface
A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber...
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