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6672864 Method and apparatus for processing substrates in a system having high and low pressure areas  
A positive pressure gradient is maintained across an open access port of an interface chamber such as a load lock chamber which provides an interface between a low pressure chamber such as a...
6669121 Holder support device  
A holder support device in an electron microscope. The device has a detachable cylindrical holder extending along the X-axis. The holder support device permits the position of the inner end of the...
6662465 Vacuum processing apparatus  
A vacuum processing apparatus which includes a conveyor structure for transferring a substrate from a substrate storage device held on a substrate storage device mount table. The apparatus further...
6663332 System for the treatment of wafers  
Installation for treatment of wafers in a reactor. To that end a series of wafers is placed in a wafer rack and fed into the reactor. Transport into and out of the reactor, which is sited in an...
6662082 System for operating a robot with easy programming  
A robot wherein the condition for a work and a sequence of movements to be performed may be set in connection with positions. In addition to setting a position at which a work is performed, the...
6655891 Substrate treatment system, substrate transfer system, and substrate transfer method  
A substrate transfer system comprising a cassette table for mounting a cassette which has an opening portion for loading and unloading a substrate and a cover detachably provided to the opening...
6652212 Cylinder, load port using it, and production system  
A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room...
6641350 Dual loading port semiconductor processing equipment  
A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing...
6641348 Docking station for substrate transport containers  
A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty...
6643564 Method of determining retreat permission position of carrier arm and teaching device thereof  
A retreat permission position of a carrier arm when the carrier arm is moved back to retreat outside a mounting table after the carrier arm carries a substrate to a position above the mounting...
6637998 Self evacuating micro environment system  
A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the...
6634845 Transfer module and cluster system for semiconductor manufacturing process  
A number of process chambers connected to a transfer module can be increased after a cluster system provided with the transfer module is initially established. The transfer module transfers an...
6619901 Method and apparatus for air guidance in a processing chamber  
An apparatus for air guidance in a processing chamber has a housing with an entrance gate and an exit gate. Inside the housing the processing chamber is embodied for filling and sealing small...
6612797 Cassette buffering within a minienvironment  
A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate...
6609869 Transfer chamber with integral loadlock and staging station  
A substrate processing system includes a substrate handling chamber and an integrated load lock chamber. The load lock chamber has a gated inlet for the transfer of a substrate into and out of the...
6601824 Single shaft, dual cradle vacuum slot valve  
A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each...
6602127 Plant for producing semiconductor products  
A plant for producing semiconductor products that includes at least one clean room having a floor and a plurality of production units that are configured in the clean room. The plurality of the...
6599076 Dual cassette load lock  
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
6595370 Apparatus and method for reducing contamination in a wafer transfer chamber  
A wafer transfer chamber, such as a load-lock chamber used in a cluster processing tool for semiconductor devices that has reduced particle contamination problem is provided. In the wafer transfer...
6592317 Pod loader interface end effectors  
An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the...
6591987 Wafer retainer  
A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at...
6592318 Docking cart with integrated load port  
An integrated wafer transport and transfer device is disclosed, which includes a vehicle with an integrated docking platform for holding a wafer carrier such as a FOUP (front opening unified pod)....
6592450 Access floor using special transfer paper  
Disclosed is an access floor made using a special transfer paper which is laid on a floor of the interior of a clean room to prevent generation of dusts or bacteria in a factory of and integrated...
6588123 Apparatus and method for preventing a wafer mapping system of an SMIF system from being polluted by corrosive gases remaining on wafers  
An apparatus and a method for preventing a wafer mapping system of an SMIF system from being polluted by a corrosive gas remaining on wafers according to the present invention are disclosed. The...
6585470 System for transporting substrates  
A system for transporting substrates into a clean room is provided. The system has an isolation chamber located between the clean room and a staging area. A first movable closure is coupled to the...
6582178 Mini-modual manufacturing environmental  
A mini-modular manufacturing environmental chamber for processing and transporting semiconductor devices is disclosed. The cylindrical chamber is provided with a conveyer assembly that transports...
6582296 Ventilating method and ventilating system for semiconductor manufacturing apparatuses  
A semiconductor manufacturing apparatus ventilating system can reduce energy consumption with respect to air-conditioning and a power spent for transporting air in a clean room by minimizing an...
6582174 Substrate processing apparatus and substrate processing method  
A substrate processing apparatus includes a rotation accommodating shelf and a transfer machine. The rotation accommodating shelf is capable of accommodating a plurality of accommodating...
6577923 Apparatus and method for robotic alignment of substrates  
A robot device that either translationally or rotationally aligns an object with a slot. For translational alignment, the robot device comprises a position sensor positioned in close proximity to...
6575737 Method and apparatus for improved substrate handling  
A transfer chamber is provided. The transfer chamber has a temperature adjustment plate located in an upper portion of the chamber, a substrate handler located in a lower portion of the chamber,...
6575687 Wafer transport system  
A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a...
6572320 Robot for handling workpieces in an automated processing system  
An automated workpiece processing system has a transfer robot including an end effector having arms which move linearly towards each other to pick up a workpiece. Each arm has two workpiece...
6568896 Transfer chamber with side wall port  
A chamber for transferring a substrate is provided. In one embodiment, a chamber for transferring a substrate includes at least one side wall supporting a lid and coupled to a chamber bottom. The...
6558100 Vacuum processing apparatus and a vacuum processing system  
The vacuum processing apparatus has an atmospheric loader having a plurality of cassette tables and a transport unit for carrying wafers, a vacuum loader equipped with vacuum wafer-processing...
6551405 Tool and method for in situ vapor phase deposition source material reloading and maintenance  
A tool and method for reloading source materials in a vapor phase deposition (VPD) environment is disclosed. The tool and method does not require the venting of the VPD environment in order to...
6551044 Bellows isolation for index platforms  
A loadlock chamber for a semiconductor processing apparatus comprises an index platform or registration plate, a shaft extending through a wall of the chamber to actuate the platform, and a...
6551045 Wafer stage chamber  
A wafer stage chamber assembly is provided to isolate semiconductor substrates, a wafer stage device, and the process of making semiconductor wafers from the atmosphere so that the resulted wafers...
6549825 Alignment apparatus  
An alignment apparatus which obtains an amount of correction for centering a semiconductor wafer from four points of a wafer edge detected by noncontact proprioceptors in a wafer delivery position...
6543981 Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation  
A method for creating a reduced particle environment in a localized area of a mechanically active transport interface is provided. The augmentation of the air flow results in a sweeping air flow...
6540869 Semiconductor processing system  
A semiconductor processing system comprises a first vacuum processing unit and a second vacuum processing unit connected thereto. The first and second vacuum processing units respectively comprise...
6540465 Substrate processing apparatus  
A substrate processing apparatus that includes a preliminary chamber and a substrate transferring apparatus. The substrate transferring apparatus is disposed in the preliminary chamber for...
6541787 Optically aligning a loadport on a process machine by transmitting light through a system of apertures  
An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and...
6540469 Substrate processing apparatus  
A substrate processing apparatus includes a process tube for processing a plurality of substrates, two boats for accommodating the substrates, two boat elevators, a substrate transfer unit for...
6537011 Method and apparatus for transferring and supporting a substrate  
A method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system. In one aspect, a support ring having one or more substrate support members mounted...
6533521 Integrated substrate handler having pre-aligner and storage pod access mechanism  
Access to the interior of a substrate storage pod in which substrates such as semiconductor wafers are stored is gained using an access device provided within a micro environment enclosure. The...
6530732 Single substrate load lock with offset cool module and buffer chamber  
A load lock and related method of handling a substrate involves placing a substrate onto a vertically movable poppet and moving the poppet between two vertically opposed subchambers such that in...
6520726 Apparatus and method for using a robot to remove a substrate carrier door  
A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the...
6520727 Modular sorter  
A modular sorter is disclosed in which modular sections maybe easily added and removed to add and remove load port assemblies as required by a particular wafer fabrication run. In one embodiment,...
6517048 Isolation valves  
Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a...
6517691 Substrate processing system  
A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or...