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6811369 Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method  
In a semiconductor fabrication apparatus, a pod that receives a single substrate using a substrate supporting table and a lid member in a sealing state is loaded from outside of a chamber and the...
6808352 Method for transporting boards, load port apparatus, and board transport system  
A substrate container having substrates stored therein and sealed with a door is placed onto a load port apparatus provided on a substrate processing system, and a door of the load port apparatus...
6802934 Processing apparatus  
Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133. Each of the load lock chambers is capable of accommodating a single wafer W....
6799932 Semiconductor wafer processing apparatus  
A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean...
6796763 Clean box, clean transfer method and system  
A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box...
6795202 Wafer processing apparatus having wafer mapping function  
If a plurality of wafers are placed on each shelf of a rack in a pod, some problems will arise in processing processes. In addition, in some apparatus for detecting wafers, driving means having a...
6779962 Device for handling flat panels in a vacuum  
A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven...
6781139 Load lock vacuum conductance limiting aperture  
An apparatus in combination with a load lock of an ion implanter comprises a cover adjacent an isolation valve slot of the load lock. The cover defines an aperture generally conforming to the size...
6776567 Valve/sensor assemblies  
In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position...
6772805 In-situ purge system for article containers  
An in-situ purge system for charging the interior of a semiconductor wafer pod with nitrogen gas after the pod is exposed to ambient moisture, air and particles in a clean room. A gas supply line...
6767170 Wafer handling system and wafer handling method  
A wafer holder has a set of minimum contact wafer support members predefining support member contacting portions on a planar wafer surface of a wafer. The wafer chuck has a wafer support region...
6764265 Erosion resistant slit valve  
Embodiments of the present invention provide structures for reducing erosion of a slit valve utilized in the fabrication of semiconductor devices. Specifically, non-metallic slit valve components...
6758647 System for producing wafers  
A system and method of manufacturing wafers are provided suitable for a semiconductor manufacturing system and a method thereof capable of shortening the processing period composed of a series of...
6755980 Process to remove solid slag particles from a mixture of solid slag particles and water  
Process to remove solid slag particles from a mixture of solid slag particles and water present in a quench zone, which quench zone is part of a process for the preparation of synthesis gas by...
6755602 Wafer transport pod with linear door opening mechanism  
A pod for transporting a cassette of semiconductor wafers that is equipped with a linearly operated door opening/closing mechanism is provided. The pod includes a body member, a cover member and a...
6746196 Vacuum treatment device  
A vacuum treatment device, comprising a vacuum treatment chamber (1) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber (2) communicating with the vacuum...
6746239 Substrate feed chamber and substrate processing apparatus  
A substrate feed chamber that is equipped in a substrate processing apparatus is provided. The substrate feed chamber has a storage tray capable of storing simultaneously three or more substrate...
6746197 Substrate processing apparatus and substrate processing method  
A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a...
6746195 Semiconductor transfer and manufacturing apparatus  
A transfer apparatus has a transfer robot for transferring wafers between a process chamber and a pre-pressurizing chamber. The process chamber and pre-pressurizing chamber are arranged in a...
6746198 Substrate transfer shuttle  
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a...
6742977 Substrate processing device, substrate conveying device, and substrate processing method  
An unprocessed substrate is conveyed to a film-processing chamber at the same time a processed substrate is conveyed to a substrate preparation chamber, reducing the substrate processing cycle,...
6742978 Wafer indexing device  
An indexing device including a housing, a cassette support mechanism, a cassette, and transport apparatus carried by the housing. The transport apparatus includes a bed of rollers having a common...
6739820 Stocker apparatus with increased input/output capacity  
Within both a stocker apparatus and a method for operating the stocker apparatus there is employed: (1) a minimum of six input/output ports; (2) an array of storage locations for storing an array...
6736583 Method and system for sharing robotic mechanisms between automated storage libraries  
A method and system for sharing robotic mechanisms between physically remote storage libraries in an automated storage library system includes routing robotic mechanism guide structures between...
6736582 Device for manipulating an object for loading and unloading a clean room  
In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining...
6733243 Method of interbay transportation  
An interbay transportation system includes bays in which process equipment are provided, stockers provided for the individual bays, and a vehicle traveling through the stockers for transporting a...
6729823 Processing system for object to be processed  
A processing system for an object to be processed has a housing defining a closed space. The housing is provided with an opening through which an airtight carrying box is carried in and carried...
6729824 Dual robot processing system  
A substrate processing system having a transfer chamber having two processing chambers and two load lock chambers coupled thereto is generally provided. The transfer chamber includes a body having...
6726429 Local store for a wafer processing station  
A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more...
6722835 System and method for processing semiconductor wafers including single-wafer load lock  
A wafer processing system employing a single-wafer load lock with integrated cooling unit is disclosed. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By...
6722834 Robot blade with dual offset wafer supports  
A robot blade and a method of using the robot blade for transferring objects, namely substrates, through a process system, the robot blade comprising an upper platform having a first object...
6719517 Substrate processing apparatus with independently configurable integral load locks  
A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings...
6719516 Single wafer load lock with internal wafer transport  
The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load...
6716651 Method and apparatus for identifying a wafer cassette  
A wafer/loadport assembly that has a built-in, self-identification system and a method for operating the assembly are described. The wafer cassette is equipped with recessed holes provided with...
6709218 Robot blade for semiconductor processing equipment  
The present invention generally provides a robot blade which provides a plurality of semi-conductive or conductive contacts disposed at least partially on the surface of the blade to support a...
6704998 Port door removal and wafer handling robotic system  
An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient...
6702540 Machine and method for manufacturing compact discs  
A compact disc manufacturing machine carrying out a plurality of manufacturing stages including a vacuum stage. A central manipulator has a plurality of radially and outwardly extending...
6701972 Vacuum load lock, system including vacuum load lock, and associated methods  
A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock...
6698992 Elastically expandable positioning device  
An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input...
6698991 Fabrication system with extensible equipment sets  
A fabrication system is provided which includes a storage apparatus coupled perpendicularly to a branch transport aisle, and one or more environmentally controlled fabrication tools coupled...
6699173 Canopy seal for infant care apparatus  
An infant care apparatus having a canopy movable vertically with respect to an infant platform. The canopy has a lower edge mating with upper peripheral edges of a plurality of vertical walls...
6690986 Method of detecting the position of a wafer  
An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber into which wafers are loaded through a pair of loadlocks which are spaced one above the other. A robot within...
6688375 Vacuum processing system having improved substrate heating and cooling  
The invention is directed a vacuum processing system having improved substrate heating and cooling facilities. An evacuable chamber of the system includes a first section in which a temperature of...
6690993 Reticle storage system  
A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a...
6682343 Substrate processing apparatus  
A substrate processing apparatus includes a substrate holder for holding a substrate with a holding angle of 45 degrees to 90 degrees with respect to a horizontal plane, a conveying system to...
6679672 Transfer port for movement of materials between clean rooms  
A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient...
6680775 Substrate treating device and method, and exposure device and method  
The mask guiding device of the present invention has a mask guiding device that guides a substrate received from the outside. The mask guiding device is provided with a plurality of receiving...
6679671 Substrate transfer shuttle having a magnetic drive  
A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle,...
6676356 Device for attaching target substrate transfer container to semiconductor processing apparatus  
A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to...
6677594 Scanning wheel for ion implantation process chamber  
A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer 7 on which a wafer is supported. Each wafer support element 3 has a...