|
Match
|
Document |
Document Title |
|
|
7569191 |
Method and apparatus for providing precursor gas to a processing chamber
Embodiments of the invention provide a method and an apparatus for generating a gaseous chemical precursor for a processing system. In one embodiment, an apparatus for generating the gaseous...
|
|
|
7491913 |
Bake apparatus for use in spin-coating equipment
Bake apparatus for use in baking a substrate, such as a semiconductor wafer, includes a chamber, a hot plate installed within the chamber, and first and second buffer plates for uniformly...
|
|
|
7489857 |
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process
An apparatus for producing powders of metal compound containing oxygen comprising a liquid flow controller, a vaporizer and a reactor, which consists essentially of: means for feeding a gas...
|
|
|
7190891 |
Heating-cooling system for a nozzle
A novel nozzle heater design, that facilitates fast thermal response on demand, to achieve rapid reduction in viscosity, allowing fluid to flow through the exit aperture of the nozzle with less...
|
|
|
7186385 |
Apparatus for providing gas to a processing chamber
An apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes a canister having at least one baffle...
|
|
|
7122085 |
Sublimation bed employing carrier gas guidance structures
Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto...
|
|
|
6982005 |
Multiple-nozzle thermal evaporation source
A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material.
|
|
|
6740586 |
Vapor delivery system for solid precursors and method of using same
A vaporizer delivery system including a sublimatable solid precursor material applied to a wire substrate for vaporizing and achieving a continuous uninterrupted delivery of a vaporized precursor...
|
|
|
6718126 |
Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition
An apparatus and method for effectively and controllably vaporizing a solid precursor material is provided. In particular, the present invention provides an apparatus that includes a housing...
|
|
|
6709524 |
Vapor deposition method and vapor deposition apparatus for forming organic thin films
In order to provide a vapor deposition method for forming an organic thin film, which is advantageous in that a deposition rate can be easily controlled and deposition can be conducted with stable...
|
|
|
6471781 |
Method of depositing titanium nitride thin film and CVD deposition apparatus
A CVD apparatus for fabricating a titanium nitride thin film is provided. The apparatus comprises an evacuatable reaction vessel having an interior, a pumping apparatus capable of exhausting the...
|
|
|
6466738 |
Material for aging-resistant ceramic vaporizers
A ceramic material is provided containing 45 to 55% by weight TiB 2 and 40.5 to 54.7% by weight BN and 0.1-1.5% by weight Ca in the form of a compound selected from the group consisting of the...
|
|
|
6444038 |
Dual fritted bubbler
A dual chambered bubbler vessel for use with solid organometallic source material for chemical vapor phase deposition systems, and a method for transporting a carrier gas saturated with source...
|
|
|
6424800 |
Bubbler
A bubbler for use in vaporizing a precursor (source) for thin film deposition includes a vaporizer chamber, the vaporizer chamber having defined therein a source inlet hole, an exhaust hole and a...
|
|
|
6189806 |
Metallizing device for vacuum metallizing
A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (3) heated by an electrical heating rod (8). This vaporizer (3) is connected to a nozzle element (1) in the...
|
|
|
6079874 |
Temperature probes for measuring substrate temperature
An apparatus accurately measures a temperature of a substrate in a thermal processing chamber. The apparatus has a support structure to support the substrate within the thermal processing chamber....
|
|
|
5966499 |
System for delivering a substantially constant vapor flow to a chemical process reactor
A vapor delivery system for delivering a vapor-phase reactant to a chemical process reactor at a substantially constant flow rate. The vapor delivery system includes a source of a reactant...
|
|
|
5481086 |
High temperature deformable crucible for use with self-resistively heated specimens
A deformable, inexpensive crucible for use with a dynamic thermo-mechanical physical test or simulating system, specifically for holding a self-resistively heated specimen (250) at liquid...
|
|
|
5455014 |
Liquid deposition source gas delivery system
A liquid deposition source delivery system (22) includes a reactant source (50) of a liquid chemical reactant, a first heater (54) positioned adjacent to the reactant source (50) , and a vapor...
|
|
|
5321792 |
Apparatus for the continuous feeding of wire to an evaporator boat
A coating material to be evaporated in an evaporator cell disposed in a vacuum chamber is fed in the form of a wire to the evaporator cell in accordance with the depth of the molten bath, by a wire...
|
|
|
5266117 |
Apparatus for the evaporative coating of substrates
A vacuum chamber contains means for transferring a substrate for an information disc such as a CD from a loading station to a coating station, where material such as aluminum in wire form is...
|
|
|
5253266 |
MBE effusion source with asymmetrical heaters
An effusion source, for the generation of molecular beams, adapted to be positioned at an angle to the horizontal, within a vacuum chamber, of an MBE system including heating structures around the...
|
|
|
5239612 |
Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat
A method of resistance heating using a graphite container having a graphite body and a pyrolytic boron nitride coating in which a metal charge of predetermined weight is deposited over the coating...
|
|
|
5239611 |
Series evaporator
A device for heating a material to an evaporation temperature so that the material can be coated on a substrate is provided which includes a series evaporator for containing the material to be...
|
|
|
5198032 |
Apparatus for vapor depositing on tape having grooved evaporator cell
The invention relates to a tape vapor coating apparatus for the production of film webs 50 coated in a vacuum, with a coating chamber for the accommodation and advancement of a film web 50 as well...
|
|
|
5168543 |
Direct contact heater for vacuum evaporation utilizing thermal expansion compensation means
An apparatus for evaporating materials to be deposited onto a substrate provides heat directly to the material to be evaporated by conduction and includes a means for compensating for thermal...
|
|
|
5136609 |
Method of producing finely divided particles or powder, vapor or fine droplets, and apparatus therefor
A method of producing finely divided particles or powder, vapor or fine droplets comprises the steps of heating and melting the starting raw material in a vessel having opposed reflecting surfaces,...
|
|
|
5128538 |
Vapor effusion source for epitaxial deposition plants
An effusion source for epitaxial deposition plants wherein molecular vapor beams are directed towards a substrate to be grown in ultrahigh vacuum environment, which has a first tube, which is...
|
|
|
5035201 |
Evaporating boat having parallel inclined cavities
A self-resistance-heated electrically-conductive refractory evaporating boat has inclined cavities on its two horizontal surfaces, the cavities being parallel to each other.
|
|
|
5034604 |
Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction
A device and method for producing an ultra pure molecular beam of elemental molecules utilizing a reduced thermal gradient filament construction in an effusion cell is provided. The effusion cell...
|
|
|
5016566 |
Apparatus for forming films by evaporation in vacuum
An apparatus for forming films by evaporation in vacuum has a chamber for evaporating a coating material containing a coating material (10), and a heating element (2) positioned outside this...
|
|
|
4959524 |
Apparatus and evaporator for metallizing foils
In order to radically improve the efficiency of evaporators used in vacuum foil coating plants wherein reactive metals such as Al, Ni, Fe and the like are being evaporated, a radiation heater...
|
|
|
4748315 |
Molecular beam source
A molecular beam source suppresses a temperature fall at the opening of a crucible, to make a temperature distribution within the crucible uniform and to prevent the phenomenon of bumping of a...
|
|
|
4722515 |
Atomizing device for vaporization
A liquid vaporizing apparatus having a cylindrical heated vaporizing surface against which atomized droplets of liquid are thrown by a spinning disk; the disk receiving a continuous thin film of...
|
|
|
4704988 |
Process and apparatus for obtaining a gaseous stream containing a compound in the vapor state, more particularly usable for introducing this compound into an epitaxy reactor
The invention relates to a process and an apparatus for obtaining a gaseous stream containing a compound in the vapor state, more particularly usable for introducing said compound into a vapor...
|
|
|
4639377 |
Thin film formation technique and equipment
A thin film formation technique and apparatus therefor which comprises converting a molecular beam effusing from a molecular beam source equipment to a pulsed molecular beam; introducing the pulsed...
|
|
|
4607152 |
Vacuum evaporation device
A vacuum evaporation device incorporates a main treatment enclosure connected to an auxiliary chamber containing a material evaporation cell. The cell is fixed to a tight bellows displacement...
|
|
|
4553022 |
Effusion cell assembly
An effusion cell assembly includes a self-supporting element disposed within a housing member. The self-supporting element provides efficient heat transfer to a crucible positioned therein and...
|
|
|
4543467 |
Effusion type evaporator cell for vacuum evaporators
Vapor sources for vacuum evaporators in which the evaporation rate has hitherto been adjusted by varying the temperature of the vessel containing the evaporative substances, have a very large time...
|
|
|
4518846 |
Heater assembly for molecular beam epitaxy furnace
In a molecular beam epitaxy furnace, a heater is described for heating the interior of an effusion cell. The heater includes an outer cylindrical sleeve having one end connected to receive a...
|
|
|
4482799 |
Evaporation heater
An evaporation heater having a wire wound into a coil and a support wire which extends from one arm of the wire outside of the coil, in spaced proximity therewith, to a central position within the...
|
|
|
4426569 |
Temperature sensor assembly
An effusion cell assembly is disclosed and includes a temperature sensor designed to balance sensor temperature and cell crucible temperature by an increased heat radiation collection.
|
|
|
4239955 |
Effusion cells for molecular beam epitaxy apparatus
The effusion cell for molecular beam epitaxy apparatus consists of a pyrolytic BN cylindrical crucible surrounded by a heating coil. The position of the heating coil is maintained by a plurality of...
|
|
|
4146774 |
Planar reactive evaporation apparatus for the deposition of compound semiconducting films
An apparatus and method for epitaxial film formation is disclosed. Planar reactive evaporation techniques suitable for scaling are employed to produce high purity compound semiconducting films at...
|
|
|
4094269 |
Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
Apparatus for the vapor deposition of volatizable solid substances on continuously moving substrates, more particularly for the production of photographic materials by vapor deposition of silver...
|
|
|
4063974 |
Planar reactive evaporation method for the deposition of compound semiconducting films
An apparatus and method for epitaxial film formation is disclosed. Planar reactive evaporation techniques suitable for scaling are employed to produce high purity compound semiconducting films at...
|
|
|
4024376 |
Device for measuring the evaporation rate in vacuum evaporation processes
A measuring device for determining the rate of evaporation of materials in vacuum systems, particularly for producing thin layers of precise thickness on substrates. An electrically conducting...
|
|
|
4002880 |
Evaporation source
In an evaporation source for the vacuum deposition of sublimating material, the evaporant surrounds, and is spaced from, an axially disposed coiled tungsten heater. The evaporated material passes...
|
|
|
3970820 |
Wire fed flash evaporation source
A unique device for flash evaporating a material within a vacuum chamber. The device includes a pair of electrodes one of which is grounded and the other of which is connected to a power supply and...
|
|
|
3947606 |
Process for producing chemical compounds applicable to surfaces in the form of thin layers
A surface of a work piece is provided with an adherent, thin but uniform, coating layer of a chemical compound by forming the chemical compound by explosive conversion of a substance into a gaseous...
|