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7566997 Gas bearing system  
A linear motor device has a gas bearing and comprises a platen and a motor stack with a bottom face positionable above the platen. The motor stack has a bottom face with a recessed gas pocket. The...
7531816 Vacuum conveying apparatus and charged particle beam equipment with the same  
A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with...
7530778 High-Performance non-contact support platforms  
A non-contact support platform for supporting without contact a stationary or traveling object by air-cushion induced forces, the platform comprising at least one of two substantially opposite...
7497014 Sliding bearing and method for the manufacture thereof  
A sliding bearing for axial and/or radial arrangement of a first bearing member in relation to a second bearing member, comprises a second bearing member, which has a bearing recess provided with a...
7458158 Method of making a sliding bearing  
This invention introduces a new category of engineered surfaces and corresponding production processes for better wear resistance and lower friction loss. The structured surfaces can be applied on...
7311036 Pneumatic cylinder  
A pneumatic cylinder has a shaft member having a piston and a piston rod combined with each other in an axial direction, a cylinder body supporting the shaft member with the piston rod protruding...
7290931 Vacuum pre-loaded pneumatic bearing with onboard vacuum generator  
A pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing comprises a bearing body having an active surface divided into a lift portion and a pre-load portion. A plurality of...
7287906 Hydrostatic bearing for linear motion guidance  
A self-compensating hydrostatic (pressurized fluid film) linear bearing that maintains a fluid gap between a carriage and a rail when relative forces are applied. The geometric shape of the rail...
7284907 Gas bearing system  
A gas bearing system comprising two opposing substantially parallel bearing surfaces ( 2, 3 ) and at least one gas duct ( 6 ) for supplying gas through an orifice ( 7 ) to the bearing gap ( 5 )...
7284906 Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing  
An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a plurality of vacuum pockets includes a differential exhaust system for evacuating the vacuum pockets and an...
7275871 Fluid dynamic bearing structure and method of adjusting bearing gap  
A bolt insertion hole is provided along an edge end portion on a flat surface of a plate-like member, and a tap hole is provided on an end face of the other edge end correspondingly to the bolt...
7275870 Air bearing structure and linear driving device using said air bearing structure  
The length of the bearing surface in the movable portion which moves linearly is larger than the length of the bearing surface in the fixed portion by the stroke of the movement. With this...
7255478 Transporting apparatus  
A transporting apparatus which can horizontally transport a carrier using an air bearing of which a rotational degree of freedom is kept relative to a surface of a base. The transporting apparatus...
7249889 Sliding guide apparatus  
A sliding guide apparatus guides a movable member for a base. A pair of guide surfaces are formed on the base. A pair of sliding surfaces are formed on the movable member as so to be opposed to the...
7232286 Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber  
The present invention provides a seal device comprising a sealing passage which allows communication between a first space and a second space, and evacuation lines individually connected to the...
7232257 Hydrostatic bearing and stage apparatus using same  
A hydrostatic bearing apparatus has a hydrostatic bearing pad, a labyrinth seal part having an exhaust groove provided around the outside of the hydrostatic bearing pad, an adjustment mechanism for...
7207720 Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method  
An apparatus includes a static gas bearing provided upon a first object and configured to form a gas layer between the first object and a second object by use of gas supplied thereto, and to...
7189002 Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device  
In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is...
7168358 Static pressure sliding block  
A static pressure sliding block which can exhibit a stable function for a long time while flow control member 23 is pressed onto recess surface 21 b of static pressure receiving surface 21 a ...
7144160 Hydrodynamic bearing apparatus and stage apparatus using the same  
A plurality of preload magnet units are arranged on each side of a hydrodynamic bearing symmetrically. Preload magnet units are arranged inside a labyrinth partition to surround the hydrodynamic...
7101080 Hydrostatic pressure linear guide device  
A non-contact type hydrostatic linear guide device includes a guide unit having a pair of rail parts on the top surface thereof, and a slide unit having oil pockets in a running surface thereof. A...
7093979 Aerostatic bearing  
A guide member and a slide are disposed such as to be opposed to each other through a bearing clearance therebetween. Air is supplied to the bearing clearance through a main pipe, a branch pipe and...
7052182 Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device  
In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is...
7018103 Active vibration damping in a machine tool  
The present invention relates to a method and an apparatus for vibration damping in a machine tool comprising at least one hydrostatic guide 8 including at least one pocket 1 for supporting a...
6990737 Fluid bearings and vacuum chucks and methods for producing same  
Fluid bearings, vacuum chucks and methods for producing these devices. One example of a method for forming a fluid bearing includes forming a plate having a face surface and a bonding surface,...
6903056 Fluid bearing unit and lubricating oil composition for bearing  
There is provided a durable low-torque lubricating oil for bearings and fluid dynamic bearings, porous oil-impregnated bearings and hydrodynamic type porous oil-impregnated bearings suitable for...
6872002 Bearing material for porous hydrostatic gas bearing and porous hydrostatic gas bearing using the same  
A bearing material includes: a backing metal made of stainless steel; and a porous sintered metal layer integrated with at least one surface of the backing metal by means of a bonding layer,...
6735867 Method of making a static pressure air bearing  
In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of...
6732610 Slide apparatus and its stage mechanism for use in vacuum  
The XY stage mechanism comprises a Y slide shaft 2 penetrating through only one side surface of the wall surfaces of a vacuum chamber 1 for holding a stage base plate in a cantilevered manner,...
6655838 Shuttle compensated hydrostatic bearing  
Apparatus for allowing nearly frictionless relative motion between bearing elements in prescribed directions while providing high stiffness against motion in other directions has a bearing guide...
6644856 Hydrostatic bearing device  
A hydrostatic bearing device for two machine areas moving relative to each other and having faces parallel to each other with a fluid space delimited by parts of the two different machine areas and...
6629778 Fluid pressure bearing  
A bearing arrangement has fluid pressure bearings which permit an especially stiff support and is therefore especially well suited for high precision machines such as coordinate measuring...
6526870 Fluid pressure cylinder  
A circular piston and a noncircular rod are separately formed as separate parts and the piston and the rod are integrally connected to each other through an adhesive in a state in which the piston...
6502987 Precision air bearing slide and stage assembly for controlled linear motion  
An air bearing slide assembly including a carriage having a plurality of planar slide faces containing integrally mounted porous carbon air bearings, the carriage being movable over a slide ram....
6499880 Static pressure air bearing  
In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of...
6491435 Linear robot  
A linear robot includes a slide and an end effector arm connected to the slide. The end effector arm includes an end effector. During use, vacuum is selectively supplied to the end effector, with...
6471404 Bearing with cooperating inner and outer shells  
A bearing assembly ( 2 ) comprises an outer shell ( 3 ) providing a pair of coaxial annular surfaces ( 4 a , 5 a ) spaced apart-and facing inwardly towards each other, and an inner shell ( 7 )...
6467960 Air bearing linear guide for use in a vacuum  
Apparatus associated with air bearings which are suitable for use in an environment with high vacuum levels. According to one aspect, an air bearing linear guide that is suitable for use in a...
6456776 Configuration for detecting mail items  
A configuration for detecting mail items includes rigid optical waveguide elements between a monitoring location and transmitting and receiving devices on a main printed circuit board. The...
6454641 Hydrostatic fluid bearing support with adjustable inlet heights  
A polishing system such as a chemical mechanical belt polisher includes a hydrostatic fluid bearing that supports polishing pads and incorporates one or more of the following novel aspects. One...
6443618 Particulate free air bearing and seal  
A particulate free air bearing and seal is formed between a slide and an air bearing body. Pressurized gas is supplied to an air bearing region between the slide and the air bearing body. The...
6434922 Track sliding facilitating method and device for a wire stranding machine  
A method and a device for facilitating the sliding, along a track, of an element having a predominant axial dimension subjected to an intense force pressing it against the track, particularly for...
6419394 Method and device to control the movement accuracy of a unit moving linearly on hydro (air) static slides  
A method and device for simultaneous compensation of five existing components of deviation from the ideal linear motion of solid unit moving hydro (air) static slides and using five independent...
6412377 Method for maintaining a cutting blade centered in a kerf  
A saw having a self-pumped hydrodynamic blade guide or bearing for retaining the saw blade in a centered position in the saw kerf (width of cut made by the saw). The hydrodynamic blade guide or...
6402380 Fluid bearing operable in a vacuum region  
A fluid bearing suitable for use in vacuum region comprises a fluid passageway for introducing a fluid into the bearing, a pump-out slot for evacuating the fluid from the bearing, and a bearing...
6363809 Precision scanning apparatus and method with fixed and movable guide members  
An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear...
6328473 Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus  
A static air-bearing provides a gas layer between two relatively movable parts (fixed part and movable part) and a predetermined clearance between the two parts, to a stage apparatus, and to an...
6315450 Diaphragm preload air bearing  
A preload hydrostatic bearing includes a pad, a diaphragm and an adjustable member. The pad has a bearing structure, an inlet manifold, and a plurality of orifices. The orifices direct a fluid,...
6315449 Compliant hydrostatic guidance of moving lathe carriage  
A hydrostatic guidance system for a moving carriage upon a lathe bed or other such machining has a plurality of fluid, preferably air bearings mounted on the carriage and a pressurized fluid...
6293184 Gas bearing and method of making a gas bearing for a free piston machine  
A gas bearing structure including a cylindrical core and a cylindrical sleeve. The core has a radially outwardly facing surface with longitudinal and circumferential grooves formed thereon. The...
Matches 1 - 50 out of 270 1 2 3 4 5 6 >