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8167491 |
Hydrostatic mounting
A hydrostatic mounting of longitudinally displaceably arranged machine parts, which have pressure pockets for hydraulic fluid for building up a hydrostatic pressure between two machine parts, gaps...
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8136992 |
Hydrostatic mounting
A hydrostatic mounting of longitudinally displaceably arranged machine parts, which have pressure pockets for hydraulic fluid for building up a hydrostatic pressure between two machine parts, gaps...
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8043007 |
Hydrostatic profile rail guide
Hydrostatic profile rail guide with a guide carriage that is hydrostatically mountable on a guide rail, whereby the guide carriage features a back and two sides that are attached to the back,...
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8001691 |
Method for manufacturing hydrodynamic bearing and shaft
A method for manufacturing a hydrodynamic bearing (30) comprises steps of: step (201): providing a substrate (10) with a plurality of protrusions (14) formed on a periphery thereof; step (202):...
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7978307 |
Gas bearing, and lithographic apparatus provided with such a bearing
A gas bearing has a first bearing part defining a first bearing surface and a second bearing part defining a second bearing surface. Between the first bearing surface and the second bearing surface...
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7946767 |
Hydrostatic bearing and stage apparatus
A hydrostatic bearing configured to slide along a sliding surface of a structural body in a non-contact manner, the hydrostatic bearing includes a jetting part having a jetting surface configured...
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7922392 |
Hydrostatic profile rail guide
A hydrostatic profile of a rail guide with a guide carriage. Viewed in cross-section through the rail guide, there is an imaginary first straight line parallel to the mid-surface, an imaginary...
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7845853 |
Hydrostatic bearing
A hydrostatic bearing for supporting horizontal and vertical forces, with a guide rail (2) and a support element (1) with a hydrostatic mounting on the guide rail, whereby the angle α between the ...
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7802920 |
Static-pressure gas bearing mechanism
A first and a second static-pressure gas bearings supporting a rod at two locations in the axial direction in the non-contact manner are provided, in which the first static-pressure gas bearing is...
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7785009 |
Slide guiding device
A slide guiding device in a machine tool includes slide guiding surfaces provided on a bed, sliding surfaces provided on a column, which is guided on the bed for movement on the same, and movable...
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7780424 |
Self leveling dynamically stable radial bearing
A bearing configuration for use in electrical submersible pumps having improved stability. The bearing configuration comprised of a plurality of pads, each able to freely tilt and adjust to the...
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7722256 |
Flat surface air bearing assembly
An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the...
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7682082 |
Compact surface self-compensated hydrostatic bearings
A compact surface self-compensated hydrostatic bearing includes a rotor assembly including a rotor plate having upper and lower fluid restricting faces, a rotor top and bottom, each having bearing...
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7682081 |
Sliding bearing with improved surface topography
A sliding bearing comprises two opposite bearing surfaces (3, 4) which enclose a gap (6) containing a lubricant film (5), the bearing surfaces (3, 4) being moveable with respect to each other in a...
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7682546 |
Disk alignment apparatus and method for patterned media production
A method for aligning a disk with an imprinting surface is described. In one embodiment, the method includes passively aligning an imprinting surface with the disk and imprinting the disk with the...
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7651272 |
Method of assembling air bearing, air bearing and linear drive unit equipped with the same
A method of assembling an air bearing, the air bearing having a guide on a fixed side, and a slider having a pair of opposing members arranged on opposite sides of the guide, the slider being...
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7624661 |
Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit
A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (Uα) has a pair of planar bearing plates. Inside the planar bearing plates are ...
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7566997 |
Gas bearing system
A linear motor device has a gas bearing and comprises a platen and a motor stack with a bottom face positionable above the platen. The motor stack has a bottom face with a recessed gas pocket. The...
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7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same
A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with...
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7530778 |
High-Performance non-contact support platforms
A non-contact support platform for supporting without contact a stationary or traveling object by air-cushion induced forces, the platform comprising at least one of two substantially opposite...
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7497014 |
Sliding bearing and method for the manufacture thereof
A sliding bearing for axial and/or radial arrangement of a first bearing member in relation to a second bearing member, comprises a second bearing member, which has a bearing recess provided with a...
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7458158 |
Method of making a sliding bearing
This invention introduces a new category of engineered surfaces and corresponding production processes for better wear resistance and lower friction loss. The structured surfaces can be applied on...
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7311036 |
Pneumatic cylinder
A pneumatic cylinder has a shaft member having a piston and a piston rod combined with each other in an axial direction, a cylinder body supporting the shaft member with the piston rod protruding...
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7290931 |
Vacuum pre-loaded pneumatic bearing with onboard vacuum generator
A pneumatic bearing for supporting a payload is disclosed. The pneumatic bearing comprises a bearing body having an active surface divided into a lift portion and a pre-load portion. A plurality of...
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7287906 |
Hydrostatic bearing for linear motion guidance
A self-compensating hydrostatic (pressurized fluid film) linear bearing that maintains a fluid gap between a carriage and a rail when relative forces are applied. The geometric shape of the rail...
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7284907 |
Gas bearing system
A gas bearing system comprising two opposing substantially parallel bearing surfaces (2, 3) and at least one gas duct (6) for supplying gas through an orifice (7) to the bearing gap (5) between the...
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7284906 |
Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing
An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a plurality of vacuum pockets includes a differential exhaust system for evacuating the vacuum pockets and an...
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7275871 |
Fluid dynamic bearing structure and method of adjusting bearing gap
A bolt insertion hole is provided along an edge end portion on a flat surface of a plate-like member, and a tap hole is provided on an end face of the other edge end correspondingly to the bolt...
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7275870 |
Air bearing structure and linear driving device using said air bearing structure
The length of the bearing surface in the movable portion which moves linearly is larger than the length of the bearing surface in the fixed portion by the stroke of the movement. With this...
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7255478 |
Transporting apparatus
A transporting apparatus which can horizontally transport a carrier using an air bearing of which a rotational degree of freedom is kept relative to a surface of a base. The transporting apparatus...
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7249889 |
Sliding guide apparatus
A sliding guide apparatus guides a movable member for a base. A pair of guide surfaces are formed on the base. A pair of sliding surfaces are formed on the movable member as so to be opposed to the...
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7232257 |
Hydrostatic bearing and stage apparatus using same
A hydrostatic bearing apparatus has a hydrostatic bearing pad, a labyrinth seal part having an exhaust groove provided around the outside of the hydrostatic bearing pad, an adjustment mechanism for...
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7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
The present invention provides a seal device comprising a sealing passage which allows communication between a first space and a second space, and evacuation lines individually connected to the...
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7207720 |
Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method
An apparatus includes a static gas bearing provided upon a first object and configured to form a gas layer between the first object and a second object by use of gas supplied thereto, and to...
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7189002 |
Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device
In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is...
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7168358 |
Static pressure sliding block
A static pressure sliding block which can exhibit a stable function for a long time while flow control member 23 is pressed onto recess surface 21b of static pressure receiving surface 21a for...
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7144160 |
Hydrodynamic bearing apparatus and stage apparatus using the same
A plurality of preload magnet units are arranged on each side of a hydrodynamic bearing symmetrically. Preload magnet units are arranged inside a labyrinth partition to surround the hydrodynamic...
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7101080 |
Hydrostatic pressure linear guide device
A non-contact type hydrostatic linear guide device includes a guide unit having a pair of rail parts on the top surface thereof, and a slide unit having oil pockets in a running surface thereof. A...
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7093979 |
Aerostatic bearing
A guide member and a slide are disposed such as to be opposed to each other through a bearing clearance therebetween. Air is supplied to the bearing clearance through a main pipe, a branch pipe and...
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7018103 |
Active vibration damping in a machine tool
The present invention relates to a method and an apparatus for vibration damping in a machine tool comprising at least one hydrostatic guide 8 including at least one pocket 1 for supporting a first...
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6990737 |
Fluid bearings and vacuum chucks and methods for producing same
Fluid bearings, vacuum chucks and methods for producing these devices. One example of a method for forming a fluid bearing includes forming a plate having a face surface and a bonding surface,...
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6903056 |
Fluid bearing unit and lubricating oil composition for bearing
There is provided a durable low-torque lubricating oil for bearings and fluid dynamic bearings, porous oil-impregnated bearings and hydrodynamic type porous oil-impregnated bearings suitable for...
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6872002 |
Bearing material for porous hydrostatic gas bearing and porous hydrostatic gas bearing using the same
A bearing material includes: a backing metal made of stainless steel; and a porous sintered metal layer integrated with at least one surface of the backing metal by means of a bonding layer,...
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6735867 |
Method of making a static pressure air bearing
In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of...
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6732610 |
Slide apparatus and its stage mechanism for use in vacuum
The XY stage mechanism comprises a Y slide shaft 2 penetrating through only one side surface of the wall surfaces of a vacuum chamber 1 for holding a stage base plate in a cantilevered manner, a Y...
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6655838 |
Shuttle compensated hydrostatic bearing
Apparatus for allowing nearly frictionless relative motion between bearing elements in prescribed directions while providing high stiffness against motion in other directions has a bearing guide...
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6644856 |
Hydrostatic bearing device
A hydrostatic bearing device for two machine areas moving relative to each other and having faces parallel to each other with a fluid space delimited by parts of the two different machine areas and...
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6629778 |
Fluid pressure bearing
A bearing arrangement has fluid pressure bearings which permit an especially stiff support and is therefore especially well suited for high precision machines such as coordinate measuring...
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6526870 |
Fluid pressure cylinder
A circular piston and a noncircular rod are separately formed as separate parts and the piston and the rod are integrally connected to each other through an adhesive in a state in which the piston...
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6502987 |
Precision air bearing slide and stage assembly for controlled linear motion
An air bearing slide assembly including a carriage having a plurality of planar slide faces containing integrally mounted porous carbon air bearings, the carriage being movable over a slide ram....
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