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7606410 |
Miniaturized imaging module construction technique
A method of constructing an image reader module and the image reader are described. The image reader module includes two or more circuit boards in a stacked configuration. Corresponding notches for...
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7598504 |
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus
A writing error diagnosis method for a charged beam photolithography apparatus and a charged beam photolithography apparatus which can specify an error cause within a short period of time in...
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7590279 |
Appearance inspection apparatus for inspecting inspection piece
A first imaging unit and a second imaging unit of an appearance inspection apparatus for inspecting a board scan one surface of the board by being moved relative to the board. A third imaging unit...
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7583833 |
Method and apparatus for manufacturing data indexing
A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as...
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7580558 |
Screen printing apparatus
A screen printing apparatus and method for printing deposits of material onto a workpiece, the apparatus comprising an inspection station for determining a positional relationship of features on...
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7580557 |
Method of design analysis of existing integrated circuits
The present invention involves a computationally efficient method of determining the locations of standard cells in an image of an IC layout. The initial step extracts and characterizes points of...
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7560940 |
Method and installation for analyzing an integrated circuit
A method and installation for analyzing an integrated circuit. The method includes, for a plurality of surface points of the integrated circuit, the following steps: applying a laser radiation, in...
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7553678 |
Method for detecting semiconductor manufacturing conditions
A method for detecting semiconductor-manufacturing conditions includes providing a photomask with a plurality of pattern areas each having a plurality of test lines with different pitches, exposing...
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7539338 |
Bump inspection apparatus and method for IC component, bump forming method for IC component, and mounting method for IC component
Unidirectional light is radiated onto a bump-formation surface of an IC component to acquire a first overall image of the IC component, light is radiated onto the bump-formation surface in inclined...
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7526405 |
Statistical signatures used with multivariate statistical analysis for fault detection and isolation and abnormal condition prevention in a process
A system and method for monitoring a process in a process plant and detecting an abnormal condition includes collecting data representative of the operation of the process, performing a...
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7519216 |
Systems and methods of maintaining equipment for manufacturing semiconductor devices
Disclosed is a method of operating a manufacturing facility. A processor detects whether abnormal first image data exists at a first common location for each of the last N wafers of the first set...
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7507961 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same
A pattern inspection apparatus can be provided, for example, in a scanning electron microscope system. When patterns of a plurality of layers are included in a SEM image, the apparatus separates...
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7505619 |
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each...
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7498181 |
Method of preparing an integrated circuit die for imaging
Integrated circuit dies are prepared for imaging by completely etching away all metal from the metal lines without removing barrier layers that underlie the metal lines. The metal vias may also be...
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7483561 |
Miniaturized imaging module construction technique
A method of constructing an image reader module and the image reader are described. The image reader module includes two or more circuit boards in a stacked configuration. Corresponding notches for...
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7463763 |
Apparatus, method, and program for assisting in selection of pattern element for pattern matching
A pattern-element extractor ( 51 ), one of functions implemented by a computer, extracts a plurality of pattern elements from a reference image, a region of which is displayed on a display ( 45 )....
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7457453 |
Pattern inspection method and apparatus
A pattern inspection apparatus including: an image detecting part for detecting a digital image of an object substrate; a display having a screen on which the digital image of the object substrate...
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7450748 |
Mask inspection process accounting for mask writer proximity correction
A mask inspection method and system. Provided is a mask fabrication database describing geometrical shapes S to be printed as part of a mask pattern on a reticle to fabricate a mask through use of...
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7428328 |
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same
In a method and apparatus for forming a three-dimensional image for an inspection pattern, a reference intensity function of an inspection X-ray is formed in accordance with a continuous scanning...
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7428326 |
Method for improving reliability in a component placement machine by vacuum nozzle inspection
The present invention features a method whereby each vacuum nozzle in a multi-spindle component placement machine is inspected placement cycle. This process also allows for updating calibration of...
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7424145 |
Device and method for inspecting photomasks and products fabricated using the same
An inspection device for photomasks and products fabricated using the same, capable of reducing the time from inspection to repair. A reference data generator generates reference data that is based...
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7410737 |
System and method for process variation monitor
A method to extend the process monitoring capabilities of a semiconductor wafer optical inspection system so as to be able to detect low-resolution effects of process variations over the surface of...
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7406191 |
Inspection data producing method and board inspection apparatus using the method
After a CAD data and a parts library are combined to produce an inspection data, the set data for the inspection window is automatically corrected using the image of a bare board for a board to be...
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7372632 |
Apparatus and methods for the inspection of microvias in printed circuit boards
An imaging method and imaging system for inspecting features located at a known inter-feature pitch on portions of a target surface. The system includes a lens array having a plurality of lenses...
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7366321 |
System and method for performing automated optical inspection of objects
A system and method for performing optical inspection are provided. At least one “invariant feature” of an object design is determined, and such invariant feature is used in inspecting objects...
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7336814 |
Method and apparatus for machine-vision
A system and method facilitate machine-vision, for example three-dimensional pose estimation for target objects, using one or more images sensors to acquire images of the target object at one or...
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7324685 |
Inspection systems and methods
In one embodiment, a system comprises logic configured to identify a tip of a pin that has been press fit into a circuit board, logic configured to measure characteristics that pertain to a flat...
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7317522 |
Verification of non-recurring defects in pattern inspection
A system and method for verifying defects in electrical circuit patterns including supplying a plurality of like electrical circuit patterns to a defect verification assembly after identification...
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7315641 |
Pattern correcting method of mask for manufacturing a semiconductor device and recording medium having recorded its pattern correcting method
A pattern correcting method of a mask for manufacturing a semiconductor device includes extracting a correction portion to be corrected from a mask pattern on the mask, obtaining a surrounding...
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7295695 |
Defect detection via multiscale wavelets-based algorithms
A method of detecting a defect in a reticle or wafer uses wavelet transforms to differentiate between real defects and pattern noise. A first image and a second image of a sample are aligned. A...
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7283660 |
Multi-layer printed circuit board fabrication system and method
A method for aligning an image to be recorded by a direct image scanner on an upper layer of a printed circuit board with an image recorded on a lower layer thereof, the method comprising:
...
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7266232 |
Apparatus and method for inspecting pattern
An inspection apparatus ( 1 ) has an image pickup part ( 2 ) for performing an image pickup of a substrate ( 9 ), an operation part ( 4 ) to which an image signal is inputted from said image pickup...
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7251348 |
Land appearance inspecting device, and land appearance inspecting method
Land circle calculating means ( 7 ) calculates a land circle as an approximate circle from label information (S 6 ). Land circle accuracy-enhancing means ( 8 ) calculates again the land circle by...
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7228257 |
Architecture for general purpose programmable semiconductor processing system and methods therefor
A method of optimizing a set of steps in a semi-conductor processing system comprising a software control program, wherein the semi-conductor processing system includes a first function, a second...
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7218772 |
Method for non-referential defect characterization using fractal encoding and active contours
A method for identification of anomalous structures, such as defects, includes the steps of providing a digital image and applying fractal encoding to identify a location of at least one anomalous...
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7218771 |
Cam reference for inspection of contour images
This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more...
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7213447 |
Method and apparatus for detecting topographical features of microelectronic substrates
An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness...
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7181058 |
Method and system for inspecting electronic components mounted on printed circuit boards
A method and system are provided for inspecting electronic components mounted on printed circuit boards utilizing both 3-D and 2-D data associated with the components and the background on which...
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7167583 |
Image processing system for use with inspection systems
An inspection system includes a plurality of models are applied in a way that enhances the effectiveness of each type of model. In one embodiment, a printed circuit board inspection system includes...
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7155052 |
Method for pattern inspection
A method for inspecting a patterned surface employs reference data related to the pattern to provide a map for identifying regions which are expected to generate equivalent images. These regions...
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7133550 |
Pattern inspection method and apparatus
A pattern inspection method in which an image can be detected without an image detection error caused by an adverse effect to be given by such factors as ions implanted in a wafer, pattern...
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7116817 |
Method and apparatus for inspecting a semiconductor device
A method and apparatus for inspecting a wafer in which a focused charged particle beam is irradiated onto a surface of a wafer on which patterns are formed through a semiconductor device...
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7116814 |
Image-based container defects detector
The image-based container defects detector consists of a plurality of camera units, a sensor unit, a frame grabber, and an image recognizer unit. The sensor unit serves to detect the vehicles...
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7113629 |
Pattern inspecting apparatus and method
A pattern inspecting apparatus includes a substrate support table, a table driver for driving the substrate support table through actuators, a camera, an image processor, and a controller connected...
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7110591 |
System and method for recognizing markers on printed circuit boards
A system and method for recognizing markers on, e.g., a PCB (printed circuit board). In one aspect, a system for recognizing a marker in an image comprises an image capture module ( 14 ) for...
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7106896 |
ID recognition apparatus and ID recognition sorter system for semiconductor wafer
A semiconductor wafer ID recognition apparatus includes an image sensing optical section and recognition processing section. The image sensing optical section reads at least one identification...
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7064845 |
Method for measuring the geometry of an object by means of a co-ordination measuring device
A process for measuring of an object geometry is disclosed using a coordinate measuring device wherein the object geometry is recorded by an optical sensor and represented as an image content,...
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7062080 |
Method of inspecting curved surface and device for inspecting printed circuit board
A circuit board with lead-free solder is inspected by using light sources with different colors at different angles to obtain an image having a plurality of color components. For each pixel within...
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7050686 |
Fiber optic article with inner region
A fiber optic article can comprise a core, an inner region disposed about the core and a cladding disposed about the inner region. The index of refraction of the cladding can be less than that of...
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7035448 |
Method of defect inspection of graytone mask and apparatus doing the same
A comparative inspection technique is employed for detecting defects by comparing similar patterns formed in a mask. As thresholds of information appearing according to the pattern difference, a...
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