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8119991 |
Method and apparatus for accurate calibration of VUV reflectometer
A calibration technique is provided that utilizes a standard sample that allows for calibration in the wavelengths of interest even when the standard sample may exhibit significant reflectance...
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8073106 |
Estimating strengths of wooden supports by detecting backscattered gamma rays
A method of estimating the strength of a wooden support wherein gamma rays (4) are transmitted and detected parallel to a neutral axis (5) through a cross section of the support. It also includes a...
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8019048 |
Window arrangement on a pressure pipe
A window arrangement on a pressure pipe, with a casing in the train or at the end of the pressure pipe, said casing featuring flanges on diametrically opposing sides having radially directed...
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7983387 |
Method and system to predict detectability and identify foreign objects
The different advantageous embodiments provide a system for identifying a likelihood of detecting objects with a backscatter x-ray system comprising a structure having a number of objects, a...
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7751527 |
Measurement method of layer thickness for thin film stacks
Provided is a thin film stack inspection method capable of accurately measuring and inspecting layer thicknesses of thin film stacks. An X-ray having a long coherence length is used as an incident...
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7742564 |
Systems and methods for detecting an image of an object by use of an X-ray beam having a polychromatic distribution
Systems and methods for detecting an image of an object using an X-ray beam having a polychromatic energy distribution are disclosed. According to one aspect, a method can include detecting an...
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7724872 |
Inspection method for thin film stack
An X-ray reflectivity measuring method is provided to measure and inspect, with higher accuracy, film thickness of a thin film stack as a sample where a thick film is provided on the thin film...
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7668293 |
High voltage x-ray generator and related oil well formation analysis apparatus and method
An apparatus and method for determining the density and other properties of a formation surrounding a borehole using a high voltage x-ray generator. One embodiment comprises a stable compact x-ray...
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7649978 |
Automated selection of X-ray reflectometry measurement locations
The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of...
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7634059 |
Downhole imaging tool utilizing x-ray generator
An X-ray downhole imaging tool is provided and includes an X-ray tube capable of operating at least at 50 KeV and emitting at least one hundred micro-amperes of continuous electron current and a...
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7551718 |
Scatter attenuation tomography
Methods for characterizing an inspected object on the basis of attenuation determined from pair-wise illuminated voxels. A beam of penetrating radiation characterized by a propagation direction and...
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7492859 |
Buildup-robust density, level and interface measurement with γ-backscattering
System and methods for measuring the density, level, or interface position of a fluid or fluids in a vessel using gamma-ray backscatter are disclosed. The gamma-ray instruments disclosed may...
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7474734 |
Method and apparatus for void content measurement and method and apparatus for particle content measurement
A void or particle content is determined using the X-ray small angle scattering measurement for a sample made of a thin film having voids or particles disorderly dispersed in the matrix, the...
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7456399 |
Calibrating multiple photoelectron spectroscopy systems
A method comprising obtaining a first set of spectral data for a first sample film measured by a first system, extracting intensities for one or more elemental species associated with the first...
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7453985 |
Control of X-ray beam spot size
A method for analysis of a sample includes directing a beam of radiation to impinge on a target area on a surface of the sample along a beam axis at a plurality of different elevation angles. For...
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7412022 |
Non-invasive stationary system for three-dimensional imaging of density fields using periodic flux modulation of compton-scattered gammas
A three-dimensional image-generating device is an inspection system incorporating three components: a radiation source, a modulating unit, and a radiation detector. All three components of the...
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7406153 |
Control of X-ray beam spot size
Apparatus for analysis of a sample includes a radiation source, which is configured to direct a beam of radiation along a beam axis to impinge on a target area on a surface of the sample. A...
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7400706 |
Method and apparatus for liquid safety-detection by backscatter with a radiation source
A method and an apparatus for liquid safety-detection by backscattering with a radiation source are provided that relate to a radiation detecting technology field. The invention comprises using a...
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7285775 |
Endpoint detection for the patterning of layered materials
Photoelectron emissions are used to detect an endpoint of a thickness alteration of a topmost layer in a set of layers undergoing patterning. The set of layers are irradiated, which causes an...
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7257192 |
Method and apparatus for X-ray reflectance measurement
In a method for X-ray reflectance measurement in which an intensity of a reflected X-ray is observed for each incident angle, a measuring scale for the incident angle ω is corrected, before the ...
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7253901 |
Laser-based cleaning device for film analysis tool
A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough...
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7250608 |
Radiographic image detector and radiographic imaging system
A radiographic image detector to detect radiation applied thereto and obtain radiographic image information, includes: an internal power supply to supply power to drive units at least upon imaging;...
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7242743 |
X-ray diffraction apparatus and method
A high resolution X-ray diffraction apparatus includes a source 4 of X-rays and a slit 6 to direct a collimated beam of X-rays 11 onto a sample 16 on a sample stage 8. Detector 10 records the...
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7231016 |
Efficient measurement of diffuse X-ray reflections
A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays,...
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7221734 |
Method for X-ray reflectance measurement
An X-ray reflectance is measured with the use of an X-ray detector, which is not less than 107 cps in upper-limit counting rate and is not more than twenty cps in noise level, under the condition...
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7130376 |
X-ray reflectometry of thin film layers with enhanced accuracy
A method for inspection of a sample that includes a first layer having a known reflectance property and a second layer formed over the first layer. The method includes directing radiation toward a...
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7120228 |
Combined X-ray reflectometer and diffractometer
Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to...
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7068753 |
Enhancement of X-ray reflectometry by measurement of diffuse reflections
A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays,...
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7046834 |
Method for measuring bone mineral density by using X-ray image
A method for measuring a bone mineral density, by use of an x-ray image, in a bone mineral density measuring system, includes the steps of: (a) obtaining an X-ray image of bone; (b) setting a...
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7039158 |
Multi-technique thin film analysis tool
A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray...
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7035375 |
X-ray scattering with a polychromatic source
A method for inspection of a sample includes irradiating the sample with a polychromatic beam of X-rays, comprising X-ray photons having a range of respective photon energies. The X-rays scattered...
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7006597 |
Examination method and apparatus
A method for examination of a subject comprises the steps of: administering (32) a contrast-enhancing agent into a subject (7, 42) to be examined, the contrast-enhancing agent introducing density...
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6987832 |
Calibration and alignment of X-ray reflectometric systems
In the calibration and alignment of an X-ray reflectometry (“XRR”) system for measuring thin films, an approach is presented for accurately determining C0 for each sample placement and for fin...
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RE38910 |
Low activity nuclear density gauge
A nuclear density gauge and test method is provided for measuring density material in a relatively thin zone beneath a surface of the material. The gauge comprises a gauge housing and a...
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6956928 |
Vertical small angle x-ray scattering system
A small angle x-ray diffraction scattering system has a vertical orientation, allowing for simplified analysis of liquid samples. The system may function in a beam-up or a beam-down configuration....
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6920200 |
Density-nonuniform multilayer film analyzing method, and apparatus and system thereof
Provided is a novel density-nonuniform multilayer analyzing method that readily and highly accurately enables analyzing the state of distribution and interfacial condition of particulate matter in...
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6909772 |
Method and apparatus for thin film thickness mapping
An apparatus and method for mapping film thickness of textured polycrystalline thin films. Multiple sample films of known thicknesses are provided, and each is irradiated by x-ray at a measurement...
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6895075 |
X-ray reflectometry with small-angle scattering measurement
Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the...
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6895074 |
Non-destructive process for continuously measuring the density profile of panels
A method for nondestructively measuring the density of a panel, comprising the steps of: directing a collimated radiation beam at the panel at an oblique angle; passing the panel under the...
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6823043 |
Determination of material parameters
A method for determining parameters of a material includes comparing a range of an actual x-ray scattering profile with a range of an expected x-ray scattering profile for a material sample. The...
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6770886 |
Detector-shield assembly for X-ray reflectometric system
A detector assembly is introduced that provides shielding of irradiation vulnerable regions of an X-ray detector against directly impinging and scattered X-rays. A shielding unit has a primary...
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6754305 |
Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry
The teachings of the subject invention lead to a new application of the XRR and RXRR systems. In particular, it has been recognized for the first time that such systems can be used to measure...
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6678349 |
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements
This invention provides a measurement device that includes both an X-ray reflectometer and a thermal or plasma wave measurement module for determining the characteristics of a sample. Preferably,...
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6617599 |
Apparatus and method for automated indexing of a nuclear gauge
The invention provides a method and apparatus for facilitating calibration of a nuclear gauge by automating the movement of a source rod between a plurality of source rod positions. The apparatus...
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6567496 |
Cargo inspection apparatus and process
A cargo inspection apparatus and process includes scanning containers with x-rays along two different planes. Outputs from x-ray sensors along the two different planes are collected for use in...
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6563906 |
X-ray compton scattering density measurement at a point within an object
The present invention pertains to a non-rotating method for non-intrusively determining the density of a point embedded within an object, without necessarily obtaining a full image for the entire...
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6556653 |
Non-rotating X-ray system for three-dimensional, three-parameter imaging
The system for inspecting an object comprises a structure having a first, second and third orthogonal axes, and a source of x-ray pencil beam mounted thereto along the first axis. An incident...
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6442232 |
Thin layer nuclear density gauge
The present invention provides an improved thin layer nuclear density gauge comprising a gauge housing having a vertical cavity therethrough and a base, a first radiation detector located at a...
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6434217 |
System and method for analyzing layers using x-ray transmission
A system and method are presented for determining the thickness and elemental composition of a layer within a measurement sample in an easy and inexpensive manner. An embodiment of the method...
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6430257 |
Method and apparatus for determining the position of an elongated object relative the surface of an obstructing body by means of electromagnetic radiation
The invention refers to a method for determining the position of an elongated narrow object relative the surface of an obstructing disk-like body in front of said object and oriented at an angle...
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