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7620153 |
Cage for x-ray tube bearings
A bearing assembly mounted in an x-ray tube includes a bearing race and a plurality of bearing balls positioned adjacent to the bearing race. The plurality of bearing balls are positioned within a...
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7605385 |
Electro-less discharge extreme ultraviolet light source
An electrode-less discharge source of extreme ultraviolet (EUV) radiation ( 10 ) efficiently assembles a hot, dense, uniform, axially stable plasma column ( 5 ) with magnetic pressure and inductive...
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7599470 |
Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination
The invention is directed to an arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency, particularly for application in...
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7596208 |
Apparatus system, and method for high flux, compact compton x-ray source
A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to...
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7589337 |
LPP EUV plasma source material target delivery system
An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source...
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7577236 |
Device for switching/generating x-rays for diagnosis and curing
There is disclosed a device including: an electron beam generation device 10 which accelerates a pulse electron beam 1 to transmit the beam through a predetermined rectilinear orbit 2 ; a...
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7576343 |
Method and apparatus for generating laser produced plasma
The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the...
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7558373 |
X-ray generator employing hemimorphic crystal and ozone generator employing it
An x-ray generator comprising a vessel 1 in which a low pressure gas atmosphere is maintained, hemimorphic crystal supporting means 3 a and 3 b provided in the vessel, at least a pair of...
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7539285 |
Device for exposure field monitoring in a radiation therapy apparatus
In a device for exposure field monitoring of a therapeutic radiation exposure field with diagnostic x-ray image quality with the same or nearly the same projection as in therapeutic radiation, the...
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7531810 |
Integrated half-beam profile measurement and polar profile for circular radiation field symmetry assessment
A method for routine monitoring and quality assurance of field asymmetry of high energy circular radiation beam producing equipment. The quality assurance process of field symmetry for devices such...
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7528395 |
Radiation source, lithographic apparatus and device manufacturing method
A radiation source comprises an anode and a cathode that are configured and arranged to create a discharge in a gas or vapor in a space between anode and cathode and to form a plasma pinch so as to...
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7526069 |
X-ray tube
The present invention relates to an X-ray tube capable of efficiently extracting X-rays of low energy and provided with a structure having excellent durability. The X-ray tube is provided with a...
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7518135 |
Reducing fast ions in a plasma radiation source
A radiation source with an anode and a cathode to create a discharge in a discharge space between the anode and the cathode is disclosed. A plasma is formed in the radiation source which generates...
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7518134 |
Plasma radiation source for a lithographic apparatus
A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and...
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7502446 |
Soft x-ray generator
A soft x-ray generator includes a unique pulse trigger assembly which reliably and reproducibly provides a plasma to initiate the discharge between a cathode and an anode, and having a cone-shaped...
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7501641 |
Dual hemispherical collectors
A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a...
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7492868 |
Source of x-rays
A charged particle beam including charged particles (e.g., electrons) is generated from a charged particle source (e.g., a cathode or scanning electron beam). As the beam is projected, it passes...
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7492867 |
Nanoparticle seeded short-wavelength discharge lamps
Methods, systems and apparatus for using nanoparticle seeded short-wavelength discharge generator sources discharge sources, for use with X-ray, XUV and EUV light emissions. Applications can...
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7491954 |
Drive laser delivery systems for EUV light source
An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may...
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7486984 |
System and method for monochromatic x-ray beam therapy
In embodiments of the invention, a radiosensitizer or other agent is relatively uniformly accumulated in the cells of a tumor. An external monochromatic x-ray beam, which is tuned to a...
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7486775 |
Tissue irradiation device with at least one electron source and numerous radiation heads
A device for irradiating tissue encompassing at least one electron source for generating an electron beam, numerous radiation heads that are firmly and annularly arranged in a supporting frame...
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7486774 |
Removable aperture cooling structure for an X-ray tube
An x-ray tube having a removable aperture structure that can be detached from a portion of the x-ray tube without damaging either component is disclosed. The aperture structure includes heat...
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7483518 |
Apparatus and method for rapidly switching the energy spectrum of diagnostic X-ray beams
An X-ray imaging apparatus is disclosed. The apparatus includes a radiator housing, an X-ray tube, a source of X-rays and at least one filtration material disposed on the X-ray tube. The X-ray tube...
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7483517 |
Device for generating X-rays having a liquid metal anode
The invention relates to a device for generating X-rays ( 18 ) comprising an electron source ( 3 ) for emitting electrons accommodated in a vacuum space ( 2 ), a liquid metal circuit including a...
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7482609 |
LPP EUV light source drive laser system
An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a...
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7481758 |
Pharmaceutically enhanced low-energy radiosurgery
Contrast agents developed specifically for x-ray diagnostics provide dose-enhanced radiotherapy and radiosurgery. The presence of heavy elements, for example, gold or iron, from these contrast...
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7479646 |
Extreme ultraviolet source with wide angle vapor containment and reflux
An extreme ultraviolet source with wide-angle vapor containment and reflux is described. In the optical output directions radiating from the source plasma there is an array of tapered buffer gas...
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7476887 |
EUV light source optical elements
Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e.g., reflectors comprising MLM stacks employing various binary layer materials and capping...
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7476886 |
Source material collection unit for a laser produced plasma EUV light source
An EUV light source is disclosed which may comprise a laser source generating a laser beam and a source material, e.g. tin, SnBr 4 , SnBr 2 , SnH 4 , tin-gallium alloys, tin-indium alloys,...
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7471769 |
X-ray source provided with a liquid metal target
An X-ray source and an X-ray apparatus with an X-ray source are provided, the X-ray source includes a liquid metal target which flows through a system of ducts and is conducted through a duct...
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7469039 |
Device and method for generating an x-ray point source by geometric confinement
A device for generating an x-ray point source includes a target, and an electron source for producing electrons which intersect with the target to generate an x-ray point source having a size which...
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7462851 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
A device for generating radiation source based on a discharge includes a cathode and an anode. A discharge is created in a material comprising an alloy of two or more substances.
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7460645 |
X-ray tube
A supporting member supports an anode target at one end thereof and is provided with an attachment portion around the outer circumference of the other end. The attachment portion is attached to the...
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7460644 |
X-ray generating method and x-ray generating apparatus
An energy beam is irradiated onto a target from an energy beam source, thereby generating an X-ray with an irradiating area to be irradiated onto an object. Then, the X-ray is introduced into a...
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7456417 |
Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device
Target 1 that is arranged in the disc direction is sprayed from nozzle 2 that has a slit-shaped aperture. Target 1 is conveyed on a gas stream. He gas is used in this example. Nozzle 2 may...
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7453071 |
Contamination barrier and lithographic apparatus comprising same
A rotatable contamination barrier is disclosed that has a plurality of closely packed blades configured to trap contaminant material coming from a radiation source. The blades are radially oriented...
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7449703 |
Method and apparatus for EUV plasma source target delivery target material handling
An EUV target delivery system and method are disclosed which may comprise: a target material purification system connected to deliver liquid target material comprising: a first container and a...
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7446329 |
Erosion resistance of EUV source electrodes
Erosion of material in an electrode in a plasma-produced extreme ultraviolet (EUV) light source may be reduced by treating the surface of the electrode. Grooves may be provided in the electrode...
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7436932 |
X-ray radiation sources with low neutron emissions for radiation scanning
In one example, a radiation source comprises a housing and an acceleration chamber within the housing, with a peak acceleration energy greater than the lowest neutron production threshold of...
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7433447 |
X-ray generator and exposure apparatus
An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through...
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7428298 |
Magnetic head for X-ray source
An X-ray source includes a magnetic appliance to provide electron beam focusing. The magnetic appliance can provide variably focused and non-focused configurations. The magnetic appliance can...
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7424096 |
Systems and methods for tape advancement in laser produced plasma equipment
Disclosed herein are systems and methods for advancing tape/ribbon through a targeting area where laser ablation of the tape occurs in laser produced plasma equipment. Disclosed systems include a...
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7424095 |
Modular X-ray tube and method of production thereof
Modular X-ray tube ( 10 ) and method for the production of such an X-ray tube, in which an anode ( 20 ) and a cathode ( 30 ) are arranged in a vacuumized inner space ( 40 ) situated opposite each...
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7421064 |
Rotatable, water-cooled X-ray source
The invention describes an X-ray source in which a cooling plate ( 36 ) for water-cooling the anode ( 28 ) of an X-ray tube ( 26 ) is firmly mounted on a radiation protection casing ( 20 ) and the...
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7420191 |
Discharge radiation source, in particular UV radiation
The invention concerns a radiation source, comprising an anode ( 2 ), a cathode ( 3 ), an electric discharge gap ( 4 ) between the anode ( 2 ) and the cathode ( 3 ) and a gas input conduit ( 30 )...
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7399981 |
Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography
The device comprises a device ( 2 ) for creating an essentially linear target ( 4 ) in an evacuated space where laser beams ( 1 ) are focused, the target being suitable for interacting with the...
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7391851 |
EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions
Metallic solutions at room temperature used a laser point source target droplets. Using the target metallic solutions results in damage free use to surrounding optical components since no debris...
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7382861 |
High efficiency monochromatic X-ray source using an optical undulator
A method of generating energetic electromagnetic radiation comprises, during each of a plurality of separated radiation intervals, injecting laser radiation of a given wavelength into an optical...
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7382857 |
X-ray catheter assembly
An apparatus for applying x-rays to an interior surface of a body cavity includes a catheter assembly, and one or more flexible probe assemblies. An x-ray generator assembly, including an optically...
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7376218 |
X-ray source assembly
An x-ray source assembly capable of producing x-rays suitable for use in medical, explosive detection, and other areas. The assembly includes a housing having a two-part socket member (which holds...
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