|
Match
|
Document |
Document Title |
|
|
8170179 |
Debris reduction in electron-impact X-ray sources
A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an...
|
|
|
8138678 |
Charged particle beam decelerating device and method, and X-ray generating apparatus using the same
A charged particle beam decelerating device includes a high-frequency cavity 34 provided on an orbit of a charged particle beam 1, and a phase synchronizing device 40 for synchronizing the charged...
|
|
|
8139287 |
Amplification of energy beams by passage through an imploding liner
Apparatus and methods are disclosed for amplifying an energy beam such as a beam of laser light or a charged particle beam. An exemplary method includes providing a liner having a first end, a...
|
|
|
8138487 |
System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to...
|
|
|
8102968 |
High brightness X-ray generating device and method
A high brightness X-ray generator and a high brightness X-ray generating method are provided which are able to promote an increase in X-ray brightness (i.e., an increase in an X-ray output) while...
|
|
|
8101930 |
Method of increasing the operation lifetime of a collector optics arranged in an irradiation device
The present invention relates to a method of increasing the operation lifetime of an optical collector unit (33)) arranged in an irradiation device. The irradiation device at least comprises a...
|
|
|
8084757 |
Contamination prevention in extreme ultraviolet lithography
Embodiments of the present invention provide methods and apparatus for removing debris particles using a stream of charged species. One embodiment of the present invention provides an apparatus for...
|
|
|
8073107 |
Betatron with a contraction and expansion coil
A betatron, especially in X-ray testing apparatus is provided, that includes a rotationally symmetrical inner yoke having two interspaced parts, an outer yoke connecting the two inner yoke parts,...
|
|
|
8027434 |
Rotating anticathode X-ray generating apparatus and X-ray generating method
A rotating anticathode X-ray generating apparatus which is configured such that an X-ray is generated by an irradiation of an electron beam emitted from a cathode includes a rotating anticathode...
|
|
|
8026674 |
Electron source and method for the operation thereof
An electron source has an electron emitter with an electron emission cathode, a high voltage unit provided for power supply of the electron emission cathode, and a low voltage unit provided to...
|
|
|
8019046 |
Apparatus for generating shortwave radiation
An apparatus providing a source of shortwave electromagnetic radiation utilizing a tape having a first side and a second side and a laser beam focused and impinging on the first side of the tape....
|
|
|
8009052 |
Method and system for monitoring the power state of an X-ray emitter and/or an X-ray detector
In a method and system for monitoring the power state of an x-ray emitter and/or an x-ray detector, the x-ray emitter is operated according to a set of test parameters, so as to emit x-rays that...
|
|
|
8000447 |
Co-axial, high energy gamma generator
A gamma ray generator includes an ion source in a first chamber. A second chamber is configured co-axially around the first chamber at a lower second pressure. Co-axially arranged plasma apertures...
|
|
|
8000448 |
Device and method for adjusting collision timing between electron beam and laser light
An electron beam detection device (34) is arranged on an electron beam passing path so that a beam delay time tB from a passing moment of an electron beam (1) to a moment when the beam reaches a...
|
|
|
7991111 |
High voltage x-ray generator and related oil well formation analysis apparatus and method
An apparatus and method for determining the density and other properties of a formation surrounding a borehole using a high voltage x-ray generator. One embodiment comprises a stable compact x-ray...
|
|
|
7983396 |
Thin walled tube radiator for bremsstrahlung at high electron beam intensities
Methods and systems for generating bremsstrahlung with enhanced photon flux in a narrow cone at forward angles utilize a thin target of a high-Z material such as gold as radiator, supported on a...
|
|
|
7964857 |
Plasma source of directed beams and application thereof to microlithography
A method for generating radiation in a range of desired wavelengths in a direction of emission is provided. According to the method, initial radiation is produced by a radiation source, the...
|
|
|
7949102 |
Multiple focal spot X-ray tube with multiple electron beam manipulating units
A multiple focal spot X-ray tube (100) comprising an electron source (105), which is adapted to generate an electron beam (106), an anode (110), which is arranged within the electron beam (106) and...
|
|
|
7949100 |
Dual-colour pyrometric measurement of X-ray focal spot temperature
An x-ray tube disclosed here in includes an emitter arranged to emit electrons on to a focal spot on a rotatable anode. The x-ray tube also includes a hollow tube arranged to receive...
|
|
|
7933381 |
HF frequency tuning device
An HF frequency tuning device includes a resonance cavity in which an HF is introduced, a phase detecting section which generates a sign data representing a sign of a phase difference between a...
|
|
|
7929667 |
High brightness X-ray metrology
An x-ray metrology tool having only one x-ray source. The x-ray source includes a liquid metal source for heating and melting at least one metal and producing a liquid metal jet, a liquid metal...
|
|
|
7894577 |
Method for downhole, non-isotopic generation of ionised radiation and an apparatus for use when practising the method
A method and apparatus for downhole generation of non-radioactive, ionized radiation arranged so as to be able to generate reverberation, particularly X-ray and/or gamma radiation, from the...
|
|
|
7885387 |
Extreme ultraviolet light and X-ray source target and manufacturing method thereof
The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance...
|
|
|
7885382 |
Radiation treatment using x-ray source
Methods and apparatus are described for irradiating living tissue via a cavity or lumen, using an inflatable balloon applicator. In a preferred embodiment the applicator balloon has a balloon skin...
|
|
|
7885385 |
Tunable X-ray source
A method for the production of X-ray bunches tunable in both time and energy level by generating multiple photon, X-ray, beams through the use of Thomson scattering. The method of the present...
|
|
|
7875857 |
X-ray photoelectron spectroscopy analysis system for surface analysis and method therefor
An X-ray photoelectron spectroscopy analysis system for analysing an insulating sample 20, and a method of XPS analysis. The system comprises an X-ray generating means 30 having an exit opening 32...
|
|
|
7869570 |
Electromagnetic apparatus and methods employing coulomb force oscillators
A Coulomb force oscillator comprising a power supply having a closed primary winding circuit and an open secondary winding that produces charge differential within the secondary winding to separate...
|
|
|
7864924 |
Scanning X-ray radiation
X-ray radiation is generated at a target that emits x-ray radiation in response to being struck by accelerated electrons, the electrons being emitted by a cathode that emits electrons in response...
|
|
|
7835499 |
Compact, short-pulse X-ray and T-ray fused source
A pulse source generates both terahertz radiation (T-rays) and X-rays consecutively at high peak intensity using the same electron beam generated in an RF photoinjector and two different...
|
|
|
7817781 |
High voltage X-ray generator and related oil well formation analysis
An apparatus and method for determining the density and other properties of a formation surrounding a borehole using a high voltage x-ray generator. One embodiment comprises a stable compact x-ray...
|
|
|
7809112 |
Method and device for generating EUV radiation and/or soft X-ray radiation
A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge...
|
|
|
7801277 |
Field emitter based electron source with minimized beam emittance growth
A system and method for limiting emittance growth in an electron beam is disclosed. The system includes an emitter element configured to generate an electron beam and an extraction electrode...
|
|
|
7787595 |
Electron source
An electron source has an electron emitter, an anode, a voltage source connected between the electron emitter and the anode, as well as a switch connected with the electron emitter. The switch is...
|
|
|
7783006 |
Radiation treatment using x-ray source
Methods and apparatus are described for irradiating living tissue via a cavity or lumen, using an inflatable balloon applicator. In a preferred embodiment the applicator balloon has a balloon skin...
|
|
|
7783010 |
X-ray radiation sources with low neutron emissions for radiation scanning
A method of manufacturing a radiation source in one example comprises selecting at least one of a target, a collimator, or target shielding consisting essentially of at least one isotope having a...
|
|
|
7773726 |
X-ray tube and X-ray source
In an X-ray source 1 and an X-ray tube 4, there is formed a shield portion 42 adapted to shield the portion W where a target support body 18 and an opening portion 34 on the other end side of a...
|
|
|
7759663 |
Self-shading electrodes for debris suppression in an EUV source
A radiation source having self-shading electrodes is disclosed. Debris originating from the electrodes is reduced. The path from the electrodes to the EUV optics is blocked by part of the...
|
|
|
7734014 |
Extreme UV and soft X ray generator
A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the...
|
|
|
7732793 |
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV metrology monitor is provided which may...
|
|
|
7732794 |
Extreme ultra violet light source apparatus
In an extreme ultra violet light source apparatus having a comparatively large output power for exposing, a solid target is supplied fast and continuously while heat dissipation for irradiation of...
|
|
|
7729474 |
X-ray generator using hemimorphic crystal
An X-ray generator uses a high electrical field generated when a hemimorphic crystal is heated or cooled. The crystal may be lithium niobate polarized in one direction. An X-ray target is placed...
|
|
|
7724876 |
Multi-color X-ray generator
A multi-color X-ray generator includes an electron beam generator 10 which accelerates an electron beam to generate a pulse electron beam 1 and which transmits the beam along a predetermined...
|
|
|
7718985 |
Advanced droplet and plasma targeting system
Methods, systems, apparatus, devices for tracking, controlling and providing feedback on droplets used in EUV source technology. The method and system track and correct positions of droplet targets...
|
|
|
7720199 |
X-ray tube and X-ray source including same
The present invention relates to an X-ray tube, having a structure for effectively suppressing discharge at a tip of an anode, irradiated with electrons in order to generate X-rays, and an X-ray...
|
|
|
7705333 |
Extreme ultra violet light source apparatus
In an extreme ultra violet light source apparatus that exhausts debris including fast ions and neutral particles by the effect of a magnetic field, neutral particles emitted from plasma are...
|
|
|
7702076 |
Linear x-ray laser generator
A small X-ray laser generator including a device (1) for generating and accelerating an electron beam, a plurality of targets (2) placed on the transport trajectory of a generated electron beam...
|
|
|
7696493 |
Radiation system and lithographic apparatus
The invention relates to a radiation system for generating electromagnetic radiation. The radiation system includes a pair of electrodes constructed and arranged to generate plasma of a first...
|
|
|
7696492 |
Radiation system and lithographic apparatus
A radiation system for generating a beam of radiation that defines an optical axis is provided. The radiation system includes a plasma produced discharge source for generating EUV radiation. The...
|
|
|
7692169 |
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first...
|
|
|
7688948 |
Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology
A method and an apparatus generate radiation in the wavelength range from about 1 nm to about 30 nm by an electrically operated discharge, which can be used in lithography or in metrology. A...
|