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7628507 |
Radiance output and temperature controlled LED radiance source
The LED-radiance source is a suitable replacement of lamp-based integrating sphere sources where they are used as stable and uniform radiance sources. The LED-based radiance source includes an...
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7591586 |
Method of temperature measurement and temperature-measuring device using the same
A method of precisely measuring temperature of an object without having to setting the emissivity of the object over a wide temperature range from low to high temperature with a single radiation...
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7585106 |
Temperature fixed-point cell, temperature fixed-point device and method of calibration of thermometer
A temperature fixed-point cell is configured with a crucible composed of carbon and a fixed-point material enclosed in the crucible. The fixed-point material has a peritectic structure of carbon...
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7582859 |
Infrared sensor calibration system and method
An infrared sensor calibration system including a calibration body at a known temperature a fixture for a package with at least two infrared sensors each aimed at a different location on the...
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7572052 |
Method for monitoring and calibrating temperature in semiconductor processing chambers
The present invention provides a non-destructive method for monitoring and calibrating chamber temperature. One embodiment of the present invention provides a method for measuring temperature...
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7549794 |
In-furnace temperature measuring method
There is provided an in-furnace temperature measuring method that is capable of reducing the number of operation steps that are required for temperature measurement, and effectively applying a...
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7543981 |
Methods for determining wafer temperature
Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The...
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7530738 |
Probe cover having a blackbody
A probe cover having a portion that operates as a blackbody. The blackbody is a combination of a stretchable film and a metal. The blackbody rapidly heats to equilibrium with the body tissue. An...
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7507019 |
Thermometer calibration
A method for calibrating a thermometer is disclosed. The thermometer comprises a primary temperature sensor for determining the temperature of a target. The thermometer also comprises a reference...
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7490980 |
Method for calibrating infrared thermometer
The present invention discloses a method for calibrating an infrared thermometer, which can obtain a sensitivity of a radiation sensor of an infrared thermometer and a reference resistance of an...
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7461535 |
Multi-temperature programming for accelerometer
A system and method for testing and calibrating integrated sensor devices that improves the manufacturing test throughput of the devices. The system includes a tester, a temperature controller, and...
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7427157 |
Wind velocity measuring apparatus
A wind velocity measuring apparatus. The apparatus includes a thermal sensor and a processor operatively coupled to the thermal sensor. The processor is configured to receive a first temperature...
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7422365 |
Thermal imaging system and method
A thermal imaging system and method for quantitative thermal mapping of a scene. The system comprises a thermal imaging device, a heat source of known temperature and emissivity located within the...
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7364355 |
Method and apparatus for obtaining a temperature measurement using an InGaAs detector
A method of linearizing the output a infrared camera having an InGaAs includes determining the an equivalent black body temperature of an object by utilizing a plurality of calibration constants...
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7306367 |
Emissivity-independent silicon surface temperature measurement
A method and system for measuring remotely the surface temperature of a silicon wafer and layers, without the need to know the surface emissivity. The surface temperature is measured in-situ and in...
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7297938 |
Integrated black body and lens cap assembly and methods for calibration of infrared cameras using same
A black body assembly is provided for use in the calibration of infrared cameras. The assembly includes, among other things, a housing within which calibration components may be situated, and a...
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7148450 |
Portable blackbody furnace
The present invention discloses a portable blackbody furnace comprising a metallic body, a cylindrical cavity with a tapered end in the metallic body, a shielding plate positioned at an open end of...
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7118271 |
Calibrating temperature sensors of weathering devices by means of contactless temperature measurement
Calibrating temperature sensors of weathering devices by means of contactless temperature measurement A temperature sensor ( 10 ) which is, for example, designed as a black standard sensor and is...
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7052180 |
LED junction temperature tester
An instrument measures the LED junction temperature directly by taking advantage of the linear relationship between the forward current driven through the LED, the forward drop of the LED, and the...
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7044637 |
Temperature measuring apparatus
A temperature measurement apparatus allows for accurate temperature measurement in both the sun and the shade using two different thermal sensors. A black sensor has an infrared absorbent surface...
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6964515 |
Temperature determining device, temperature correcting method, and image forming apparatus
A temperature determining device is composed of a temperature detecting unit that detects a temperature of a determination object member based on an intensity of infrared rays from the object...
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6939035 |
System for calibrating thermometers
A device ( 10 ) for calibrating tympanic thermometers includes an enclosure ( 12 ) which may be heated or cooled depending upon the testing temperature. Within the enclosure ( 12 ) there is...
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6851848 |
Turbo-molecular pump having radiation temperature apparatus
A turbo-molecular pump has components including a stator column, a rotary shaft, and a blade connected to the rotary shaft for rotation therewith. A radiation temperature measuring apparatus has a...
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6846105 |
Method for continuously measuring melting steel temperature and measuring temperature pipe
The invention discloses a method for measuring the temperature of a molten steel continuously, comprises the following steps: providing a tube that is made of double bushings, both of the inner and...
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6798036 |
Temperature measuring method and apparatus in semiconductor processing apparatus, and semiconductor processing method and apparatus
A temperature measuring method for a target substrate to be thermally processed in a semiconductor processing apparatus under a predetermined process condition is provided. This method includes the...
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6742925 |
Method and apparatus for verifying accuracy of an infrared thermometer
The verification of accuracy of an IR thermometer is provided at any temperature in the range of −25° C. to +100° C., preferably at the room temperature. The magnetic surface of a...
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6729756 |
Method for calibrating a total-power microwave radiometer for a satellite
A method for calibrating a total-power microwave radiometer for a satellite uses a cold calibration source, a hot calibration source and a receiver. The method has the steps of measuring with the...
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6709152 |
Apparatus for calibration of temperature sensors
An apparatus for calibration of temperature sensors, comprising a cavity ( 2 ) for receiving a sensor ( 10 ) to be calibrated, a heat-transferring medium ( 5 ) for surrounding the sensor in the...
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6676288 |
Process for thermal imaging scanning of a swaged heater for an anode subassembly of a hollow cathode assembly
A process for thermal imaging scanning of a swaged heater of an anode subassembly of a hollow cathode assembly, comprising scanning a swaged heater with a thermal imaging radiometer to measure a...
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6641299 |
Fixed-point cell, thermometer calibration method and fixed-point temperature realizing apparatus
A thermometer calibration method and fixed-point temperature realizing apparatus uses a fixed-point cell including a crucible of carbon and a fixed-point material enclosed in the crucible. The...
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6585410 |
Radiant temperature nulling radiometer
A self-calibrating nulling radiometer for non-contact temperature measurement of an object, such as a body of water, employs a black body source as a temperature reference, an optomechanical...
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6467952 |
Virtual blackbody radiation system and radiation temperature measuring system
A virtual blackbody radiation system ( 10 ) includes a light-emitting unit ( 1 ) including an LED driven by a fixed current, a light-receiving unit ( 2 ) including a sapphire rod, and an optical...
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6447160 |
Blackbody cavity for calibration of infrared thermometers
A blackbody cavity having two types of wall surfaces wherein a first type has high emissivity and a second type has low emissivity. The low emissivity wall surface has an aperture from where the...
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6398405 |
Fixed-point crucible, fixed-point temperature realizing apparatus using the crucible and temperature calibration method
The present invention is to realize fixed points in a temperature region exceeding the melting point of copper, thereby highly accurately calibrating all the thermometers used in a high temperature...
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6390668 |
Blackbody source using a heat pipe principle and transition region
A source of thermal radiation for calibrating or testing infrared thermometers or detectors, in which improved temperature uniformity of the radiation-emitting surface is achieved by supplying heat...
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6345909 |
Apparatus for infrared pyrometer calibration in a thermal processing system
A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a...
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6293696 |
System and process for calibrating pyrometers in thermal processing chambers
A method and system for calibrating radiation sensing devices, such as pyrometers, in thermal processing chambers are disclosed. The system includes a reflective device positioned opposite the...
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6283629 |
Method of calibrating a radiation thermometer
A method of calibrating a radiation thermometer including a radiation sensor that is characterized by a sensitivity (S) and a temperature-responsive resistor that serves as an ambient temperature...
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6280081 |
Methods and apparatus for calibrating temperature measurements and measuring currents
A calibration current source and methods of calibrating temperature measurements made during, e.g., an RTP process are described. The calibration current source preferably includes a biasing...
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6267501 |
Ambient temperature micro-bolometer control, calibration, and operation
A method for measuring the temperature of a scene using a detector having at least one reference pixel, with an integratable sampling circuit associated with each pixel. Initially, an ambient...
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6193411 |
Calibrator for contact and non-contact thermometer
The present invention relates to a calibrator for contact and non-contact thermometers, comprising a metallic body which comprises two opposite end surfaces, wherein at least a first type of hole...
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6179466 |
Method and apparatus for measuring substrate temperatures
A method of correcting a temperature probe reading in a thermal processing chamber for heating a substrate, including the steps of heating the substrate to a process temperature and using a first,...
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6056433 |
Method and apparatus for infrared pyrometer calibration in a thermal processing system
A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a...
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5988874 |
Black body reference for RTA
A method for calibrating an optical pyrometer to an external reference point. By changing the focus of the optical pyrometer without physically moving the pyrometer, calibration of the optical...
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5848842 |
Method of calibrating a temperature measurement system
A method of calibrating a temperature measurement system including the steps of heating a first substrate having a high emissivity value to a first process temperature; while the first substrate is...
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5746511 |
Temperature transmitter with on-line calibration using johnson noise
A temperature transmitter and a process control system includes a sensor input for coupling to a temperature sensor having a temperature dependent resistance. The resistance measuring circuitry...
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5703276 |
One-window cell for testing passive remote vapor detectors
A cell for testing passive remote vapor detectors has a cell body with a blackbody radiation source attached to a first end and a window attached to a second end. The blackbody radiation source and...
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5608838 |
Blackbody type heating element for calibration furnace with pyrolytic graphite coating disposed on end cap electrode members
A blackbody type heating element for calibration furnaces employs an elongated hollow cylinder of graphite open at first and second opposite ends. The cylinder has an integral solid graphite...
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5553939 |
Method and device for calibrating an optical pyrometer and associated reference wafers
A method of calibrating an optical pyrometer comprising placing an oven, a wafer with a reference region on at least part of one of its faces, the reference region having an electromagnetic wave...
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5331311 |
Railroad wheel temperature sensor with infrared array
A temperature sensor assembly for monitoring railroad car wheels includes an array of temperature detectors arranged to generate a temperature profile of the wheel. The array may be formed...
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